DE60024942D1 - Magnetlager - Google Patents

Magnetlager

Info

Publication number
DE60024942D1
DE60024942D1 DE2000624942 DE60024942T DE60024942D1 DE 60024942 D1 DE60024942 D1 DE 60024942D1 DE 2000624942 DE2000624942 DE 2000624942 DE 60024942 T DE60024942 T DE 60024942T DE 60024942 D1 DE60024942 D1 DE 60024942D1
Authority
DE
Germany
Prior art keywords
magnetic bearings
bearings
magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE2000624942
Other languages
English (en)
Other versions
DE60024942T2 (de
Inventor
Toshimitsu Barada
Atsushi Ooyama
Toshiharu Nakazawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Application granted granted Critical
Publication of DE60024942D1 publication Critical patent/DE60024942D1/de
Publication of DE60024942T2 publication Critical patent/DE60024942T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0444—Details of devices to control the actuation of the electromagnets
    • F16C32/0446—Determination of the actual position of the moving member, e.g. details of sensors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0442—Active magnetic bearings with devices affected by abnormal, undesired or non-standard conditions such as shock-load, power outage, start-up or touchdown
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2231/00—Running-in; Initial operation
DE2000624942 1999-09-07 2000-09-07 Magnetlager Expired - Lifetime DE60024942T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP25318499A JP2001074049A (ja) 1999-09-07 1999-09-07 磁気軸受装置
JP25318499 1999-09-07

Publications (2)

Publication Number Publication Date
DE60024942D1 true DE60024942D1 (de) 2006-01-26
DE60024942T2 DE60024942T2 (de) 2006-09-21

Family

ID=17247725

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2000624942 Expired - Lifetime DE60024942T2 (de) 1999-09-07 2000-09-07 Magnetlager

Country Status (6)

Country Link
US (1) US6404088B1 (de)
EP (1) EP1083348B1 (de)
JP (1) JP2001074049A (de)
KR (1) KR20010030287A (de)
DE (1) DE60024942T2 (de)
TW (1) TW504550B (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3786803B2 (ja) * 1999-07-14 2006-06-14 株式会社ジェイテクト 制御型磁気軸受装置及び磁気軸受の機種判定方法
US8048806B2 (en) 2000-03-17 2011-11-01 Applied Materials, Inc. Methods to avoid unstable plasma states during a process transition
US8617351B2 (en) 2002-07-09 2013-12-31 Applied Materials, Inc. Plasma reactor with minimal D.C. coils for cusp, solenoid and mirror fields for plasma uniformity and device damage reduction
DE10152839B4 (de) * 2000-11-30 2011-05-05 Heidelberger Druckmaschinen Ag Verfahren zur Positionierung einer in wenigstens zwei unterschiedliche Betriebsstellungen bewegbaren Walze einer Druckmaschine und entsprechendes Farbwerk
US6879126B2 (en) * 2001-06-29 2005-04-12 Medquest Products, Inc Method and system for positioning a movable body in a magnetic bearing system
TWI283899B (en) * 2002-07-09 2007-07-11 Applied Materials Inc Capacitively coupled plasma reactor with magnetic plasma control
JP4232573B2 (ja) * 2003-08-19 2009-03-04 株式会社島津製作所 磁気軸受制御装置および磁気浮上装置
JP4353017B2 (ja) * 2004-07-16 2009-10-28 株式会社ジェイテクト 磁気軸受装置
JP4466439B2 (ja) * 2005-03-31 2010-05-26 株式会社島津製作所 磁気軸受装置
JP2008221433A (ja) * 2007-03-15 2008-09-25 Jtekt Corp 研削装置
DE102007028935B4 (de) * 2007-06-22 2018-12-27 Saurer Spinning Solutions Gmbh & Co. Kg Verfahren und Vorrichtung zum Starten einer elektrischen Maschine mit einem magnetisch gelagerten Rotor
KR100906662B1 (ko) * 2007-09-14 2009-07-07 강원대학교산학협력단 스러스트 자기베어링 시스템
CN102597498A (zh) 2009-10-29 2012-07-18 海洋能源公司 能量转换系统和方法
KR101103504B1 (ko) * 2009-10-30 2012-01-10 한국전력공사 축방향 자기베어링 장치
CN102947606B (zh) * 2010-06-21 2015-08-19 英派尔科技开发有限公司 影响磁轴承中的磁场的系统
KR101103726B1 (ko) * 2010-08-31 2012-01-11 한국전력공사 자기 베어링을 이용하는 플라이휠 에너지 저장 장치
KR101823716B1 (ko) 2010-11-24 2018-03-14 에드워즈 가부시키가이샤 자기 베어링의 제어 장치와 상기 장치를 구비한 배기 펌프
CZ304672B6 (cs) * 2012-07-24 2014-08-27 Vysoká Škola Báňská-Technická Univerzita Ostrava Způsob pro kaskádní aktivní řízení hydrodynamických kluzných ložisek piezoaktuátory a zařízení k provádění tohoto způsobu
CN103939485B (zh) * 2013-10-30 2017-02-01 南京航空航天大学 带有位移传感器自动标定功能的磁悬浮轴承数字控制器
TWI499729B (zh) * 2013-12-27 2015-09-11 Hiwin Tech Corp Linear transmission with wear detection
CZ27820U1 (cs) * 2014-11-04 2015-02-16 Vysoká škola báňská- Technická univerzita Ostrava Sestava aktivního ložiskového stojanu a ložiska
CN104373352B (zh) * 2014-11-05 2016-08-24 北京石油化工学院 磁悬浮单轴直驱压缩机
EP3663599B1 (de) * 2017-09-29 2023-10-11 Daikin Industries, Ltd. Verfahren zur kalibrierung eines spaltsensors
EP3511585B1 (de) * 2018-01-15 2020-07-08 Siemens Aktiengesellschaft Verfahren zur überwachung einer magnetlagervorrichtung
CN110185705A (zh) * 2019-06-04 2019-08-30 珠海格力电器股份有限公司 一种磁悬浮轴承系统、保护装置及其检测控制方法
US11125837B2 (en) * 2020-01-14 2021-09-21 Allegro Microsystems, Llc Magnetic field sensor offset and gain adjustment
CN113217540B (zh) * 2021-06-08 2023-01-03 北京泓慧国际能源技术发展有限公司 磁轴承轴向悬浮位置自校正系统和方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2516382B2 (ja) * 1987-11-06 1996-07-24 セイコー精機株式会社 磁気軸受を主軸にもつ加工装置
JP2700904B2 (ja) * 1988-10-18 1998-01-21 セイコー精機株式会社 磁気浮上体の制御装置
US5013987A (en) * 1989-07-18 1991-05-07 Seiko Instruments Inc. Control system for magnetic bearing
DE4114566C2 (de) 1991-05-04 1999-07-08 Randolf Paul Rolff Verfahren zur Inbetriebnahme einer mit einem magnetgelagerten Rotor ausgerüsteten Maschine sowie Schaltung zur Durchführung dieses Verfahrens
JP3090977B2 (ja) * 1991-05-31 2000-09-25 株式会社日立製作所 磁気軸受けの制御方法及び装置
JPH0510326A (ja) * 1991-06-27 1993-01-19 Matsushita Electric Ind Co Ltd 磁気軸受の制御装置
US5666013A (en) * 1992-12-07 1997-09-09 Seiko Seiki Kabushiki Kaisha Magnetic bearing
JPH07256503A (ja) * 1994-03-17 1995-10-09 Seiko Seiki Co Ltd スピンドル装置
JPH0972336A (ja) * 1995-09-05 1997-03-18 Shimadzu Corp 磁気軸受の制御装置
JP3680226B2 (ja) * 1995-10-13 2005-08-10 光洋精工株式会社 磁気軸受装置
JPH1037957A (ja) 1996-07-19 1998-02-13 Daikin Ind Ltd 磁気軸受装置
JP4005654B2 (ja) * 1996-12-26 2007-11-07 Ｎｔｎ株式会社 磁気浮上型遠心式ポンプ装置
JPH11166534A (ja) 1997-12-04 1999-06-22 Daikin Ind Ltd 磁気軸受装置
JPH11166535A (ja) 1997-12-04 1999-06-22 Daikin Ind Ltd 磁気軸受装置
JP2946326B1 (ja) 1998-04-14 1999-09-06 セイコー精機株式会社 磁気軸受内位置センサのオフセット調整装置

Also Published As

Publication number Publication date
US6404088B1 (en) 2002-06-11
KR20010030287A (ko) 2001-04-16
JP2001074049A (ja) 2001-03-23
DE60024942T2 (de) 2006-09-21
EP1083348B1 (de) 2005-12-21
TW504550B (en) 2002-10-01
EP1083348A1 (de) 2001-03-14

Similar Documents

Publication Publication Date Title
DE60024942D1 (de) Magnetlager
DE60042253D1 (de) Steuerbares magnetlager
DE59910725D1 (de) Magnetische Lagervorrichtung
DE60044873D1 (de) Orientierte biopolymermembrane
DE69924556D1 (de) Magnetlager
DE60036628D1 (de) Magnetischer sensor
DE60038383D1 (de) Magnetischer sensor
DE60143037D1 (de) Gleitlager
FR2798786B1 (fr) Structure de rotor magnetique
DE60037521D1 (de) Magnetischer sensor
DE10082788D2 (de) Lagervorrichtung
DE60036629D1 (de) Magnetischer sensor
DE10007428B8 (de) Magnetlager
DE50106314D1 (de) Radial-axial-wälzlager
DE60031305D1 (de) Lagervorrichtung
DE69943382D1 (de) Magnetisches drucklager
DE50007859D1 (de) Radial-Axial-Lagereinheit
DE60037522D1 (de) Magnetischer sensor
DE69823647T2 (de) Elektrodynamische magnetlager
ATE219157T1 (de) Gleitlager
DE60022833D1 (de) Kugellager
DE50005093D1 (de) Linearwälzlager
DE60015461D1 (de) Magnetlager
DE50006093D1 (de) Gleitlagerung
DE69902410T2 (de) Lageranordnung

Legal Events

Date Code Title Description
8364 No opposition during term of opposition