DE60210907D1 - Vakuumpumpe - Google Patents

Vakuumpumpe

Info

Publication number
DE60210907D1
DE60210907D1 DE60210907T DE60210907T DE60210907D1 DE 60210907 D1 DE60210907 D1 DE 60210907D1 DE 60210907 T DE60210907 T DE 60210907T DE 60210907 T DE60210907 T DE 60210907T DE 60210907 D1 DE60210907 D1 DE 60210907D1
Authority
DE
Germany
Prior art keywords
vacuum pump
vacuum
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60210907T
Other languages
English (en)
Other versions
DE60210907T2 (de
Inventor
Yoshiyuki Sakaguchi
Yasushi Maejima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
BOC Edwards Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Edwards Japan Ltd filed Critical BOC Edwards Japan Ltd
Application granted granted Critical
Publication of DE60210907D1 publication Critical patent/DE60210907D1/de
Publication of DE60210907T2 publication Critical patent/DE60210907T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DE60210907T 2001-11-19 2002-11-05 Vakuumpumpe Expired - Fee Related DE60210907T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001353746 2001-11-19
JP2001353746A JP3950323B2 (ja) 2001-11-19 2001-11-19 真空ポンプ

Publications (2)

Publication Number Publication Date
DE60210907D1 true DE60210907D1 (de) 2006-06-01
DE60210907T2 DE60210907T2 (de) 2006-08-31

Family

ID=19165707

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60210907T Expired - Fee Related DE60210907T2 (de) 2001-11-19 2002-11-05 Vakuumpumpe

Country Status (5)

Country Link
US (1) US6814536B2 (de)
EP (1) EP1314893B1 (de)
JP (1) JP3950323B2 (de)
KR (1) KR20030041781A (de)
DE (1) DE60210907T2 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5738869B2 (ja) * 2010-09-06 2015-06-24 エドワーズ株式会社 ターボ分子ポンプ
JP6077804B2 (ja) * 2012-09-06 2017-02-08 エドワーズ株式会社 固定側部材及び真空ポンプ

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6332752B2 (en) * 1997-06-27 2001-12-25 Ebara Corporation Turbo-molecular pump
JP4447684B2 (ja) * 1999-01-13 2010-04-07 株式会社島津製作所 ターボ分子ポンプ
JP2000220596A (ja) * 1999-02-03 2000-08-08 Osaka Vacuum Ltd 分子ポンプ
KR100724048B1 (ko) * 1999-02-19 2007-06-04 가부시키가이샤 에바라 세이사꾸쇼 터보 분자 펌프

Also Published As

Publication number Publication date
EP1314893A1 (de) 2003-05-28
US20030095861A1 (en) 2003-05-22
JP3950323B2 (ja) 2007-08-01
JP2003155996A (ja) 2003-05-30
US6814536B2 (en) 2004-11-09
DE60210907T2 (de) 2006-08-31
EP1314893B1 (de) 2006-04-26
KR20030041781A (ko) 2003-05-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: EDWARDS JAPAN LTD., TOKIO, JP

8339 Ceased/non-payment of the annual fee