DE602005003567D1 - Ebenen-neuausrichtung nach einem epitaxieschritt - Google Patents
Ebenen-neuausrichtung nach einem epitaxieschrittInfo
- Publication number
- DE602005003567D1 DE602005003567D1 DE602005003567T DE602005003567T DE602005003567D1 DE 602005003567 D1 DE602005003567 D1 DE 602005003567D1 DE 602005003567 T DE602005003567 T DE 602005003567T DE 602005003567 T DE602005003567 T DE 602005003567T DE 602005003567 D1 DE602005003567 D1 DE 602005003567D1
- Authority
- DE
- Germany
- Prior art keywords
- epitaxi
- level alignment
- alignment
- level
- epitaxi step
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/54453—Marks applied to semiconductor devices or parts for use prior to dicing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0450752A FR2869459B1 (fr) | 2004-04-21 | 2004-04-21 | Realignement entre niveaux apres une etape d'epitaxie. |
FR0450752 | 2004-04-21 | ||
PCT/FR2005/050260 WO2005106943A2 (fr) | 2004-04-21 | 2005-04-20 | Realignement entre niveaux apres une etape d'epitaxie |
Publications (2)
Publication Number | Publication Date |
---|---|
DE602005003567D1 true DE602005003567D1 (de) | 2008-01-10 |
DE602005003567T2 DE602005003567T2 (de) | 2008-11-27 |
Family
ID=34945170
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602005003567T Active DE602005003567T2 (de) | 2004-04-21 | 2005-04-20 | Ebenen-neuausrichtung nach einem epitaxieschritt |
Country Status (6)
Country | Link |
---|---|
US (1) | US7830027B2 (de) |
EP (1) | EP1741131B1 (de) |
JP (1) | JP2007534168A (de) |
DE (1) | DE602005003567T2 (de) |
FR (1) | FR2869459B1 (de) |
WO (1) | WO2005106943A2 (de) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2869459B1 (fr) * | 2004-04-21 | 2006-08-04 | Commissariat Energie Atomique | Realignement entre niveaux apres une etape d'epitaxie. |
US9123634B2 (en) * | 2013-01-15 | 2015-09-01 | Epistar Corporation | Method for making semiconductor device and semiconductor device made thereby |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6380528A (ja) * | 1986-09-24 | 1988-04-11 | Nec Corp | 埋込拡散層の形成方法 |
JPS63108717A (ja) * | 1986-10-27 | 1988-05-13 | Nec Corp | 半導体装置の製造方法 |
US4936930A (en) * | 1988-01-06 | 1990-06-26 | Siliconix Incorporated | Method for improved alignment for semiconductor devices with buried layers |
JPH0340415A (ja) * | 1989-04-05 | 1991-02-21 | Oki Electric Ind Co Ltd | アライメントマーク及びアライメントマーク形成方法 |
US5106432A (en) * | 1989-05-16 | 1992-04-21 | Oki Electric Industry Co., Ltd. | Wafer alignment mark utilizing parallel grooves and process |
JP3060261B2 (ja) * | 1991-03-19 | 2000-07-10 | 株式会社半導体エネルギー研究所 | 半導体装置の製造方法 |
JPH053143A (ja) * | 1991-04-19 | 1993-01-08 | Hitachi Ltd | 位置合せ方法および装置 |
DE69332006T2 (de) * | 1992-03-25 | 2002-11-28 | Texas Instruments Inc | Planares Verfahren unter Verwendung von gemeinsamen Ausrichtungsmarken für die Wannenimplantierungen |
US5314837A (en) * | 1992-06-08 | 1994-05-24 | Analog Devices, Incorporated | Method of making a registration mark on a semiconductor |
US5270255A (en) * | 1993-01-08 | 1993-12-14 | Chartered Semiconductor Manufacturing Pte, Ltd. | Metallization process for good metal step coverage while maintaining useful alignment mark |
JP2793486B2 (ja) * | 1993-12-01 | 1998-09-03 | 山形日本電気株式会社 | 半導体装置の製造方法 |
CA2178255A1 (en) * | 1995-07-12 | 1997-01-13 | Becton, Dickinson And Company | Telescoping needle shield |
US5700732A (en) * | 1996-08-02 | 1997-12-23 | Micron Technology, Inc. | Semiconductor wafer, wafer alignment patterns and method of forming wafer alignment patterns |
US5801090A (en) * | 1997-04-25 | 1998-09-01 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method of protecting an alignment mark in a semiconductor manufacturing process with CMP |
JPH10312964A (ja) * | 1997-05-13 | 1998-11-24 | Sony Corp | 半導体装置の製造方法 |
JPH11329923A (ja) * | 1998-05-11 | 1999-11-30 | Sony Corp | 半導体装置の製造方法 |
US6596604B1 (en) * | 2002-07-22 | 2003-07-22 | Atmel Corporation | Method of preventing shift of alignment marks during rapid thermal processing |
FR2842832B1 (fr) * | 2002-07-24 | 2006-01-20 | Lumilog | Procede de realisation par epitaxie en phase vapeur d'un film de nitrure de gallium a faible densite de defaut |
TWI237908B (en) * | 2003-08-29 | 2005-08-11 | Ind Tech Res Inst | A method for manufacturing a strained Si having few threading dislocations |
FR2869459B1 (fr) * | 2004-04-21 | 2006-08-04 | Commissariat Energie Atomique | Realignement entre niveaux apres une etape d'epitaxie. |
US20060208257A1 (en) * | 2005-03-15 | 2006-09-21 | Branz Howard M | Method for low-temperature, hetero-epitaxial growth of thin film cSi on amorphous and multi-crystalline substrates and c-Si devices on amorphous, multi-crystalline, and crystalline substrates |
US7396407B2 (en) * | 2006-04-18 | 2008-07-08 | International Business Machines Corporation | Trench-edge-defect-free recrystallization by edge-angle-optimized solid phase epitaxy: method and applications to hybrid orientation substrates |
-
2004
- 2004-04-21 FR FR0450752A patent/FR2869459B1/fr not_active Expired - Fee Related
-
2005
- 2005-04-20 DE DE602005003567T patent/DE602005003567T2/de active Active
- 2005-04-20 WO PCT/FR2005/050260 patent/WO2005106943A2/fr active IP Right Grant
- 2005-04-20 US US11/578,975 patent/US7830027B2/en not_active Expired - Fee Related
- 2005-04-20 JP JP2007508950A patent/JP2007534168A/ja not_active Ceased
- 2005-04-20 EP EP05746639A patent/EP1741131B1/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2007534168A (ja) | 2007-11-22 |
EP1741131B1 (de) | 2007-11-28 |
WO2005106943A3 (fr) | 2006-05-04 |
WO2005106943A2 (fr) | 2005-11-10 |
FR2869459B1 (fr) | 2006-08-04 |
US20070221120A1 (en) | 2007-09-27 |
DE602005003567T2 (de) | 2008-11-27 |
FR2869459A1 (fr) | 2005-10-28 |
US7830027B2 (en) | 2010-11-09 |
EP1741131A2 (de) | 2007-01-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |