DE50115118D1 - Mikromechanisches bauelement und abgleichverfahren - Google Patents

Mikromechanisches bauelement und abgleichverfahren

Info

Publication number
DE50115118D1
DE50115118D1 DE50115118T DE50115118T DE50115118D1 DE 50115118 D1 DE50115118 D1 DE 50115118D1 DE 50115118 T DE50115118 T DE 50115118T DE 50115118 T DE50115118 T DE 50115118T DE 50115118 D1 DE50115118 D1 DE 50115118D1
Authority
DE
Germany
Prior art keywords
micromechanical component
compensating process
compensating
micromechanical
component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE50115118T
Other languages
English (en)
Inventor
Joerg Muchow
Jochen Franz
Uwe Lipphardt
Andreas Duell
Wolfgang Romes
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Application granted granted Critical
Publication of DE50115118D1 publication Critical patent/DE50115118D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
DE50115118T 2000-03-21 2001-03-15 Mikromechanisches bauelement und abgleichverfahren Expired - Lifetime DE50115118D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10013904A DE10013904A1 (de) 2000-03-21 2000-03-21 Mikromechanisches Bauelement und Abgleichverfahren
PCT/DE2001/000992 WO2001070625A2 (de) 2000-03-21 2001-03-15 Mikromechanisches bauelement und abgleichverfahren

Publications (1)

Publication Number Publication Date
DE50115118D1 true DE50115118D1 (de) 2009-11-05

Family

ID=7635718

Family Applications (2)

Application Number Title Priority Date Filing Date
DE10013904A Withdrawn DE10013904A1 (de) 2000-03-21 2000-03-21 Mikromechanisches Bauelement und Abgleichverfahren
DE50115118T Expired - Lifetime DE50115118D1 (de) 2000-03-21 2001-03-15 Mikromechanisches bauelement und abgleichverfahren

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE10013904A Withdrawn DE10013904A1 (de) 2000-03-21 2000-03-21 Mikromechanisches Bauelement und Abgleichverfahren

Country Status (5)

Country Link
US (1) US6782756B2 (de)
EP (1) EP1277033B1 (de)
JP (1) JP4921674B2 (de)
DE (2) DE10013904A1 (de)
WO (1) WO2001070625A2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7055392B2 (en) * 2003-07-04 2006-06-06 Robert Bosch Gmbh Micromechanical pressure sensor
TWI265555B (en) * 2005-08-23 2006-11-01 Touch Micro System Tech Method of forming a piezoresistive device capable of selecting standards and method of forming a circuit layout capable of selecting sub circuit layouts
DE102017114299A1 (de) * 2017-06-28 2019-01-03 Endress+Hauser SE+Co. KG Verfahren zur Herstellung einer Druckmesseinrichtung

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4333349A (en) * 1980-10-06 1982-06-08 Kulite Semiconductor Products, Inc. Binary balancing apparatus for semiconductor transducer structures
JPS59217375A (ja) * 1983-05-26 1984-12-07 Toyota Central Res & Dev Lab Inc 半導体機械−電気変換装置
DE3319605A1 (de) * 1983-05-30 1984-12-06 Siemens AG, 1000 Berlin und 8000 München Sensor mit polykristallinen silicium-widerstaenden
US4682503A (en) * 1986-05-16 1987-07-28 Honeywell Inc. Microscopic size, thermal conductivity type, air or gas absolute pressure sensor
US4726232A (en) * 1986-06-02 1988-02-23 Gould Inc. Temperature coefficient compensated pressure transducer
JP3114453B2 (ja) * 1993-10-05 2000-12-04 株式会社日立製作所 物理量検出センサ及びプロセス状態検出器
DE4415984A1 (de) * 1994-05-06 1995-11-09 Bosch Gmbh Robert Halbleitersensor mit Schutzschicht
JP3319173B2 (ja) * 1994-09-19 2002-08-26 株式会社日立製作所 センサ
DE19517676B4 (de) * 1995-05-13 2008-01-31 Robert Bosch Gmbh Drucksensor für eine Brennkraftmaschine mit einem Ansaugrohr
DE19701055B4 (de) 1997-01-15 2016-04-28 Robert Bosch Gmbh Halbleiter-Drucksensor
DE19731420A1 (de) * 1997-07-22 1999-01-28 Bosch Gmbh Robert Vorrichtung zur Erfassung des Drucks und der Temperatur im Saugrohr einer Brennkraftmaschine und Verfahren zu ihrer Herstellung
JP3873454B2 (ja) * 1998-05-29 2007-01-24 株式会社デンソー 半導体圧力センサ
DE19825464A1 (de) * 1998-06-08 1999-12-09 Bosch Gmbh Robert Vorrichtung zur Druckmessung

Also Published As

Publication number Publication date
JP4921674B2 (ja) 2012-04-25
DE10013904A1 (de) 2001-09-27
WO2001070625A2 (de) 2001-09-27
JP2004506522A (ja) 2004-03-04
WO2001070625A3 (de) 2002-10-24
EP1277033B1 (de) 2009-09-23
US20030150253A1 (en) 2003-08-14
EP1277033A2 (de) 2003-01-22
US6782756B2 (en) 2004-08-31

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition