DE60021212T2 - Hydrofluorether als wärmeübertragungsflüssigkeit - Google Patents
Hydrofluorether als wärmeübertragungsflüssigkeit Download PDFInfo
- Publication number
- DE60021212T2 DE60021212T2 DE60021212T DE60021212T DE60021212T2 DE 60021212 T2 DE60021212 T2 DE 60021212T2 DE 60021212 T DE60021212 T DE 60021212T DE 60021212 T DE60021212 T DE 60021212T DE 60021212 T2 DE60021212 T2 DE 60021212T2
- Authority
- DE
- Germany
- Prior art keywords
- heat transfer
- temperature
- heat
- transfer fluid
- fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000013529 heat transfer fluid Substances 0.000 title claims description 50
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 title 2
- 238000012546 transfer Methods 0.000 claims description 49
- 238000000034 method Methods 0.000 claims description 22
- 239000007788 liquid Substances 0.000 claims description 18
- 239000004065 semiconductor Substances 0.000 claims description 17
- 238000012360 testing method Methods 0.000 claims description 15
- HHBBIOLEJRWIGU-UHFFFAOYSA-N 4-ethoxy-1,1,1,2,2,3,3,4,5,6,6,6-dodecafluoro-5-(trifluoromethyl)hexane Chemical compound CCOC(F)(C(F)(C(F)(F)F)C(F)(F)F)C(F)(F)C(F)(F)C(F)(F)F HHBBIOLEJRWIGU-UHFFFAOYSA-N 0.000 claims description 13
- 239000000523 sample Substances 0.000 claims description 10
- 235000012431 wafers Nutrition 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims description 5
- 238000009826 distribution Methods 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 4
- 239000000446 fuel Substances 0.000 claims description 2
- 238000004080 punching Methods 0.000 claims description 2
- 230000005540 biological transmission Effects 0.000 claims 1
- 239000012530 fluid Substances 0.000 description 47
- 239000000203 mixture Substances 0.000 description 21
- 239000000463 material Substances 0.000 description 16
- 239000010702 perfluoropolyether Substances 0.000 description 15
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 15
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 14
- 238000009835 boiling Methods 0.000 description 12
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 11
- 231100000053 low toxicity Toxicity 0.000 description 9
- 239000000047 product Substances 0.000 description 9
- 238000005086 pumping Methods 0.000 description 9
- 239000004215 Carbon black (E152) Substances 0.000 description 8
- 229930195733 hydrocarbon Natural products 0.000 description 8
- NROKBHXJSPEDAR-UHFFFAOYSA-M potassium fluoride Chemical compound [F-].[K+] NROKBHXJSPEDAR-UHFFFAOYSA-M 0.000 description 8
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 7
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 6
- 238000005481 NMR spectroscopy Methods 0.000 description 6
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- 229910052731 fluorine Inorganic materials 0.000 description 6
- 239000011737 fluorine Substances 0.000 description 6
- 150000002430 hydrocarbons Chemical class 0.000 description 6
- 239000003921 oil Substances 0.000 description 6
- 230000002085 persistent effect Effects 0.000 description 6
- 229920002545 silicone oil Polymers 0.000 description 6
- 238000001816 cooling Methods 0.000 description 5
- 239000008367 deionised water Substances 0.000 description 5
- 229910021641 deionized water Inorganic materials 0.000 description 5
- 238000004821 distillation Methods 0.000 description 5
- 238000007710 freezing Methods 0.000 description 5
- 230000008014 freezing Effects 0.000 description 5
- 229910052757 nitrogen Inorganic materials 0.000 description 5
- 230000000704 physical effect Effects 0.000 description 5
- 230000007613 environmental effect Effects 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 4
- -1 hydrocarbon alcohols Chemical class 0.000 description 4
- 239000011698 potassium fluoride Substances 0.000 description 4
- 235000003270 potassium fluoride Nutrition 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 239000012298 atmosphere Substances 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 3
- 238000004364 calculation method Methods 0.000 description 3
- 210000004027 cell Anatomy 0.000 description 3
- 239000000470 constituent Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000002688 persistence Effects 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 230000035939 shock Effects 0.000 description 3
- 230000003068 static effect Effects 0.000 description 3
- CSNNHWWHGAXBCP-UHFFFAOYSA-L Magnesium sulfate Chemical compound [Mg+2].[O-][S+2]([O-])([O-])[O-] CSNNHWWHGAXBCP-UHFFFAOYSA-L 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000004035 construction material Substances 0.000 description 2
- 239000012043 crude product Substances 0.000 description 2
- DENRZWYUOJLTMF-UHFFFAOYSA-N diethyl sulfate Chemical compound CCOS(=O)(=O)OCC DENRZWYUOJLTMF-UHFFFAOYSA-N 0.000 description 2
- 229940008406 diethyl sulfate Drugs 0.000 description 2
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- HCDGVLDPFQMKDK-UHFFFAOYSA-N hexafluoropropylene Chemical group FC(F)=C(F)C(F)(F)F HCDGVLDPFQMKDK-UHFFFAOYSA-N 0.000 description 2
- 230000014759 maintenance of location Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 238000010792 warming Methods 0.000 description 2
- PDCBZHHORLHNCZ-UHFFFAOYSA-N 1,4-bis(trifluoromethyl)benzene Chemical compound FC(F)(F)C1=CC=C(C(F)(F)F)C=C1 PDCBZHHORLHNCZ-UHFFFAOYSA-N 0.000 description 1
- NAMDIHYPBYVYAP-UHFFFAOYSA-N 1-methoxy-2-(2-methoxyethoxy)ethane Chemical compound COCCOCCOC.COCCOCCOC NAMDIHYPBYVYAP-UHFFFAOYSA-N 0.000 description 1
- YYXWJNBPHDUWJP-UHFFFAOYSA-N 2,2,3,3,4,4,4-heptafluorobutanoyl fluoride Chemical compound FC(=O)C(F)(F)C(F)(F)C(F)(F)F YYXWJNBPHDUWJP-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- XTHFKEDIFFGKHM-UHFFFAOYSA-N Dimethoxyethane Chemical compound COCCOC XTHFKEDIFFGKHM-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 239000000010 aprotic solvent Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 235000011089 carbon dioxide Nutrition 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000002274 desiccant Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000013213 extrapolation Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 150000002222 fluorine compounds Chemical class 0.000 description 1
- 238000000806 fluorine-19 nuclear magnetic resonance spectrum Methods 0.000 description 1
- 210000000540 fraction c Anatomy 0.000 description 1
- 238000004817 gas chromatography Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 230000002757 inflammatory effect Effects 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- KDJZJOMWRVYHCY-UHFFFAOYSA-M methyl-tri(octadecan-9-yl)azanium;chloride Chemical group [Cl-].CCCCCCCCCC(CCCCCCCC)[N+](C)(C(CCCCCCCC)CCCCCCCCC)C(CCCCCCCC)CCCCCCCCC KDJZJOMWRVYHCY-UHFFFAOYSA-M 0.000 description 1
- XKBGEWXEAPTVCK-UHFFFAOYSA-M methyltrioctylammonium chloride Chemical compound [Cl-].CCCCCCCC[N+](C)(CCCCCCCC)CCCCCCCC XKBGEWXEAPTVCK-UHFFFAOYSA-M 0.000 description 1
- 238000005065 mining Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- RVZRBWKZFJCCIB-UHFFFAOYSA-N perfluorotributylamine Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)N(C(F)(F)C(F)(F)C(F)(F)C(F)(F)F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F RVZRBWKZFJCCIB-UHFFFAOYSA-N 0.000 description 1
- JAJLKEVKNDUJBG-UHFFFAOYSA-N perfluorotripropylamine Chemical compound FC(F)(F)C(F)(F)C(F)(F)N(C(F)(F)C(F)(F)C(F)(F)F)C(F)(F)C(F)(F)C(F)(F)F JAJLKEVKNDUJBG-UHFFFAOYSA-N 0.000 description 1
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000000425 proton nuclear magnetic resonance spectrum Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000012264 purified product Substances 0.000 description 1
- 150000003242 quaternary ammonium salts Chemical class 0.000 description 1
- 239000011541 reaction mixture Substances 0.000 description 1
- 239000012925 reference material Substances 0.000 description 1
- 230000001373 regressive effect Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000001694 spray drying Methods 0.000 description 1
- 239000005437 stratosphere Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K5/00—Heat-transfer, heat-exchange or heat-storage materials, e.g. refrigerants; Materials for the production of heat or cold by chemical reactions other than by combustion
- C09K5/08—Materials not undergoing a change of physical state when used
- C09K5/10—Liquid materials
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C19/00—Acyclic saturated compounds containing halogen atoms
- C07C19/08—Acyclic saturated compounds containing halogen atoms containing fluorine
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C43/00—Ethers; Compounds having groups, groups or groups
- C07C43/02—Ethers
- C07C43/03—Ethers having all ether-oxygen atoms bound to acyclic carbon atoms
- C07C43/04—Saturated ethers
- C07C43/12—Saturated ethers containing halogen
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Combustion & Propulsion (AREA)
- Thermal Sciences (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Lubricants (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US15869799P | 1999-10-08 | 1999-10-08 | |
| US158697P | 1999-10-08 | ||
| US09/661,935 US6374907B1 (en) | 1999-10-08 | 2000-09-14 | Hydrofluoroether as a heat-transfer fluid |
| US661935 | 2000-09-14 | ||
| PCT/US2000/026968 WO2001027217A1 (en) | 1999-10-08 | 2000-09-29 | Hydrofluoroether as a heat-transfer fluid |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE60021212D1 DE60021212D1 (de) | 2005-08-11 |
| DE60021212T2 true DE60021212T2 (de) | 2006-05-18 |
Family
ID=26855295
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE60021212T Expired - Lifetime DE60021212T2 (de) | 1999-10-08 | 2000-09-29 | Hydrofluorether als wärmeübertragungsflüssigkeit |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US6374907B1 (enExample) |
| EP (1) | EP1261676B1 (enExample) |
| JP (1) | JP2003526906A (enExample) |
| KR (1) | KR100669264B1 (enExample) |
| AU (1) | AU7741500A (enExample) |
| DE (1) | DE60021212T2 (enExample) |
| WO (1) | WO2001027217A1 (enExample) |
Families Citing this family (37)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001038811A1 (en) | 1999-11-26 | 2001-05-31 | Nkk Corporation | Thermal storage material using hydrate and thermal storage device therefor, and production method of the thermal storage material |
| EP1306417B1 (en) * | 2001-10-23 | 2012-08-01 | Solvay Specialty Polymers Italy S.p.A. | Use of fluorinated liquids for the heat exchange or as working fluids in the presence of ionizing radiations and/or irradiation with neutrons |
| US7541009B2 (en) * | 2002-05-31 | 2009-06-02 | Jfe Engineering Corporation | Apparatus for producing hydrate slurry |
| WO2005007771A1 (en) * | 2003-07-23 | 2005-01-27 | Dupont Canada Inc. | Coolant liquids having a low dielectric constant and high resistivity for use in fuel cells & other electrochemical reactor stacks |
| WO2005008819A2 (en) * | 2003-07-23 | 2005-01-27 | Dupont Canada Inc. | Evaporative coolants having low dielectric constant for use in fuel cells & other electrochemical reactor stacks |
| US6953082B2 (en) * | 2003-12-16 | 2005-10-11 | 3M Innovative Properties Company | Hydrofluoroether as a heat-transfer fluid |
| US7055579B2 (en) * | 2003-12-16 | 2006-06-06 | 3M Innovative Properties Company | Hydrofluoroether as a heat-transfer fluid |
| US7128133B2 (en) * | 2003-12-16 | 2006-10-31 | 3M Innovative Properties Company | Hydrofluoroether as a heat-transfer fluid |
| US7788939B2 (en) | 2004-07-15 | 2010-09-07 | Parker-Hannifin Corporation | Azeotrope spray cooling system |
| US7428816B2 (en) * | 2004-07-16 | 2008-09-30 | Honeywell International Inc. | Working fluids for thermal energy conversion of waste heat from fuel cells using Rankine cycle systems |
| US7338575B2 (en) * | 2004-09-10 | 2008-03-04 | Axcelis Technologies, Inc. | Hydrocarbon dielectric heat transfer fluids for microwave plasma generators |
| EP1655358A1 (de) * | 2004-11-04 | 2006-05-10 | Solvay Fluor GmbH | Arbeitsfluid zur Wärmeübertragung |
| US7691282B2 (en) | 2005-09-08 | 2010-04-06 | 3M Innovative Properties Company | Hydrofluoroether compounds and processes for their preparation and use |
| US7385089B2 (en) * | 2005-12-23 | 2008-06-10 | 3M Innovative Properties Company | Fluorochemical ketone compounds and processes for their use |
| ITMI20060381A1 (it) | 2006-03-02 | 2007-09-03 | Solvay Solexis Spa | Fluidi di scambio termico |
| US8791254B2 (en) * | 2006-05-19 | 2014-07-29 | 3M Innovative Properties Company | Cyclic hydrofluoroether compounds and processes for their preparation and use |
| US8193397B2 (en) * | 2006-12-06 | 2012-06-05 | 3M Innovative Properties Company | Hydrofluoroether compounds and processes for their preparation and use |
| US8905124B2 (en) * | 2007-06-27 | 2014-12-09 | Taiwan Semiconductor Manufacturing Company, Ltd. | Temperature controlled loadlock chamber |
| US20090176148A1 (en) * | 2008-01-04 | 2009-07-09 | 3M Innovative Properties Company | Thermal management of electrochemical cells |
| US8003004B2 (en) * | 2008-01-23 | 2011-08-23 | 3M Innovative Properties Company | Heat transfer apparatus and methods including hydrofluorocarbonates |
| US20090269521A1 (en) * | 2008-04-24 | 2009-10-29 | 3M Innovative Properties Company | Porous structured thermal transfer article |
| US8071816B2 (en) * | 2008-06-30 | 2011-12-06 | 3M Innovative Properties Company | Hydrofluoroacetal compounds and processes for their preparation and use |
| US20100263885A1 (en) * | 2009-04-21 | 2010-10-21 | 3M Innovative Properties Company | Protection systems and methods for electronic devices |
| US9010318B2 (en) | 2009-09-04 | 2015-04-21 | Wisconsin Alumni Research Foundation | Extended-range heat transfer fluid using variable composition |
| US8323524B2 (en) * | 2009-10-01 | 2012-12-04 | 3M Innovative Properties Company | Apparatus including hydrofluoroether with high temperature stability and uses thereof |
| US8535559B2 (en) * | 2010-03-26 | 2013-09-17 | 3M Innovative Properties Company | Nitrogen-containing fluoroketones for high temperature heat transfer |
| US8193393B2 (en) * | 2010-03-26 | 2012-06-05 | 3M Innovative Properties Company | Fluoroether diketones for high temperature heat transfer |
| EP2718253B1 (en) | 2011-06-10 | 2020-09-09 | 3M Innovative Properties Company | Partially fluorinated ketones and methods of making and using the same |
| DE102012221923A1 (de) * | 2012-11-29 | 2014-06-05 | Carl Zeiss Smt Gmbh | Kühlsystem für zumindest eine Systemkomponente eines optischen Systems für EUV-Anwendungen sowie derartige Systemkomponente und derartiges optisches System |
| US9540316B2 (en) | 2013-07-25 | 2017-01-10 | 3M Innovative Properties Company | Nitrogen containing hydrofluoroethers and methods of making same |
| CN106574172B (zh) | 2014-07-16 | 2018-11-02 | 3M创新有限公司 | 氢氟醚烯烃及其使用方法 |
| CN105457575B (zh) * | 2014-09-12 | 2017-06-06 | 张宝权 | 氯化物成品质量控制工艺 |
| WO2016064585A1 (en) | 2014-10-24 | 2016-04-28 | 3M Innovative Properties Company | Segregated fluorinated esters |
| CN109072054B (zh) | 2017-03-21 | 2021-10-19 | 3M创新有限公司 | 热传递流体及其使用方法 |
| FR3083800B1 (fr) * | 2018-07-13 | 2020-12-25 | Total Marketing Services | Composition refroidissante et ignifugeante pour systeme de propulsion d'un vehicule electrique ou hybride |
| FR3094744B1 (fr) * | 2019-04-03 | 2021-12-10 | Safran Nacelles | Fluide caloporteur pour système de refroidissement de turboréacteur pour aéronef |
| CA3153966A1 (en) * | 2019-10-28 | 2021-05-06 | The Chemours Company Fc, Llc | Heat transfer fluids for use in low temperature chiller applications |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1993011201A1 (en) * | 1991-12-03 | 1993-06-10 | United States Environmental Protection Agency | Refrigerant compositions and processes for using same |
| DE4305239A1 (de) | 1993-02-20 | 1994-08-25 | Hoechst Ag | Verwendung von weitgehend fluorierten Verbindungen als Wärmeträger |
| CA2129380A1 (en) * | 1993-08-11 | 1995-02-12 | Kenichi Sanechika | Lubricant oil composition comprising a fluorine-containing aromatic compound and an alkyl- or alkyl derivative-substituted aromatic compound, and a refrigerant composition containing the same |
| US5737923A (en) * | 1995-10-17 | 1998-04-14 | Marlow Industries, Inc. | Thermoelectric device with evaporating/condensing heat exchanger |
| DE69611930T3 (de) | 1995-10-20 | 2010-05-20 | Minnesota Mining And Mfg. Co., Saint Paul | Hydrofluorether als tieftemperaturkühlmittel |
| US6023002A (en) | 1998-01-26 | 2000-02-08 | 3M Innovative Properties Company | Process for preparing hydrofluoroethers |
-
2000
- 2000-09-14 US US09/661,935 patent/US6374907B1/en not_active Expired - Lifetime
- 2000-09-29 WO PCT/US2000/026968 patent/WO2001027217A1/en not_active Ceased
- 2000-09-29 AU AU77415/00A patent/AU7741500A/en not_active Abandoned
- 2000-09-29 EP EP00967175A patent/EP1261676B1/en not_active Expired - Lifetime
- 2000-09-29 JP JP2001530423A patent/JP2003526906A/ja not_active Withdrawn
- 2000-09-29 DE DE60021212T patent/DE60021212T2/de not_active Expired - Lifetime
- 2000-09-29 KR KR1020027004447A patent/KR100669264B1/ko not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| AU7741500A (en) | 2001-04-23 |
| EP1261676A1 (en) | 2002-12-04 |
| JP2003526906A (ja) | 2003-09-09 |
| KR100669264B1 (ko) | 2007-01-17 |
| US6374907B1 (en) | 2002-04-23 |
| EP1261676B1 (en) | 2005-07-06 |
| DE60021212D1 (de) | 2005-08-11 |
| KR20020042859A (ko) | 2002-06-07 |
| WO2001027217A1 (en) | 2001-04-19 |
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