DE602006018245D1 - Prüfverfahren für einen piezoelektrischen Aktor - Google Patents

Prüfverfahren für einen piezoelektrischen Aktor

Info

Publication number
DE602006018245D1
DE602006018245D1 DE200660018245 DE602006018245T DE602006018245D1 DE 602006018245 D1 DE602006018245 D1 DE 602006018245D1 DE 200660018245 DE200660018245 DE 200660018245 DE 602006018245 T DE602006018245 T DE 602006018245T DE 602006018245 D1 DE602006018245 D1 DE 602006018245D1
Authority
DE
Germany
Prior art keywords
test method
piezoelectric actuator
piezoelectric
actuator
test
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE200660018245
Other languages
English (en)
Inventor
Hidetoshi Watanabe
Toshihumi Kubo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Brother Industries Ltd
Original Assignee
Brother Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brother Industries Ltd filed Critical Brother Industries Ltd
Publication of DE602006018245D1 publication Critical patent/DE602006018245D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14209—Structure of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14209—Structure of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
    • B41J2002/14217—Multi layer finger type piezoelectric element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14209—Structure of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
    • B41J2002/14225—Finger type piezoelectric element on only one side of the chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/03—Specific materials used
DE200660018245 2005-11-30 2006-11-28 Prüfverfahren für einen piezoelektrischen Aktor Active DE602006018245D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005345087A JP4991145B2 (ja) 2005-11-30 2005-11-30 圧電アクチュエータの検査方法

Publications (1)

Publication Number Publication Date
DE602006018245D1 true DE602006018245D1 (de) 2010-12-30

Family

ID=37835226

Family Applications (1)

Application Number Title Priority Date Filing Date
DE200660018245 Active DE602006018245D1 (de) 2005-11-30 2006-11-28 Prüfverfahren für einen piezoelektrischen Aktor

Country Status (5)

Country Link
US (1) US7498716B2 (de)
EP (1) EP1793431B1 (de)
JP (1) JP4991145B2 (de)
CN (1) CN1976197B (de)
DE (1) DE602006018245D1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7730785B2 (en) * 2006-04-26 2010-06-08 Denso Corporation Ultrasonic sensor and manufacture method of the same
JP4582173B2 (ja) * 2008-03-28 2010-11-17 ブラザー工業株式会社 液体移送装置
JP5136644B2 (ja) * 2008-07-14 2013-02-06 株式会社村田製作所 圧電発電装置
JP5560587B2 (ja) * 2009-04-30 2014-07-30 ブラザー工業株式会社 圧電アクチュエータの製造方法
US9440258B2 (en) * 2010-07-30 2016-09-13 Koninklijke Philips Electronics N.V. Thin film ultrasound transducer
JP6102075B2 (ja) 2012-03-30 2017-03-29 セイコーエプソン株式会社 超音波トランスデューサー素子チップおよびプローブ並びに電子機器および超音波診断装置
JP5900107B2 (ja) * 2012-03-30 2016-04-06 セイコーエプソン株式会社 超音波トランスデューサー素子チップおよびプローブ並びに電子機器および超音波診断装置
KR101338383B1 (ko) 2013-01-07 2013-12-10 주식회사 코러스트 자체 작동 검사 기능을 갖는 압전 변환기 및 이를 포함하는 초음파 장치

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06198880A (ja) * 1993-01-07 1994-07-19 Ricoh Co Ltd インクジェットヘッド
US5794080A (en) * 1994-08-31 1998-08-11 Nikon Corporation Piezoelectric vibration angular velocity meter and camera using the same
JPH11198371A (ja) * 1998-01-19 1999-07-27 Ricoh Co Ltd インクジェットヘッド
JP2003094653A (ja) * 2001-09-25 2003-04-03 Ricoh Co Ltd インクジェットヘッド
KR100462872B1 (ko) * 2001-12-27 2004-12-17 주식회사 에스세라 누설전류가 감소된 압전체 조성물 및 이로 제조된 압전기기
JP2003211657A (ja) * 2002-01-22 2003-07-29 Ricoh Co Ltd インクジェットヘッド、インクジェットヘッドの製造方法、およびインクジェッドヘッド記録装置
JP2004107181A (ja) * 2002-09-20 2004-04-08 Canon Inc 圧電体素子形成用組成物、圧電体膜の製造方法、圧電体素子及びインクジェット記録ヘッド
DE10348346A1 (de) 2002-10-17 2004-05-27 Kyocera Corp. Aktuator, Herstellungsverfahren und Druckkopf
JP4812244B2 (ja) 2002-10-21 2011-11-09 京セラ株式会社 印刷ヘッド
DE602005002060T2 (de) 2004-01-27 2007-12-13 Matsushita Electric Industrial Co., Ltd., Kadoma Piezoelektrisches Element und dessen Herstellungsverfahren sowie Tintenstrahldruckkopf und -aufzeichnungsgerät mit demselben
DE102004054625A1 (de) * 2004-11-11 2006-05-18 Mann + Hummel Gmbh Widerstandsheizung

Also Published As

Publication number Publication date
JP2007144911A (ja) 2007-06-14
EP1793431B1 (de) 2010-11-17
US20070200463A1 (en) 2007-08-30
JP4991145B2 (ja) 2012-08-01
CN1976197A (zh) 2007-06-06
EP1793431A1 (de) 2007-06-06
CN1976197B (zh) 2010-06-16
US7498716B2 (en) 2009-03-03

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