DE60107108D1 - Integrierte phasentrennvorrchtung für hoch-vacuumanlage - Google Patents

Integrierte phasentrennvorrchtung für hoch-vacuumanlage

Info

Publication number
DE60107108D1
DE60107108D1 DE60107108T DE60107108T DE60107108D1 DE 60107108 D1 DE60107108 D1 DE 60107108D1 DE 60107108 T DE60107108 T DE 60107108T DE 60107108 T DE60107108 T DE 60107108T DE 60107108 D1 DE60107108 D1 DE 60107108D1
Authority
DE
Germany
Prior art keywords
cryogenic
phase separator
liquid nitrogen
shroud
panel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60107108T
Other languages
English (en)
Other versions
DE60107108T2 (de
Inventor
E Colombo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Veeco Instruments Inc
Original Assignee
Veeco Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Veeco Instruments Inc filed Critical Veeco Instruments Inc
Application granted granted Critical
Publication of DE60107108D1 publication Critical patent/DE60107108D1/de
Publication of DE60107108T2 publication Critical patent/DE60107108T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
    • C30B23/02—Epitaxial-layer growth

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Separation By Low-Temperature Treatments (AREA)
  • Physical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
DE60107108T 2000-09-22 2001-09-21 Integrierte phasentrennvorrchtung für hoch-vacuumanlage Expired - Lifetime DE60107108T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/668,772 US6367267B1 (en) 2000-09-22 2000-09-22 Integrated phase separator for ultra high vacuum system
US668772 2000-09-22
PCT/US2001/029685 WO2002024983A2 (en) 2000-09-22 2001-09-21 Integrated phase separator for ultra high vacuum system

Publications (2)

Publication Number Publication Date
DE60107108D1 true DE60107108D1 (de) 2004-12-16
DE60107108T2 DE60107108T2 (de) 2005-11-10

Family

ID=24683667

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60107108T Expired - Lifetime DE60107108T2 (de) 2000-09-22 2001-09-21 Integrierte phasentrennvorrchtung für hoch-vacuumanlage

Country Status (7)

Country Link
US (1) US6367267B1 (de)
EP (1) EP1330561B1 (de)
JP (1) JP2004533910A (de)
AT (1) ATE282100T1 (de)
AU (1) AU2001291197A1 (de)
DE (1) DE60107108T2 (de)
WO (1) WO2002024983A2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6718775B2 (en) * 2002-07-30 2004-04-13 Applied Epi, Inc. Dual chamber cooling system with cryogenic and non-cryogenic chambers for ultra high vacuum system
JP2010504434A (ja) * 2006-09-25 2010-02-12 ビーコ インスツルメンツ インコーポレイティド 真空蒸着装置用の断熱クライオパネル
EP3755827A4 (de) * 2018-02-21 2021-11-24 Anyon Systems Inc. Vorrichtung und verfahren zur molekularen strahlepitaxie
CN113117606B (zh) * 2021-05-28 2022-07-15 中国科学技术大学 一种在真空束源腔中精密调节束源方向和位置的束源操纵装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE657551A (de) * 1964-01-16
US3371499A (en) * 1966-11-02 1968-03-05 Union Carbide Corp Cryosorption vacuum pumping system
SU515884A1 (ru) * 1974-04-30 1976-05-30 Ленинградский Ордена Ленина Политехнический Институт Им. М.И. Калинина Криогенный сверхвысоковакуумный насос
US4510760A (en) * 1984-03-02 1985-04-16 Messer Griesheim Industries, Inc. Compact integrated gas phase separator and subcooler and process
US4873833A (en) * 1988-11-23 1989-10-17 American Telephone Telegraph Company, At&T Bell Laboratories Apparatus comprising a high-vacuum chamber
US5041719A (en) * 1990-06-01 1991-08-20 General Electric Company Two-zone electrical furnace for molecular beam epitaxial apparatus
JPH0558777A (ja) * 1991-08-27 1993-03-09 Canon Inc 薄膜形成装置
JPH0897147A (ja) * 1994-09-29 1996-04-12 Mitsubishi Electric Corp エピタキシャル結晶成長装置
US5788776A (en) * 1996-12-02 1998-08-04 Chorus Corporation Molecular beam epitaxy isolation tube system
JP3630562B2 (ja) * 1998-07-23 2005-03-16 シャープ株式会社 分子線エピタキシー装置

Also Published As

Publication number Publication date
JP2004533910A (ja) 2004-11-11
EP1330561B1 (de) 2004-11-10
DE60107108T2 (de) 2005-11-10
WO2002024983A3 (en) 2002-06-20
WO2002024983A2 (en) 2002-03-28
AU2001291197A1 (en) 2002-04-02
EP1330561A2 (de) 2003-07-30
WO2002024983A9 (en) 2003-03-27
US6367267B1 (en) 2002-04-09
ATE282100T1 (de) 2004-11-15

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Legal Events

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