DE60026449D1 - Verfahren zur überkritischen Trocknung - Google Patents
Verfahren zur überkritischen TrocknungInfo
- Publication number
- DE60026449D1 DE60026449D1 DE60026449T DE60026449T DE60026449D1 DE 60026449 D1 DE60026449 D1 DE 60026449D1 DE 60026449 T DE60026449 T DE 60026449T DE 60026449 T DE60026449 T DE 60026449T DE 60026449 D1 DE60026449 D1 DE 60026449D1
- Authority
- DE
- Germany
- Prior art keywords
- supercritical drying
- supercritical
- drying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 title 1
- 238000000352 supercritical drying Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02052—Wet cleaning only
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B5/00—Drying solid materials or objects by processes not involving the application of heat
- F26B5/005—Drying solid materials or objects by processes not involving the application of heat by dipping them into or mixing them with a chemical liquid, e.g. organic; chemical, e.g. organic, dewatering aids
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/40—Treatment after imagewise removal, e.g. baking
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/40—Treatment after imagewise removal, e.g. baking
- G03F7/405—Treatment with inorganic or organometallic reagents after imagewise removal
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S134/00—Cleaning and liquid contact with solids
- Y10S134/902—Semiconductor wafer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/906—Cleaning of wafer as interim step
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Molecular Biology (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Drying Of Solid Materials (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP34620599 | 1999-12-06 | ||
JP34620599A JP3553838B2 (ja) | 1999-12-06 | 1999-12-06 | 超臨界乾燥方法 |
JP2000134441A JP3553856B2 (ja) | 2000-05-08 | 2000-05-08 | 超臨界乾燥方法 |
JP2000134441 | 2000-05-08 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60026449D1 true DE60026449D1 (de) | 2006-05-04 |
DE60026449T2 DE60026449T2 (de) | 2006-11-16 |
Family
ID=26578221
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60026449T Expired - Lifetime DE60026449T2 (de) | 1999-12-06 | 2000-12-01 | Verfahren zur überkritischen Trocknung |
Country Status (4)
Country | Link |
---|---|
US (1) | US6576066B1 (de) |
EP (1) | EP1106946B1 (de) |
KR (1) | KR100400194B1 (de) |
DE (1) | DE60026449T2 (de) |
Families Citing this family (43)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6090217A (en) * | 1998-12-09 | 2000-07-18 | Kittle; Paul A. | Surface treatment of semiconductor substrates |
US7044143B2 (en) * | 1999-05-14 | 2006-05-16 | Micell Technologies, Inc. | Detergent injection systems and methods for carbon dioxide microelectronic substrate processing systems |
US20040003831A1 (en) * | 2000-04-18 | 2004-01-08 | Mount David J. | Supercritical fluid cleaning process for precision surfaces |
TWI221316B (en) * | 2001-04-24 | 2004-09-21 | Kobe Steel Ltd | Process for drying an object having microstructure and the object obtained by the same |
KR20020095103A (ko) * | 2001-06-11 | 2002-12-20 | 제이에스알 가부시끼가이샤 | 실리카막의 형성 방법, 실리카막, 절연막 및 반도체 장치 |
US7326673B2 (en) * | 2001-12-31 | 2008-02-05 | Advanced Technology Materials, Inc. | Treatment of semiconductor substrates using long-chain organothiols or long-chain acetates |
US6846380B2 (en) | 2002-06-13 | 2005-01-25 | The Boc Group, Inc. | Substrate processing apparatus and related systems and methods |
US7011716B2 (en) * | 2003-04-29 | 2006-03-14 | Advanced Technology Materials, Inc. | Compositions and methods for drying patterned wafers during manufacture of integrated circuitry products |
US6880560B2 (en) | 2002-11-18 | 2005-04-19 | Techsonic | Substrate processing apparatus for processing substrates using dense phase gas and sonic waves |
US7119020B2 (en) * | 2002-12-04 | 2006-10-10 | Matsushita Electric Industrial Co., Ltd. | Method for fabricating semiconductor device |
US7737097B2 (en) * | 2003-06-27 | 2010-06-15 | Lam Research Corporation | Method for removing contamination from a substrate and for making a cleaning solution |
US7913703B1 (en) | 2003-06-27 | 2011-03-29 | Lam Research Corporation | Method and apparatus for uniformly applying a multi-phase cleaning solution to a substrate |
US7799141B2 (en) * | 2003-06-27 | 2010-09-21 | Lam Research Corporation | Method and system for using a two-phases substrate cleaning compound |
US8316866B2 (en) * | 2003-06-27 | 2012-11-27 | Lam Research Corporation | Method and apparatus for cleaning a semiconductor substrate |
US8522801B2 (en) * | 2003-06-27 | 2013-09-03 | Lam Research Corporation | Method and apparatus for cleaning a semiconductor substrate |
US7648584B2 (en) * | 2003-06-27 | 2010-01-19 | Lam Research Corporation | Method and apparatus for removing contamination from substrate |
US20040261823A1 (en) * | 2003-06-27 | 2004-12-30 | Lam Research Corporation | Method and apparatus for removing a target layer from a substrate using reactive gases |
JP4464125B2 (ja) * | 2003-12-22 | 2010-05-19 | ソニー株式会社 | 構造体の作製方法及びシリコン酸化膜エッチング剤 |
US8522799B2 (en) | 2005-12-30 | 2013-09-03 | Lam Research Corporation | Apparatus and system for cleaning a substrate |
US7862662B2 (en) * | 2005-12-30 | 2011-01-04 | Lam Research Corporation | Method and material for cleaning a substrate |
US8323420B2 (en) | 2005-06-30 | 2012-12-04 | Lam Research Corporation | Method for removing material from semiconductor wafer and apparatus for performing the same |
US7416370B2 (en) * | 2005-06-15 | 2008-08-26 | Lam Research Corporation | Method and apparatus for transporting a substrate using non-Newtonian fluid |
US8043441B2 (en) | 2005-06-15 | 2011-10-25 | Lam Research Corporation | Method and apparatus for cleaning a substrate using non-Newtonian fluids |
US7568490B2 (en) * | 2003-12-23 | 2009-08-04 | Lam Research Corporation | Method and apparatus for cleaning semiconductor wafers using compressed and/or pressurized foams, bubbles, and/or liquids |
US20050183740A1 (en) * | 2004-02-19 | 2005-08-25 | Fulton John L. | Process and apparatus for removing residues from semiconductor substrates |
WO2005113167A1 (en) * | 2004-05-07 | 2005-12-01 | Advanced Technology Materials, Inc. | Compositions and methods for drying patterned wafers during manufacture of integrated circuitry products |
SG154438A1 (en) * | 2005-12-30 | 2009-08-28 | Lam Res Corp | Cleaning compound and method and system for using the cleaning compound |
KR100774093B1 (ko) * | 2006-08-09 | 2007-11-06 | 부경대학교 산학협력단 | 초임계이산화탄소 건조에서 패턴붕괴 방지에 유용한 방법 |
JP4762098B2 (ja) | 2006-09-28 | 2011-08-31 | 大日本スクリーン製造株式会社 | 基板処理装置および基板処理方法 |
US20080148595A1 (en) * | 2006-12-20 | 2008-06-26 | Lam Research Corporation | Method and apparatus for drying substrates using a surface tensions reducing gas |
US7897213B2 (en) * | 2007-02-08 | 2011-03-01 | Lam Research Corporation | Methods for contained chemical surface treatment |
US8226775B2 (en) | 2007-12-14 | 2012-07-24 | Lam Research Corporation | Methods for particle removal by single-phase and two-phase media |
US8153533B2 (en) * | 2008-09-24 | 2012-04-10 | Lam Research | Methods and systems for preventing feature collapse during microelectronic topography fabrication |
US8961701B2 (en) * | 2008-09-24 | 2015-02-24 | Lam Research Corporation | Method and system of drying a microelectronic topography |
US20100184301A1 (en) * | 2009-01-20 | 2010-07-22 | Lam Research | Methods for Preventing Precipitation of Etch Byproducts During an Etch Process and/or Subsequent Rinse Process |
EP2615630B1 (de) * | 2010-09-08 | 2019-11-20 | Mitsubishi Gas Chemical Company, Inc. | Verwendung von behandlungsflüssigkeit zur hemmung von musterzusammenbrüchen in mikrostrukturen und verfahren zur herstellung von mikrostrukturen unter verwendung der behandlungsflüssigkeit |
TWI689004B (zh) * | 2012-11-26 | 2020-03-21 | 美商應用材料股份有限公司 | 用於高深寬比半導體元件結構具有污染物去除之無黏附乾燥處理 |
WO2015067275A1 (en) * | 2013-11-06 | 2015-05-14 | Superwood A/S | A method for liquid treatment of a wood species |
US10221488B2 (en) * | 2015-09-18 | 2019-03-05 | General Electric Company | Supercritical water method for treating internal passages |
KR20200056515A (ko) * | 2018-11-14 | 2020-05-25 | 삼성전자주식회사 | 기판 건조 방법, 포토레지스트 현상 방법, 그들을 포함하는 포토리소그래피 방법, 및 기판 건조 장치 |
KR102387423B1 (ko) * | 2019-11-28 | 2022-04-18 | 세메스 주식회사 | 기판 처리 장치 및 기판 처리 방법 |
CN112404026B (zh) * | 2020-09-11 | 2022-03-01 | 上海金堂轻纺新材料科技有限公司 | 一种除油污废水循环利用的工艺 |
CN114136060A (zh) * | 2021-11-30 | 2022-03-04 | 唐川 | 超临界二氧化碳干燥设备控制系统 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06105683B2 (ja) | 1992-04-23 | 1994-12-21 | 株式会社ソルテック | レジストパターン形成方法 |
US5370742A (en) * | 1992-07-13 | 1994-12-06 | The Clorox Company | Liquid/supercritical cleaning with decreased polymer damage |
JPH06196472A (ja) * | 1992-12-22 | 1994-07-15 | Soltec:Kk | ウェットエッチング方法及びウェット洗浄方法 |
DE19506404C1 (de) | 1995-02-23 | 1996-03-14 | Siemens Ag | Verfahren zum Freiätzen (Separieren) und Trocknen mikromechanischer Komponenten |
JPH09139374A (ja) * | 1995-11-15 | 1997-05-27 | Hitachi Ltd | 表面処理方法および装置ならびにこれにより得られた素子 |
US5733964A (en) * | 1996-06-20 | 1998-03-31 | Board Of Regents, The University Of Texas System | Surfactants for heterogeneous processes in liquid or supercritical CO2 |
KR19980018262A (ko) | 1996-08-01 | 1998-06-05 | 윌리엄 비.켐플러 | 입출력포트 및 램 메모리 어드레스 지정기술 |
EP0830890A1 (de) | 1996-09-18 | 1998-03-25 | Air Products And Chemicals, Inc. | In flüssigem superkritischem CO2 Gas verwendete Tenside |
EP0893166A4 (de) * | 1996-09-25 | 2004-11-10 | Shuzurifuresher Kaihatsukyodok | Waschsystem, das verflüssigtes gas hoher dichte verwendet |
KR100417647B1 (ko) * | 1996-12-28 | 2004-04-13 | 주식회사 하이닉스반도체 | 반도체 소자의 클리닝 방법 |
JPH1187306A (ja) * | 1997-09-12 | 1999-03-30 | Nippon Telegr & Teleph Corp <Ntt> | 超臨界乾燥装置 |
US6067728A (en) | 1998-02-13 | 2000-05-30 | G.T. Equipment Technologies, Inc. | Supercritical phase wafer drying/cleaning system |
US6334266B1 (en) * | 1999-09-20 | 2002-01-01 | S.C. Fluids, Inc. | Supercritical fluid drying system and method of use |
-
2000
- 2000-11-28 US US09/724,684 patent/US6576066B1/en not_active Expired - Fee Related
- 2000-12-01 DE DE60026449T patent/DE60026449T2/de not_active Expired - Lifetime
- 2000-12-01 EP EP00250417A patent/EP1106946B1/de not_active Expired - Lifetime
- 2000-12-05 KR KR10-2000-0073467A patent/KR100400194B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR20010062139A (ko) | 2001-07-07 |
US6576066B1 (en) | 2003-06-10 |
EP1106946A3 (de) | 2002-04-10 |
KR100400194B1 (ko) | 2003-10-01 |
EP1106946B1 (de) | 2006-03-08 |
EP1106946A2 (de) | 2001-06-13 |
DE60026449T2 (de) | 2006-11-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |