DE4112946A1 - Gepulstes gasentladungslasersystem - Google Patents

Gepulstes gasentladungslasersystem

Info

Publication number
DE4112946A1
DE4112946A1 DE4112946A DE4112946A DE4112946A1 DE 4112946 A1 DE4112946 A1 DE 4112946A1 DE 4112946 A DE4112946 A DE 4112946A DE 4112946 A DE4112946 A DE 4112946A DE 4112946 A1 DE4112946 A1 DE 4112946A1
Authority
DE
Germany
Prior art keywords
microwave
gas discharge
gas
laser system
discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE4112946A
Other languages
German (de)
English (en)
Other versions
DE4112946C2 (enExample
Inventor
Frank Dipl Ing Gekat
Hans Klingenberg
Gerhard Krutina
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Deutsches Zentrum fuer Luft und Raumfahrt eV
Original Assignee
Deutsches Zentrum fuer Luft und Raumfahrt eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Deutsches Zentrum fuer Luft und Raumfahrt eV filed Critical Deutsches Zentrum fuer Luft und Raumfahrt eV
Priority to DE4112946A priority Critical patent/DE4112946A1/de
Priority to PCT/EP1992/000808 priority patent/WO1992019028A1/de
Priority to US07/958,336 priority patent/US5347530A/en
Priority to JP4507494A priority patent/JPH0728064B2/ja
Publication of DE4112946A1 publication Critical patent/DE4112946A1/de
Application granted granted Critical
Publication of DE4112946C2 publication Critical patent/DE4112946C2/de
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H01S3/0943—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a gas laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0975—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser using inductive or capacitive excitation

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
DE4112946A 1991-04-20 1991-04-20 Gepulstes gasentladungslasersystem Granted DE4112946A1 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE4112946A DE4112946A1 (de) 1991-04-20 1991-04-20 Gepulstes gasentladungslasersystem
PCT/EP1992/000808 WO1992019028A1 (de) 1991-04-20 1992-04-09 Gepulstes gasentladungslasersystem
US07/958,336 US5347530A (en) 1991-04-20 1992-04-09 Pulsed gas-discharge laser system
JP4507494A JPH0728064B2 (ja) 1991-04-20 1992-04-09 気体放電パルスレーザシステム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4112946A DE4112946A1 (de) 1991-04-20 1991-04-20 Gepulstes gasentladungslasersystem

Publications (2)

Publication Number Publication Date
DE4112946A1 true DE4112946A1 (de) 1992-10-22
DE4112946C2 DE4112946C2 (enExample) 1993-02-04

Family

ID=6430003

Family Applications (1)

Application Number Title Priority Date Filing Date
DE4112946A Granted DE4112946A1 (de) 1991-04-20 1991-04-20 Gepulstes gasentladungslasersystem

Country Status (4)

Country Link
US (1) US5347530A (enExample)
JP (1) JPH0728064B2 (enExample)
DE (1) DE4112946A1 (enExample)
WO (1) WO1992019028A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5684821A (en) * 1995-05-24 1997-11-04 Lite Jet, Inc. Microwave excited laser with uniform gas discharge
US6331994B1 (en) 1996-07-19 2001-12-18 Canon Kabushiki Kaisha Excimer laser oscillation apparatus and method, excimer laser exposure apparatus, and laser tube
US6819687B1 (en) * 1997-12-10 2004-11-16 Nellcor Puritan Bennett Incorporated Non-imaging optical corner turner
US6804285B2 (en) 1998-10-29 2004-10-12 Canon Kabushiki Kaisha Gas supply path structure for a gas laser
JP4256520B2 (ja) * 1999-02-26 2009-04-22 忠弘 大見 レーザ発振装置、露光装置及びデバイスの製造方法
RU2164048C1 (ru) * 1999-07-20 2001-03-10 Корчагин Юрий Владимирович Устройство для свч возбуждения и поддержания генерации газоразрядного лазера при помощи создания плазменной коаксиальной линии
JP3404521B2 (ja) * 1999-09-24 2003-05-12 宇都宮大学長 短パルスマイクロ波の生成方法及び生成装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4513424A (en) * 1982-09-21 1985-04-23 Waynant Ronald W Laser pumped by X-band microwaves
DE3708314A1 (de) * 1987-03-14 1988-09-22 Deutsche Forsch Luft Raumfahrt Mikrowellengepumpter hochdruckgasentladungslaser
US4802183A (en) * 1982-04-07 1989-01-31 Board Of Trustees Of The Leland Stanford Junior University Microwave excited excimer laser and method
DE4008195A1 (de) * 1990-03-15 1991-09-26 Fraunhofer Ges Forschung Vorrichtung zur anregung des gases einer gasentladungsstrecke mit mikrowellenenergie

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4710939A (en) * 1983-07-23 1987-12-01 Quantum Diagnostics Ltd. X-ray frequency down converter
US4862886A (en) * 1985-05-08 1989-09-05 Summit Technology Inc. Laser angioplasty
US4796271A (en) * 1987-07-02 1989-01-03 Potomac Photonics, Inc. High duty factor rare gas halide laser
JPH01262682A (ja) * 1988-04-14 1989-10-19 Toshiba Corp マイクロ波レーザ装置
JPH0240978A (ja) * 1988-07-30 1990-02-09 Matsushita Electric Ind Co Ltd ガスレーザ発振装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4802183A (en) * 1982-04-07 1989-01-31 Board Of Trustees Of The Leland Stanford Junior University Microwave excited excimer laser and method
US4513424A (en) * 1982-09-21 1985-04-23 Waynant Ronald W Laser pumped by X-band microwaves
DE3708314A1 (de) * 1987-03-14 1988-09-22 Deutsche Forsch Luft Raumfahrt Mikrowellengepumpter hochdruckgasentladungslaser
DE4008195A1 (de) * 1990-03-15 1991-09-26 Fraunhofer Ges Forschung Vorrichtung zur anregung des gases einer gasentladungsstrecke mit mikrowellenenergie

Non-Patent Citations (5)

* Cited by examiner, † Cited by third party
Title
1982, S. 1839-1840 *
CHRISTENSEN, C. P. et al.: High efficiency micro- wave discharge XeCl laser. In: US-Z.: Appl. Phys. Lett., Vol. 46, No. 4, 1985, S. 321-323 *
KLINGENBERG, H.H. et al.: L-band microwave pumped XeCl laser without preionization. In: US-Z.: Applied Optics, Vol. 29, No. 9, 1990, S.1246-1248 *
KLINGENBERG, H.H., GEKAT, F.: Mikrowellenanregung von Excimerlasern. In: DE-Z.: Laser und Optoelek- tronik, Vol. 22, No. 4, 1990, S. 60-62 *
WISOFF, P. I. K. et al.: Improced Performance of the Microwave-Pumped XeCl Laser. In: US-Z.: IEEE Journal of Quantum Electronics, Vol. QE-18, No.11 *

Also Published As

Publication number Publication date
US5347530A (en) 1994-09-13
JPH0728064B2 (ja) 1995-03-29
WO1992019028A1 (de) 1992-10-29
JPH05507181A (ja) 1993-10-14
DE4112946C2 (enExample) 1993-02-04

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: DEUTSCHES ZENTRUM FUER LUFT- UND RAUMFAHRT E.V., 5

8339 Ceased/non-payment of the annual fee