DE60208603T2 - Auf Totalreflexion beruhender optischer Schalter - Google Patents
Auf Totalreflexion beruhender optischer Schalter Download PDFInfo
- Publication number
- DE60208603T2 DE60208603T2 DE60208603T DE60208603T DE60208603T2 DE 60208603 T2 DE60208603 T2 DE 60208603T2 DE 60208603 T DE60208603 T DE 60208603T DE 60208603 T DE60208603 T DE 60208603T DE 60208603 T2 DE60208603 T2 DE 60208603T2
- Authority
- DE
- Germany
- Prior art keywords
- trench region
- region
- trench
- optical switch
- waveguide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 title claims description 128
- 239000012530 fluid Substances 0.000 claims description 95
- 239000007788 liquid Substances 0.000 claims description 57
- 238000006073 displacement reaction Methods 0.000 claims description 53
- 239000000463 material Substances 0.000 claims description 22
- 239000000758 substrate Substances 0.000 claims description 18
- 239000012528 membrane Substances 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 230000008859 change Effects 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 239000011162 core material Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000005253 cladding Methods 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 229910001338 liquidmetal Inorganic materials 0.000 description 3
- 239000003921 oil Substances 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 238000013519 translation Methods 0.000 description 2
- 230000014616 translation Effects 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 239000012792 core layer Substances 0.000 description 1
- 230000002996 emotional effect Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000007725 thermal activation Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3536—Optical coupling means having switching means involving evanescent coupling variation, e.g. by a moving element such as a membrane which changes the effective refractive index
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/004—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3538—Optical coupling means having switching means based on displacement or deformation of a liquid
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3522—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element enabling or impairing total internal reflection
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
- G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/3574—Mechanical force, e.g. pressure variations
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/3576—Temperature or heat actuation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3596—With planar waveguide arrangement, i.e. in a substrate, regardless if actuating mechanism is outside the substrate
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/956,468 US6487333B2 (en) | 1999-12-22 | 2001-09-17 | Total internal reflection optical switch |
| US956468 | 2001-09-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE60208603D1 DE60208603D1 (de) | 2006-04-06 |
| DE60208603T2 true DE60208603T2 (de) | 2006-10-05 |
Family
ID=25498274
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE60208603T Expired - Lifetime DE60208603T2 (de) | 2001-09-17 | 2002-05-06 | Auf Totalreflexion beruhender optischer Schalter |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6487333B2 (enExample) |
| EP (1) | EP1300707B1 (enExample) |
| JP (1) | JP2003161895A (enExample) |
| DE (1) | DE60208603T2 (enExample) |
Families Citing this family (103)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1264206B1 (de) * | 2000-01-31 | 2003-12-17 | Sercalo Microtechnology Ltd. | Schalteranordnung für strahlungsleiter |
| US6689976B1 (en) * | 2002-10-08 | 2004-02-10 | Agilent Technologies, Inc. | Electrically isolated liquid metal micro-switches for integrally shielded microcircuits |
| US20020037130A1 (en) * | 2000-08-02 | 2002-03-28 | Sarnoff Corporation | Microfluidic optical switch |
| AU2001286511A1 (en) * | 2000-08-15 | 2002-02-25 | Nanostream, Inc. | Optical devices with fluidic systems |
| US20030002778A1 (en) * | 2001-02-14 | 2003-01-02 | David Bach | Photo-polymer based fiber-optic switch using total internal reflection and micro-fluidic actuation |
| WO2002069016A2 (en) * | 2001-02-28 | 2002-09-06 | Lightwave Microsystems Corporation | Microfluid control for waveguide optical switches, variable attenuators, and other optical devices |
| US6560383B1 (en) * | 2001-04-30 | 2003-05-06 | Agilent Technologies, Inc. | High efficiency insulation for improving thermal efficiency of bubble optical switch |
| US7078849B2 (en) * | 2001-10-31 | 2006-07-18 | Agilent Technologies, Inc. | Longitudinal piezoelectric optical latching relay |
| US6674934B2 (en) * | 2001-11-06 | 2004-01-06 | Agilent Technologies, Inc. | Pressure-actuated bi-stable optical switching |
| US6798939B2 (en) * | 2002-03-14 | 2004-09-28 | Agilent Technologies, Inc. | Bubble stability in an optical switch |
| US6741767B2 (en) * | 2002-03-28 | 2004-05-25 | Agilent Technologies, Inc. | Piezoelectric optical relay |
| US20030194170A1 (en) * | 2002-04-10 | 2003-10-16 | Wong Marvin Glenn | Piezoelectric optical demultiplexing switch |
| US6750594B2 (en) | 2002-05-02 | 2004-06-15 | Agilent Technologies, Inc. | Piezoelectrically actuated liquid metal switch |
| US6927529B2 (en) | 2002-05-02 | 2005-08-09 | Agilent Technologies, Inc. | Solid slug longitudinal piezoelectric latching relay |
| US6756551B2 (en) | 2002-05-09 | 2004-06-29 | Agilent Technologies, Inc. | Piezoelectrically actuated liquid metal switch |
| US6718085B1 (en) * | 2002-10-07 | 2004-04-06 | Agilent Technologies, Inc. | Stable optical switch with reduced power consumption |
| US20040076363A1 (en) * | 2002-10-16 | 2004-04-22 | Schroeder Dale W. | Optical switch with increased operational stability |
| US6743990B1 (en) | 2002-12-12 | 2004-06-01 | Agilent Technologies, Inc. | Volume adjustment apparatus and method for use |
| US6774324B2 (en) | 2002-12-12 | 2004-08-10 | Agilent Technologies, Inc. | Switch and production thereof |
| US6855898B2 (en) * | 2002-12-12 | 2005-02-15 | Agilent Technologies, Inc. | Ceramic channel plate for a switch |
| US20040112727A1 (en) * | 2002-12-12 | 2004-06-17 | Wong Marvin Glenn | Laser cut channel plate for a switch |
| US7022926B2 (en) * | 2002-12-12 | 2006-04-04 | Agilent Technologies, Inc. | Ultrasonically milled channel plate for a switch |
| US7019235B2 (en) | 2003-01-13 | 2006-03-28 | Agilent Technologies, Inc. | Photoimaged channel plate for a switch |
| US6809277B2 (en) * | 2003-01-22 | 2004-10-26 | Agilent Technologies, Inc. | Method for registering a deposited material with channel plate channels, and switch produced using same |
| US6747222B1 (en) | 2003-02-04 | 2004-06-08 | Agilent Technologies, Inc. | Feature formation in a nonphotoimagable material and switch incorporating same |
| US6825429B2 (en) * | 2003-03-31 | 2004-11-30 | Agilent Technologies, Inc. | Hermetic seal and controlled impedance RF connections for a liquid metal micro switch |
| US6770827B1 (en) | 2003-04-14 | 2004-08-03 | Agilent Technologies, Inc. | Electrical isolation of fluid-based switches |
| US6876132B2 (en) * | 2003-04-14 | 2005-04-05 | Agilent Technologies, Inc. | Method and structure for a solid slug caterpillar piezoelectric relay |
| US7071432B2 (en) * | 2003-04-14 | 2006-07-04 | Agilent Technologies, Inc. | Reduction of oxides in a fluid-based switch |
| US6803842B1 (en) | 2003-04-14 | 2004-10-12 | Agilent Technologies, Inc. | Longitudinal mode solid slug optical latching relay |
| US6885133B2 (en) * | 2003-04-14 | 2005-04-26 | Agilent Technologies, Inc. | High frequency bending-mode latching relay |
| US6798937B1 (en) | 2003-04-14 | 2004-09-28 | Agilent Technologies, Inc. | Pressure actuated solid slug optical latching relay |
| US7012354B2 (en) * | 2003-04-14 | 2006-03-14 | Agilent Technologies, Inc. | Method and structure for a pusher-mode piezoelectrically actuated liquid metal switch |
| US6879088B2 (en) * | 2003-04-14 | 2005-04-12 | Agilent Technologies, Inc. | Insertion-type liquid metal latching relay array |
| US7048519B2 (en) * | 2003-04-14 | 2006-05-23 | Agilent Technologies, Inc. | Closed-loop piezoelectric pump |
| US6730866B1 (en) | 2003-04-14 | 2004-05-04 | Agilent Technologies, Inc. | High-frequency, liquid metal, latching relay array |
| US6768068B1 (en) | 2003-04-14 | 2004-07-27 | Agilent Technologies, Inc. | Method and structure for a slug pusher-mode piezoelectrically actuated liquid metal switch |
| US6920259B2 (en) * | 2003-04-14 | 2005-07-19 | Agilent Technologies, Inc. | Longitudinal electromagnetic latching optical relay |
| US6765161B1 (en) * | 2003-04-14 | 2004-07-20 | Agilent Technologies, Inc. | Method and structure for a slug caterpillar piezoelectric latching reflective optical relay |
| US6903493B2 (en) * | 2003-04-14 | 2005-06-07 | Agilent Technologies, Inc. | Inserting-finger liquid metal relay |
| US6903492B2 (en) * | 2003-04-14 | 2005-06-07 | Agilent Technologies, Inc. | Wetting finger latching piezoelectric relay |
| US6946776B2 (en) * | 2003-04-14 | 2005-09-20 | Agilent Technologies, Inc. | Method and apparatus for maintaining a liquid metal switch in a ready-to-switch condition |
| US6876131B2 (en) * | 2003-04-14 | 2005-04-05 | Agilent Technologies, Inc. | High-frequency, liquid metal, latching relay with face contact |
| US6925223B2 (en) * | 2003-04-14 | 2005-08-02 | Agilent Technologies, Inc. | Pressure actuated optical latching relay |
| US6816641B2 (en) * | 2003-04-14 | 2004-11-09 | Agilent Technologies, Inc. | Method and structure for a solid slug caterpillar piezoelectric optical relay |
| US6900578B2 (en) * | 2003-04-14 | 2005-05-31 | Agilent Technologies, Inc. | High frequency latching relay with bending switch bar |
| US6946775B2 (en) * | 2003-04-14 | 2005-09-20 | Agilent Technologies, Inc. | Method and structure for a slug assisted longitudinal piezoelectrically actuated liquid metal optical switch |
| US6891116B2 (en) * | 2003-04-14 | 2005-05-10 | Agilent Technologies, Inc. | Substrate with liquid electrode |
| US6876130B2 (en) * | 2003-04-14 | 2005-04-05 | Agilent Technologies, Inc. | Damped longitudinal mode latching relay |
| US6903287B2 (en) * | 2003-04-14 | 2005-06-07 | Agilent Technologies, Inc. | Liquid metal optical relay |
| US6774325B1 (en) | 2003-04-14 | 2004-08-10 | Agilent Technologies, Inc. | Reducing oxides on a switching fluid in a fluid-based switch |
| US6876133B2 (en) * | 2003-04-14 | 2005-04-05 | Agilent Technologies, Inc. | Latching relay with switch bar |
| US6903490B2 (en) * | 2003-04-14 | 2005-06-07 | Agilent Technologies, Inc. | Longitudinal mode optical latching relay |
| US6894237B2 (en) * | 2003-04-14 | 2005-05-17 | Agilent Technologies, Inc. | Formation of signal paths to increase maximum signal-carrying frequency of a fluid-based switch |
| US6891315B2 (en) * | 2003-04-14 | 2005-05-10 | Agilent Technologies, Inc. | Shear mode liquid metal switch |
| US6794591B1 (en) | 2003-04-14 | 2004-09-21 | Agilent Technologies, Inc. | Fluid-based switches |
| US6838959B2 (en) * | 2003-04-14 | 2005-01-04 | Agilent Technologies, Inc. | Longitudinal electromagnetic latching relay |
| US6961487B2 (en) * | 2003-04-14 | 2005-11-01 | Agilent Technologies, Inc. | Method and structure for a pusher-mode piezoelectrically actuated liquid metal optical switch |
| US6924443B2 (en) * | 2003-04-14 | 2005-08-02 | Agilent Technologies, Inc. | Reducing oxides on a switching fluid in a fluid-based switch |
| US6841746B2 (en) * | 2003-04-14 | 2005-01-11 | Agilent Technologies, Inc. | Bent switching fluid cavity |
| US6818844B2 (en) * | 2003-04-14 | 2004-11-16 | Agilent Technologies, Inc. | Method and structure for a slug assisted pusher-mode piezoelectrically actuated liquid metal optical switch |
| US6879089B2 (en) * | 2003-04-14 | 2005-04-12 | Agilent Technologies, Inc. | Damped longitudinal mode optical latching relay |
| US6831532B2 (en) * | 2003-04-14 | 2004-12-14 | Agilent Technologies, Inc. | Push-mode latching relay |
| US6762378B1 (en) | 2003-04-14 | 2004-07-13 | Agilent Technologies, Inc. | Liquid metal, latching relay with face contact |
| US20040201447A1 (en) * | 2003-04-14 | 2004-10-14 | Wong Marvin Glenn | Thin-film resistor device |
| US6888977B2 (en) * | 2003-04-14 | 2005-05-03 | Agilent Technologies, Inc. | Polymeric liquid metal optical switch |
| US6870111B2 (en) * | 2003-04-14 | 2005-03-22 | Agilent Technologies, Inc. | Bending mode liquid metal switch |
| US7070908B2 (en) * | 2003-04-14 | 2006-07-04 | Agilent Technologies, Inc. | Feature formation in thick-film inks |
| US6894424B2 (en) * | 2003-04-14 | 2005-05-17 | Agilent Technologies, Inc. | High frequency push-mode latching relay |
| US6740829B1 (en) | 2003-04-14 | 2004-05-25 | Agilent Technologies, Inc. | Insertion-type liquid metal latching relay |
| US6882088B2 (en) * | 2003-04-14 | 2005-04-19 | Agilent Technologies, Inc. | Bending-mode latching relay |
| US6956990B2 (en) * | 2003-04-14 | 2005-10-18 | Agilent Technologies, Inc. | Reflecting wedge optical wavelength multiplexer/demultiplexer |
| US6906271B2 (en) * | 2003-04-14 | 2005-06-14 | Agilent Technologies, Inc. | Fluid-based switch |
| US6895139B2 (en) * | 2003-04-15 | 2005-05-17 | Agilent Technologies, Inc. | Bistable thermopneumatic optical switch |
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| US6759610B1 (en) | 2003-06-05 | 2004-07-06 | Agilent Technologies, Inc. | Multi-layer assembly of stacked LIMMS devices with liquid metal vias |
| US6759611B1 (en) | 2003-06-16 | 2004-07-06 | Agilent Technologies, Inc. | Fluid-based switches and methods for producing the same |
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| US7359523B2 (en) * | 2003-06-17 | 2008-04-15 | Avago Technologies Fiber Ip Pte Ltd | Fluidic acoustic transducer |
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| US6787720B1 (en) | 2003-07-31 | 2004-09-07 | Agilent Technologies, Inc. | Gettering agent and method to prevent corrosion in a fluid switch |
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| US7072536B2 (en) | 2003-12-11 | 2006-07-04 | Gary Neal Poovey | Light triggered light switch |
| US7024062B2 (en) * | 2004-02-25 | 2006-04-04 | John Julian Uebbing | Optical switch with low pressure bubble |
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| US20100104242A1 (en) * | 2007-04-12 | 2010-04-29 | Poovey Gary N | Light activated optical switch that includes a piezoelectric element and a conductive layer |
| WO2016064402A1 (en) | 2014-10-23 | 2016-04-28 | Hewlett Packard Enterprise Development Lp | Optical fiber interface for optical device package |
| US10088634B2 (en) * | 2014-10-23 | 2018-10-02 | Hewlett Packard Enterprise Development Lp | Optical port-shuffling module |
| WO2016064426A1 (en) | 2014-10-24 | 2016-04-28 | Hewlett Packard Enterprise Development Lp | Optical interconnect device |
| WO2016122490A1 (en) | 2015-01-28 | 2016-08-04 | Hewlett Packard Enterprise Development Lp | Laser-written optical routing systems and method |
| GB2563929A (en) * | 2017-06-30 | 2019-01-02 | Oclaro Tech Ltd | Spatial filter |
| DE102018209368B4 (de) | 2018-06-12 | 2020-01-02 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Optik für Sende- und/oder Empfangs-Element, Kommunikationsmodul, Arrays aus Kommunikationsmodulen, System aus mehreren Kommunikationsmodulen und Verfahren zur Herstellung einer Optik |
| JP2020086049A (ja) * | 2018-11-21 | 2020-06-04 | 日本電信電話株式会社 | 光演算素子と多層ニューラルネットワーク |
| WO2020150618A1 (en) * | 2019-01-18 | 2020-07-23 | Commscope Technologies Llc | Optical waveguide switch and method of making same |
| WO2020225873A1 (ja) * | 2019-05-08 | 2020-11-12 | 日本電信電話株式会社 | 光演算素子と多層ニューラルネットワーク |
| WO2020240623A1 (ja) * | 2019-05-24 | 2020-12-03 | 日本電信電話株式会社 | 光演算素子と多層ニューラルネットワーク |
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|---|---|---|---|---|
| DE3138968A1 (de) * | 1981-09-30 | 1983-04-14 | Siemens AG, 1000 Berlin und 8000 München | Optische steuervorrichtung zum steuern der in einem optischen wellenleiter gefuehrten strahlung, insbesondere optischer schalter |
| IT1190892B (it) | 1982-06-24 | 1988-02-24 | Guido Birocchi | Struttura di generatore di vapore per stiratura ed usi accessori |
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| US6055344A (en) | 1998-02-18 | 2000-04-25 | Hewlett-Packard Company | Fabrication of a total internal reflection optical switch with vertical fluid fill-holes |
| US6360775B1 (en) | 1998-12-23 | 2002-03-26 | Agilent Technologies, Inc. | Capillary fluid switch with asymmetric bubble chamber |
| US6320994B1 (en) * | 1999-12-22 | 2001-11-20 | Agilent Technolgies, Inc. | Total internal reflection optical switch |
-
2001
- 2001-09-17 US US09/956,468 patent/US6487333B2/en not_active Expired - Fee Related
-
2002
- 2002-05-06 EP EP02010068A patent/EP1300707B1/en not_active Expired - Lifetime
- 2002-05-06 DE DE60208603T patent/DE60208603T2/de not_active Expired - Lifetime
- 2002-09-17 JP JP2002269680A patent/JP2003161895A/ja not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| EP1300707B1 (en) | 2006-01-11 |
| DE60208603D1 (de) | 2006-04-06 |
| JP2003161895A (ja) | 2003-06-06 |
| US20020067879A1 (en) | 2002-06-06 |
| EP1300707A3 (en) | 2004-03-03 |
| US6487333B2 (en) | 2002-11-26 |
| EP1300707A2 (en) | 2003-04-09 |
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