DE60039472D1 - Magnetische Kopplungsvorrichtung zur Verwendung in einem Gasströmungslaser - Google Patents

Magnetische Kopplungsvorrichtung zur Verwendung in einem Gasströmungslaser

Info

Publication number
DE60039472D1
DE60039472D1 DE60039472T DE60039472T DE60039472D1 DE 60039472 D1 DE60039472 D1 DE 60039472D1 DE 60039472 T DE60039472 T DE 60039472T DE 60039472 T DE60039472 T DE 60039472T DE 60039472 D1 DE60039472 D1 DE 60039472D1
Authority
DE
Germany
Prior art keywords
gas flow
coupling device
magnetic coupling
flow laser
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60039472T
Other languages
English (en)
Inventor
Takashi Saito
Motohiro Arai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Application granted granted Critical
Publication of DE60039472D1 publication Critical patent/DE60039472D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067—Fibre lasers
    • H01S3/06754—Fibre amplifiers
    • H01S3/06783—Amplifying coupler
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K1/00—Details of the magnetic circuit
    • H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
    • H02K1/12—Stationary parts of the magnetic circuit
    • H02K1/17—Stator cores with permanent magnets
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Power Engineering (AREA)
  • Lasers (AREA)
DE60039472T 1999-05-19 2000-05-18 Magnetische Kopplungsvorrichtung zur Verwendung in einem Gasströmungslaser Expired - Fee Related DE60039472D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13838299A JP3458891B2 (ja) 1999-05-19 1999-05-19 エキシマレーザ装置の磁気カップリング機構

Publications (1)

Publication Number Publication Date
DE60039472D1 true DE60039472D1 (de) 2008-08-28

Family

ID=15220644

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60039472T Expired - Fee Related DE60039472D1 (de) 1999-05-19 2000-05-18 Magnetische Kopplungsvorrichtung zur Verwendung in einem Gasströmungslaser

Country Status (5)

Country Link
US (1) US6417591B1 (de)
EP (1) EP1054488B1 (de)
JP (1) JP3458891B2 (de)
KR (1) KR20000077252A (de)
DE (1) DE60039472D1 (de)

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AUPS237502A0 (en) * 2002-05-16 2002-06-13 Rooke, Margaret Wynn Torque converter
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US7572115B2 (en) * 2002-07-19 2009-08-11 Innovative Mag-Drive, Llc Corrosion-resistant rotor for a magnetic-drive centrifugal pump
KR20040026722A (ko) * 2002-09-25 2004-04-01 레이저앤피직스 주식회사 자력을 이용한 비관통식 엑시머 레이저 블로우어 구동 방식
US8602882B2 (en) * 2004-10-04 2013-12-10 Igt Jackpot interfaces and services on a gaming machine
US7862427B2 (en) * 2004-10-04 2011-01-04 Igt Wide area progressive jackpot system and methods
ITBO20040629A1 (it) * 2004-10-14 2005-01-14 Marchesini Group Spa Sistema per la trasmissione del moto tra organi separati da una parete divisoria
GB2426036A (en) * 2005-05-10 2006-11-15 Bernard Whicher Vertical Northey compressor
CN100513827C (zh) * 2005-08-08 2009-07-15 浙江长城减速机有限公司 一种耐高温磁传动装置
ATE516445T1 (de) * 2005-08-09 2011-07-15 Omega Kemix Private Ltd Magnetische dichtungsanordnung
TW200734549A (en) * 2006-03-10 2007-09-16 Sunonwealth Electr Mach Ind Co Cooling fan structure
US7791235B2 (en) * 2006-12-22 2010-09-07 General Electric Company Variable magnetic coupling of rotating machinery
CA2726294C (en) * 2008-06-20 2017-06-13 Cameron International Corporation Gas compressor magnetic coupler
US8863646B2 (en) * 2008-09-08 2014-10-21 Ge Oil & Gas Compression Systems, Llc Compression system having seal with magnetic coupling of pistons
CN101635427B (zh) * 2009-05-21 2012-04-11 中国科学院长春光学精密机械与物理研究所 一种真空光学谐振腔中磁耦合空心轴组合式横流风机
JP5327966B2 (ja) * 2009-08-20 2013-10-30 リョーエイ株式会社 磁気カップリング装置
TWI392818B (zh) * 2009-09-07 2013-04-11 Efun Technology Co Ltd Vacuum mechanical introduction device
US8593024B2 (en) * 2010-04-12 2013-11-26 Hamilton Sundstrand Space Systems International, Inc. Implementation of a non-metallic barrier in an electric motor
EP2630384B1 (de) * 2010-10-20 2019-12-11 Dresser-Rand Company Magnetkupplung mit variabler geschwindigkeit
US9540999B2 (en) 2012-01-17 2017-01-10 Peregrine Turbine Technologies, Llc System and method for generating power using a supercritical fluid
JP5875407B2 (ja) * 2012-02-28 2016-03-02 三菱重工業株式会社 磁気カップリングの取り付け方法、取り外し方法
JP2013249857A (ja) * 2012-05-30 2013-12-12 Mitsubishi Heavy Ind Ltd 磁気カップリング
TWI617753B (zh) * 2013-11-08 2018-03-11 鴻海精密工業股份有限公司 增減速裝置
US9771938B2 (en) 2014-03-11 2017-09-26 Peopleflo Manufacturing, Inc. Rotary device having a radial magnetic coupling
CN106704204B (zh) * 2015-07-24 2020-05-08 浙江三花汽车零部件有限公司 电子泵
US9920764B2 (en) 2015-09-30 2018-03-20 Peopleflo Manufacturing, Inc. Pump devices
ITUB20160172A1 (it) * 2016-02-03 2017-08-03 Ima Spa Apparato di dosaggio per prodotti in polvere.
KR102065450B1 (ko) * 2018-06-14 2020-01-13 정길용 디스크형 마그네틱 커플링
CN109296727A (zh) * 2018-12-16 2019-02-01 湖南玉丰真空科学技术有限公司 一种真空环境下的动力传输装置
US11841024B2 (en) * 2021-02-17 2023-12-12 Omachron Intellectual Property Inc. Fan and motor assembly for an appliance such as a vacuum cleaner and a vacuum cleaner having same
KR102557260B1 (ko) * 2022-10-17 2023-07-20 주식회사마스터 비접촉식 동력 전달장치
WO2024161662A1 (ja) * 2023-02-03 2024-08-08 ギガフォトン株式会社 レーザチャンバ装置、ガスレーザ装置及び電子デバイスの製造方法
WO2024171298A1 (ja) * 2023-02-14 2024-08-22 ギガフォトン株式会社 レーザチャンバ装置、ガスレーザ装置及び電子デバイスの製造方法

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US4163164A (en) * 1977-10-11 1979-07-31 Micropump Corporation Split magnet drive
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FR2588323B1 (fr) * 1985-10-09 1990-02-23 Ngk Insulators Ltd Pompe centrifuge a entrainement magnetique
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US4891818A (en) * 1987-08-31 1990-01-02 Acculase, Inc. Rare gas-halogen excimer laser
US4959840A (en) * 1988-01-15 1990-09-25 Cymer Laser Technologies Compact excimer laser including an electrode mounted in insulating relationship to wall of the laser
JPH03112181A (ja) * 1989-09-27 1991-05-13 Fanuc Ltd レーザ用ターボフロア及びそれに用いたレーザ発振装置
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US5763973A (en) * 1996-10-30 1998-06-09 Imo Industries, Inc. Composite barrier can for a magnetic coupling
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US6128323A (en) * 1997-04-23 2000-10-03 Cymer, Inc. Reliable modular production quality narrow-band high REP rate excimer laser
JPH10327549A (ja) * 1997-05-26 1998-12-08 Sankyo Seiki Mfg Co Ltd スピンドルモータ
EP0899857B1 (de) * 1997-08-25 2007-11-28 LUST ANTRIEBSTECHNIK GmbH Magnetgelagerte Rotationsanordnung

Also Published As

Publication number Publication date
JP2000332319A (ja) 2000-11-30
JP3458891B2 (ja) 2003-10-20
US6417591B1 (en) 2002-07-09
KR20000077252A (ko) 2000-12-26
EP1054488A2 (de) 2000-11-22
EP1054488B1 (de) 2008-07-16
EP1054488A3 (de) 2003-10-08

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee