DE602007014297D1 - Kontaktfreie Mehrbereichssonde - Google Patents

Kontaktfreie Mehrbereichssonde

Info

Publication number
DE602007014297D1
DE602007014297D1 DE602007014297T DE602007014297T DE602007014297D1 DE 602007014297 D1 DE602007014297 D1 DE 602007014297D1 DE 602007014297 T DE602007014297 T DE 602007014297T DE 602007014297 T DE602007014297 T DE 602007014297T DE 602007014297 D1 DE602007014297 D1 DE 602007014297D1
Authority
DE
Germany
Prior art keywords
contact multi
range probe
probe
range
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602007014297T
Other languages
English (en)
Inventor
Paul Gladnick
Scott Harsila
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Publication of DE602007014297D1 publication Critical patent/DE602007014297D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/46—Indirect determination of position data
    • G01S17/48—Active triangulation systems, i.e. using the transmission and reflection of electromagnetic waves other than radio waves

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE602007014297T 2006-07-31 2007-07-12 Kontaktfreie Mehrbereichssonde Active DE602007014297D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/497,466 US7508529B2 (en) 2006-07-31 2006-07-31 Multi-range non-contact probe

Publications (1)

Publication Number Publication Date
DE602007014297D1 true DE602007014297D1 (de) 2011-06-16

Family

ID=38858910

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602007014297T Active DE602007014297D1 (de) 2006-07-31 2007-07-12 Kontaktfreie Mehrbereichssonde

Country Status (5)

Country Link
US (1) US7508529B2 (de)
EP (1) EP1887315B1 (de)
JP (1) JP5225631B2 (de)
CN (1) CN101118153B (de)
DE (1) DE602007014297D1 (de)

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US8238641B2 (en) * 2008-06-20 2012-08-07 Arc Harima Co., Ltd. Method for measuring mirror index and apparatus thereof
GB0909635D0 (en) * 2009-06-04 2009-07-22 Renishaw Plc Vision measurement probe
EP2564156B1 (de) * 2010-04-26 2019-04-17 Nikon Corporation Profilmesser
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CN102506725B (zh) * 2011-10-28 2013-07-31 合肥工业大学 三维微纳米接触扫描探头
CN102589423B (zh) * 2012-01-10 2014-03-12 合肥工业大学 微纳米三维接触扫描测量探头
US20130296712A1 (en) * 2012-05-03 2013-11-07 Covidien Lp Integrated non-contact dimensional metrology tool
TWI460394B (zh) * 2012-07-20 2014-11-11 Test Research Inc 三維影像量測裝置
CN102814512B (zh) * 2012-08-24 2014-07-16 沈阳黎明航空发动机(集团)有限责任公司 一种针对发动机压气机盘类零件辐板型面的在线测量方法
TW201416166A (zh) * 2012-10-18 2014-05-01 Max See Industry Co Ltd 加工機之工件檢測方法及其裝置
US9429416B2 (en) * 2013-12-06 2016-08-30 Tesa Sa Accessory for coordinate measuring machine
US9639083B2 (en) 2013-12-18 2017-05-02 Mitutoyo Corporation System and method for programming workpiece feature inspection operations for a coordinate measuring machine
US10264030B2 (en) * 2016-02-22 2019-04-16 Sonos, Inc. Networked microphone device control
US10620447B2 (en) * 2017-01-19 2020-04-14 Cognex Corporation System and method for reduced-speckle laser line generation
CN111692992A (zh) * 2020-06-22 2020-09-22 征图智能科技(江苏)有限公司 基于多图分时曝光的高精度2d尺寸测量方法
CN112579372B (zh) * 2020-12-10 2023-04-07 上海新时达机器人有限公司 提高电机控制器的位置锁存精度的方法
CN112611338A (zh) * 2020-12-14 2021-04-06 航天智造（上海）科技有限责任公司 基于移轴镜头的大景深激光轮廓仪
US11635291B2 (en) 2021-04-30 2023-04-25 Mitutoyo Corporation Workpiece holder for utilization in metrology system for measuring workpiece in different orientations

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JP3879359B2 (ja) * 2000-03-17 2007-02-14 オムロン株式会社 画像記録装置
US6643024B2 (en) * 2001-05-03 2003-11-04 Zygo Corporation Apparatus and method(s) for reducing the effects of coherent artifacts in an interferometer
JP2004530139A (ja) * 2001-06-12 2004-09-30 ヘキサゴン メトロロジー，アクティエボラーグ 制御装置と精密測定組立体の間の通信方法と、両者を互いに接続する共通制御バス
JP4087146B2 (ja) * 2002-04-30 2008-05-21 株式会社リコー 形状測定方法及び形状測定装置
DE10303551A1 (de) * 2003-01-29 2004-08-12 Dr. Johannes Heidenhain Gmbh Verfahren zum Übertragen von Steuerbefehlen von einem Sendeelement zu einem Messtaster
KR100615576B1 (ko) * 2003-02-06 2006-08-25 주식회사 고영테크놀러지 3차원형상 측정장치
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US7202466B2 (en) * 2003-08-25 2007-04-10 Cadent Ltd. Apparatus and method for providing high intensity non-coherent light and for speckle reduction
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US7652275B2 (en) * 2006-07-28 2010-01-26 Mitutoyo Corporation Non-contact probe control interface

Also Published As

Publication number Publication date
JP2008032727A (ja) 2008-02-14
JP5225631B2 (ja) 2013-07-03
US7508529B2 (en) 2009-03-24
EP1887315A3 (de) 2009-05-27
US20080024753A1 (en) 2008-01-31
EP1887315A2 (de) 2008-02-13
EP1887315B1 (de) 2011-05-04
CN101118153B (zh) 2011-01-19
CN101118153A (zh) 2008-02-06

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