DE60103178T2 - Vorrichtung zur plasma-gasbehandlung - Google Patents
Vorrichtung zur plasma-gasbehandlung Download PDFInfo
- Publication number
- DE60103178T2 DE60103178T2 DE60103178T DE60103178T DE60103178T2 DE 60103178 T2 DE60103178 T2 DE 60103178T2 DE 60103178 T DE60103178 T DE 60103178T DE 60103178 T DE60103178 T DE 60103178T DE 60103178 T2 DE60103178 T2 DE 60103178T2
- Authority
- DE
- Germany
- Prior art keywords
- large face
- gas
- plasma
- making
- injector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
- B01J19/122—Incoherent waves
- B01J19/126—Microwaves
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/32—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
- B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
- B01D2259/806—Microwaves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
- B01D2259/818—Employing electrical discharges or the generation of a plasma
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0871—Heating or cooling of the reactor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0894—Processes carried out in the presence of a plasma
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/12—Processes employing electromagnetic waves
- B01J2219/1203—Incoherent waves
- B01J2219/1206—Microwaves
- B01J2219/1209—Features relating to the reactor or vessel
- B01J2219/1212—Arrangements of the reactor or the reactors
- B01J2219/1215—Single reactor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/12—Processes employing electromagnetic waves
- B01J2219/1203—Incoherent waves
- B01J2219/1206—Microwaves
- B01J2219/1209—Features relating to the reactor or vessel
- B01J2219/1221—Features relating to the reactor or vessel the reactor per se
- B01J2219/1224—Form of the reactor
- B01J2219/123—Vessels in the form of a cup
- B01J2219/1233—Closure means, such as lids, caps, seals
- B01J2219/1236—Frames for holding the lid in place
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/12—Processes employing electromagnetic waves
- B01J2219/1203—Incoherent waves
- B01J2219/1206—Microwaves
- B01J2219/1248—Features relating to the microwave cavity
- B01J2219/1269—Microwave guides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/12—Processes employing electromagnetic waves
- B01J2219/1203—Incoherent waves
- B01J2219/1206—Microwaves
- B01J2219/1275—Controlling the microwave irradiation variables
- B01J2219/1281—Frequency
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/12—Processes employing electromagnetic waves
- B01J2219/1203—Incoherent waves
- B01J2219/1206—Microwaves
- B01J2219/1275—Controlling the microwave irradiation variables
- B01J2219/1284—Intensity
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/12—Processes employing electromagnetic waves
- B01J2219/1203—Incoherent waves
- B01J2219/1206—Microwaves
- B01J2219/1287—Features relating to the microwave source
- B01J2219/129—Arrangements thereof
- B01J2219/1293—Single source
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Analytical Chemistry (AREA)
- Electromagnetism (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Organic Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Plasma Technology (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Incineration Of Waste (AREA)
- Drying Of Semiconductors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0013840A FR2815888B1 (fr) | 2000-10-27 | 2000-10-27 | Dispositif de traitement de gaz par plasma |
PCT/FR2001/003293 WO2002035575A1 (fr) | 2000-10-27 | 2001-10-23 | Dispositif de traitement de gaz par plasma |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60103178D1 DE60103178D1 (de) | 2004-06-09 |
DE60103178T2 true DE60103178T2 (de) | 2005-04-21 |
Family
ID=8855829
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60103178T Expired - Lifetime DE60103178T2 (de) | 2000-10-27 | 2001-10-23 | Vorrichtung zur plasma-gasbehandlung |
Country Status (12)
Country | Link |
---|---|
US (1) | US6916400B2 (de) |
EP (1) | EP1332511B1 (de) |
JP (1) | JP4339588B2 (de) |
KR (1) | KR100858396B1 (de) |
AT (1) | ATE266257T1 (de) |
AU (1) | AU2002214089A1 (de) |
DE (1) | DE60103178T2 (de) |
ES (1) | ES2219573T3 (de) |
FR (1) | FR2815888B1 (de) |
PT (1) | PT1332511E (de) |
TW (1) | TW519856B (de) |
WO (1) | WO2002035575A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9265138B2 (en) | 2012-08-28 | 2016-02-16 | Agilent Technologies, Inc. | Electromagnetic waveguide and plasma source |
Families Citing this family (51)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0309932D0 (en) * | 2003-04-30 | 2003-06-04 | Boc Group Plc | Apparatus and method for forming a plasma |
US7282244B2 (en) * | 2003-09-05 | 2007-10-16 | General Electric Company | Replaceable plate expanded thermal plasma apparatus and method |
US20050163696A1 (en) * | 2004-01-28 | 2005-07-28 | Uhm Han S. | Synthesis of carbon nanotubes by making use of microwave plasma torch |
US7164095B2 (en) * | 2004-07-07 | 2007-01-16 | Noritsu Koki Co., Ltd. | Microwave plasma nozzle with enhanced plume stability and heating efficiency |
US20060052883A1 (en) * | 2004-09-08 | 2006-03-09 | Lee Sang H | System and method for optimizing data acquisition of plasma using a feedback control module |
US20070228008A1 (en) * | 2004-12-06 | 2007-10-04 | University Of Houston | Medium pressure plasma system for removal of surface layers without substrate loss |
ATE383063T1 (de) * | 2005-04-29 | 2008-01-15 | Alter Srl | Plasmaerzeuger |
GB0521830D0 (en) * | 2005-10-26 | 2005-12-07 | Boc Group Plc | Plasma reactor |
US7679024B2 (en) * | 2005-12-23 | 2010-03-16 | Lam Research Corporation | Highly efficient gas distribution arrangement for plasma tube of a plasma processing chamber |
US7562638B2 (en) * | 2005-12-23 | 2009-07-21 | Lam Research Corporation | Methods and arrangement for implementing highly efficient plasma traps |
US7554053B2 (en) * | 2005-12-23 | 2009-06-30 | Lam Research Corporation | Corrugated plasma trap arrangement for creating a highly efficient downstream microwave plasma system |
US7369320B2 (en) * | 2005-12-30 | 2008-05-06 | 3M Innovative Properties Company | Projection system with beam homogenizer |
TW200742506A (en) * | 2006-02-17 | 2007-11-01 | Noritsu Koki Co Ltd | Plasma generation apparatus and work process apparatus |
US20100074810A1 (en) * | 2008-09-23 | 2010-03-25 | Sang Hun Lee | Plasma generating system having tunable plasma nozzle |
US7921804B2 (en) * | 2008-12-08 | 2011-04-12 | Amarante Technologies, Inc. | Plasma generating nozzle having impedance control mechanism |
US20100201272A1 (en) * | 2009-02-09 | 2010-08-12 | Sang Hun Lee | Plasma generating system having nozzle with electrical biasing |
US20100254853A1 (en) * | 2009-04-06 | 2010-10-07 | Sang Hun Lee | Method of sterilization using plasma generated sterilant gas |
US10658161B2 (en) * | 2010-10-15 | 2020-05-19 | Applied Materials, Inc. | Method and apparatus for reducing particle defects in plasma etch chambers |
TWI603913B (zh) * | 2012-12-13 | 2017-11-01 | 財團法人工業技術研究院 | 石墨烯片的形成裝置與形成方法 |
US9247629B2 (en) * | 2013-03-15 | 2016-01-26 | Agilent Technologies, Inc. | Waveguide-based apparatus for exciting and sustaining a plasma |
US9427821B2 (en) * | 2013-03-15 | 2016-08-30 | Agilent Technologies, Inc. | Integrated magnetron plasma torch, and related methods |
US11939477B2 (en) | 2014-01-30 | 2024-03-26 | Monolith Materials, Inc. | High temperature heat integration method of making carbon black |
US10138378B2 (en) | 2014-01-30 | 2018-11-27 | Monolith Materials, Inc. | Plasma gas throat assembly and method |
US10370539B2 (en) | 2014-01-30 | 2019-08-06 | Monolith Materials, Inc. | System for high temperature chemical processing |
US10100200B2 (en) | 2014-01-30 | 2018-10-16 | Monolith Materials, Inc. | Use of feedstock in carbon black plasma process |
PL3100597T3 (pl) * | 2014-01-31 | 2023-10-23 | Monolith Materials, Inc. | Palnik plazmowy z elektrodami grafitowymi |
MX2017009982A (es) | 2015-02-03 | 2018-01-25 | Monolith Mat Inc | Metodo y dispositivo de enfriamiento regenerativo. |
TWI539043B (zh) * | 2015-07-21 | 2016-06-21 | 財團法人工業技術研究院 | 石墨烯花的形成方法 |
CA3032246C (en) | 2015-07-29 | 2023-12-12 | Monolith Materials, Inc. | Dc plasma torch electrical power design method and apparatus |
EP3350855A4 (de) | 2015-09-14 | 2019-08-07 | Monolith Materials, Inc. | Russ aus erdgas |
CA3060482C (en) | 2016-04-29 | 2023-04-11 | Monolith Materials, Inc. | Secondary heat addition to particle production process and apparatus |
CN109642090A (zh) | 2016-04-29 | 2019-04-16 | 巨石材料公司 | 炬针方法和设备 |
WO2018067814A1 (en) | 2016-10-06 | 2018-04-12 | Lyten, Inc. | Microwave reactor system with gas-solids separation |
US9812295B1 (en) | 2016-11-15 | 2017-11-07 | Lyten, Inc. | Microwave chemical processing |
US9997334B1 (en) | 2017-02-09 | 2018-06-12 | Lyten, Inc. | Seedless particles with carbon allotropes |
US9767992B1 (en) * | 2017-02-09 | 2017-09-19 | Lyten, Inc. | Microwave chemical processing reactor |
CA3055830A1 (en) | 2017-03-08 | 2018-09-13 | Monolith Materials, Inc. | Systems and methods of making carbon particles with thermal transfer gas |
US10920035B2 (en) | 2017-03-16 | 2021-02-16 | Lyten, Inc. | Tuning deformation hysteresis in tires using graphene |
CN110418816B (zh) | 2017-03-16 | 2022-05-31 | 利腾股份有限公司 | 碳和弹性体整合 |
US9862606B1 (en) | 2017-03-27 | 2018-01-09 | Lyten, Inc. | Carbon allotropes |
CN115637064A (zh) | 2017-04-20 | 2023-01-24 | 巨石材料公司 | 颗粒系统和方法 |
US10465128B2 (en) | 2017-09-20 | 2019-11-05 | Lyten, Inc. | Cracking of a process gas |
CA3116989C (en) | 2017-10-24 | 2024-04-02 | Monolith Materials, Inc. | Particle systems and methods |
WO2019126196A1 (en) | 2017-12-22 | 2019-06-27 | Lyten, Inc. | Structured composite materials |
KR20200103788A (ko) | 2018-01-04 | 2020-09-02 | 라이텐, 인코포레이티드 | 공진 가스 센서 |
WO2019143559A1 (en) | 2018-01-16 | 2019-07-25 | Lyten, Inc. | Microwave transparent pressure barrier |
CN112867702A (zh) | 2018-08-23 | 2021-05-28 | 转化材料有限公司 | 处理气体的系统和方法 |
US11633710B2 (en) | 2018-08-23 | 2023-04-25 | Transform Materials Llc | Systems and methods for processing gases |
US11623197B2 (en) * | 2020-01-23 | 2023-04-11 | Lyten, Inc. | Complex modality reactor for materials production and synthesis |
CN111465161B (zh) * | 2020-03-18 | 2023-06-02 | 苏州迈微能等离子科技有限公司 | 一种常压自点火式微波等离子炬及微波等离子发生系统 |
WO2022046297A1 (en) * | 2020-08-31 | 2022-03-03 | Lyten, Inc. | Microwave reactor system enclosing a self-igniting plasma |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2533397A2 (fr) * | 1982-09-16 | 1984-03-23 | Anvar | Perfectionnements aux torches a plasma |
FR2751565B1 (fr) * | 1996-07-26 | 1998-09-04 | Air Liquide | Procede et installation de traitement de gaz perfluores et hydrofluorocarbones en vue de leur destruction |
FR2757082B1 (fr) * | 1996-12-13 | 1999-01-15 | Air Liquide | Procede d'epuration d'un gaz plasmagene et installation pour la mise en oeuvre d'un tel procede |
FR2762748B1 (fr) * | 1997-04-25 | 1999-06-11 | Air Liquide | Dispositif d'excitation d'un gaz par plasma d'onde de surface |
FR2766321B1 (fr) | 1997-07-16 | 1999-09-03 | Air Liquide | Dispositif d'excitation d'un gaz par plasma d'onde de surface |
FR2787677B1 (fr) * | 1998-12-22 | 2001-01-19 | Air Liquide | Element de canalisation pour dispositif de traitement de gaz et dispositif incorporant un tel element de canalisation |
-
2000
- 2000-10-27 FR FR0013840A patent/FR2815888B1/fr not_active Expired - Fee Related
-
2001
- 2001-10-12 TW TW090125191A patent/TW519856B/zh not_active IP Right Cessation
- 2001-10-23 WO PCT/FR2001/003293 patent/WO2002035575A1/fr active IP Right Grant
- 2001-10-23 AU AU2002214089A patent/AU2002214089A1/en not_active Abandoned
- 2001-10-23 KR KR1020037005825A patent/KR100858396B1/ko not_active IP Right Cessation
- 2001-10-23 JP JP2002538460A patent/JP4339588B2/ja not_active Expired - Fee Related
- 2001-10-23 AT AT01982534T patent/ATE266257T1/de not_active IP Right Cessation
- 2001-10-23 PT PT01982534T patent/PT1332511E/pt unknown
- 2001-10-23 ES ES01982534T patent/ES2219573T3/es not_active Expired - Lifetime
- 2001-10-23 DE DE60103178T patent/DE60103178T2/de not_active Expired - Lifetime
- 2001-10-23 EP EP01982534A patent/EP1332511B1/de not_active Expired - Lifetime
- 2001-10-26 US US09/983,853 patent/US6916400B2/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9265138B2 (en) | 2012-08-28 | 2016-02-16 | Agilent Technologies, Inc. | Electromagnetic waveguide and plasma source |
Also Published As
Publication number | Publication date |
---|---|
AU2002214089A1 (en) | 2002-05-06 |
EP1332511B1 (de) | 2004-05-06 |
JP2004512648A (ja) | 2004-04-22 |
PT1332511E (pt) | 2004-09-30 |
TW519856B (en) | 2003-02-01 |
DE60103178D1 (de) | 2004-06-09 |
EP1332511A1 (de) | 2003-08-06 |
ATE266257T1 (de) | 2004-05-15 |
WO2002035575A1 (fr) | 2002-05-02 |
KR20040005851A (ko) | 2004-01-16 |
FR2815888B1 (fr) | 2003-05-30 |
ES2219573T3 (es) | 2004-12-01 |
JP4339588B2 (ja) | 2009-10-07 |
US20020050323A1 (en) | 2002-05-02 |
US6916400B2 (en) | 2005-07-12 |
FR2815888A1 (fr) | 2002-05-03 |
KR100858396B1 (ko) | 2008-09-11 |
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