DE602004000155D1 - Absoluter optischer Positionkodierer mit faseroptischem Sensorkopf und mindestens zwei Skalen - Google Patents

Absoluter optischer Positionkodierer mit faseroptischem Sensorkopf und mindestens zwei Skalen

Info

Publication number
DE602004000155D1
DE602004000155D1 DE602004000155T DE602004000155T DE602004000155D1 DE 602004000155 D1 DE602004000155 D1 DE 602004000155D1 DE 602004000155 T DE602004000155 T DE 602004000155T DE 602004000155 T DE602004000155 T DE 602004000155T DE 602004000155 D1 DE602004000155 D1 DE 602004000155D1
Authority
DE
Germany
Prior art keywords
scales
fiber optic
sensor head
optical position
optic sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602004000155T
Other languages
English (en)
Other versions
DE602004000155T2 (de
Inventor
Joseph D Tobiason
Kim W Atherton
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Publication of DE602004000155D1 publication Critical patent/DE602004000155D1/de
Application granted granted Critical
Publication of DE602004000155T2 publication Critical patent/DE602004000155T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices
    • G01D5/34723—Scale reading or illumination devices involving light-guides

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
DE602004000155T 2003-05-02 2004-04-28 Absoluter optischer Positionkodierer mit faseroptischem Sensorkopf und mindestens zwei Skalen Expired - Lifetime DE602004000155T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US428238 2003-05-02
US10/428,238 US7053362B2 (en) 2003-05-02 2003-05-02 Absolute position miniature grating encoder readhead using fiber optic receiver channels

Publications (2)

Publication Number Publication Date
DE602004000155D1 true DE602004000155D1 (de) 2005-12-01
DE602004000155T2 DE602004000155T2 (de) 2006-04-27

Family

ID=32990471

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004000155T Expired - Lifetime DE602004000155T2 (de) 2003-05-02 2004-04-28 Absoluter optischer Positionkodierer mit faseroptischem Sensorkopf und mindestens zwei Skalen

Country Status (5)

Country Link
US (1) US7053362B2 (de)
EP (1) EP1473550B1 (de)
JP (1) JP4493985B2 (de)
CN (1) CN100365379C (de)
DE (1) DE602004000155T2 (de)

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US7211782B2 (en) * 2004-04-09 2007-05-01 Mitutoyo Corporation Precision measuring gauges with optical fiber output channels
US7435946B2 (en) * 2005-10-17 2008-10-14 Ricoh Company, Ltd. Mark detector using multiple light beams for use in a displacement detector and an image forming apparatus
US7465917B2 (en) * 2006-02-16 2008-12-16 Avago Technologies General Ip (Singapore) Pte. Ltd. Absolute encoder utilizing light of different wavelengths to reduce cross-talk
JP5021244B2 (ja) * 2006-07-03 2012-09-05 株式会社ミツトヨ 変位検出エンコーダ
US7502122B2 (en) * 2006-07-31 2009-03-10 Mitutoyo Corporation Fiber-optic miniature encoder for fine pitch scales
DE102006044229B4 (de) * 2006-09-20 2023-09-28 Carl Zeiss Microscopy Gmbh Verfahren und Vorrichtung zur Bildverarbeitung mit höheren Harmonischen eines Beleuchtungsgitters
JP4976823B2 (ja) * 2006-11-15 2012-07-18 株式会社ミツトヨ 光学式エンコーダ
US20080156973A1 (en) * 2006-12-29 2008-07-03 Weng Fei Wong Photosensor array for optical encoder
US20090027692A1 (en) * 2007-07-24 2009-01-29 Mitutoyo Corporation Reference signal generating configuration for an interferometric miniature grating encoder readhead using fiber optic receiver channels
US7973941B2 (en) 2007-07-24 2011-07-05 Mitutoyo Corporation Reference signal generating configuration for an interferometric miniature grating encoder readhead using fiber optic receiver channels
US7965393B2 (en) * 2007-07-24 2011-06-21 Mitutoyo Corporation Reference signal generating configuration for an interferometric miniature grating encoder readhead using fiber optic receiver channels
TWI416082B (zh) * 2008-06-05 2013-11-21 Mitsubishi Electric Corp 光學式編碼器
JP5153466B2 (ja) 2008-06-11 2013-02-27 日本発條株式会社 ディンプル位置検出方法
US8009939B2 (en) * 2008-09-30 2011-08-30 General Electric Company Fiberoptic clearance detection system and method
JP5668226B2 (ja) * 2010-10-26 2015-02-12 株式会社ミツトヨ 光電式エンコーダ
JP6069653B2 (ja) * 2011-01-27 2017-02-01 株式会社ミツトヨ 光電式エンコーダ及びそのアライメント調整方法
US8772706B2 (en) 2012-04-20 2014-07-08 Mitutoyo Corporation Multiple wavelength configuration for an optical encoder readhead including dual optical path region with an optical path length difference
JP5939956B2 (ja) * 2012-10-12 2016-06-29 Dmg森精機株式会社 変位検出装置
US20140353477A1 (en) * 2013-05-29 2014-12-04 The Cleveland Electric Laboratories Company Optical encoder
US10731246B2 (en) 2014-07-28 2020-08-04 Gatan, Inc. Ion beam sample preparation and coating apparatus and methods
CN105180800B (zh) * 2015-04-30 2017-12-12 中国科学院上海光学精密机械研究所 自准直光栅干涉仪的高光学细分结构
US9689715B2 (en) * 2015-05-19 2017-06-27 Mitutoyo Corporation Light source array used in an illumination portion of an optical encoder
US9529165B1 (en) 2015-06-30 2016-12-27 Stmicroelectronics (Crolles 2) Sas Method for aligning electro-optic device with optical fiber array with optical grating couplers
JP7028652B2 (ja) 2018-01-16 2022-03-02 株式会社ミツトヨ 測定装置
CN110132418A (zh) * 2018-12-07 2019-08-16 常州工学院 一种led绝对光功率谱分布的测量方法和装置
US10763961B2 (en) * 2019-01-03 2020-09-01 The John Hopkins University Free-space optical terminal
CN110233548A (zh) * 2019-06-25 2019-09-13 苏州汇川技术有限公司 一种校准设备、方法、编码器及电机
JP7303053B2 (ja) * 2019-07-17 2023-07-04 ファナック株式会社 調整補助具及びレーザ溶接装置
CN112150542B (zh) * 2020-09-24 2023-02-24 上海联影医疗科技股份有限公司 一种射野测量方法、装置、电子设备及存储介质
JP2022083979A (ja) 2020-11-25 2022-06-06 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング 光学式位置測定装置
CN114545022A (zh) * 2022-01-28 2022-05-27 中国科学院电工研究所 一种高速直线电机定位测速实时仿真方法及系统

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US11948A (en) * 1854-11-14 Excavator and ditching-plow
US4162399A (en) * 1977-09-16 1979-07-24 Bei Electronics, Inc. Optical encoder with fiber optics
JPH0672784B2 (ja) * 1984-05-09 1994-09-14 デユポン ジヤパン リミテツド 光反射式エンコーダー
JPS59173713A (ja) * 1983-03-23 1984-10-01 Ishikawajima Harima Heavy Ind Co Ltd 光反射型変位測定装置
JPS6085317A (ja) * 1983-10-17 1985-05-14 Mitsubishi Electric Corp エンコ−ダ
JPS6089712A (ja) * 1983-10-21 1985-05-20 Alps Electric Co Ltd 光学式エンコ−ダ
US4879508A (en) * 1986-04-04 1989-11-07 Mitutoyo Corporation Capacitance-type measuring device for absolute measurement of positions
JP2562479B2 (ja) * 1988-04-25 1996-12-11 株式会社 ミツトヨ 反射式ｘｙエンコーダ
CN2207565Y (zh) * 1994-06-16 1995-09-13 东南大学 长线性量程光纤位移传感器
US5886519A (en) * 1997-01-29 1999-03-23 Mitutoyo Corporation Multi-scale induced current absolute position transducer
US5808730A (en) * 1997-04-08 1998-09-15 Ceramoptec Industries Inc. Fiber optic displacement sensor
US5909283A (en) * 1997-10-07 1999-06-01 Eselun; Steven Albert Linear encoder using diverging light beam diffraction
US6906315B2 (en) * 2002-07-16 2005-06-14 Mitutoyo Corporation High accuracy miniature grating encoder readhead using fiber optic receiver channels

Also Published As

Publication number Publication date
JP4493985B2 (ja) 2010-06-30
US7053362B2 (en) 2006-05-30
CN1550753A (zh) 2004-12-01
DE602004000155T2 (de) 2006-04-27
EP1473550A1 (de) 2004-11-03
JP2004333471A (ja) 2004-11-25
US20040217268A1 (en) 2004-11-04
CN100365379C (zh) 2008-01-30
EP1473550B1 (de) 2005-10-26

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