DE60024924D1 - Defektprüfvorrichtung - Google Patents

Defektprüfvorrichtung

Info

Publication number
DE60024924D1
DE60024924D1 DE60024924T DE60024924T DE60024924D1 DE 60024924 D1 DE60024924 D1 DE 60024924D1 DE 60024924 T DE60024924 T DE 60024924T DE 60024924 T DE60024924 T DE 60024924T DE 60024924 D1 DE60024924 D1 DE 60024924D1
Authority
DE
Germany
Prior art keywords
defect inspection
defect
inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60024924T
Other languages
English (en)
Other versions
DE60024924T2 (de
Inventor
Eiji Yonezawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nidek Co Ltd
Original Assignee
Nidek Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nidek Co Ltd filed Critical Nidek Co Ltd
Application granted granted Critical
Publication of DE60024924D1 publication Critical patent/DE60024924D1/de
Publication of DE60024924T2 publication Critical patent/DE60024924T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

Landscapes

  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
DE60024924T 1999-06-30 2000-06-29 Defektprüfvorrichtung Expired - Fee Related DE60024924T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP11184881A JP2001013085A (ja) 1999-06-30 1999-06-30 欠陥検査装置
JP18488199 1999-06-30

Publications (2)

Publication Number Publication Date
DE60024924D1 true DE60024924D1 (de) 2006-01-26
DE60024924T2 DE60024924T2 (de) 2006-08-17

Family

ID=16160957

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60024924T Expired - Fee Related DE60024924T2 (de) 1999-06-30 2000-06-29 Defektprüfvorrichtung

Country Status (4)

Country Link
US (1) US6621568B1 (de)
EP (1) EP1065499B1 (de)
JP (1) JP2001013085A (de)
DE (1) DE60024924T2 (de)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6738504B1 (en) * 1999-08-27 2004-05-18 Shinko Electric Industries Co., Ltd Inspection apparatus for semiconductor device and parts mounter using same
US6603542B1 (en) * 2000-06-14 2003-08-05 Qc Optics, Inc. High sensitivity optical inspection system and method for detecting flaws on a diffractive surface
US7142294B2 (en) * 2000-12-20 2006-11-28 Hitachi, Ltd. Method and apparatus for detecting defects
JP5288672B2 (ja) * 2001-07-11 2013-09-11 株式会社ニコン 表面欠陥検査装置
US7106432B1 (en) * 2002-09-27 2006-09-12 Kla-Tencor Technologies Corporation Surface inspection system and method for using photo detector array to detect defects in inspection surface
US7505619B2 (en) * 2002-09-27 2009-03-17 Kla-Tencor Technologies Corporation System and method for conducting adaptive fourier filtering to detect defects in dense logic areas of an inspection surface
US7090559B2 (en) * 2003-11-19 2006-08-15 Ait Industries Co. Ophthalmic lens manufacturing system
JP2005291874A (ja) * 2004-03-31 2005-10-20 Hoya Corp パターンのムラ欠陥検査方法及び装置
US20060092536A1 (en) * 2004-10-29 2006-05-04 Fuji Photo Film Co., Ltd Transfer method, apparatus and method of inspecting master disk
JP4637642B2 (ja) * 2005-05-18 2011-02-23 株式会社日立ハイテクノロジーズ パターン間の欠陥検査装置および方法
TW200730842A (en) 2005-10-12 2007-08-16 Delta Design Inc Camera based pin grid array (PGA) inspection system with pin base mask and low angle lighting
KR20080079173A (ko) * 2005-12-14 2008-08-29 가부시키가이샤 니콘 표면검사장치 및 표면검사방법
US7522263B2 (en) * 2005-12-27 2009-04-21 Asml Netherlands B.V. Lithographic apparatus and method
US20070146658A1 (en) * 2005-12-27 2007-06-28 Asml Netherlands B.V. Lithographic apparatus and method
JP4988224B2 (ja) * 2006-03-01 2012-08-01 株式会社日立ハイテクノロジーズ 欠陥検査方法及びその装置
WO2008085160A1 (en) * 2007-01-08 2008-07-17 General Electric Company System and method for inspection of films
DE102007009255A1 (de) 2007-02-22 2008-08-28 Vistec Semiconductor Systems Jena Gmbh Vorrichtung und Verfahren zur Untersuchung einer Halbleiteroberfläche
US10197505B2 (en) * 2007-08-22 2019-02-05 Camtek Ltd. Method and system for low cost inspection
JP5078583B2 (ja) * 2007-12-10 2012-11-21 インターナショナル・ビジネス・マシーンズ・コーポレーション マクロ検査装置、マクロ検査方法
US8385997B2 (en) * 2007-12-11 2013-02-26 Tokitae Llc Spectroscopic detection of malaria via the eye
US8585567B2 (en) * 2007-12-11 2013-11-19 Tokitae Llc Systems, devices, and methods including paramagnetic oscillation, rotation and translation of hemozoin asymmetric nanoparticles in response to multi-harmonic optical detection of the presence of hemozoin
JP2009156618A (ja) * 2007-12-25 2009-07-16 Hoya Corp フォトマスクの欠陥検査装置、フォトマスクの欠陥検査方法及びフォトマスクの製造方法
WO2009099142A1 (ja) 2008-02-06 2009-08-13 Nikon Corporation 表面検査装置および表面検査方法
JP5175605B2 (ja) * 2008-04-18 2013-04-03 株式会社日立ハイテクノロジーズ パターン形状検査方法
DE102008040308A1 (de) 2008-07-10 2010-01-14 Robert Bosch Gmbh Verfahren zum Erfassen des Ladezustands einer Fahrzeugbatterie und elektronische Steuerung
US8781184B2 (en) 2010-02-10 2014-07-15 Tokitae Llc Systems, devices, and methods for detection of malaria
US9044141B2 (en) * 2010-02-10 2015-06-02 Tokitae Llc Systems, devices, and methods including a dark-field reflected-illumination apparatus
WO2011100065A2 (en) * 2010-02-10 2011-08-18 Tokitae Llc Systems, devices, and methods including a dark-field reflected-illumination apparatus
DE102010031227A1 (de) * 2010-07-12 2012-01-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zur Prüfung von Mikrostrukturierungsqualität
JP6212843B2 (ja) * 2012-09-05 2017-10-18 大日本印刷株式会社 異物検査装置、異物検査方法
CN103293162B (zh) * 2013-06-17 2015-03-11 浙江大学 用于球面光学元件表面疵病暗场检测的照明系统及方法
JP7299728B2 (ja) * 2019-03-22 2023-06-28 ファスフォードテクノロジ株式会社 半導体製造装置および半導体装置の製造方法
US11676266B2 (en) 2020-11-04 2023-06-13 Tokyo Electron Limited Method and apparatus for inspecting pattern collapse defects

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4871257A (en) * 1982-12-01 1989-10-03 Canon Kabushiki Kaisha Optical apparatus for observing patterned article
US4618938A (en) * 1984-02-22 1986-10-21 Kla Instruments Corporation Method and apparatus for automatic wafer inspection
US4889998A (en) * 1987-01-29 1989-12-26 Nikon Corporation Apparatus with four light detectors for checking surface of mask with pellicle
US5046847A (en) * 1987-10-30 1991-09-10 Hitachi Ltd. Method for detecting foreign matter and device for realizing same
US4845558A (en) 1987-12-03 1989-07-04 Kla Instruments Corporation Method and apparatus for detecting defects in repeated microminiature patterns
US4943734A (en) 1989-06-30 1990-07-24 Qc Optics, Inc. Inspection apparatus and method for detecting flaws on a diffractive surface
US5363187A (en) * 1990-09-12 1994-11-08 Nikon Corporation Light scanning apparatus for detecting foreign particles on surface having circuit pattern
IL99823A0 (en) * 1990-11-16 1992-08-18 Orbot Instr Ltd Optical inspection method and apparatus
US5177559A (en) 1991-05-17 1993-01-05 International Business Machines Corporation Dark field imaging defect inspection system for repetitive pattern integrated circuits
JPH06222013A (ja) 1992-09-11 1994-08-12 Hologenix Inc 表面の光学的検査装置
JP3379805B2 (ja) 1993-05-13 2003-02-24 オリンパス光学工業株式会社 表面欠陥検査装置
US5774222A (en) * 1994-10-07 1998-06-30 Hitachi, Ltd. Manufacturing method of semiconductor substrative and method and apparatus for inspecting defects of patterns on an object to be inspected
US5625193A (en) 1995-07-10 1997-04-29 Qc Optics, Inc. Optical inspection system and method for detecting flaws on a diffractive surface
US5917588A (en) * 1996-11-04 1999-06-29 Kla-Tencor Corporation Automated specimen inspection system for and method of distinguishing features or anomalies under either bright field or dark field illumination
EP0930498A3 (de) 1997-12-26 1999-11-17 Nidek Co., Ltd. Prüfeinrichtung und Verfahren zum Erfassen von Fehlstellen
US6167148A (en) * 1998-06-30 2000-12-26 Ultrapointe Corporation Method and system for inspecting the surface of a wafer

Also Published As

Publication number Publication date
JP2001013085A (ja) 2001-01-19
EP1065499A3 (de) 2002-12-11
EP1065499B1 (de) 2005-12-21
DE60024924T2 (de) 2006-08-17
US6621568B1 (en) 2003-09-16
EP1065499A2 (de) 2001-01-03

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee