DE60044612D1 - Schaltbares impedanzanpassungssystem für eine veränderbare last - Google Patents

Schaltbares impedanzanpassungssystem für eine veränderbare last

Info

Publication number
DE60044612D1
DE60044612D1 DE60044612T DE60044612T DE60044612D1 DE 60044612 D1 DE60044612 D1 DE 60044612D1 DE 60044612 T DE60044612 T DE 60044612T DE 60044612 T DE60044612 T DE 60044612T DE 60044612 D1 DE60044612 D1 DE 60044612D1
Authority
DE
Germany
Prior art keywords
adjustment system
impedance adjustment
switchable impedance
changeable load
changeable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60044612T
Other languages
German (de)
English (en)
Inventor
Anton Mavretic
Tomislav Lozic
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Energys Voorhees Operations
Original Assignee
Advanced Energys Voorhees Operations
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Energys Voorhees Operations filed Critical Advanced Energys Voorhees Operations
Application granted granted Critical
Publication of DE60044612D1 publication Critical patent/DE60044612D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H01J37/32183—Matching circuits
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
    • H03H7/38—Impedance-matching networks
    • H03H7/40—Automatic matching of load impedance to source impedance

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Drying Of Semiconductors (AREA)
DE60044612T 1999-11-30 2000-11-30 Schaltbares impedanzanpassungssystem für eine veränderbare last Expired - Lifetime DE60044612D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/451,512 US6424232B1 (en) 1999-11-30 1999-11-30 Method and apparatus for matching a variable load impedance with an RF power generator impedance
PCT/US2000/042460 WO2001043282A1 (en) 1999-11-30 2000-11-30 Variable load switchable impedance matching system

Publications (1)

Publication Number Publication Date
DE60044612D1 true DE60044612D1 (de) 2010-08-12

Family

ID=23792528

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60044612T Expired - Lifetime DE60044612D1 (de) 1999-11-30 2000-11-30 Schaltbares impedanzanpassungssystem für eine veränderbare last

Country Status (6)

Country Link
US (1) US6424232B1 (enExample)
EP (1) EP1236275B1 (enExample)
JP (1) JP2003516691A (enExample)
AU (1) AU4511501A (enExample)
DE (1) DE60044612D1 (enExample)
WO (1) WO2001043282A1 (enExample)

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Also Published As

Publication number Publication date
JP2003516691A (ja) 2003-05-13
EP1236275B1 (en) 2010-06-30
EP1236275A4 (en) 2006-09-27
WO2001043282A1 (en) 2001-06-14
EP1236275A1 (en) 2002-09-04
US6424232B1 (en) 2002-07-23
AU4511501A (en) 2001-06-18

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