KR100669264B1 - 열전달액으로서의 히드로플루오로에테르 - Google Patents

열전달액으로서의 히드로플루오로에테르 Download PDF

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KR100669264B1
KR100669264B1 KR1020027004447A KR20027004447A KR100669264B1 KR 100669264 B1 KR100669264 B1 KR 100669264B1 KR 1020027004447 A KR1020027004447 A KR 1020027004447A KR 20027004447 A KR20027004447 A KR 20027004447A KR 100669264 B1 KR100669264 B1 KR 100669264B1
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heat transfer
temperature
heat
liquid
transfer liquid
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Korean (ko)
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KR20020042859A (ko
Inventor
류 에이. 터지그넌트
필립 이. 튜마
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쓰리엠 이노베이티브 프로퍼티즈 캄파니
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    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K5/00—Heat-transfer, heat-exchange or heat-storage materials, e.g. refrigerants; Materials for the production of heat or cold by chemical reactions other than by combustion
    • C09K5/08—Materials not undergoing a change of physical state when used
    • C09K5/10—Liquid materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C19/00—Acyclic saturated compounds containing halogen atoms
    • C07C19/08—Acyclic saturated compounds containing halogen atoms containing fluorine
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C43/00—Ethers; Compounds having groups, groups or groups
    • C07C43/02—Ethers
    • C07C43/03—Ethers having all ether-oxygen atoms bound to acyclic carbon atoms
    • C07C43/04—Saturated ethers
    • C07C43/12—Saturated ethers containing halogen

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Combustion & Propulsion (AREA)
  • Thermal Sciences (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Lubricants (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
KR1020027004447A 1999-10-08 2000-09-29 열전달액으로서의 히드로플루오로에테르 Expired - Fee Related KR100669264B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US15869799P 1999-10-08 1999-10-08
US60/158,697 1999-10-08
US09/661,935 2000-09-14
US09/661,935 US6374907B1 (en) 1999-10-08 2000-09-14 Hydrofluoroether as a heat-transfer fluid

Publications (2)

Publication Number Publication Date
KR20020042859A KR20020042859A (ko) 2002-06-07
KR100669264B1 true KR100669264B1 (ko) 2007-01-17

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Family Applications (1)

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KR1020027004447A Expired - Fee Related KR100669264B1 (ko) 1999-10-08 2000-09-29 열전달액으로서의 히드로플루오로에테르

Country Status (7)

Country Link
US (1) US6374907B1 (enExample)
EP (1) EP1261676B1 (enExample)
JP (1) JP2003526906A (enExample)
KR (1) KR100669264B1 (enExample)
AU (1) AU7741500A (enExample)
DE (1) DE60021212T2 (enExample)
WO (1) WO2001027217A1 (enExample)

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KR100455839B1 (ko) 1999-11-26 2004-11-06 제이에프이 엔지니어링 가부시키가이샤 수화물계 축열재 및 그 제조방법, 수화물계 축열재를 이용한 축열장치, 그리고 수화물계 냉열수송매체
EP1306417B1 (en) * 2001-10-23 2012-08-01 Solvay Specialty Polymers Italy S.p.A. Use of fluorinated liquids for the heat exchange or as working fluids in the presence of ionizing radiations and/or irradiation with neutrons
WO2003102474A1 (en) * 2002-05-31 2003-12-11 Jfe Engineering Corporation Hydrate slurry manufacturing device
WO2005007771A1 (en) * 2003-07-23 2005-01-27 Dupont Canada Inc. Coolant liquids having a low dielectric constant and high resistivity for use in fuel cells & other electrochemical reactor stacks
WO2005008819A2 (en) * 2003-07-23 2005-01-27 Dupont Canada Inc. Evaporative coolants having low dielectric constant for use in fuel cells & other electrochemical reactor stacks
US7055579B2 (en) * 2003-12-16 2006-06-06 3M Innovative Properties Company Hydrofluoroether as a heat-transfer fluid
US6953082B2 (en) * 2003-12-16 2005-10-11 3M Innovative Properties Company Hydrofluoroether as a heat-transfer fluid
US7128133B2 (en) * 2003-12-16 2006-10-31 3M Innovative Properties Company Hydrofluoroether as a heat-transfer fluid
US7788939B2 (en) 2004-07-15 2010-09-07 Parker-Hannifin Corporation Azeotrope spray cooling system
US7428816B2 (en) * 2004-07-16 2008-09-30 Honeywell International Inc. Working fluids for thermal energy conversion of waste heat from fuel cells using Rankine cycle systems
US7338575B2 (en) * 2004-09-10 2008-03-04 Axcelis Technologies, Inc. Hydrocarbon dielectric heat transfer fluids for microwave plasma generators
EP1655358A1 (de) * 2004-11-04 2006-05-10 Solvay Fluor GmbH Arbeitsfluid zur Wärmeübertragung
US7691282B2 (en) 2005-09-08 2010-04-06 3M Innovative Properties Company Hydrofluoroether compounds and processes for their preparation and use
US7385089B2 (en) * 2005-12-23 2008-06-10 3M Innovative Properties Company Fluorochemical ketone compounds and processes for their use
ITMI20060381A1 (it) 2006-03-02 2007-09-03 Solvay Solexis Spa Fluidi di scambio termico
US8791254B2 (en) * 2006-05-19 2014-07-29 3M Innovative Properties Company Cyclic hydrofluoroether compounds and processes for their preparation and use
US8193397B2 (en) * 2006-12-06 2012-06-05 3M Innovative Properties Company Hydrofluoroether compounds and processes for their preparation and use
US8905124B2 (en) * 2007-06-27 2014-12-09 Taiwan Semiconductor Manufacturing Company, Ltd. Temperature controlled loadlock chamber
US20090176148A1 (en) * 2008-01-04 2009-07-09 3M Innovative Properties Company Thermal management of electrochemical cells
US8003004B2 (en) * 2008-01-23 2011-08-23 3M Innovative Properties Company Heat transfer apparatus and methods including hydrofluorocarbonates
US20090269521A1 (en) * 2008-04-24 2009-10-29 3M Innovative Properties Company Porous structured thermal transfer article
US8071816B2 (en) * 2008-06-30 2011-12-06 3M Innovative Properties Company Hydrofluoroacetal compounds and processes for their preparation and use
US20100263885A1 (en) * 2009-04-21 2010-10-21 3M Innovative Properties Company Protection systems and methods for electronic devices
US9010318B2 (en) 2009-09-04 2015-04-21 Wisconsin Alumni Research Foundation Extended-range heat transfer fluid using variable composition
US8323524B2 (en) * 2009-10-01 2012-12-04 3M Innovative Properties Company Apparatus including hydrofluoroether with high temperature stability and uses thereof
US8535559B2 (en) * 2010-03-26 2013-09-17 3M Innovative Properties Company Nitrogen-containing fluoroketones for high temperature heat transfer
US8193393B2 (en) * 2010-03-26 2012-06-05 3M Innovative Properties Company Fluoroether diketones for high temperature heat transfer
KR101920953B1 (ko) 2011-06-10 2018-11-21 쓰리엠 이노베이티브 프로퍼티즈 컴파니 부분적으로 불소화된 케톤 및 그의 제조 및 이용 방법
DE102012221923A1 (de) * 2012-11-29 2014-06-05 Carl Zeiss Smt Gmbh Kühlsystem für zumindest eine Systemkomponente eines optischen Systems für EUV-Anwendungen sowie derartige Systemkomponente und derartiges optisches System
EP3024810B1 (en) 2013-07-25 2018-06-20 3M Innovative Properties Company Nitrogen containing hydrofluoroethers and methods of making same
US10030185B2 (en) 2014-07-16 2018-07-24 3M Innovative Properties Company Hydrofluoroether olefins and methods of using same
CN105457575B (zh) * 2014-09-12 2017-06-06 张宝权 氯化物成品质量控制工艺
WO2016064585A1 (en) 2014-10-24 2016-04-28 3M Innovative Properties Company Segregated fluorinated esters
EP3601470B1 (en) 2017-03-21 2024-04-24 3M Innovative Properties Company A method for selectively making hfp-trimer
FR3083800B1 (fr) * 2018-07-13 2020-12-25 Total Marketing Services Composition refroidissante et ignifugeante pour systeme de propulsion d'un vehicule electrique ou hybride
FR3094744B1 (fr) * 2019-04-03 2021-12-10 Safran Nacelles Fluide caloporteur pour système de refroidissement de turboréacteur pour aéronef
EP4051750B1 (en) * 2019-10-28 2025-08-13 The Chemours Company FC, LLC Heat transfer fluids for use in low temperature chiller applications

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69231725T2 (de) * 1991-12-03 2001-10-31 United States Environmental Protection Agency, Washington Kältemittelzusammensetzung sowie verfahren zu deren benutzung
DE4305239A1 (de) 1993-02-20 1994-08-25 Hoechst Ag Verwendung von weitgehend fluorierten Verbindungen als Wärmeträger
CA2129380A1 (en) * 1993-08-11 1995-02-12 Kenichi Sanechika Lubricant oil composition comprising a fluorine-containing aromatic compound and an alkyl- or alkyl derivative-substituted aromatic compound, and a refrigerant composition containing the same
US5737923A (en) * 1995-10-17 1998-04-14 Marlow Industries, Inc. Thermoelectric device with evaporating/condensing heat exchanger
JP3142878B2 (ja) 1995-10-20 2001-03-07 ミネソタ マイニング アンド マニュファクチャリング カンパニー 低温冷媒としてのヒドロフルオロエーテル
US6023002A (en) 1998-01-26 2000-02-08 3M Innovative Properties Company Process for preparing hydrofluoroethers

Also Published As

Publication number Publication date
US6374907B1 (en) 2002-04-23
DE60021212D1 (de) 2005-08-11
EP1261676A1 (en) 2002-12-04
DE60021212T2 (de) 2006-05-18
JP2003526906A (ja) 2003-09-09
EP1261676B1 (en) 2005-07-06
AU7741500A (en) 2001-04-23
WO2001027217A1 (en) 2001-04-19
KR20020042859A (ko) 2002-06-07

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