CN1756945A - 工作流体流中污染物的分析方法 - Google Patents

工作流体流中污染物的分析方法 Download PDF

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Publication number
CN1756945A
CN1756945A CNA200480004583XA CN200480004583A CN1756945A CN 1756945 A CN1756945 A CN 1756945A CN A200480004583X A CNA200480004583X A CN A200480004583XA CN 200480004583 A CN200480004583 A CN 200480004583A CN 1756945 A CN1756945 A CN 1756945A
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CN
China
Prior art keywords
contaminants
pollutants
purification material
gas
desorption
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Pending
Application number
CNA200480004583XA
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English (en)
Chinese (zh)
Inventor
杰弗里·J.·施皮格尔曼
小丹尼尔·阿尔瓦雷斯
艾伦·特拉姆
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Entegris Inc
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Mykrolis Corp
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Publication date
Application filed by Mykrolis Corp filed Critical Mykrolis Corp
Publication of CN1756945A publication Critical patent/CN1756945A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/04—Preparation or injection of sample to be analysed
    • G01N30/06—Preparation
    • G01N30/12—Preparation by evaporation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/2202—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling
    • G01N1/2214—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling by sorption
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/34—Purifying; Cleaning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/44—Sample treatment involving radiation, e.g. heat
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/04—Preparation or injection of sample to be analysed
    • G01N30/06—Preparation
    • G01N30/08—Preparation using an enricher
    • G01N2030/085—Preparation using an enricher using absorbing precolumn
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/25—Chemistry: analytical and immunological testing including sample preparation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/25—Chemistry: analytical and immunological testing including sample preparation
    • Y10T436/25375—Liberation or purification of sample or separation of material from a sample [e.g., filtering, centrifuging, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/25—Chemistry: analytical and immunological testing including sample preparation
    • Y10T436/25375—Liberation or purification of sample or separation of material from a sample [e.g., filtering, centrifuging, etc.]
    • Y10T436/255—Liberation or purification of sample or separation of material from a sample [e.g., filtering, centrifuging, etc.] including use of a solid sorbent, semipermeable membrane, or liquid extraction

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  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Pathology (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Molecular Biology (AREA)
  • Biomedical Technology (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Sampling And Sample Adjustment (AREA)
CNA200480004583XA 2003-02-21 2004-02-20 工作流体流中污染物的分析方法 Pending CN1756945A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US44928403P 2003-02-21 2003-02-21
US60/449,284 2003-02-21

Publications (1)

Publication Number Publication Date
CN1756945A true CN1756945A (zh) 2006-04-05

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ID=32927506

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA200480004583XA Pending CN1756945A (zh) 2003-02-21 2004-02-20 工作流体流中污染物的分析方法

Country Status (8)

Country Link
US (1) US8664004B2 (enExample)
EP (1) EP1595132B1 (enExample)
JP (1) JP2006518468A (enExample)
KR (1) KR20050103946A (enExample)
CN (1) CN1756945A (enExample)
DE (1) DE602004004369T2 (enExample)
TW (1) TW200506334A (enExample)
WO (1) WO2004077015A2 (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101393222B (zh) * 2007-09-20 2012-07-18 财团法人工业技术研究院 有机气体监测装置及方法
CN103157429A (zh) * 2013-03-22 2013-06-19 南京玖壹环境科技有限公司 高真空多层绝热用吸附剂活化的装置与方法
CN104792604A (zh) * 2015-04-28 2015-07-22 李勘 电子制冷大气预浓缩仪
CN104865306A (zh) * 2015-04-23 2015-08-26 中国制浆造纸研究院 一种固体样品中可吸附有机氯化物的检测方法

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EP1595132B1 (en) 2003-02-21 2007-01-17 Entegris, Inc. Method for analysis of contaminants in a process fluid stream
US6913654B2 (en) 2003-06-02 2005-07-05 Mykrolis Corporation Method for the removal of airborne molecular contaminants using water gas mixtures
US20060285091A1 (en) * 2003-07-21 2006-12-21 Parekh Bipin S Lithographic projection apparatus, gas purging method, device manufacturing method and purge gas supply system related application
US7384149B2 (en) * 2003-07-21 2008-06-10 Asml Netherlands B.V. Lithographic projection apparatus, gas purging method and device manufacturing method and purge gas supply system
US7946152B2 (en) 2005-06-07 2011-05-24 Tokyo Electron Limited Apparatus and method for measuring the concentration of organic gas
JP4929823B2 (ja) * 2005-06-07 2012-05-09 東京エレクトロン株式会社 有機物ガスの濃度測定方法及びその濃度測定装置
WO2007016453A2 (en) * 2005-08-02 2007-02-08 Entegris, Inc. Systems and methods for capture substrates
CN101263385A (zh) * 2005-08-08 2008-09-10 琳德股份有限公司 气体分析方法
US8017405B2 (en) * 2005-08-08 2011-09-13 The Boc Group, Inc. Gas analysis method
JP5150749B2 (ja) 2011-05-31 2013-02-27 株式会社東芝 発生ガスの捕集方法、及び測定方法
CN105606683A (zh) * 2016-01-29 2016-05-25 华电电力科学研究院 So3在线连续监测装置及方法
US10228324B2 (en) 2016-07-25 2019-03-12 Mks Instruments, Inc. Gas measurement system
WO2018186268A1 (ja) * 2017-04-05 2018-10-11 パナソニック株式会社 ガスセンサ
KR102156387B1 (ko) 2020-06-25 2020-09-15 엄봉 청소가 용이한 창호프레임
US11609505B2 (en) * 2021-04-05 2023-03-21 Applied Materials, Inc. Apparatus and methods for verification and re-use of process fluids

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US5027642A (en) * 1987-10-13 1991-07-02 American Air Liquide Method of detecting and or removing trace amounts of condensible vapors from compressed gas
US4805441A (en) * 1988-02-22 1989-02-21 Cms Research Corporation Continuous air monitoring apparatus and method
US5583282A (en) * 1990-12-14 1996-12-10 Millipore Investment Holdings Limited Differential gas sensing in-line monitoring system
US5138869A (en) * 1990-12-14 1992-08-18 Novapure Corporation In-line detector system for real-time determination of impurity concentration in a flowing gas stream
JPH04353761A (ja) * 1991-05-30 1992-12-08 Tadahiro Omi 特殊ガス中の不純物量測定方法及びその測定装置
US5304796A (en) 1992-03-25 1994-04-19 The Boc Group, Inc. Atmospheric pressure ionization mass spectroscopy method including a silica gel drying step
US5511409A (en) 1994-09-19 1996-04-30 Knaebel; Kent S. Measurement of emission levels in a gas stream
US6059859A (en) 1997-09-19 2000-05-09 Aeronex, Inc. Method, composition and apparatus for water removal from non-corrosive gas streams
JP3607997B2 (ja) 1998-04-09 2005-01-05 大陽日酸株式会社 ガス中の微量不純物の分析装置
US6241955B1 (en) * 1998-10-02 2001-06-05 Aeronex, Inc. Method and apparatus for purification of hydride gas streams
JP4268254B2 (ja) 1999-03-04 2009-05-27 新日本製鐵株式会社 超音速分子ジェットレーザ分光分析装置およびその前処理方法
JP2000304734A (ja) 1999-04-21 2000-11-02 Shimizu Corp 空気中の汚染物質の検出方法
US6393894B1 (en) * 1999-07-27 2002-05-28 Honeywell International Inc. Gas sensor with phased heaters for increased sensitivity
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JP2001235405A (ja) 2000-02-21 2001-08-31 Ube Kagaku Bunseki Center:Kk 揮発性有機化合物の捕集方法、及びそれを利用した分析方法、並びに揮発性有機化合物の捕集装置
JP3632748B2 (ja) * 2000-03-21 2005-03-23 日立プラント建設株式会社 汚染物質の固体表面吸着評価方法
US6409801B1 (en) * 2000-09-29 2002-06-25 The Boc Group, Inc. Activation processes for monolith adsorbents
JP4590091B2 (ja) 2000-11-24 2010-12-01 大陽日酸株式会社 ガス分析装置
US6547861B2 (en) * 2000-12-26 2003-04-15 Matheson Tri-Gas,, Inc. Method and materials for purifying reactive gases using preconditioned ultra-low emission carbon material
DE10114947B4 (de) * 2001-03-27 2004-08-19 Gerstel Systemtechnik Gmbh & Co.Kg Verfahren und Vorrichtung zum Herstellen eines mindestens eine gasförmige Komponente enthaltenden Gasgemisches, insbesondere eines Kalibriergases
US6391090B1 (en) * 2001-04-02 2002-05-21 Aeronex, Inc. Method for purification of lens gases used in photolithography
US20030162305A1 (en) 2002-02-25 2003-08-28 Daniel Alvarez Gas contaminant detection and quantification method
EP1595132B1 (en) 2003-02-21 2007-01-17 Entegris, Inc. Method for analysis of contaminants in a process fluid stream
US7132011B2 (en) 2003-09-02 2006-11-07 Entegris, Inc. Reactive gas filter

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101393222B (zh) * 2007-09-20 2012-07-18 财团法人工业技术研究院 有机气体监测装置及方法
CN103157429A (zh) * 2013-03-22 2013-06-19 南京玖壹环境科技有限公司 高真空多层绝热用吸附剂活化的装置与方法
CN104865306A (zh) * 2015-04-23 2015-08-26 中国制浆造纸研究院 一种固体样品中可吸附有机氯化物的检测方法
CN104792604A (zh) * 2015-04-28 2015-07-22 李勘 电子制冷大气预浓缩仪

Also Published As

Publication number Publication date
WO2004077015A2 (en) 2004-09-10
WO2004077015A3 (en) 2004-12-09
US8664004B2 (en) 2014-03-04
DE602004004369T2 (de) 2007-11-29
JP2006518468A (ja) 2006-08-10
US20060211131A1 (en) 2006-09-21
EP1595132B1 (en) 2007-01-17
DE602004004369D1 (de) 2007-03-08
KR20050103946A (ko) 2005-11-01
TW200506334A (en) 2005-02-16
EP1595132A2 (en) 2005-11-16

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Effective date of registration: 20060519

Address after: Minnesota, USA

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