DE60118129D1 - Mikro-elektromechanische Spiegelstruktur - Google Patents

Mikro-elektromechanische Spiegelstruktur

Info

Publication number
DE60118129D1
DE60118129D1 DE60118129T DE60118129T DE60118129D1 DE 60118129 D1 DE60118129 D1 DE 60118129D1 DE 60118129 T DE60118129 T DE 60118129T DE 60118129 T DE60118129 T DE 60118129T DE 60118129 D1 DE60118129 D1 DE 60118129D1
Authority
DE
Germany
Prior art keywords
mirror structure
microelectromechanical mirror
microelectromechanical
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60118129T
Other languages
English (en)
Other versions
DE60118129T2 (de
Inventor
Eric Peters
Michel A Rosa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xerox Corp
Original Assignee
Xerox Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xerox Corp filed Critical Xerox Corp
Publication of DE60118129D1 publication Critical patent/DE60118129D1/de
Application granted granted Critical
Publication of DE60118129T2 publication Critical patent/DE60118129T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3554—3D constellations, i.e. with switching elements and switched beams located in a volume
    • G02B6/3556—NxM switch, i.e. regular arrays of switches elements of matrix type constellation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/358—Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Micromachines (AREA)
DE60118129T 2000-09-28 2001-09-07 Mikro-elektromechanische Spiegelstruktur Expired - Lifetime DE60118129T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US675108 2000-09-28
US09/675,108 US6466356B1 (en) 2000-09-28 2000-09-28 Structure for an optical switch on a silicon substrate

Publications (2)

Publication Number Publication Date
DE60118129D1 true DE60118129D1 (de) 2006-05-11
DE60118129T2 DE60118129T2 (de) 2006-08-31

Family

ID=24709089

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60118129T Expired - Lifetime DE60118129T2 (de) 2000-09-28 2001-09-07 Mikro-elektromechanische Spiegelstruktur

Country Status (4)

Country Link
US (1) US6466356B1 (de)
EP (1) EP1193524B1 (de)
JP (1) JP4920843B2 (de)
DE (1) DE60118129T2 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6706202B1 (en) * 2000-09-28 2004-03-16 Xerox Corporation Method for shaped optical MEMS components with stressed thin films
JP4364459B2 (ja) * 2000-12-07 2009-11-18 富士通株式会社 光信号交換器の制御装置および制御方法
US6690849B1 (en) * 2001-01-05 2004-02-10 Tellium, Inc. Optical switch having MEMS array with reduced optical loss
JP2002221673A (ja) * 2001-01-26 2002-08-09 Olympus Optical Co Ltd アクチュエータを備えた光学ユニット
US6843574B2 (en) * 2002-08-20 2005-01-18 Intel Corporation Gimbaled micromechanical rotation system
US6733144B2 (en) * 2002-09-27 2004-05-11 Intel Corporation Shock protectors for micro-mechanical systems
US7019434B2 (en) * 2002-11-08 2006-03-28 Iris Ao, Inc. Deformable mirror method and apparatus including bimorph flexures and integrated drive
US20040160118A1 (en) 2002-11-08 2004-08-19 Knollenberg Clifford F. Actuator apparatus and method for improved deflection characteristics
US6906848B2 (en) * 2003-02-24 2005-06-14 Exajoule, Llc Micromirror systems with concealed multi-piece hinge structures
JPWO2005085125A1 (ja) * 2004-03-08 2007-12-06 松下電器産業株式会社 マイクロアクチュエータ、およびマイクロアクチュエータを備えた装置
US7072090B2 (en) * 2004-04-22 2006-07-04 Micronic Laser Systems Ab Addressing of an SLM
JP4445019B2 (ja) 2005-12-26 2010-04-07 日本電信電話株式会社 ばね、ミラー素子、ミラーアレイおよび光スイッチ
US7471441B1 (en) 2006-06-09 2008-12-30 Hewlett-Packard Development Company, L.P. Flexures
US20080101748A1 (en) * 2006-10-26 2008-05-01 Hewlett-Packard Development Company Lp Mems device lever
JP5618145B2 (ja) * 2010-12-23 2014-11-05 日本精機株式会社 ミラーユニット
US10690859B1 (en) * 2018-07-22 2020-06-23 Sam A Marshall Twisted Z optical Switch

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0756531B2 (ja) * 1984-07-31 1995-06-14 テキサス インスツルメンツ インコーポレイテツド 空間光変調器とその製法
US6674562B1 (en) * 1994-05-05 2004-01-06 Iridigm Display Corporation Interferometric modulation of radiation
JPH0990249A (ja) * 1995-09-25 1997-04-04 Olympus Optical Co Ltd 光偏向子及びその製造方法
JPH1114933A (ja) * 1997-06-24 1999-01-22 Toshiba Corp ガルバノミラーおよびこれを用いた光ディスク装置
JPH1151967A (ja) * 1997-08-08 1999-02-26 Mitsubishi Electric Corp 多軸加速度センサ及びその製造方法
US6091050A (en) * 1997-11-17 2000-07-18 Roxburgh Limited Thermal microplatform
JP2000164105A (ja) * 1998-11-25 2000-06-16 Omron Corp マイクロマシン、マイクロアクチュエータ及びマイクロリレー
JP2000162538A (ja) * 1998-11-30 2000-06-16 Mitsubishi Electric Corp マイクロミラー装置
US6267605B1 (en) * 1999-11-15 2001-07-31 Xerox Corporation Self positioning, passive MEMS mirror structures
US6341039B1 (en) * 2000-03-03 2002-01-22 Axsun Technologies, Inc. Flexible membrane for tunable fabry-perot filter
US6283601B1 (en) * 2000-04-14 2001-09-04 C Speed Corporation Optical mirror system with multi-axis rotational control
US6300665B1 (en) * 2000-09-28 2001-10-09 Xerox Corporation Structure for an optical switch on a silicon on insulator substrate

Also Published As

Publication number Publication date
JP2002162581A (ja) 2002-06-07
JP4920843B2 (ja) 2012-04-18
US6466356B1 (en) 2002-10-15
DE60118129T2 (de) 2006-08-31
EP1193524B1 (de) 2006-03-22
EP1193524A3 (de) 2003-05-07
EP1193524A2 (de) 2002-04-03

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition