DE60116969D1 - Herstellung einer Spiegelstruktur - Google Patents
Herstellung einer SpiegelstrukturInfo
- Publication number
- DE60116969D1 DE60116969D1 DE60116969T DE60116969T DE60116969D1 DE 60116969 D1 DE60116969 D1 DE 60116969D1 DE 60116969 T DE60116969 T DE 60116969T DE 60116969 T DE60116969 T DE 60116969T DE 60116969 D1 DE60116969 D1 DE 60116969D1
- Authority
- DE
- Germany
- Prior art keywords
- production
- mirror structure
- mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
- G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00642—Manufacture or treatment of devices or systems in or on a substrate for improving the physical properties of a device
- B81C1/0065—Mechanical properties
- B81C1/00666—Treatments for controlling internal stress or strain in MEMS structures
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/045—Optical switches
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/04—Electrodes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3554—3D constellations, i.e. with switching elements and switched beams located in a volume
- G02B6/3556—NxM switch, i.e. regular arrays of switches elements of matrix type constellation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/358—Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US67504600A | 2000-09-28 | 2000-09-28 | |
US675046 | 2000-09-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60116969D1 true DE60116969D1 (de) | 2006-04-13 |
DE60116969T2 DE60116969T2 (de) | 2006-07-27 |
Family
ID=24708851
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE2001616969 Expired - Lifetime DE60116969T2 (de) | 2000-09-28 | 2001-09-07 | Herstellung einer Spiegelstruktur |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP1193530B1 (de) |
JP (1) | JP2002162578A (de) |
DE (1) | DE60116969T2 (de) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6706202B1 (en) * | 2000-09-28 | 2004-03-16 | Xerox Corporation | Method for shaped optical MEMS components with stressed thin films |
US7072090B2 (en) * | 2004-04-22 | 2006-07-04 | Micronic Laser Systems Ab | Addressing of an SLM |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0756531B2 (ja) * | 1984-07-31 | 1995-06-14 | テキサス インスツルメンツ インコーポレイテツド | 空間光変調器とその製法 |
US4954789A (en) * | 1989-09-28 | 1990-09-04 | Texas Instruments Incorporated | Spatial light modulator |
US5633552A (en) * | 1993-06-04 | 1997-05-27 | The Regents Of The University Of California | Cantilever pressure transducer |
US5673139A (en) * | 1993-07-19 | 1997-09-30 | Medcom, Inc. | Microelectromechanical television scanning device and method for making the same |
US5753134A (en) * | 1994-01-04 | 1998-05-19 | Siemens Aktiengesellschaft | Method for producing a layer with reduced mechanical stresses |
US5613861A (en) * | 1995-06-07 | 1997-03-25 | Xerox Corporation | Photolithographically patterned spring contact |
JPH0990249A (ja) * | 1995-09-25 | 1997-04-04 | Olympus Optical Co Ltd | 光偏向子及びその製造方法 |
US6028689A (en) * | 1997-01-24 | 2000-02-22 | The United States Of America As Represented By The Secretary Of The Air Force | Multi-motion micromirror |
JPH1114933A (ja) * | 1997-06-24 | 1999-01-22 | Toshiba Corp | ガルバノミラーおよびこれを用いた光ディスク装置 |
US6392221B1 (en) * | 1997-12-22 | 2002-05-21 | Agere Systems Guardian Corp. | Micro-electro-mechanical optical device |
KR100703140B1 (ko) * | 1998-04-08 | 2007-04-05 | 이리다임 디스플레이 코포레이션 | 간섭 변조기 및 그 제조 방법 |
US5979892A (en) * | 1998-05-15 | 1999-11-09 | Xerox Corporation | Controlled cilia for object manipulation |
JP2000164105A (ja) * | 1998-11-25 | 2000-06-16 | Omron Corp | マイクロマシン、マイクロアクチュエータ及びマイクロリレー |
JP2000162538A (ja) * | 1998-11-30 | 2000-06-16 | Mitsubishi Electric Corp | マイクロミラー装置 |
US6267605B1 (en) * | 1999-11-15 | 2001-07-31 | Xerox Corporation | Self positioning, passive MEMS mirror structures |
US20020071169A1 (en) * | 2000-02-01 | 2002-06-13 | Bowers John Edward | Micro-electro-mechanical-system (MEMS) mirror device |
US6545385B2 (en) * | 2000-04-11 | 2003-04-08 | Sandia Corporation | Microelectromechanical apparatus for elevating and tilting a platform |
-
2001
- 2001-09-07 EP EP20010307643 patent/EP1193530B1/de not_active Expired - Lifetime
- 2001-09-07 DE DE2001616969 patent/DE60116969T2/de not_active Expired - Lifetime
- 2001-09-20 JP JP2001286488A patent/JP2002162578A/ja not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
EP1193530A2 (de) | 2002-04-03 |
EP1193530B1 (de) | 2006-02-01 |
EP1193530A3 (de) | 2003-08-13 |
DE60116969T2 (de) | 2006-07-27 |
JP2002162578A (ja) | 2002-06-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69902933D1 (de) | Herstellung einer silicon wellenleiterstruktur | |
DE60107518D1 (de) | Spiegelstruktur | |
DE60120598D1 (de) | Herstellung von einer Testkarte | |
DE60239517D1 (de) | nspiels einer Turbine | |
DE69734931D1 (de) | Herstellung einer honigwabenstruktur | |
NO20030960L (no) | Produksjon av sykliske terpenoider | |
DE60044178D1 (de) | Herstellung einer dünnen membran | |
DE60103821D1 (de) | Herstellung von Oberflächenmodifitierte Kieselsäure | |
DE60118126D1 (de) | Verfahren zur Herstellung einer Spiegelstruktur | |
DE60132865D1 (de) | Spiegelstruktur | |
DE50100948D1 (de) | Herstellung von Organosilanen | |
DE60137387D1 (de) | Verbindungsstruktur | |
ATE546425T1 (de) | Herstellung von (r)-2-alkyl-3-phenylpropionsäuren | |
DE60118129D1 (de) | Mikro-elektromechanische Spiegelstruktur | |
DE60205984D1 (de) | Montageanordnung einer Fahrzeugdachzierleiste | |
DE60132362D1 (de) | Herstellung von ultradünnwandigen cordierit-strukturen | |
DE60233709D1 (de) | Ausnehmmechanismus einer Hohlglasformmaschine | |
DE60118678D1 (de) | Herstellung von mikro-elektromechanischen Spiegelstrukturen | |
DE60116839D1 (de) | Verfahren zur Herstellung einer Spiegelstruktur | |
DE60142051D1 (de) | Herstellung von perfluorolefinen | |
DE60111791D1 (de) | Hohlfaser-Membranen und ihre Herstellung | |
DE60128896D1 (de) | Herstellung einer hochkopplungs-flash-zelle | |
ID26582A (id) | Proyektor penghasil berbagai bentuk yang berwarna warni | |
DE60118127D1 (de) | Mikro-elektromechanische Spiegelstruktur | |
DE60233549D1 (de) | Ausnehmmechanismus einer Hohlglasformmaschine |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |