DE60120905T2 - Optisches System mit elektronischer Punktgrössensteuerung und Fokussierungskontrolle - Google Patents

Optisches System mit elektronischer Punktgrössensteuerung und Fokussierungskontrolle Download PDF

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Publication number
DE60120905T2
DE60120905T2 DE60120905T DE60120905T DE60120905T2 DE 60120905 T2 DE60120905 T2 DE 60120905T2 DE 60120905 T DE60120905 T DE 60120905T DE 60120905 T DE60120905 T DE 60120905T DE 60120905 T2 DE60120905 T2 DE 60120905T2
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Germany
Prior art keywords
focus
light beam
optical system
actuator
lens
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60120905T
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German (de)
English (en)
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DE60120905D1 (de
Inventor
Jouni P. Santa Monica Partanen
Nansheng Valencia Tang
Xingkun Valencia Wu
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3D Systems Inc
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3D Systems Inc
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Publication of DE60120905D1 publication Critical patent/DE60120905D1/de
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Publication of DE60120905T2 publication Critical patent/DE60120905T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/40—Optical focusing aids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B23K26/0613—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams having a common axis
    • B23K26/0617—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams having a common axis and with spots spaced along the common axis
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/073—Shaping the laser spot
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/10—Processes of additive manufacturing
    • B29C64/106—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material
    • B29C64/124—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified
    • B29C64/129—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified characterised by the energy source therefor, e.g. by global irradiation combined with a mask
    • B29C64/135—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified characterised by the energy source therefor, e.g. by global irradiation combined with a mask the energy source being concentrated, e.g. scanning lasers or focused light sources
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/20—Apparatus for additive manufacturing; Details thereof or accessories therefor
    • B29C64/264—Arrangements for irradiation
    • B29C64/268—Arrangements for irradiation using laser beams; using electron beams [EB]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/20—Apparatus for additive manufacturing; Details thereof or accessories therefor
    • B29C64/264—Arrangements for irradiation
    • B29C64/268—Arrangements for irradiation using laser beams; using electron beams [EB]
    • B29C64/273—Arrangements for irradiation using laser beams; using electron beams [EB] pulsed; frequency modulated
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0009—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only
    • G02B19/0014—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only at least one surface having optical power
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G02B19/0052—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0095—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with ultraviolet radiation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/12—Scanning systems using multifaceted mirrors
    • G02B26/127—Adaptive control of the scanning light beam, e.g. using the feedback from one or more detectors
    • G02B26/128—Focus control
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/095—Refractive optical elements
    • G02B27/0955—Lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
    • G02B7/10—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification by relative axial movement of several lenses, e.g. of varifocal objective lens
    • G02B7/102—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification by relative axial movement of several lenses, e.g. of varifocal objective lens controlled by a microcomputer

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Lenses (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Focusing (AREA)
  • Automatic Focus Adjustment (AREA)
DE60120905T 2001-02-23 2001-11-02 Optisches System mit elektronischer Punktgrössensteuerung und Fokussierungskontrolle Expired - Lifetime DE60120905T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US791346 2001-02-23
US09/791,346 US6426840B1 (en) 2001-02-23 2001-02-23 Electronic spot light control

Publications (2)

Publication Number Publication Date
DE60120905D1 DE60120905D1 (de) 2006-08-03
DE60120905T2 true DE60120905T2 (de) 2007-02-15

Family

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DE60120905T Expired - Lifetime DE60120905T2 (de) 2001-02-23 2001-11-02 Optisches System mit elektronischer Punktgrössensteuerung und Fokussierungskontrolle
DE60138052T Expired - Lifetime DE60138052D1 (de) 2001-02-23 2001-11-02 Optisches System mit elektronischer Punktgrössensteuerung und Fokussierungskontrolle

Family Applications After (1)

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DE60138052T Expired - Lifetime DE60138052D1 (de) 2001-02-23 2001-11-02 Optisches System mit elektronischer Punktgrössensteuerung und Fokussierungskontrolle

Country Status (5)

Country Link
US (1) US6426840B1 (enExample)
EP (2) EP1659438B1 (enExample)
JP (1) JP4057311B2 (enExample)
AT (2) ATE426185T1 (enExample)
DE (2) DE60120905T2 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016111932A1 (de) * 2016-06-29 2018-01-04 Trumpf Laser Gmbh Frequenzkonversionseinheit und Verfahren zur Frequenzkonversion
WO2020160726A1 (de) * 2019-02-06 2020-08-13 MTU Aero Engines AG Vorrichtung zum generativen aufbauen eines bauteils
DE102016015785B4 (de) * 2016-06-29 2021-06-17 Trumpf Laser Gmbh Strahladaptionsvorrichtung, Frequenzkonversionseinheit, optisches System und Vefahren zur Frequenzkonversion

Families Citing this family (44)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW584736B (en) * 2001-12-07 2004-04-21 Ind Tech Res Inst Shape measurement device of dual-axial anamorphic image magnification
US20050172894A1 (en) * 2004-02-10 2005-08-11 Farnworth Warren M. Selective deposition system and method for initiating deposition at a defined starting surface
US7261542B2 (en) 2004-03-18 2007-08-28 Desktop Factory, Inc. Apparatus for three dimensional printing using image layers
AU2006299612A1 (en) * 2005-10-03 2007-04-12 Aradigm Corporation Method and system for laser machining
US7352789B2 (en) * 2006-01-12 2008-04-01 Semiconductor Energy Laboratory Co., Ltd. Laser light irradiation apparatus and laser light irradiation method
JP5007090B2 (ja) * 2006-09-11 2012-08-22 株式会社ディスコ レーザー加工方法
US7706078B2 (en) * 2006-09-14 2010-04-27 Semiconductor Energy Laboratory Co., Ltd. Laser light irradiation apparatus and laser light irradiation method
CN103328190B (zh) * 2010-11-29 2015-11-25 3D系统公司 使用内部激光调制的立体光刻系统和方法
GB2490143B (en) * 2011-04-20 2013-03-13 Rolls Royce Plc Method of manufacturing a component
EP3597100B1 (en) 2011-12-05 2024-10-23 Leica Microsystems NC, Inc. Optical imaging systems having input beam shape control and path length control
US8777412B2 (en) 2012-04-05 2014-07-15 Bioptigen, Inc. Surgical microscopes using optical coherence tomography and related methods
US9400391B2 (en) * 2012-09-27 2016-07-26 Coherent, Inc. Uniformity adjustment method for a diode-laser line-projector
US10464172B2 (en) 2013-02-21 2019-11-05 Nlight, Inc. Patterning conductive films using variable focal plane to control feature size
CN105122387B (zh) * 2013-02-21 2019-01-11 恩耐公司 非烧蚀性激光图案化
US9842665B2 (en) 2013-02-21 2017-12-12 Nlight, Inc. Optimization of high resolution digitally encoded laser scanners for fine feature marking
WO2014130895A1 (en) 2013-02-21 2014-08-28 Nlight Photonics Corporation Laser patterning multi-layer structures
TWI611854B (zh) * 2013-05-02 2018-01-21 ｎ萊特股份有限公司 光學處理系統和用於光學處理的方法
WO2014197553A2 (en) 2013-06-04 2014-12-11 Bioptigen, Inc. Hybrid telescope for optical beam delivery and related systems and methods
JP6415553B2 (ja) 2013-07-29 2018-10-31 バイオプティジェン, インコーポレイテッドBioptigen, Inc. 外科手術用手技光干渉断層計及び関連するシステム及びその方法
JP6192827B2 (ja) 2013-08-28 2017-09-06 バイオプティジェン, インコーポレイテッドBioptigen, Inc. 光干渉断層撮影機能が組み込まれた手術用顕微鏡用のヘッドアップディスプレイ
CA2939498C (en) * 2014-02-28 2018-08-21 Ettore Maurizio Costabeber Improved stereolithography machine
US10069271B2 (en) 2014-06-02 2018-09-04 Nlight, Inc. Scalable high power fiber laser
US10618131B2 (en) 2014-06-05 2020-04-14 Nlight, Inc. Laser patterning skew correction
US10310201B2 (en) 2014-08-01 2019-06-04 Nlight, Inc. Back-reflection protection and monitoring in fiber and fiber-delivered lasers
US9837783B2 (en) 2015-01-26 2017-12-05 Nlight, Inc. High-power, single-mode fiber sources
DE102015202347A1 (de) * 2015-02-10 2016-08-11 Trumpf Laser- Und Systemtechnik Gmbh Bestrahlungseinrichtung, Bearbeitungsmaschine und Verfahren zum Herstellen einer Schicht eines dreidimensionalen Bauteils
JP6519860B2 (ja) * 2015-03-30 2019-05-29 株式会社東京精密 非接触形状測定装置及び走査レンズ収差補正方法
US10520671B2 (en) 2015-07-08 2019-12-31 Nlight, Inc. Fiber with depressed central index for increased beam parameter product
EP3380266B1 (en) 2015-11-23 2021-08-11 NLIGHT, Inc. Fine-scale temporal control for laser material processing
US10074960B2 (en) 2015-11-23 2018-09-11 Nlight, Inc. Predictive modification of laser diode drive current waveform in order to optimize optical output waveform in high power laser systems
US11179807B2 (en) 2015-11-23 2021-11-23 Nlight, Inc. Fine-scale temporal control for laser material processing
CN108698164B (zh) 2016-01-19 2021-01-29 恩耐公司 处理3d激光扫描仪系统中的校准数据的方法
US10732439B2 (en) 2016-09-29 2020-08-04 Nlight, Inc. Fiber-coupled device for varying beam characteristics
US10730785B2 (en) 2016-09-29 2020-08-04 Nlight, Inc. Optical fiber bending mechanisms
US10295845B2 (en) 2016-09-29 2019-05-21 Nlight, Inc. Adjustable beam characteristics
KR102611837B1 (ko) 2017-04-04 2023-12-07 엔라이트 인크. 검류계 스캐너 보정을 위한 광학 기준 생성
CN107336440A (zh) * 2017-08-09 2017-11-10 英诺激光科技股份有限公司 一种具有矫形功能的激光3d打印方法及其系统
CN107718541A (zh) * 2017-09-14 2018-02-23 佛山科学技术学院 一种三维打印机及其实现方法
EP3521028B1 (en) * 2018-02-01 2020-11-25 CL Schutzrechtsverwaltungs GmbH Apparatus for additively manufacturing three-dimensional objects
CN113276409A (zh) * 2020-02-18 2021-08-20 空客(北京)工程技术中心有限公司 增材制造方法、增材制造设备和计算机可读介质
KR102468802B1 (ko) * 2020-05-04 2022-11-18 한국기계연구원 광학식 리소그래피 장치 및 방법
US12128497B2 (en) * 2020-10-16 2024-10-29 Amo Development, Llc Laser focal spot size measurement using a built-in camera for an ophthalmic laser system
CN118059394B (zh) * 2024-02-20 2024-08-02 浙江深月医疗技术有限公司 激光光斑的调节与识别装置
CN120370561A (zh) * 2025-06-26 2025-07-25 北京精亦光电科技有限公司 一种微调激光椭圆度的方法及系统

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4575330A (en) 1984-08-08 1986-03-11 Uvp, Inc. Apparatus for production of three-dimensional objects by stereolithography
US5184307A (en) 1988-04-18 1993-02-02 3D Systems, Inc. Method and apparatus for production of high resolution three-dimensional objects by stereolithography
US5059359A (en) 1988-04-18 1991-10-22 3 D Systems, Inc. Methods and apparatus for production of three-dimensional objects by stereolithography
US5965079A (en) 1995-04-25 1999-10-12 3D Systems, Inc. Method and apparatus for making a three-dimensional object by stereolithography
CA1338521C (en) 1988-04-18 1996-08-13 Charles William Hull Cad/cam stereolithographic data conversion
KR0178873B1 (ko) 1988-04-18 1999-05-15 찰스 윌리엄 헐 스테레오리소그래픽 커얼 감소
US5182056A (en) 1988-04-18 1993-01-26 3D Systems, Inc. Stereolithography method and apparatus employing various penetration depths
JPH033127A (ja) * 1989-05-31 1991-01-09 Hitachi Ltd 光学ヘッド
US5133987A (en) 1989-10-27 1992-07-28 3D Systems, Inc. Stereolithographic apparatus and method
US4997250A (en) * 1989-11-17 1991-03-05 General Electric Company Fiber output coupler with beam shaping optics for laser materials processing system
US5999184A (en) 1990-10-30 1999-12-07 3D Systems, Inc. Simultaneous multiple layer curing in stereolithography
US5193024A (en) * 1990-10-31 1993-03-09 E. I. Du Pont De Nemours And Company Liquid/vapor optical modulator
JP3170023B2 (ja) * 1992-02-27 2001-05-28 ホーヤ株式会社 レーザ加工装置
JPH05291659A (ja) * 1992-04-14 1993-11-05 Toshiba Corp レーザービーム補正機構
DE69327139T2 (de) * 1992-07-10 2000-04-06 Fujitsu Ltd. Laserdiodenmodul
US5615200A (en) * 1992-09-10 1997-03-25 Kabushiki Kaisha Toshiba Light beam shaping device to change an anisotropic beam to an isotropic beam for reducing the size of an optical head
US5777961A (en) * 1994-06-27 1998-07-07 Nec Corporation Astigmatic difference correcting method for optical head and apparatus therefor
US5991102A (en) * 1994-11-25 1999-11-23 Asahi Kogaku Kogyo Kabushiki Kaisha Beam protecting device
EP0763236B1 (en) * 1995-03-15 2000-06-07 Koninklijke Philips Electronics N.V. Device for optically scanning a recording medium
US5745296A (en) * 1995-05-17 1998-04-28 Asahi Kogaku Kogyo Kabushiki Kaisha Multibeam recording device
JPH09122942A (ja) * 1995-08-25 1997-05-13 Asahi Optical Co Ltd レーザ描画装置
KR19990028932A (ko) * 1996-05-13 1999-04-15 토마스 에프. 멀베니 자기매체의 정형 빔 레이저 텍스쳐링
US5840239A (en) 1997-01-31 1998-11-24 3D Systems, Inc. Apparatus and method for forming three-dimensional objects in stereolithography utilizing a laser exposure system having a diode pumped frequency quadrupled solid state laser
US5923473A (en) * 1997-05-06 1999-07-13 Agfa Corporation Multi-size spot beam imaging system and method
US6129884A (en) 1999-02-08 2000-10-10 3D Systems, Inc. Stereolithographic method and apparatus with enhanced control of prescribed stimulation production and application
US6325961B1 (en) * 1999-02-08 2001-12-04 3D Systems, Inc. Stereolithographic method and apparatus with enhanced control of prescribed stimulation and application
US6222679B1 (en) * 1999-08-31 2001-04-24 Agilent Technologies Mechanically simplified, high resolution, optical focusing and steering apparatus

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016111932A1 (de) * 2016-06-29 2018-01-04 Trumpf Laser Gmbh Frequenzkonversionseinheit und Verfahren zur Frequenzkonversion
DE102016111932B4 (de) * 2016-06-29 2018-02-08 Trumpf Laser Gmbh Frequenzkonversionseinheit und Verfahren zur Frequenzkonversion
US10591803B2 (en) 2016-06-29 2020-03-17 Trumpf Laser Gmbh Variable-astigmatism beam adaptation device and frequency conversion units
DE102016015785B4 (de) * 2016-06-29 2021-06-17 Trumpf Laser Gmbh Strahladaptionsvorrichtung, Frequenzkonversionseinheit, optisches System und Vefahren zur Frequenzkonversion
WO2020160726A1 (de) * 2019-02-06 2020-08-13 MTU Aero Engines AG Vorrichtung zum generativen aufbauen eines bauteils

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ATE426185T1 (de) 2009-04-15
US6426840B1 (en) 2002-07-30
EP1237034A3 (en) 2002-10-16
EP1237034B1 (en) 2006-06-21
JP4057311B2 (ja) 2008-03-05
EP1237034A2 (en) 2002-09-04
DE60120905D1 (de) 2006-08-03
ATE331235T1 (de) 2006-07-15
EP1659438B1 (en) 2009-03-18
JP2002357781A (ja) 2002-12-13
EP1659438A1 (en) 2006-05-24
DE60138052D1 (de) 2009-04-30

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