DE602004004369T2 - Verfahren zur analyse von verunreinigungen in einem prozessfluidstrom - Google Patents
Verfahren zur analyse von verunreinigungen in einem prozessfluidstrom Download PDFInfo
- Publication number
- DE602004004369T2 DE602004004369T2 DE602004004369T DE602004004369T DE602004004369T2 DE 602004004369 T2 DE602004004369 T2 DE 602004004369T2 DE 602004004369 T DE602004004369 T DE 602004004369T DE 602004004369 T DE602004004369 T DE 602004004369T DE 602004004369 T2 DE602004004369 T2 DE 602004004369T2
- Authority
- DE
- Germany
- Prior art keywords
- impurities
- cleaning material
- compounds
- cleaner
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
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- 238000011109 contamination Methods 0.000 title claims description 18
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- 239000012535 impurity Substances 0.000 claims description 76
- 239000000356 contaminant Substances 0.000 claims description 51
- 238000003795 desorption Methods 0.000 claims description 43
- 239000011538 cleaning material Substances 0.000 claims description 23
- 239000007788 liquid Substances 0.000 claims description 23
- 238000004458 analytical method Methods 0.000 claims description 20
- 229930195733 hydrocarbon Natural products 0.000 claims description 19
- 150000002430 hydrocarbons Chemical class 0.000 claims description 19
- 150000001875 compounds Chemical class 0.000 claims description 16
- 238000004519 manufacturing process Methods 0.000 claims description 15
- -1 hydride compounds Chemical class 0.000 claims description 11
- 229910052760 oxygen Inorganic materials 0.000 claims description 11
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 9
- 239000001301 oxygen Substances 0.000 claims description 9
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 8
- 229910052739 hydrogen Inorganic materials 0.000 claims description 8
- 239000001257 hydrogen Substances 0.000 claims description 8
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- 229910001868 water Inorganic materials 0.000 claims description 8
- 238000000769 gas chromatography-flame ionisation detection Methods 0.000 claims description 7
- 239000000126 substance Substances 0.000 claims description 7
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 6
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 5
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- 230000001066 destructive effect Effects 0.000 claims description 3
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- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims description 2
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- 238000001514 detection method Methods 0.000 description 10
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- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
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- IVSZLXZYQVIEFR-UHFFFAOYSA-N 1,3-Dimethylbenzene Natural products CC1=CC=CC(C)=C1 IVSZLXZYQVIEFR-UHFFFAOYSA-N 0.000 description 2
- YNQLUTRBYVCPMQ-UHFFFAOYSA-N Ethylbenzene Chemical compound CCC1=CC=CC=C1 YNQLUTRBYVCPMQ-UHFFFAOYSA-N 0.000 description 2
- URLKBWYHVLBVBO-UHFFFAOYSA-N Para-Xylene Chemical group CC1=CC=C(C)C=C1 URLKBWYHVLBVBO-UHFFFAOYSA-N 0.000 description 2
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- CTQNGGLPUBDAKN-UHFFFAOYSA-N o-dimethylbenzene Natural products CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 2
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- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 238000004566 IR spectroscopy Methods 0.000 description 1
- 101100023111 Schizosaccharomyces pombe (strain 972 / ATCC 24843) mfc1 gene Proteins 0.000 description 1
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- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 150000001639 boron compounds Chemical class 0.000 description 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
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- 229910052731 fluorine Inorganic materials 0.000 description 1
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- 239000011630 iodine Substances 0.000 description 1
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- 238000002955 isolation Methods 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
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- 239000000314 lubricant Substances 0.000 description 1
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- 150000001247 metal acetylides Chemical class 0.000 description 1
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- 150000004681 metal hydrides Chemical class 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- VUZPPFZMUPKLLV-UHFFFAOYSA-N methane;hydrate Chemical compound C.O VUZPPFZMUPKLLV-UHFFFAOYSA-N 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
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- 229910052763 palladium Inorganic materials 0.000 description 1
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
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- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
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- 235000012431 wafers Nutrition 0.000 description 1
- 239000010457 zeolite Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
- G01N30/02—Column chromatography
- G01N30/04—Preparation or injection of sample to be analysed
- G01N30/06—Preparation
- G01N30/12—Preparation by evaporation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/2202—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling
- G01N1/2214—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling by sorption
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/34—Purifying; Cleaning
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/44—Sample treatment involving radiation, e.g. heat
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
- G01N30/02—Column chromatography
- G01N30/04—Preparation or injection of sample to be analysed
- G01N30/06—Preparation
- G01N30/08—Preparation using an enricher
- G01N2030/085—Preparation using an enricher using absorbing precolumn
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T436/00—Chemistry: analytical and immunological testing
- Y10T436/25—Chemistry: analytical and immunological testing including sample preparation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T436/00—Chemistry: analytical and immunological testing
- Y10T436/25—Chemistry: analytical and immunological testing including sample preparation
- Y10T436/25375—Liberation or purification of sample or separation of material from a sample [e.g., filtering, centrifuging, etc.]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T436/00—Chemistry: analytical and immunological testing
- Y10T436/25—Chemistry: analytical and immunological testing including sample preparation
- Y10T436/25375—Liberation or purification of sample or separation of material from a sample [e.g., filtering, centrifuging, etc.]
- Y10T436/255—Liberation or purification of sample or separation of material from a sample [e.g., filtering, centrifuging, etc.] including use of a solid sorbent, semipermeable membrane, or liquid extraction
Landscapes
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Pathology (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Immunology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Molecular Biology (AREA)
- Biomedical Technology (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Sampling And Sample Adjustment (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US44928403P | 2003-02-21 | 2003-02-21 | |
| US449284P | 2003-02-21 | ||
| PCT/US2004/004845 WO2004077015A2 (en) | 2003-02-21 | 2004-02-20 | Method for analysis of contaminants in a process fluid stream |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE602004004369D1 DE602004004369D1 (de) | 2007-03-08 |
| DE602004004369T2 true DE602004004369T2 (de) | 2007-11-29 |
Family
ID=32927506
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE602004004369T Expired - Fee Related DE602004004369T2 (de) | 2003-02-21 | 2004-02-20 | Verfahren zur analyse von verunreinigungen in einem prozessfluidstrom |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US8664004B2 (enExample) |
| EP (1) | EP1595132B1 (enExample) |
| JP (1) | JP2006518468A (enExample) |
| KR (1) | KR20050103946A (enExample) |
| CN (1) | CN1756945A (enExample) |
| DE (1) | DE602004004369T2 (enExample) |
| TW (1) | TW200506334A (enExample) |
| WO (1) | WO2004077015A2 (enExample) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8664004B2 (en) | 2003-02-21 | 2014-03-04 | Entegris, Inc. | Method for analysis of contaminants in a process fluid stream |
| US6913654B2 (en) | 2003-06-02 | 2005-07-05 | Mykrolis Corporation | Method for the removal of airborne molecular contaminants using water gas mixtures |
| US7384149B2 (en) * | 2003-07-21 | 2008-06-10 | Asml Netherlands B.V. | Lithographic projection apparatus, gas purging method and device manufacturing method and purge gas supply system |
| US20060285091A1 (en) * | 2003-07-21 | 2006-12-21 | Parekh Bipin S | Lithographic projection apparatus, gas purging method, device manufacturing method and purge gas supply system related application |
| WO2006132156A1 (ja) * | 2005-06-07 | 2006-12-14 | Tokyo Electron Limited | 有機物ガスの濃度を測定する装置及び方法 |
| JP4929823B2 (ja) * | 2005-06-07 | 2012-05-09 | 東京エレクトロン株式会社 | 有機物ガスの濃度測定方法及びその濃度測定装置 |
| CN101247900A (zh) * | 2005-08-02 | 2008-08-20 | 恩特格林斯公司 | 用于俘获基板的系统和方法 |
| CN101263385A (zh) * | 2005-08-08 | 2008-09-10 | 琳德股份有限公司 | 气体分析方法 |
| US8017405B2 (en) * | 2005-08-08 | 2011-09-13 | The Boc Group, Inc. | Gas analysis method |
| CN101393222B (zh) * | 2007-09-20 | 2012-07-18 | 财团法人工业技术研究院 | 有机气体监测装置及方法 |
| JP5150749B2 (ja) | 2011-05-31 | 2013-02-27 | 株式会社東芝 | 発生ガスの捕集方法、及び測定方法 |
| CN103157429A (zh) * | 2013-03-22 | 2013-06-19 | 南京玖壹环境科技有限公司 | 高真空多层绝热用吸附剂活化的装置与方法 |
| CN104865306A (zh) * | 2015-04-23 | 2015-08-26 | 中国制浆造纸研究院 | 一种固体样品中可吸附有机氯化物的检测方法 |
| CN104792604A (zh) * | 2015-04-28 | 2015-07-22 | 李勘 | 电子制冷大气预浓缩仪 |
| CN105606683A (zh) * | 2016-01-29 | 2016-05-25 | 华电电力科学研究院 | So3在线连续监测装置及方法 |
| EP3488225A4 (en) | 2016-07-25 | 2020-03-04 | MKS Instruments, Inc. | GAS MEASUREMENT SYSTEM |
| EP3608660B1 (en) * | 2017-04-05 | 2023-12-20 | Panasonic Holdings Corporation | Gas sensor |
| KR102156387B1 (ko) | 2020-06-25 | 2020-09-15 | 엄봉 | 청소가 용이한 창호프레임 |
| US11609505B2 (en) * | 2021-04-05 | 2023-03-21 | Applied Materials, Inc. | Apparatus and methods for verification and re-use of process fluids |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5027642A (en) * | 1987-10-13 | 1991-07-02 | American Air Liquide | Method of detecting and or removing trace amounts of condensible vapors from compressed gas |
| US4805441A (en) * | 1988-02-22 | 1989-02-21 | Cms Research Corporation | Continuous air monitoring apparatus and method |
| US5138869A (en) * | 1990-12-14 | 1992-08-18 | Novapure Corporation | In-line detector system for real-time determination of impurity concentration in a flowing gas stream |
| US5583282A (en) * | 1990-12-14 | 1996-12-10 | Millipore Investment Holdings Limited | Differential gas sensing in-line monitoring system |
| JPH04353761A (ja) * | 1991-05-30 | 1992-12-08 | Tadahiro Omi | 特殊ガス中の不純物量測定方法及びその測定装置 |
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-
2004
- 2004-02-20 US US10/544,309 patent/US8664004B2/en active Active
- 2004-02-20 JP JP2006503693A patent/JP2006518468A/ja active Pending
- 2004-02-20 EP EP04713293A patent/EP1595132B1/en not_active Expired - Lifetime
- 2004-02-20 DE DE602004004369T patent/DE602004004369T2/de not_active Expired - Fee Related
- 2004-02-20 TW TW093104226A patent/TW200506334A/zh unknown
- 2004-02-20 KR KR1020057015353A patent/KR20050103946A/ko not_active Withdrawn
- 2004-02-20 WO PCT/US2004/004845 patent/WO2004077015A2/en not_active Ceased
- 2004-02-20 CN CNA200480004583XA patent/CN1756945A/zh active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| US20060211131A1 (en) | 2006-09-21 |
| JP2006518468A (ja) | 2006-08-10 |
| DE602004004369D1 (de) | 2007-03-08 |
| KR20050103946A (ko) | 2005-11-01 |
| CN1756945A (zh) | 2006-04-05 |
| WO2004077015A2 (en) | 2004-09-10 |
| TW200506334A (en) | 2005-02-16 |
| WO2004077015A3 (en) | 2004-12-09 |
| US8664004B2 (en) | 2014-03-04 |
| EP1595132B1 (en) | 2007-01-17 |
| EP1595132A2 (en) | 2005-11-16 |
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