JP2003526906A - 伝熱流体としてのヒドロフルオロエーテル - Google Patents
伝熱流体としてのヒドロフルオロエーテルInfo
- Publication number
- JP2003526906A JP2003526906A JP2001530423A JP2001530423A JP2003526906A JP 2003526906 A JP2003526906 A JP 2003526906A JP 2001530423 A JP2001530423 A JP 2001530423A JP 2001530423 A JP2001530423 A JP 2001530423A JP 2003526906 A JP2003526906 A JP 2003526906A
- Authority
- JP
- Japan
- Prior art keywords
- heat transfer
- transfer fluid
- temperature
- fluid
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000013529 heat transfer fluid Substances 0.000 title claims abstract description 53
- 238000012546 transfer Methods 0.000 claims abstract description 61
- 238000000034 method Methods 0.000 claims abstract description 20
- HHBBIOLEJRWIGU-UHFFFAOYSA-N 4-ethoxy-1,1,1,2,2,3,3,4,5,6,6,6-dodecafluoro-5-(trifluoromethyl)hexane Chemical compound CCOC(F)(C(F)(C(F)(F)F)C(F)(F)F)C(F)(F)C(F)(F)C(F)(F)F HHBBIOLEJRWIGU-UHFFFAOYSA-N 0.000 claims abstract description 12
- 238000012360 testing method Methods 0.000 claims description 24
- 239000007788 liquid Substances 0.000 claims description 22
- 239000004065 semiconductor Substances 0.000 claims description 16
- 230000035939 shock Effects 0.000 claims description 10
- 239000000126 substance Substances 0.000 claims description 7
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims description 6
- 238000012545 processing Methods 0.000 claims description 5
- 238000009826 distribution Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000000446 fuel Substances 0.000 claims description 2
- 238000003860 storage Methods 0.000 claims description 2
- 239000012530 fluid Substances 0.000 description 47
- 239000000203 mixture Substances 0.000 description 22
- 239000000463 material Substances 0.000 description 17
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 15
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 14
- 238000009835 boiling Methods 0.000 description 12
- 239000010702 perfluoropolyether Substances 0.000 description 12
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 11
- 230000007613 environmental effect Effects 0.000 description 11
- 239000000047 product Substances 0.000 description 10
- 230000008569 process Effects 0.000 description 9
- 235000012431 wafers Nutrition 0.000 description 9
- 239000004215 Carbon black (E152) Substances 0.000 description 8
- 229930195733 hydrocarbon Natural products 0.000 description 8
- 231100000053 low toxicity Toxicity 0.000 description 8
- NROKBHXJSPEDAR-UHFFFAOYSA-M potassium fluoride Chemical compound [F-].[K+] NROKBHXJSPEDAR-UHFFFAOYSA-M 0.000 description 8
- 239000000523 sample Substances 0.000 description 8
- 230000008859 change Effects 0.000 description 7
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 7
- 238000005481 NMR spectroscopy Methods 0.000 description 6
- -1 PFC Substances 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- 150000002430 hydrocarbons Chemical class 0.000 description 6
- 239000003921 oil Substances 0.000 description 6
- 230000002085 persistent effect Effects 0.000 description 6
- 229920002545 silicone oil Polymers 0.000 description 6
- 239000008367 deionised water Substances 0.000 description 5
- 229910021641 deionized water Inorganic materials 0.000 description 5
- 238000004821 distillation Methods 0.000 description 5
- 238000007710 freezing Methods 0.000 description 5
- 230000008014 freezing Effects 0.000 description 5
- 229910052757 nitrogen Inorganic materials 0.000 description 5
- 230000000704 physical effect Effects 0.000 description 5
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 4
- 238000001816 cooling Methods 0.000 description 4
- 239000011698 potassium fluoride Substances 0.000 description 4
- 235000003270 potassium fluoride Nutrition 0.000 description 4
- 238000010792 warming Methods 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 210000004027 cell Anatomy 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000002688 persistence Effects 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- CSNNHWWHGAXBCP-UHFFFAOYSA-L Magnesium sulfate Chemical compound [Mg+2].[O-][S+2]([O-])([O-])[O-] CSNNHWWHGAXBCP-UHFFFAOYSA-L 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000009529 body temperature measurement Methods 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 239000012043 crude product Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- DENRZWYUOJLTMF-UHFFFAOYSA-N diethyl sulfate Chemical compound CCOS(=O)(=O)OCC DENRZWYUOJLTMF-UHFFFAOYSA-N 0.000 description 2
- 229940008406 diethyl sulfate Drugs 0.000 description 2
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- HCDGVLDPFQMKDK-UHFFFAOYSA-N hexafluoropropylene Chemical group FC(F)=C(F)C(F)(F)F HCDGVLDPFQMKDK-UHFFFAOYSA-N 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 238000010998 test method Methods 0.000 description 2
- 230000001052 transient effect Effects 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- OYROYOJVKGRCKX-UHFFFAOYSA-N 1,1,1,2,2,3,3,4,4,5,6,6,6-tridecafluoro-5-(trifluoromethyl)hexane Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(C(F)(F)F)C(F)(F)F OYROYOJVKGRCKX-UHFFFAOYSA-N 0.000 description 1
- PDCBZHHORLHNCZ-UHFFFAOYSA-N 1,4-bis(trifluoromethyl)benzene Chemical compound FC(F)(F)C1=CC=C(C(F)(F)F)C=C1 PDCBZHHORLHNCZ-UHFFFAOYSA-N 0.000 description 1
- NAMDIHYPBYVYAP-UHFFFAOYSA-N 1-methoxy-2-(2-methoxyethoxy)ethane Chemical compound COCCOCCOC.COCCOCCOC NAMDIHYPBYVYAP-UHFFFAOYSA-N 0.000 description 1
- YYXWJNBPHDUWJP-UHFFFAOYSA-N 2,2,3,3,4,4,4-heptafluorobutanoyl fluoride Chemical compound FC(=O)C(F)(F)C(F)(F)C(F)(F)F YYXWJNBPHDUWJP-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- XTHFKEDIFFGKHM-UHFFFAOYSA-N Dimethoxyethane Chemical compound COCCOC XTHFKEDIFFGKHM-UHFFFAOYSA-N 0.000 description 1
- IMNFDUFMRHMDMM-UHFFFAOYSA-N N-Heptane Chemical compound CCCCCCC IMNFDUFMRHMDMM-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000004480 active ingredient Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000001476 alcoholic effect Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 239000000010 aprotic solvent Substances 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 235000011089 carbon dioxide Nutrition 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000013065 commercial product Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000001351 cycling effect Effects 0.000 description 1
- 239000002274 desiccant Substances 0.000 description 1
- 238000000113 differential scanning calorimetry Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000013213 extrapolation Methods 0.000 description 1
- 238000000806 fluorine-19 nuclear magnetic resonance spectrum Methods 0.000 description 1
- 210000000540 fraction c Anatomy 0.000 description 1
- 238000004508 fractional distillation Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000004817 gas chromatography Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 230000002706 hydrostatic effect Effects 0.000 description 1
- 238000009863 impact test Methods 0.000 description 1
- OOYGSFOGFJDDHP-KMCOLRRFSA-N kanamycin A sulfate Chemical group OS(O)(=O)=O.O[C@@H]1[C@@H](O)[C@H](O)[C@@H](CN)O[C@@H]1O[C@H]1[C@H](O)[C@@H](O[C@@H]2[C@@H]([C@@H](N)[C@H](O)[C@@H](CO)O2)O)[C@H](N)C[C@@H]1N OOYGSFOGFJDDHP-KMCOLRRFSA-N 0.000 description 1
- 231100000344 non-irritating Toxicity 0.000 description 1
- 231100000252 nontoxic Toxicity 0.000 description 1
- 230000003000 nontoxic effect Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- RVZRBWKZFJCCIB-UHFFFAOYSA-N perfluorotributylamine Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)N(C(F)(F)C(F)(F)C(F)(F)C(F)(F)F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F RVZRBWKZFJCCIB-UHFFFAOYSA-N 0.000 description 1
- JAJLKEVKNDUJBG-UHFFFAOYSA-N perfluorotripropylamine Chemical compound FC(F)(F)C(F)(F)C(F)(F)N(C(F)(F)C(F)(F)C(F)(F)F)C(F)(F)C(F)(F)C(F)(F)F JAJLKEVKNDUJBG-UHFFFAOYSA-N 0.000 description 1
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000000425 proton nuclear magnetic resonance spectrum Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000012264 purified product Substances 0.000 description 1
- 150000003242 quaternary ammonium salts Chemical class 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000001694 spray drying Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K5/00—Heat-transfer, heat-exchange or heat-storage materials, e.g. refrigerants; Materials for the production of heat or cold by chemical reactions other than by combustion
- C09K5/08—Materials not undergoing a change of physical state when used
- C09K5/10—Liquid materials
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C19/00—Acyclic saturated compounds containing halogen atoms
- C07C19/08—Acyclic saturated compounds containing halogen atoms containing fluorine
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C43/00—Ethers; Compounds having groups, groups or groups
- C07C43/02—Ethers
- C07C43/03—Ethers having all ether-oxygen atoms bound to acyclic carbon atoms
- C07C43/04—Saturated ethers
- C07C43/12—Saturated ethers containing halogen
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Combustion & Propulsion (AREA)
- Thermal Sciences (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Lubricants (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US15869799P | 1999-10-08 | 1999-10-08 | |
| US60/158,697 | 1999-10-08 | ||
| US09/661,935 US6374907B1 (en) | 1999-10-08 | 2000-09-14 | Hydrofluoroether as a heat-transfer fluid |
| US09/661,935 | 2000-09-14 | ||
| PCT/US2000/026968 WO2001027217A1 (en) | 1999-10-08 | 2000-09-29 | Hydrofluoroether as a heat-transfer fluid |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003526906A true JP2003526906A (ja) | 2003-09-09 |
| JP2003526906A5 JP2003526906A5 (enExample) | 2007-11-15 |
Family
ID=26855295
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001530423A Withdrawn JP2003526906A (ja) | 1999-10-08 | 2000-09-29 | 伝熱流体としてのヒドロフルオロエーテル |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US6374907B1 (enExample) |
| EP (1) | EP1261676B1 (enExample) |
| JP (1) | JP2003526906A (enExample) |
| KR (1) | KR100669264B1 (enExample) |
| AU (1) | AU7741500A (enExample) |
| DE (1) | DE60021212T2 (enExample) |
| WO (1) | WO2001027217A1 (enExample) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008519113A (ja) * | 2004-11-04 | 2008-06-05 | ソルヴェイ フルオル ゲゼルシャフト ミット ベシュレンクテル ハフツング | 熱伝達のための作動流体 |
| JP2016505882A (ja) * | 2012-11-29 | 2016-02-25 | カール・ツァイス・エスエムティー・ゲーエムベーハー | Ｅｕｖ用途向けの光学系の少なくとも１つのシステムコンポーネントのための冷却システム、並びにこの種のシステムコンポーネント及びこの種の光学系 |
| JP2017524692A (ja) * | 2014-07-16 | 2017-08-31 | スリーエム イノベイティブ プロパティズ カンパニー | ハイドロフルオロエーテルオレフィン及びその使用方法 |
| JP2021524529A (ja) * | 2018-07-13 | 2021-09-13 | トタル マーケティング セルヴィス | 電気車両又はハイブリッド車両の推進システムのための冷却用防炎性潤滑剤組成物 |
| JP2023501203A (ja) * | 2019-10-28 | 2023-01-18 | ザ ケマーズ カンパニー エフシー リミテッド ライアビリティ カンパニー | 低温冷却機用途で使用するための伝熱流体 |
Families Citing this family (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001038811A1 (en) | 1999-11-26 | 2001-05-31 | Nkk Corporation | Thermal storage material using hydrate and thermal storage device therefor, and production method of the thermal storage material |
| EP1306417B1 (en) * | 2001-10-23 | 2012-08-01 | Solvay Specialty Polymers Italy S.p.A. | Use of fluorinated liquids for the heat exchange or as working fluids in the presence of ionizing radiations and/or irradiation with neutrons |
| US7541009B2 (en) * | 2002-05-31 | 2009-06-02 | Jfe Engineering Corporation | Apparatus for producing hydrate slurry |
| WO2005007771A1 (en) * | 2003-07-23 | 2005-01-27 | Dupont Canada Inc. | Coolant liquids having a low dielectric constant and high resistivity for use in fuel cells & other electrochemical reactor stacks |
| WO2005008819A2 (en) * | 2003-07-23 | 2005-01-27 | Dupont Canada Inc. | Evaporative coolants having low dielectric constant for use in fuel cells & other electrochemical reactor stacks |
| US6953082B2 (en) * | 2003-12-16 | 2005-10-11 | 3M Innovative Properties Company | Hydrofluoroether as a heat-transfer fluid |
| US7055579B2 (en) * | 2003-12-16 | 2006-06-06 | 3M Innovative Properties Company | Hydrofluoroether as a heat-transfer fluid |
| US7128133B2 (en) * | 2003-12-16 | 2006-10-31 | 3M Innovative Properties Company | Hydrofluoroether as a heat-transfer fluid |
| US7788939B2 (en) | 2004-07-15 | 2010-09-07 | Parker-Hannifin Corporation | Azeotrope spray cooling system |
| US7428816B2 (en) * | 2004-07-16 | 2008-09-30 | Honeywell International Inc. | Working fluids for thermal energy conversion of waste heat from fuel cells using Rankine cycle systems |
| US7338575B2 (en) * | 2004-09-10 | 2008-03-04 | Axcelis Technologies, Inc. | Hydrocarbon dielectric heat transfer fluids for microwave plasma generators |
| US7691282B2 (en) | 2005-09-08 | 2010-04-06 | 3M Innovative Properties Company | Hydrofluoroether compounds and processes for their preparation and use |
| US7385089B2 (en) * | 2005-12-23 | 2008-06-10 | 3M Innovative Properties Company | Fluorochemical ketone compounds and processes for their use |
| ITMI20060381A1 (it) | 2006-03-02 | 2007-09-03 | Solvay Solexis Spa | Fluidi di scambio termico |
| US8791254B2 (en) * | 2006-05-19 | 2014-07-29 | 3M Innovative Properties Company | Cyclic hydrofluoroether compounds and processes for their preparation and use |
| US8193397B2 (en) * | 2006-12-06 | 2012-06-05 | 3M Innovative Properties Company | Hydrofluoroether compounds and processes for their preparation and use |
| US8905124B2 (en) * | 2007-06-27 | 2014-12-09 | Taiwan Semiconductor Manufacturing Company, Ltd. | Temperature controlled loadlock chamber |
| US20090176148A1 (en) * | 2008-01-04 | 2009-07-09 | 3M Innovative Properties Company | Thermal management of electrochemical cells |
| US8003004B2 (en) * | 2008-01-23 | 2011-08-23 | 3M Innovative Properties Company | Heat transfer apparatus and methods including hydrofluorocarbonates |
| US20090269521A1 (en) * | 2008-04-24 | 2009-10-29 | 3M Innovative Properties Company | Porous structured thermal transfer article |
| US8071816B2 (en) * | 2008-06-30 | 2011-12-06 | 3M Innovative Properties Company | Hydrofluoroacetal compounds and processes for their preparation and use |
| US20100263885A1 (en) * | 2009-04-21 | 2010-10-21 | 3M Innovative Properties Company | Protection systems and methods for electronic devices |
| US9010318B2 (en) | 2009-09-04 | 2015-04-21 | Wisconsin Alumni Research Foundation | Extended-range heat transfer fluid using variable composition |
| US8323524B2 (en) * | 2009-10-01 | 2012-12-04 | 3M Innovative Properties Company | Apparatus including hydrofluoroether with high temperature stability and uses thereof |
| US8535559B2 (en) * | 2010-03-26 | 2013-09-17 | 3M Innovative Properties Company | Nitrogen-containing fluoroketones for high temperature heat transfer |
| US8193393B2 (en) * | 2010-03-26 | 2012-06-05 | 3M Innovative Properties Company | Fluoroether diketones for high temperature heat transfer |
| EP2718253B1 (en) | 2011-06-10 | 2020-09-09 | 3M Innovative Properties Company | Partially fluorinated ketones and methods of making and using the same |
| US9540316B2 (en) | 2013-07-25 | 2017-01-10 | 3M Innovative Properties Company | Nitrogen containing hydrofluoroethers and methods of making same |
| CN105457575B (zh) * | 2014-09-12 | 2017-06-06 | 张宝权 | 氯化物成品质量控制工艺 |
| WO2016064585A1 (en) | 2014-10-24 | 2016-04-28 | 3M Innovative Properties Company | Segregated fluorinated esters |
| CN109072054B (zh) | 2017-03-21 | 2021-10-19 | 3M创新有限公司 | 热传递流体及其使用方法 |
| FR3094744B1 (fr) * | 2019-04-03 | 2021-12-10 | Safran Nacelles | Fluide caloporteur pour système de refroidissement de turboréacteur pour aéronef |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1993011201A1 (en) * | 1991-12-03 | 1993-06-10 | United States Environmental Protection Agency | Refrigerant compositions and processes for using same |
| DE4305239A1 (de) | 1993-02-20 | 1994-08-25 | Hoechst Ag | Verwendung von weitgehend fluorierten Verbindungen als Wärmeträger |
| CA2129380A1 (en) * | 1993-08-11 | 1995-02-12 | Kenichi Sanechika | Lubricant oil composition comprising a fluorine-containing aromatic compound and an alkyl- or alkyl derivative-substituted aromatic compound, and a refrigerant composition containing the same |
| US5737923A (en) * | 1995-10-17 | 1998-04-14 | Marlow Industries, Inc. | Thermoelectric device with evaporating/condensing heat exchanger |
| DE69611930T3 (de) | 1995-10-20 | 2010-05-20 | Minnesota Mining And Mfg. Co., Saint Paul | Hydrofluorether als tieftemperaturkühlmittel |
| US6023002A (en) | 1998-01-26 | 2000-02-08 | 3M Innovative Properties Company | Process for preparing hydrofluoroethers |
-
2000
- 2000-09-14 US US09/661,935 patent/US6374907B1/en not_active Expired - Lifetime
- 2000-09-29 WO PCT/US2000/026968 patent/WO2001027217A1/en not_active Ceased
- 2000-09-29 AU AU77415/00A patent/AU7741500A/en not_active Abandoned
- 2000-09-29 EP EP00967175A patent/EP1261676B1/en not_active Expired - Lifetime
- 2000-09-29 JP JP2001530423A patent/JP2003526906A/ja not_active Withdrawn
- 2000-09-29 DE DE60021212T patent/DE60021212T2/de not_active Expired - Lifetime
- 2000-09-29 KR KR1020027004447A patent/KR100669264B1/ko not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008519113A (ja) * | 2004-11-04 | 2008-06-05 | ソルヴェイ フルオル ゲゼルシャフト ミット ベシュレンクテル ハフツング | 熱伝達のための作動流体 |
| JP2016505882A (ja) * | 2012-11-29 | 2016-02-25 | カール・ツァイス・エスエムティー・ゲーエムベーハー | Ｅｕｖ用途向けの光学系の少なくとも１つのシステムコンポーネントのための冷却システム、並びにこの種のシステムコンポーネント及びこの種の光学系 |
| JP2017524692A (ja) * | 2014-07-16 | 2017-08-31 | スリーエム イノベイティブ プロパティズ カンパニー | ハイドロフルオロエーテルオレフィン及びその使用方法 |
| JP2021524529A (ja) * | 2018-07-13 | 2021-09-13 | トタル マーケティング セルヴィス | 電気車両又はハイブリッド車両の推進システムのための冷却用防炎性潤滑剤組成物 |
| JP2023501203A (ja) * | 2019-10-28 | 2023-01-18 | ザ ケマーズ カンパニー エフシー リミテッド ライアビリティ カンパニー | 低温冷却機用途で使用するための伝熱流体 |
| JP7624987B2 (ja) | 2019-10-28 | 2025-01-31 | ザ ケマーズ カンパニー エフシー リミテッド ライアビリティ カンパニー | 低温冷却機用途で使用するための伝熱流体 |
Also Published As
| Publication number | Publication date |
|---|---|
| AU7741500A (en) | 2001-04-23 |
| EP1261676A1 (en) | 2002-12-04 |
| DE60021212T2 (de) | 2006-05-18 |
| KR100669264B1 (ko) | 2007-01-17 |
| US6374907B1 (en) | 2002-04-23 |
| EP1261676B1 (en) | 2005-07-06 |
| DE60021212D1 (de) | 2005-08-11 |
| KR20020042859A (ko) | 2002-06-07 |
| WO2001027217A1 (en) | 2001-04-19 |
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