DE602004026862D1 - Herstellung von silicium-mikrophonen - Google Patents
Herstellung von silicium-mikrophonenInfo
- Publication number
- DE602004026862D1 DE602004026862D1 DE602004026862T DE602004026862T DE602004026862D1 DE 602004026862 D1 DE602004026862 D1 DE 602004026862D1 DE 602004026862 T DE602004026862 T DE 602004026862T DE 602004026862 T DE602004026862 T DE 602004026862T DE 602004026862 D1 DE602004026862 D1 DE 602004026862D1
- Authority
- DE
- Germany
- Prior art keywords
- wafer
- layer
- major surface
- silicon
- heavily doped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title abstract 11
- 229910052710 silicon Inorganic materials 0.000 title abstract 11
- 239000010703 silicon Substances 0.000 title abstract 11
- 235000012431 wafers Nutrition 0.000 abstract 12
- 239000002184 metal Substances 0.000 abstract 2
- 238000004519 manufacturing process Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/005—Electrostatic transducers using semiconductor materials
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/04—Microphones
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
- H04R31/006—Interconnection of transducer parts
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
- H04R2201/003—Mems transducers or their use
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2205/00—Details of stereophonic arrangements covered by H04R5/00 but not provided for in any of its subgroups
- H04R2205/041—Adaptation of stereophonic signal reproduction for the hearing impaired
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2499/00—Aspects covered by H04R or H04S not otherwise provided for in their subgroups
- H04R2499/10—General applications
- H04R2499/11—Transducers incorporated or for use in hand-held devices, e.g. mobile phones, PDA's, camera's
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Manufacturing & Machinery (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
- Pressure Sensors (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SG200302854 | 2003-05-26 | ||
PCT/SG2004/000152 WO2004105428A1 (en) | 2003-05-26 | 2004-05-26 | Fabrication of silicon microphones |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602004026862D1 true DE602004026862D1 (de) | 2010-06-10 |
Family
ID=33476166
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602004026862T Expired - Fee Related DE602004026862D1 (de) | 2003-05-26 | 2004-05-26 | Herstellung von silicium-mikrophonen |
Country Status (9)
Country | Link |
---|---|
US (1) | US20070065968A1 (de) |
EP (1) | EP1632105B1 (de) |
JP (1) | JP2007504782A (de) |
KR (1) | KR20060034223A (de) |
CN (1) | CN1813489A (de) |
AT (1) | ATE466456T1 (de) |
DE (1) | DE602004026862D1 (de) |
MY (1) | MY136475A (de) |
WO (1) | WO2004105428A1 (de) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SG121923A1 (en) * | 2004-10-18 | 2006-05-26 | Sensfab Pte Ltd | Silicon microphone |
KR100599124B1 (ko) * | 2005-02-14 | 2006-07-12 | 삼성전자주식회사 | 부유 구조체 제조방법 |
SG127754A1 (en) * | 2005-05-16 | 2006-12-29 | Sensfab Pte Ltd | Silicon microphone |
JP2010506532A (ja) * | 2006-10-11 | 2010-02-25 | メムス テクノロジー ビーエイチディー | 極低圧力センサーおよびその製造方法 |
US8165323B2 (en) | 2006-11-28 | 2012-04-24 | Zhou Tiansheng | Monolithic capacitive transducer |
US20090001499A1 (en) * | 2007-06-27 | 2009-01-01 | Honeywell International Inc. | Thick active layer for mems device using wafer dissolve process |
KR101178989B1 (ko) * | 2007-10-30 | 2012-08-31 | 아즈빌주식회사 | 압력 센서 및 그 제조 방법 |
WO2010139050A1 (en) | 2009-06-01 | 2010-12-09 | Tiansheng Zhou | Mems micromirror and micromirror array |
US8304846B2 (en) * | 2009-12-31 | 2012-11-06 | Texas Instruments Incorporated | Silicon microphone with integrated back side cavity |
US8617960B2 (en) * | 2009-12-31 | 2013-12-31 | Texas Instruments Incorporated | Silicon microphone transducer |
US8316718B2 (en) * | 2010-08-23 | 2012-11-27 | Freescale Semiconductor, Inc. | MEMS pressure sensor device and method of fabricating same |
US9036231B2 (en) | 2010-10-20 | 2015-05-19 | Tiansheng ZHOU | Micro-electro-mechanical systems micromirrors and micromirror arrays |
US10551613B2 (en) | 2010-10-20 | 2020-02-04 | Tiansheng ZHOU | Micro-electro-mechanical systems micromirrors and micromirror arrays |
CN102740203A (zh) * | 2011-04-06 | 2012-10-17 | 美律实业股份有限公司 | 结合式微机电麦克风及其制造方法 |
US8455288B2 (en) * | 2011-09-14 | 2013-06-04 | Analog Devices, Inc. | Method for etching material longitudinally spaced from etch mask |
CN102611975B (zh) * | 2012-01-20 | 2014-04-23 | 缪建民 | 一种采用共晶键合与soi硅片的mems硅麦克风及其制备方法 |
US9385634B2 (en) | 2012-01-26 | 2016-07-05 | Tiansheng ZHOU | Rotational type of MEMS electrostatic actuator |
US9181086B1 (en) | 2012-10-01 | 2015-11-10 | The Research Foundation For The State University Of New York | Hinged MEMS diaphragm and method of manufacture therof |
US9439017B2 (en) * | 2014-02-10 | 2016-09-06 | Infineon Technologies Ag | Method for manufacturing a plurality of microphone structures, microphone and mobile device |
WO2018204455A1 (en) | 2017-05-02 | 2018-11-08 | Medtronic Vascular Inc. | Assemblies and methods for sterilizing a wet stored prosthetic heart valve |
CN110603205B (zh) * | 2017-05-02 | 2022-08-09 | 美敦力瓦斯科尔勒公司 | 用于干组织假体心脏瓣膜的包装 |
WO2021134688A1 (zh) * | 2019-12-31 | 2021-07-08 | 瑞声声学科技(深圳)有限公司 | 一种制作mems驱动器的方法 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US106828A (en) * | 1870-08-30 | Improved fluting- and sad-iron | ||
US4975390A (en) * | 1986-12-18 | 1990-12-04 | Nippondenso Co. Ltd. | Method of fabricating a semiconductor pressure sensor |
JP2681207B2 (ja) * | 1989-02-01 | 1997-11-26 | 株式会社 オーディオテクニカ | 静電型電気音響変換器の振動板 |
FR2697675B1 (fr) | 1992-11-05 | 1995-01-06 | Suisse Electronique Microtech | Procédé de fabrication de transducteurs capacitifs intégrés. |
US5573679A (en) * | 1995-06-19 | 1996-11-12 | Alberta Microelectronic Centre | Fabrication of a surface micromachined capacitive microphone using a dry-etch process |
US5627112A (en) * | 1995-11-13 | 1997-05-06 | Rockwell International Corporation | Method of making suspended microstructures |
AU2923397A (en) * | 1996-04-18 | 1997-11-07 | California Institute Of Technology | Thin film electret microphone |
JPH11108783A (ja) * | 1997-10-06 | 1999-04-23 | Omron Corp | 静電容量型圧力センサ及びその固定構造 |
DE59907268D1 (de) * | 1998-08-11 | 2003-11-13 | Infineon Technologies Ag | Verfahren zur Herstellung eines Mikromechanischen Sensors |
US6847090B2 (en) * | 2001-01-24 | 2005-01-25 | Knowles Electronics, Llc | Silicon capacitive microphone |
US7298856B2 (en) * | 2001-09-05 | 2007-11-20 | Nippon Hoso Kyokai | Chip microphone and method of making same |
JP2003078981A (ja) * | 2001-09-05 | 2003-03-14 | Nippon Hoso Kyokai <Nhk> | マイクロホン実装回路基板および該基板を搭載する音声処理装置 |
US6958255B2 (en) * | 2002-08-08 | 2005-10-25 | The Board Of Trustees Of The Leland Stanford Junior University | Micromachined ultrasonic transducers and method of fabrication |
US20050187204A1 (en) * | 2002-08-08 | 2005-08-25 | Sankyo Company, Limited | Medicinal composition for lowering blood lipid level |
-
2004
- 2004-05-26 DE DE602004026862T patent/DE602004026862D1/de not_active Expired - Fee Related
- 2004-05-26 AT AT04734967T patent/ATE466456T1/de not_active IP Right Cessation
- 2004-05-26 JP JP2006532250A patent/JP2007504782A/ja active Pending
- 2004-05-26 MY MYPI20042021A patent/MY136475A/en unknown
- 2004-05-26 US US10/558,885 patent/US20070065968A1/en not_active Abandoned
- 2004-05-26 KR KR1020057022617A patent/KR20060034223A/ko not_active Application Discontinuation
- 2004-05-26 WO PCT/SG2004/000152 patent/WO2004105428A1/en active Application Filing
- 2004-05-26 CN CNA2004800183562A patent/CN1813489A/zh active Pending
- 2004-05-26 EP EP04734967A patent/EP1632105B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP1632105B1 (de) | 2010-04-28 |
ATE466456T1 (de) | 2010-05-15 |
EP1632105A4 (de) | 2008-09-17 |
MY136475A (en) | 2008-10-31 |
KR20060034223A (ko) | 2006-04-21 |
EP1632105A1 (de) | 2006-03-08 |
JP2007504782A (ja) | 2007-03-01 |
US20070065968A1 (en) | 2007-03-22 |
WO2004105428A1 (en) | 2004-12-02 |
CN1813489A (zh) | 2006-08-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8339 | Ceased/non-payment of the annual fee |