KR100669264B1 - 열전달액으로서의 히드로플루오로에테르 - Google Patents

열전달액으로서의 히드로플루오로에테르 Download PDF

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KR100669264B1
KR100669264B1 KR1020027004447A KR20027004447A KR100669264B1 KR 100669264 B1 KR100669264 B1 KR 100669264B1 KR 1020027004447 A KR1020027004447 A KR 1020027004447A KR 20027004447 A KR20027004447 A KR 20027004447A KR 100669264 B1 KR100669264 B1 KR 100669264B1
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South Korea
Prior art keywords
heat transfer
temperature
heat
liquid
transfer liquid
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KR1020027004447A
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English (en)
Korean (ko)
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KR20020042859A (ko
Inventor
류 에이. 터지그넌트
필립 이. 튜마
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쓰리엠 이노베이티브 프로퍼티즈 캄파니
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Publication of KR20020042859A publication Critical patent/KR20020042859A/ko
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    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K5/00—Heat-transfer, heat-exchange or heat-storage materials, e.g. refrigerants; Materials for the production of heat or cold by chemical reactions other than by combustion
    • C09K5/08—Materials not undergoing a change of physical state when used
    • C09K5/10—Liquid materials
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C19/00—Acyclic saturated compounds containing halogen atoms
    • C07C19/08—Acyclic saturated compounds containing halogen atoms containing fluorine
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C43/00—Ethers; Compounds having groups, groups or groups
    • C07C43/02—Ethers
    • C07C43/03—Ethers having all ether-oxygen atoms bound to acyclic carbon atoms
    • C07C43/04—Saturated ethers
    • C07C43/12—Saturated ethers containing halogen
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Combustion & Propulsion (AREA)
  • Thermal Sciences (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Lubricants (AREA)
KR1020027004447A 1999-10-08 2000-09-29 열전달액으로서의 히드로플루오로에테르 Expired - Fee Related KR100669264B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US15869799P 1999-10-08 1999-10-08
US60/158,697 1999-10-08
US09/661,935 US6374907B1 (en) 1999-10-08 2000-09-14 Hydrofluoroether as a heat-transfer fluid
US09/661,935 2000-09-14

Publications (2)

Publication Number Publication Date
KR20020042859A KR20020042859A (ko) 2002-06-07
KR100669264B1 true KR100669264B1 (ko) 2007-01-17

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ID=26855295

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Application Number Title Priority Date Filing Date
KR1020027004447A Expired - Fee Related KR100669264B1 (ko) 1999-10-08 2000-09-29 열전달액으로서의 히드로플루오로에테르

Country Status (7)

Country Link
US (1) US6374907B1 (enExample)
EP (1) EP1261676B1 (enExample)
JP (1) JP2003526906A (enExample)
KR (1) KR100669264B1 (enExample)
AU (1) AU7741500A (enExample)
DE (1) DE60021212T2 (enExample)
WO (1) WO2001027217A1 (enExample)

Families Citing this family (37)

* Cited by examiner, † Cited by third party
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WO2001038811A1 (en) 1999-11-26 2001-05-31 Nkk Corporation Thermal storage material using hydrate and thermal storage device therefor, and production method of the thermal storage material
EP1306417B1 (en) * 2001-10-23 2012-08-01 Solvay Specialty Polymers Italy S.p.A. Use of fluorinated liquids for the heat exchange or as working fluids in the presence of ionizing radiations and/or irradiation with neutrons
US7541009B2 (en) * 2002-05-31 2009-06-02 Jfe Engineering Corporation Apparatus for producing hydrate slurry
WO2005007771A1 (en) * 2003-07-23 2005-01-27 Dupont Canada Inc. Coolant liquids having a low dielectric constant and high resistivity for use in fuel cells & other electrochemical reactor stacks
WO2005008819A2 (en) * 2003-07-23 2005-01-27 Dupont Canada Inc. Evaporative coolants having low dielectric constant for use in fuel cells & other electrochemical reactor stacks
US6953082B2 (en) * 2003-12-16 2005-10-11 3M Innovative Properties Company Hydrofluoroether as a heat-transfer fluid
US7055579B2 (en) * 2003-12-16 2006-06-06 3M Innovative Properties Company Hydrofluoroether as a heat-transfer fluid
US7128133B2 (en) * 2003-12-16 2006-10-31 3M Innovative Properties Company Hydrofluoroether as a heat-transfer fluid
US7788939B2 (en) 2004-07-15 2010-09-07 Parker-Hannifin Corporation Azeotrope spray cooling system
US7428816B2 (en) * 2004-07-16 2008-09-30 Honeywell International Inc. Working fluids for thermal energy conversion of waste heat from fuel cells using Rankine cycle systems
US7338575B2 (en) * 2004-09-10 2008-03-04 Axcelis Technologies, Inc. Hydrocarbon dielectric heat transfer fluids for microwave plasma generators
EP1655358A1 (de) * 2004-11-04 2006-05-10 Solvay Fluor GmbH Arbeitsfluid zur Wärmeübertragung
US7691282B2 (en) 2005-09-08 2010-04-06 3M Innovative Properties Company Hydrofluoroether compounds and processes for their preparation and use
US7385089B2 (en) * 2005-12-23 2008-06-10 3M Innovative Properties Company Fluorochemical ketone compounds and processes for their use
ITMI20060381A1 (it) 2006-03-02 2007-09-03 Solvay Solexis Spa Fluidi di scambio termico
US8791254B2 (en) * 2006-05-19 2014-07-29 3M Innovative Properties Company Cyclic hydrofluoroether compounds and processes for their preparation and use
US8193397B2 (en) * 2006-12-06 2012-06-05 3M Innovative Properties Company Hydrofluoroether compounds and processes for their preparation and use
US8905124B2 (en) * 2007-06-27 2014-12-09 Taiwan Semiconductor Manufacturing Company, Ltd. Temperature controlled loadlock chamber
US20090176148A1 (en) * 2008-01-04 2009-07-09 3M Innovative Properties Company Thermal management of electrochemical cells
US8003004B2 (en) * 2008-01-23 2011-08-23 3M Innovative Properties Company Heat transfer apparatus and methods including hydrofluorocarbonates
US20090269521A1 (en) * 2008-04-24 2009-10-29 3M Innovative Properties Company Porous structured thermal transfer article
US8071816B2 (en) * 2008-06-30 2011-12-06 3M Innovative Properties Company Hydrofluoroacetal compounds and processes for their preparation and use
US20100263885A1 (en) * 2009-04-21 2010-10-21 3M Innovative Properties Company Protection systems and methods for electronic devices
US9010318B2 (en) 2009-09-04 2015-04-21 Wisconsin Alumni Research Foundation Extended-range heat transfer fluid using variable composition
US8323524B2 (en) * 2009-10-01 2012-12-04 3M Innovative Properties Company Apparatus including hydrofluoroether with high temperature stability and uses thereof
US8535559B2 (en) * 2010-03-26 2013-09-17 3M Innovative Properties Company Nitrogen-containing fluoroketones for high temperature heat transfer
US8193393B2 (en) * 2010-03-26 2012-06-05 3M Innovative Properties Company Fluoroether diketones for high temperature heat transfer
EP2718253B1 (en) 2011-06-10 2020-09-09 3M Innovative Properties Company Partially fluorinated ketones and methods of making and using the same
DE102012221923A1 (de) * 2012-11-29 2014-06-05 Carl Zeiss Smt Gmbh Kühlsystem für zumindest eine Systemkomponente eines optischen Systems für EUV-Anwendungen sowie derartige Systemkomponente und derartiges optisches System
US9540316B2 (en) 2013-07-25 2017-01-10 3M Innovative Properties Company Nitrogen containing hydrofluoroethers and methods of making same
CN106574172B (zh) 2014-07-16 2018-11-02 3M创新有限公司 氢氟醚烯烃及其使用方法
CN105457575B (zh) * 2014-09-12 2017-06-06 张宝权 氯化物成品质量控制工艺
WO2016064585A1 (en) 2014-10-24 2016-04-28 3M Innovative Properties Company Segregated fluorinated esters
CN109072054B (zh) 2017-03-21 2021-10-19 3M创新有限公司 热传递流体及其使用方法
FR3083800B1 (fr) * 2018-07-13 2020-12-25 Total Marketing Services Composition refroidissante et ignifugeante pour systeme de propulsion d'un vehicule electrique ou hybride
FR3094744B1 (fr) * 2019-04-03 2021-12-10 Safran Nacelles Fluide caloporteur pour système de refroidissement de turboréacteur pour aéronef
CA3153966A1 (en) * 2019-10-28 2021-05-06 The Chemours Company Fc, Llc Heat transfer fluids for use in low temperature chiller applications

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993011201A1 (en) * 1991-12-03 1993-06-10 United States Environmental Protection Agency Refrigerant compositions and processes for using same
DE4305239A1 (de) 1993-02-20 1994-08-25 Hoechst Ag Verwendung von weitgehend fluorierten Verbindungen als Wärmeträger
CA2129380A1 (en) * 1993-08-11 1995-02-12 Kenichi Sanechika Lubricant oil composition comprising a fluorine-containing aromatic compound and an alkyl- or alkyl derivative-substituted aromatic compound, and a refrigerant composition containing the same
US5737923A (en) * 1995-10-17 1998-04-14 Marlow Industries, Inc. Thermoelectric device with evaporating/condensing heat exchanger
DE69611930T3 (de) 1995-10-20 2010-05-20 Minnesota Mining And Mfg. Co., Saint Paul Hydrofluorether als tieftemperaturkühlmittel
US6023002A (en) 1998-01-26 2000-02-08 3M Innovative Properties Company Process for preparing hydrofluoroethers

Also Published As

Publication number Publication date
AU7741500A (en) 2001-04-23
EP1261676A1 (en) 2002-12-04
JP2003526906A (ja) 2003-09-09
DE60021212T2 (de) 2006-05-18
US6374907B1 (en) 2002-04-23
EP1261676B1 (en) 2005-07-06
DE60021212D1 (de) 2005-08-11
KR20020042859A (ko) 2002-06-07
WO2001027217A1 (en) 2001-04-19

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