DE60212479D1 - Magnetoresistives Element und Benützung für MRAM - Google Patents
Magnetoresistives Element und Benützung für MRAMInfo
- Publication number
- DE60212479D1 DE60212479D1 DE60212479T DE60212479T DE60212479D1 DE 60212479 D1 DE60212479 D1 DE 60212479D1 DE 60212479 T DE60212479 T DE 60212479T DE 60212479 T DE60212479 T DE 60212479T DE 60212479 D1 DE60212479 D1 DE 60212479D1
- Authority
- DE
- Germany
- Prior art keywords
- mram
- magnetoresistive element
- magnetoresistive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B61/00—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
- H10B61/20—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices comprising components having three or more electrodes, e.g. transistors
- H10B61/22—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices comprising components having three or more electrodes, e.g. transistors of the field-effect transistor [FET] type
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/14—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using thin-film elements
- G11C11/15—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using thin-film elements using multiple magnetic layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
- G11C11/161—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
- G11C11/165—Auxiliary circuits
- G11C11/1675—Writing or programming circuits or methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
- H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
- H01F10/3268—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the exchange coupling being asymmetric, e.g. by use of additional pinning, by using antiferromagnetic or ferromagnetic coupling interface, i.e. so-called spin-valve [SV] structure, e.g. NiFe/Cu/NiFe/FeMn
- H01F10/3281—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the exchange coupling being asymmetric, e.g. by use of additional pinning, by using antiferromagnetic or ferromagnetic coupling interface, i.e. so-called spin-valve [SV] structure, e.g. NiFe/Cu/NiFe/FeMn only by use of asymmetry of the magnetic film pair itself, i.e. so-called pseudospin valve [PSV] structure, e.g. NiFe/Cu/Co
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
- H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
- H01F10/3286—Spin-exchange coupled multilayers having at least one layer with perpendicular magnetic anisotropy
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/10—Magnetoresistive devices
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Nanotechnology (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Hall/Mr Elements (AREA)
- Mram Or Spin Memory Techniques (AREA)
- Semiconductor Memories (AREA)
- Measuring Magnetic Variables (AREA)
- Magnetic Heads (AREA)
- Thin Magnetic Films (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001078471A JP3667244B2 (ja) | 2001-03-19 | 2001-03-19 | 磁気抵抗素子、それを用いたメモリ素子、磁気ランダムアクセスメモリ及び磁気ランダムアクセスメモリの記録再生方法 |
JP2001078471 | 2001-03-19 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60212479D1 true DE60212479D1 (de) | 2006-08-03 |
DE60212479T2 DE60212479T2 (de) | 2006-12-21 |
Family
ID=18935082
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60212479T Expired - Lifetime DE60212479T2 (de) | 2001-03-19 | 2002-03-18 | Magnetoresistives Element und Benützung für MRAM |
Country Status (7)
Country | Link |
---|---|
US (1) | US6853580B2 (de) |
EP (1) | EP1244118B1 (de) |
JP (1) | JP3667244B2 (de) |
KR (1) | KR100515623B1 (de) |
CN (1) | CN1221043C (de) |
DE (1) | DE60212479T2 (de) |
TW (1) | TW559807B (de) |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7035138B2 (en) * | 2000-09-27 | 2006-04-25 | Canon Kabushiki Kaisha | Magnetic random access memory having perpendicular magnetic films switched by magnetic fields from a plurality of directions |
EP1288958A3 (de) * | 2001-08-30 | 2003-07-09 | Canon Kabushiki Kaisha | Magnetoresistives Element und dieses verwendender magnetoresistiver Speicher |
JP2003086775A (ja) | 2001-09-07 | 2003-03-20 | Canon Inc | 磁気メモリ装置およびその製造方法 |
US6762952B2 (en) * | 2002-05-01 | 2004-07-13 | Hewlett-Packard Development Company, L.P. | Minimizing errors in a magnetoresistive solid-state storage device |
DE10301092B4 (de) * | 2003-01-14 | 2006-06-29 | Infineon Technologies Ag | MRAM-Speicherzelle |
JP4419408B2 (ja) * | 2003-03-14 | 2010-02-24 | Tdk株式会社 | 磁気抵抗効果素子および磁気メモリデバイス |
JP2005026576A (ja) * | 2003-07-04 | 2005-01-27 | Sony Corp | 記憶装置 |
JP4253225B2 (ja) * | 2003-07-09 | 2009-04-08 | 株式会社東芝 | 磁気抵抗効果素子および磁気メモリ |
US20050105328A1 (en) * | 2003-11-17 | 2005-05-19 | Ho Chiahua | Perpendicular MRAM with high magnetic transition and low programming current |
CN100372141C (zh) * | 2003-12-18 | 2008-02-27 | 安泰科技股份有限公司 | 巨磁阻抗材料的复合式焦耳处理方法 |
US7075807B2 (en) * | 2004-08-18 | 2006-07-11 | Infineon Technologies Ag | Magnetic memory with static magnetic offset field |
CN100383891C (zh) * | 2004-09-10 | 2008-04-23 | 中国科学院物理研究所 | 一种碳纳米管磁随机存取存储器 |
JP4575181B2 (ja) * | 2005-01-28 | 2010-11-04 | 株式会社東芝 | スピン注入磁気ランダムアクセスメモリ |
US20070115715A1 (en) * | 2005-11-23 | 2007-05-24 | Ryu Ho J | Magnetic access memory device using perpendicular magnetization and fabrication method thereof |
FR2907587B1 (fr) * | 2006-10-23 | 2008-12-26 | Commissariat Energie Atomique | Dispositif magnetique a animation perpendiculaire et a couche intercalaire compensatrice d'interactions. |
JP2010034153A (ja) * | 2008-07-25 | 2010-02-12 | Toshiba Corp | 磁気ランダムアクセスメモリおよびその書き込み方法 |
JP2012069671A (ja) | 2010-09-22 | 2012-04-05 | Toshiba Corp | 半導体記憶装置およびその製造方法 |
JP5796349B2 (ja) * | 2011-05-23 | 2015-10-21 | ソニー株式会社 | 記憶素子の製造方法 |
CN102540113B (zh) * | 2011-11-11 | 2014-07-02 | 江苏多维科技有限公司 | 磁场传感器 |
DE102012005134B4 (de) | 2012-03-05 | 2015-10-08 | Helmholtz-Zentrum Berlin Für Materialien Und Energie Gmbh | Spin-Ventil und Verwendung einer Vielzahl von Spin-Ventilen |
JP5542856B2 (ja) * | 2012-03-21 | 2014-07-09 | 株式会社東芝 | 磁気抵抗効果素子及び磁気メモリ |
KR101266791B1 (ko) * | 2012-09-21 | 2013-05-27 | 고려대학교 산학협력단 | 면내 전류와 전기장을 이용한 자기메모리 소자 |
CN104698408A (zh) * | 2013-12-10 | 2015-06-10 | 日本电产三协株式会社 | 磁传感器装置及磁性编码器装置 |
US9972775B2 (en) | 2015-03-12 | 2018-05-15 | Globalfoundries Singapore Pte. Ltd. | Integrated magnetic random access memory with logic device having low-k interconnects |
US10199572B2 (en) * | 2015-05-27 | 2019-02-05 | Globalfoundries Singapore Pte. Ltd. | Integrated magnetic random access memory with logic device |
US10205088B2 (en) * | 2016-10-27 | 2019-02-12 | Tdk Corporation | Magnetic memory |
US10446607B2 (en) | 2016-12-28 | 2019-10-15 | GLOBALFOUNDARIES Singapore Pte. Ltd. | Integrated two-terminal device with logic device for embedded application |
CN107611257B (zh) * | 2017-07-21 | 2019-11-12 | 华侨大学 | 一种垂直负矫顽力人工磁耦合结构材料及其制备方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW411471B (en) * | 1997-09-17 | 2000-11-11 | Siemens Ag | Memory-cell device |
JP3679593B2 (ja) | 1998-01-28 | 2005-08-03 | キヤノン株式会社 | 磁性薄膜素子および磁性薄膜メモリ素子およびその記録再生方法 |
EP0959475A3 (de) | 1998-05-18 | 2000-11-08 | Canon Kabushiki Kaisha | Magnetischer Dünnfilmspeicher sowie Schreibe- und Leseverfahren und Anordnung unter Verwendung solchen Speichers |
US6055179A (en) | 1998-05-19 | 2000-04-25 | Canon Kk | Memory device utilizing giant magnetoresistance effect |
US6166948A (en) | 1999-09-03 | 2000-12-26 | International Business Machines Corporation | Magnetic memory array with magnetic tunnel junction memory cells having flux-closed free layers |
EP1115164B1 (de) | 2000-01-07 | 2005-05-25 | Sharp Kabushiki Kaisha | Magnetoresistive Anordnung und diese verwendendes magnetisches Speicherelement |
-
2001
- 2001-03-19 JP JP2001078471A patent/JP3667244B2/ja not_active Expired - Fee Related
-
2002
- 2002-03-15 TW TW091104994A patent/TW559807B/zh not_active IP Right Cessation
- 2002-03-15 US US10/098,117 patent/US6853580B2/en not_active Expired - Lifetime
- 2002-03-18 DE DE60212479T patent/DE60212479T2/de not_active Expired - Lifetime
- 2002-03-18 KR KR10-2002-0014500A patent/KR100515623B1/ko not_active IP Right Cessation
- 2002-03-18 EP EP02006095A patent/EP1244118B1/de not_active Expired - Lifetime
- 2002-03-19 CN CNB02120599XA patent/CN1221043C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR20030009083A (ko) | 2003-01-29 |
KR100515623B1 (ko) | 2005-09-22 |
JP3667244B2 (ja) | 2005-07-06 |
CN1221043C (zh) | 2005-09-28 |
US6853580B2 (en) | 2005-02-08 |
EP1244118A3 (de) | 2003-07-16 |
CN1392618A (zh) | 2003-01-22 |
JP2002280639A (ja) | 2002-09-27 |
DE60212479T2 (de) | 2006-12-21 |
TW559807B (en) | 2003-11-01 |
EP1244118B1 (de) | 2006-06-21 |
US20030002330A1 (en) | 2003-01-02 |
EP1244118A2 (de) | 2002-09-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |