DE60143202D1 - Mikromechanisch hergestellter absolutdrucksensor - Google Patents

Mikromechanisch hergestellter absolutdrucksensor

Info

Publication number
DE60143202D1
DE60143202D1 DE60143202T DE60143202T DE60143202D1 DE 60143202 D1 DE60143202 D1 DE 60143202D1 DE 60143202 T DE60143202 T DE 60143202T DE 60143202 T DE60143202 T DE 60143202T DE 60143202 D1 DE60143202 D1 DE 60143202D1
Authority
DE
Germany
Prior art keywords
semiconductor membrane
conductor
capacitor plate
dielectric pad
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60143202T
Other languages
English (en)
Inventor
Steve T Cho
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hospira Inc
Original Assignee
Hospira Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hospira Inc filed Critical Hospira Inc
Application granted granted Critical
Publication of DE60143202D1 publication Critical patent/DE60143202D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
DE60143202T 2000-07-28 2001-07-20 Mikromechanisch hergestellter absolutdrucksensor Expired - Lifetime DE60143202D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/627,946 US6445053B1 (en) 2000-07-28 2000-07-28 Micro-machined absolute pressure sensor
PCT/US2001/022920 WO2002010702A2 (en) 2000-07-28 2001-07-20 Micro-machined absolute pressure sensor

Publications (1)

Publication Number Publication Date
DE60143202D1 true DE60143202D1 (de) 2010-11-18

Family

ID=24516761

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60143202T Expired - Lifetime DE60143202D1 (de) 2000-07-28 2001-07-20 Mikromechanisch hergestellter absolutdrucksensor

Country Status (9)

Country Link
US (1) US6445053B1 (de)
EP (1) EP1305586B1 (de)
JP (1) JP4768205B2 (de)
AT (1) ATE483958T1 (de)
AU (2) AU8066001A (de)
CA (1) CA2410707A1 (de)
DE (1) DE60143202D1 (de)
ES (1) ES2354842T3 (de)
WO (1) WO2002010702A2 (de)

Families Citing this family (79)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040108588A1 (en) * 2002-09-24 2004-06-10 Cookson Electronics, Inc. Package for microchips
US6813964B1 (en) * 2003-05-21 2004-11-09 Hospira, Inc. Fluid flow measurement device
JP2005201818A (ja) * 2004-01-16 2005-07-28 Alps Electric Co Ltd 圧力センサ
US7545079B2 (en) * 2004-04-01 2009-06-09 Siemens Medical Solutions Usa, Inc. Photoetched ultrasound transducer components
US7111517B2 (en) * 2004-07-29 2006-09-26 Agere Systems, Inc. Apparatus and method for in-situ measuring of vibrational energy in a process bath of a vibrational cleaning system
US7093494B2 (en) * 2004-10-18 2006-08-22 Silverbrook Research Pty Ltd Micro-electromechanical pressure sensor
US7328609B1 (en) 2004-10-29 2008-02-12 National Semiconductor Corporation Wireless pressure sensing Schrader valve
US7121146B1 (en) * 2004-10-29 2006-10-17 National Semiconductor Corporation MEMS pressure sensing device
US20060099733A1 (en) * 2004-11-09 2006-05-11 Geefay Frank S Semiconductor package and fabrication method
US7222639B2 (en) * 2004-12-29 2007-05-29 Honeywell International Inc. Electrostatically actuated gas valve
US7691723B2 (en) * 2005-01-07 2010-04-06 Honeywell International Inc. Bonding system having stress control
US7807550B2 (en) 2005-06-17 2010-10-05 Dalsa Semiconductor Inc. Method of making MEMS wafers
EP1798196B1 (de) * 2005-12-15 2017-08-09 Infineon Technologies AG Mehrlagiges Bauelement mit Reduzierung der UV-Stahlung während der Verkapselung
US7261003B2 (en) * 2006-01-03 2007-08-28 Freescale Semiconductor, Inc. Flowmeter and method for the making thereof
EP1830167A3 (de) * 2006-03-02 2010-01-20 Alps Electric Co., Ltd. Drucksensor mit eutektischer Gold-Silizium-Kristallschicht zwischen der Kontaktschicht und dem Siliziumsubstrat
US7493823B2 (en) * 2006-06-16 2009-02-24 Honeywell International Inc. Pressure transducer with differential amplifier
US7543604B2 (en) * 2006-09-11 2009-06-09 Honeywell International Inc. Control valve
CN1944235B (zh) * 2006-11-03 2011-07-20 北京航空航天大学 电磁-磁电式微机械谐振梁结构
US7644731B2 (en) 2006-11-30 2010-01-12 Honeywell International Inc. Gas valve with resilient seat
CN100465088C (zh) * 2006-12-22 2009-03-04 北京航空航天大学 一种“中”字形谐振式硅微机械压力传感器
US8374880B2 (en) 2007-04-24 2013-02-12 Koninklijke Philips Electronics N.V. System for automatically creating a lighting atmosphere based on a keyword input
US8403908B2 (en) 2007-12-17 2013-03-26 Hospira, Inc. Differential pressure based flow sensor assembly for medication delivery monitoring and method of using the same
US9026370B2 (en) 2007-12-18 2015-05-05 Hospira, Inc. User interface improvements for medical devices
US8164821B2 (en) * 2008-02-22 2012-04-24 Qualcomm Mems Technologies, Inc. Microelectromechanical device with thermal expansion balancing layer or stiffening layer
US8065924B2 (en) * 2008-05-23 2011-11-29 Hospira, Inc. Cassette for differential pressure based medication delivery flow sensor assembly for medication delivery monitoring and method of making the same
US7819838B2 (en) 2008-09-02 2010-10-26 Hospira, Inc. Cassette for use in a medication delivery flow sensor assembly and method of making the same
US20100109104A1 (en) * 2008-10-30 2010-05-06 Radi Medical Systems Ab Pressure sensor and wire guide assembly
US8048022B2 (en) * 2009-01-30 2011-11-01 Hospira, Inc. Cassette for differential pressure based medication delivery flow sensor assembly for medication delivery monitoring and method of making the same
US8656772B2 (en) 2010-03-22 2014-02-25 Honeywell International Inc. Flow sensor with pressure output signal
US8616065B2 (en) 2010-11-24 2013-12-31 Honeywell International Inc. Pressure sensor
US8695417B2 (en) 2011-01-31 2014-04-15 Honeywell International Inc. Flow sensor with enhanced flow range capability
WO2013028497A1 (en) 2011-08-19 2013-02-28 Hospira, Inc. Systems and methods for a graphical interface including a graphical representation of medical data
US8947242B2 (en) 2011-12-15 2015-02-03 Honeywell International Inc. Gas valve with valve leakage test
US9851103B2 (en) 2011-12-15 2017-12-26 Honeywell International Inc. Gas valve with overpressure diagnostics
US9835265B2 (en) 2011-12-15 2017-12-05 Honeywell International Inc. Valve with actuator diagnostics
US9846440B2 (en) 2011-12-15 2017-12-19 Honeywell International Inc. Valve controller configured to estimate fuel comsumption
US8839815B2 (en) 2011-12-15 2014-09-23 Honeywell International Inc. Gas valve with electronic cycle counter
US9074770B2 (en) 2011-12-15 2015-07-07 Honeywell International Inc. Gas valve with electronic valve proving system
US9557059B2 (en) 2011-12-15 2017-01-31 Honeywell International Inc Gas valve with communication link
US8905063B2 (en) 2011-12-15 2014-12-09 Honeywell International Inc. Gas valve with fuel rate monitor
US9995486B2 (en) 2011-12-15 2018-06-12 Honeywell International Inc. Gas valve with high/low gas pressure detection
US8899264B2 (en) 2011-12-15 2014-12-02 Honeywell International Inc. Gas valve with electronic proof of closure system
WO2013090709A1 (en) 2011-12-16 2013-06-20 Hospira, Inc. System for monitoring and delivering medication to a patient and method of using the same to minimize the risks associated with automated therapy
WO2013134610A1 (en) 2012-03-08 2013-09-12 Quality Manufacturing Inc. Touch sensitive robotic gripper
US9605952B2 (en) 2012-03-08 2017-03-28 Quality Manufacturing Inc. Touch sensitive robotic gripper
ES2741725T3 (es) 2012-03-30 2020-02-12 Icu Medical Inc Sistema de detección de aire y método para detectar aire en una bomba de un sistema de infusión
US9003897B2 (en) 2012-05-10 2015-04-14 Honeywell International Inc. Temperature compensated force sensor
US10463788B2 (en) 2012-07-31 2019-11-05 Icu Medical, Inc. Patient care system for critical medications
US9234661B2 (en) 2012-09-15 2016-01-12 Honeywell International Inc. Burner control system
US10422531B2 (en) 2012-09-15 2019-09-24 Honeywell International Inc. System and approach for controlling a combustion chamber
US9052217B2 (en) 2012-11-09 2015-06-09 Honeywell International Inc. Variable scale sensor
WO2014116205A1 (en) * 2013-01-22 2014-07-31 Mingqiang Yi A mems chip for wind speed measurements
US10046112B2 (en) 2013-05-24 2018-08-14 Icu Medical, Inc. Multi-sensor infusion system for detecting air or an occlusion in the infusion system
EP3003442B1 (de) 2013-05-29 2020-12-30 ICU Medical, Inc. Infusionssystem und verfahren zur verwendung zur verhinderung der übersättigung eines analog-digital-wandlers
AU2014274146B2 (en) 2013-05-29 2019-01-24 Icu Medical, Inc. Infusion system which utilizes one or more sensors and additional information to make an air determination regarding the infusion system
EP2868970B1 (de) 2013-10-29 2020-04-22 Honeywell Technologies Sarl Regelungsvorrichtung
US20150133861A1 (en) 2013-11-11 2015-05-14 Kevin P. McLennan Thermal management system and method for medical devices
US10024439B2 (en) 2013-12-16 2018-07-17 Honeywell International Inc. Valve over-travel mechanism
ES2776363T3 (es) 2014-02-28 2020-07-30 Icu Medical Inc Sistema de infusión y método que utiliza detección óptica de aire en línea de doble longitud de onda
WO2015184366A1 (en) 2014-05-29 2015-12-03 Hospira, Inc. Infusion system and pump with configurable closed loop delivery rate catch-up
US10143795B2 (en) 2014-08-18 2018-12-04 Icu Medical, Inc. Intravenous pole integrated power, control, and communication system and method for an infusion pump
US9841122B2 (en) 2014-09-09 2017-12-12 Honeywell International Inc. Gas valve with electronic valve proving system
US9645584B2 (en) 2014-09-17 2017-05-09 Honeywell International Inc. Gas valve with electronic health monitoring
US11344668B2 (en) 2014-12-19 2022-05-31 Icu Medical, Inc. Infusion system with concurrent TPN/insulin infusion
US10850024B2 (en) 2015-03-02 2020-12-01 Icu Medical, Inc. Infusion system, device, and method having advanced infusion features
AU2016267763B2 (en) 2015-05-26 2021-07-08 Icu Medical, Inc. Disposable infusion fluid delivery device for programmable large volume drug delivery
US10718359B2 (en) 2015-08-21 2020-07-21 Quality Manufacturing Inc. Devices and systems for producing rotational actuation
US10503181B2 (en) 2016-01-13 2019-12-10 Honeywell International Inc. Pressure regulator
EP4085944A1 (de) 2016-05-13 2022-11-09 ICU Medical, Inc. Infusionspumpensystem mit gemeinsamer leitung zur automatischen spülung
WO2017214441A1 (en) 2016-06-10 2017-12-14 Icu Medical, Inc. Acoustic flow sensor for continuous medication flow measurements and feedback control of infusion
US10564062B2 (en) 2016-10-19 2020-02-18 Honeywell International Inc. Human-machine interface for gas valve
US10089055B1 (en) 2017-12-27 2018-10-02 Icu Medical, Inc. Synchronized display of screen content on networked devices
US11073281B2 (en) 2017-12-29 2021-07-27 Honeywell International Inc. Closed-loop programming and control of a combustion appliance
US10697815B2 (en) 2018-06-09 2020-06-30 Honeywell International Inc. System and methods for mitigating condensation in a sensor module
USD939079S1 (en) 2019-08-22 2021-12-21 Icu Medical, Inc. Infusion pump
US11278671B2 (en) 2019-12-04 2022-03-22 Icu Medical, Inc. Infusion pump with safety sequence keypad
CA3189781A1 (en) 2020-07-21 2022-01-27 Icu Medical, Inc. Fluid transfer devices and methods of use
US11135360B1 (en) 2020-12-07 2021-10-05 Icu Medical, Inc. Concurrent infusion with common line auto flush
TWI808926B (zh) * 2023-02-14 2023-07-11 王傳蔚 互補式金氧半微機電壓力感測器之製作方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4773972A (en) * 1986-10-30 1988-09-27 Ford Motor Company Method of making silicon capacitive pressure sensor with glass layer between silicon wafers
US4701826A (en) * 1986-10-30 1987-10-20 Ford Motor Company High temperature pressure sensor with low parasitic capacitance
JP2540875B2 (ja) * 1987-08-04 1996-10-09 日立プラント建設株式会社 空気調和装置の運転方法
US5155061A (en) * 1991-06-03 1992-10-13 Allied-Signal Inc. Method for fabricating a silicon pressure sensor incorporating silicon-on-insulator structures
JP2729005B2 (ja) 1992-04-01 1998-03-18 三菱電機株式会社 半導体圧力センサ及びその製造方法
FI93059C (fi) 1993-07-07 1995-02-10 Vaisala Oy Kapasitiivinen paineanturirakenne ja menetelmä sen valmistamiseksi
JPH1038734A (ja) * 1996-07-19 1998-02-13 Omron Corp 静電容量型圧力センサ及びその製造方法並びにそのセンサを用いた血圧計
US6109113A (en) * 1998-06-11 2000-08-29 Delco Electronics Corp. Silicon micromachined capacitive pressure sensor and method of manufacture

Also Published As

Publication number Publication date
ATE483958T1 (de) 2010-10-15
WO2002010702A2 (en) 2002-02-07
JP4768205B2 (ja) 2011-09-07
ES2354842T3 (es) 2011-03-18
US6445053B1 (en) 2002-09-03
EP1305586B1 (de) 2010-10-06
EP1305586A2 (de) 2003-05-02
JP2004505269A (ja) 2004-02-19
CA2410707A1 (en) 2002-02-07
WO2002010702A3 (en) 2002-11-14
AU8066001A (en) 2002-02-13
AU2001280660B2 (en) 2005-09-15

Similar Documents

Publication Publication Date Title
DE60143202D1 (de) Mikromechanisch hergestellter absolutdrucksensor
US7448277B2 (en) Capacitive pressure sensor and method therefor
CA1185454A (en) Silicon-glass-silicon capacitive pressure transducer
US5936164A (en) All-silicon capacitive pressure sensor
CN103373698B (zh) 制作mems惯性传感器的方法及mems惯性传感器
US7135749B2 (en) Pressure sensor
AU2001280660A1 (en) Micro-machined absolute pressure sensor
CA2006672A1 (en) Capacitive pressure sensor with encircling third plate
CN104422548B (zh) 电容式压力传感器及其形成方法
JPH0533732B2 (de)
CN106586943A (zh) 用于寄生电容器的层间多晶硅连接件以及管芯尺寸改进
JPH08320268A (ja) 静電容量型センサ
JP3428729B2 (ja) 容量式圧力変換器
CN108362408B (zh) 压力传感器及其制造方法
CN112798158B (zh) 一种压力传感器芯片及压力传感器
CN108692836A (zh) 包括电容式压力传感器的mems器件及其制造方法
CN108351267A (zh) 电容式压力传感器及其制造方法
TW201719130A (zh) 微型回饋腔感測器及其製造方法
JP4539413B2 (ja) 静電容量型センサの構造
WO2015169249A1 (zh) 电容式压力传感器和其制作方法
CN111174957A (zh) 一种压力传感器及制备方法
CN213364087U (zh) 一种应用于电子终端产品的电容式mems压力传感器
CN104422550B (zh) 电容式压力传感器及其形成方法
CN113074845A (zh) 一种压力传感器芯片的制造工艺
CN1764328B (zh) 动态压力感测装置