DE60102600D1 - Verfahren und vorrichtung zur bildung von mustern in filmen unter verwendung von temperaturgradienten - Google Patents
Verfahren und vorrichtung zur bildung von mustern in filmen unter verwendung von temperaturgradientenInfo
- Publication number
- DE60102600D1 DE60102600D1 DE60102600T DE60102600T DE60102600D1 DE 60102600 D1 DE60102600 D1 DE 60102600D1 DE 60102600 T DE60102600 T DE 60102600T DE 60102600 T DE60102600 T DE 60102600T DE 60102600 D1 DE60102600 D1 DE 60102600D1
- Authority
- DE
- Germany
- Prior art keywords
- films
- temperature gradients
- film
- forming patterns
- patterns
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41C—PROCESSES FOR THE MANUFACTURE OR REPRODUCTION OF PRINTING SURFACES
- B41C1/00—Forme preparation
- B41C1/10—Forme preparation for lithographic printing; Master sheets for transferring a lithographic image to the forme
- B41C1/1041—Forme preparation for lithographic printing; Master sheets for transferring a lithographic image to the forme by modification of the lithographic properties without removal or addition of material, e.g. by the mere generation of a lithographic pattern
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
- B41M5/00—Duplicating or marking methods; Sheet materials for use therein
- B41M5/26—Thermography ; Marking by high energetic means, e.g. laser otherwise than by burning, and characterised by the material used
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
- B41M5/00—Duplicating or marking methods; Sheet materials for use therein
- B41M5/26—Thermography ; Marking by high energetic means, e.g. laser otherwise than by burning, and characterised by the material used
- B41M5/36—Thermography ; Marking by high energetic means, e.g. laser otherwise than by burning, and characterised by the material used using a polymeric layer, which may be particulate and which is deformed or structurally changed with modification of its' properties, e.g. of its' optical hydrophobic-hydrophilic, solubility or permeability properties
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
- G05D23/1927—Control of temperature characterised by the use of electric means using a plurality of sensors
- G05D23/193—Control of temperature characterised by the use of electric means using a plurality of sensors sensing the temperaure in different places in thermal relationship with one or more spaces
- G05D23/1935—Control of temperature characterised by the use of electric means using a plurality of sensors sensing the temperaure in different places in thermal relationship with one or more spaces using sequential control
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Composite Materials (AREA)
- Remote Sensing (AREA)
- Automation & Control Theory (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Vapour Deposition (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP00124205 | 2000-11-08 | ||
EP00124205A EP1207048A1 (de) | 2000-11-08 | 2000-11-08 | Verfahren und Vorrichtung zur Bildaufzeichnung von Mustern auf Filmen durch die Verwendung von Temperaturgradienten |
PCT/EP2001/012944 WO2002038386A1 (en) | 2000-11-08 | 2001-11-08 | A process and an apparatus for the formation of patterns in films using temperature gradients |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60102600D1 true DE60102600D1 (de) | 2004-05-06 |
DE60102600T2 DE60102600T2 (de) | 2005-02-17 |
Family
ID=8170309
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60102600T Expired - Fee Related DE60102600T2 (de) | 2000-11-08 | 2001-11-08 | Verfahren und vorrichtung zur bildung von mustern in filmen unter verwendung von temperaturgradienten |
Country Status (9)
Country | Link |
---|---|
US (1) | US20040063250A1 (de) |
EP (2) | EP1207048A1 (de) |
JP (1) | JP2004512974A (de) |
AT (1) | ATE263034T1 (de) |
AU (1) | AU2002226328A1 (de) |
CA (1) | CA2428118A1 (de) |
DE (1) | DE60102600T2 (de) |
NZ (1) | NZ525162A (de) |
WO (1) | WO2002038386A1 (de) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4202962B2 (ja) * | 2004-04-27 | 2008-12-24 | 株式会社東芝 | 基板処理方法及び半導体装置の製造方法 |
US8793006B2 (en) * | 2008-11-25 | 2014-07-29 | California Institute Of Technology | Method and apparatus for the controlled fabrication of micro and nanoscale structures by thermocapillary lithography |
FR2950562B1 (fr) * | 2009-09-30 | 2012-01-06 | Commissariat Energie Atomique | Procede de realisation de motifs localises |
KR101792585B1 (ko) | 2012-08-20 | 2017-11-02 | 코니카 미놀타 가부시키가이샤 | 도전성 재료를 포함하는 평행선 패턴, 평행선 패턴 형성 방법, 투명 도전막을 구비한 기재, 디바이스 및 전자 기기 |
EP3635452A4 (de) * | 2017-05-17 | 2021-06-09 | Everix, Inc. | Ultradünne, flexible dünnschichtfilter mit räumlich oder zeitlich variierenden optischen eigenschaften und herstellungsverfahren dafür |
CN115075184B (zh) * | 2022-07-08 | 2024-05-17 | 江苏百绿园林集团有限公司 | 一种城市内河弯曲河道防侵蚀护岸结构布局与构建方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50136038A (de) * | 1974-04-15 | 1975-10-28 | ||
DE3726809C1 (en) * | 1987-08-12 | 1988-12-15 | Dornier System Gmbh | Gradient plate |
JPH02128890A (ja) * | 1988-11-09 | 1990-05-17 | Dainippon Printing Co Ltd | パターン形成方法 |
EP0487794A1 (de) * | 1990-11-27 | 1992-06-03 | Sony Corporation | Verfahren zur Herstellung von Photolackmustern |
US6713238B1 (en) * | 1998-10-09 | 2004-03-30 | Stephen Y. Chou | Microscale patterning and articles formed thereby |
-
2000
- 2000-11-08 EP EP00124205A patent/EP1207048A1/de not_active Withdrawn
-
2001
- 2001-11-08 CA CA002428118A patent/CA2428118A1/en not_active Abandoned
- 2001-11-08 WO PCT/EP2001/012944 patent/WO2002038386A1/en active IP Right Grant
- 2001-11-08 JP JP2002540942A patent/JP2004512974A/ja active Pending
- 2001-11-08 NZ NZ525162A patent/NZ525162A/en unknown
- 2001-11-08 AU AU2002226328A patent/AU2002226328A1/en not_active Abandoned
- 2001-11-08 AT AT01993546T patent/ATE263034T1/de not_active IP Right Cessation
- 2001-11-08 EP EP01993546A patent/EP1339550B1/de not_active Expired - Lifetime
- 2001-11-08 DE DE60102600T patent/DE60102600T2/de not_active Expired - Fee Related
- 2001-11-08 US US10/416,208 patent/US20040063250A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
JP2004512974A (ja) | 2004-04-30 |
EP1207048A1 (de) | 2002-05-22 |
ATE263034T1 (de) | 2004-04-15 |
EP1339550A1 (de) | 2003-09-03 |
EP1339550B1 (de) | 2004-03-31 |
AU2002226328A1 (en) | 2002-05-21 |
CA2428118A1 (en) | 2002-05-16 |
DE60102600T2 (de) | 2005-02-17 |
US20040063250A1 (en) | 2004-04-01 |
WO2002038386B1 (en) | 2002-09-06 |
NZ525162A (en) | 2004-08-27 |
WO2002038386A1 (en) | 2002-05-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE602004020200D1 (de) | Belichtungsgerät und verfahren zur herstellung einer vorrichtung | |
EP1670039A4 (de) | Belichtungsvorrichtung und bauelemente-herstellungsverfahren | |
ATE168791T1 (de) | Methode zur herstellung eines lithographischen musters in einem verfahren zur herstellung von halbleitervorrichtungen | |
WO1999001796A3 (en) | Pattern-forming methods | |
DE69620336D1 (de) | Verfahren zur Herstellung einer lithographischen Druckplatte mit Wasser als Entwickler | |
DE69940118D1 (de) | Verfahren zur herstellung von kopien optischer elemente mittels eines photoresist-stempelverfahrens sowie entsprechend erzeugte kopien | |
WO2005109095A3 (en) | Method for imprint lithography at constant temperature | |
ATE462991T1 (de) | Belichtungsapparat und verfahren zur herstellung einer vorrichtung | |
MY106633A (en) | Positive acting photoresists and method of producing same. | |
DE602005013398D1 (de) | Verfahren zur Herstellung einer Lithografiedruckform | |
CN107121890A (zh) | 一种纳米压印模板及其制备方法 | |
ATE216507T1 (de) | Verfahren zur herstellung einer siebdruckschablone | |
TW200515106A (en) | Method for exposing a substrate and lithographic projection apparatus | |
SE9900114D0 (sv) | System for production of large area display panels with improved precision | |
ATE196200T1 (de) | Gravierverfahren mit bildmaske und lichtempfindlicher laminatfilm für besagte bildmaske | |
DE60102600D1 (de) | Verfahren und vorrichtung zur bildung von mustern in filmen unter verwendung von temperaturgradienten | |
DE69222203T2 (de) | Hitzebeständige, positiv arbeitende Photoresistzusammensetzung, lichtempfindliches Substrat, und Verfahren zur Herstellung eines hitzebeständigen positiven Musters | |
ATE170639T1 (de) | Verfahren und vorrichtung zur herstellung einer druckschablone | |
EP1746462A3 (de) | Verfahren zur Belichtung von Flexodruckplatten | |
DE69110838D1 (de) | Verfahren zur Herstellung eines Substrats für eine lithographische Druckplatte. | |
DE69303809D1 (de) | Verfahren zur Herstellung lithographischer Druckformen | |
ATE336390T1 (de) | Verfahren zur herstellung einer lichtempfindlichen flachdruckplatte | |
DE69916347D1 (de) | Verfahren zur Herstellung einer Siebdruckschablone | |
DE602004015397D1 (de) | Verfahren zur Vorbereitung eines Substrats, Messverfahren, Verfahren zur Herstellung einer Vorrichtung, Lithographischer Apparat, Computerprogramm und Substrat | |
DE69303810T2 (de) | Verfahren zur Herstellung lithographischer Druckformen |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8327 | Change in the person/name/address of the patent owner |
Owner name: APPLIED NANOSYSTEMS, GRONINGEN, NL |
|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |