DE60000717D1 - Vorrichtung und verfahren zur elektronstrahl-pvd-beschichtung - Google Patents
Vorrichtung und verfahren zur elektronstrahl-pvd-beschichtungInfo
- Publication number
- DE60000717D1 DE60000717D1 DE60000717T DE60000717T DE60000717D1 DE 60000717 D1 DE60000717 D1 DE 60000717D1 DE 60000717 T DE60000717 T DE 60000717T DE 60000717 T DE60000717 T DE 60000717T DE 60000717 D1 DE60000717 D1 DE 60000717D1
- Authority
- DE
- Germany
- Prior art keywords
- electron beam
- pvd coating
- beam pvd
- coating
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/52—Means for observation of the coating process
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/31—Processing objects on a macro-scale
- H01J2237/3132—Evaporating
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Toxicology (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14723699P | 1999-08-04 | 1999-08-04 | |
US62480900A | 2000-07-24 | 2000-07-24 | |
PCT/US2000/021108 WO2001011108A1 (en) | 1999-08-04 | 2000-08-02 | Electron beam physical vapor deposition apparatus and method |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60000717D1 true DE60000717D1 (de) | 2002-12-12 |
DE60000717T2 DE60000717T2 (de) | 2003-10-02 |
Family
ID=26844723
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60000717T Expired - Lifetime DE60000717T2 (de) | 1999-08-04 | 2000-08-02 | Vorrichtung und verfahren zur elektronstrahl-pvd-beschichtung |
Country Status (5)
Country | Link |
---|---|
US (1) | US6863937B2 (de) |
EP (1) | EP1123422B1 (de) |
JP (1) | JP4678643B2 (de) |
DE (1) | DE60000717T2 (de) |
WO (1) | WO2001011108A1 (de) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE60015919T2 (de) * | 1999-08-04 | 2005-11-03 | General Electric Co. | Elektronenstrahlbedampfungsanlage mit stabmagazin |
US6983718B1 (en) * | 1999-08-04 | 2006-01-10 | General Electric Company | Electron beam physical vapor deposition apparatus |
US7060330B2 (en) * | 2002-05-08 | 2006-06-13 | Applied Materials, Inc. | Method for forming ultra low k films using electron beam |
US7323399B2 (en) * | 2002-05-08 | 2008-01-29 | Applied Materials, Inc. | Clean process for an electron beam source |
US6936551B2 (en) * | 2002-05-08 | 2005-08-30 | Applied Materials Inc. | Methods and apparatus for E-beam treatment used to fabricate integrated circuit devices |
US7790583B2 (en) * | 2004-02-20 | 2010-09-07 | Applied Materials, Inc. | Clean process for an electron beam source |
US7282271B2 (en) * | 2004-12-01 | 2007-10-16 | Honeywell International, Inc. | Durable thermal barrier coatings |
FR2879825A1 (fr) * | 2004-12-20 | 2006-06-23 | Commissariat Energie Atomique | Procede de fabrication d'une pile a combustible a oxyde solide sous forme de couches minces |
WO2007005832A2 (en) * | 2005-06-30 | 2007-01-11 | University Of Virginia Patent Foundation | Reliant thermal barrier coating system and related methods and apparatus of making the same |
US7422771B2 (en) * | 2005-09-01 | 2008-09-09 | United Technologies Corporation | Methods for applying a hybrid thermal barrier coating |
US20080041314A1 (en) * | 2006-08-18 | 2008-02-21 | Robert William Bruce | Vaccum coater device and mechanism for transporting workpieces in same |
US7753112B1 (en) | 2006-11-10 | 2010-07-13 | Angel Petroleum Technologies LLC | Fluid production system and method |
US7997227B2 (en) * | 2007-03-13 | 2011-08-16 | General Electric Company | Vacuum coater device and mechanism for supporting and manipulating workpieces in same |
WO2011066532A2 (en) * | 2009-11-30 | 2011-06-03 | United Technologies Corporation | Coating methods and apparatus |
US8350180B2 (en) * | 2010-03-12 | 2013-01-08 | United Technologies Corporation | High pressure pre-oxidation for deposition of thermal barrier coating with hood |
US20110223354A1 (en) * | 2010-03-12 | 2011-09-15 | United Technologies Corporation | High pressure pre-oxidation for deposition of thermal barrier coating |
US8337989B2 (en) | 2010-05-17 | 2012-12-25 | United Technologies Corporation | Layered thermal barrier coating with blended transition |
WO2011161296A1 (en) * | 2010-06-21 | 2011-12-29 | Beneq Oy | Apparatus and method for coating glass substrate |
WO2012027442A1 (en) * | 2010-08-27 | 2012-03-01 | Rolls-Royce Corporation | Rare earth silicate environmental barrier coatings |
CN103237916B (zh) * | 2010-12-03 | 2015-07-22 | 夏普株式会社 | 蒸镀装置和回收装置 |
US8951350B2 (en) * | 2011-05-03 | 2015-02-10 | United Technologies Corporation | Coating methods and apparatus |
EP3366804B1 (de) * | 2017-02-22 | 2022-05-11 | Satisloh AG | Vakuumbeschichtungsvorrichtung zur vakuumbeschichtung von substraten, insbesondere von brillenlinsen |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49135890A (de) * | 1973-05-02 | 1974-12-27 | ||
JPS5816065A (ja) * | 1981-07-22 | 1983-01-29 | Matsushita Electric Ind Co Ltd | 真空メツキ装置 |
JPS6096762A (ja) * | 1983-10-28 | 1985-05-30 | Sharp Corp | 蒸着方法 |
JPH07258832A (ja) * | 1994-03-25 | 1995-10-09 | Toppan Printing Co Ltd | 真空蒸着装置用電子銃およびそれを備えた真空蒸着装置 |
US5474809A (en) * | 1994-12-27 | 1995-12-12 | General Electric Company | Evaporation method |
JPH08185820A (ja) * | 1994-12-28 | 1996-07-16 | Sony Corp | エネルギー粒子発生装置における放電防止方法、その放電防止構造及びエネルギー粒子発生装置 |
US5698273A (en) * | 1995-11-24 | 1997-12-16 | General Electric Company | Electron beam physical vapor deposition method |
EP0785291A1 (de) * | 1996-01-19 | 1997-07-23 | The Boc Group, Inc. | Elektronenstrahl-Verdampfungssystem |
JP2000514497A (ja) * | 1996-05-30 | 2000-10-31 | シーメンス アクチエンゲゼルシヤフト | 構造部品を断熱層で被覆する方法と被覆装置 |
JPH10154330A (ja) * | 1996-11-22 | 1998-06-09 | Victor Co Of Japan Ltd | 真空蒸着装置 |
JP2000096216A (ja) * | 1998-07-01 | 2000-04-04 | General Electric Co <Ge> | 断熱皮膜系を形成する方法 |
US6319569B1 (en) * | 1998-11-30 | 2001-11-20 | Howmet Research Corporation | Method of controlling vapor deposition substrate temperature |
-
2000
- 2000-08-02 JP JP2001515352A patent/JP4678643B2/ja not_active Expired - Fee Related
- 2000-08-02 EP EP00950945A patent/EP1123422B1/de not_active Expired - Lifetime
- 2000-08-02 DE DE60000717T patent/DE60000717T2/de not_active Expired - Lifetime
- 2000-08-02 WO PCT/US2000/021108 patent/WO2001011108A1/en active IP Right Grant
-
2002
- 2002-11-19 US US10/299,646 patent/US6863937B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP4678643B2 (ja) | 2011-04-27 |
WO2001011108A1 (en) | 2001-02-15 |
US20040018303A1 (en) | 2004-01-29 |
EP1123422B1 (de) | 2002-11-06 |
EP1123422A1 (de) | 2001-08-16 |
JP2003522294A (ja) | 2003-07-22 |
DE60000717T2 (de) | 2003-10-02 |
US6863937B2 (en) | 2005-03-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8328 | Change in the person/name/address of the agent |
Representative=s name: ROEGER UND KOLLEGEN, 73728 ESSLINGEN |