DE4108944A1 - Verfahren und einrichtung zur beruehrungslosen erfassung der oberflaechengestalt von diffus streuenden objekten - Google Patents
Verfahren und einrichtung zur beruehrungslosen erfassung der oberflaechengestalt von diffus streuenden objektenInfo
- Publication number
- DE4108944A1 DE4108944A1 DE19914108944 DE4108944A DE4108944A1 DE 4108944 A1 DE4108944 A1 DE 4108944A1 DE 19914108944 DE19914108944 DE 19914108944 DE 4108944 A DE4108944 A DE 4108944A DE 4108944 A1 DE4108944 A1 DE 4108944A1
- Authority
- DE
- Germany
- Prior art keywords
- aperture angle
- speckle
- contrast
- interference
- coherence length
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005259 measurement Methods 0.000 title claims abstract description 13
- 238000005286 illumination Methods 0.000 title claims abstract description 10
- 235000012431 wafers Nutrition 0.000 title description 3
- 239000004065 semiconductor Substances 0.000 title description 2
- 238000003384 imaging method Methods 0.000 claims abstract description 7
- 230000003287 optical effect Effects 0.000 claims abstract description 4
- 230000003746 surface roughness Effects 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 25
- 238000001914 filtration Methods 0.000 claims description 4
- 239000006185 dispersion Substances 0.000 claims description 3
- 238000011156 evaluation Methods 0.000 claims description 3
- 235000015241 bacon Nutrition 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 230000008901 benefit Effects 0.000 abstract description 3
- 238000005305 interferometry Methods 0.000 description 8
- 239000011521 glass Substances 0.000 description 4
- 230000001427 coherent effect Effects 0.000 description 3
- 210000003128 head Anatomy 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
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- 210000001747 pupil Anatomy 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000000386 microscopy Methods 0.000 description 2
- 238000010008 shearing Methods 0.000 description 2
- 235000010678 Paulownia tomentosa Nutrition 0.000 description 1
- 240000002834 Paulownia tomentosa Species 0.000 description 1
- 241000972450 Triangula Species 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
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- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
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- 238000003801 milling Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000001314 profilometry Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/0209—Low-coherence interferometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02094—Speckle interferometers, i.e. for detecting changes in speckle pattern
- G01B9/02096—Speckle interferometers, i.e. for detecting changes in speckle pattern detecting a contour or curvature
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19914108944 DE4108944A1 (de) | 1991-03-19 | 1991-03-19 | Verfahren und einrichtung zur beruehrungslosen erfassung der oberflaechengestalt von diffus streuenden objekten |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19914108944 DE4108944A1 (de) | 1991-03-19 | 1991-03-19 | Verfahren und einrichtung zur beruehrungslosen erfassung der oberflaechengestalt von diffus streuenden objekten |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE4108944A1 true DE4108944A1 (de) | 1992-09-24 |
| DE4108944C2 DE4108944C2 (https=) | 1993-07-01 |
Family
ID=6427668
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19914108944 Granted DE4108944A1 (de) | 1991-03-19 | 1991-03-19 | Verfahren und einrichtung zur beruehrungslosen erfassung der oberflaechengestalt von diffus streuenden objekten |
Country Status (1)
| Country | Link |
|---|---|
| DE (1) | DE4108944A1 (https=) |
Cited By (36)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4404154A1 (de) * | 1994-02-10 | 1995-08-17 | Fraunhofer Ges Forschung | Verfahren und Vorrichtung zum optischen Untersuchen einer Oberfläche |
| US5519204A (en) * | 1994-04-25 | 1996-05-21 | Cyberoptics Corporation | Method and apparatus for exposure control in light-based measurement instruments |
| EP0768511A1 (en) * | 1995-10-16 | 1997-04-16 | European Community | Optical three-dimensional profilometry method based on processing speckle images in partially coherent light, and interferometer implementing such a method |
| DE29715904U1 (de) * | 1997-09-01 | 1997-10-23 | OMECA Messtechnik GmbH, 14513 Teltow | Interferenzoptische Meßeinrichtung |
| EP0746745A4 (en) * | 1993-02-01 | 1997-12-17 | Zygo Corp | METHOD AND APPARATUS FOR QUICK ACQUISITION OF DATA FOR COHERENCE SCANNING INTERFEROMETRY |
| DE19721882A1 (de) * | 1997-05-26 | 1998-12-03 | Bosch Gmbh Robert | Interferometrische Meßvorrichtung |
| DE19721881A1 (de) * | 1997-05-26 | 1998-12-03 | Bosch Gmbh Robert | Interferometrische Meßvorrichtung |
| DE19808273A1 (de) * | 1998-02-27 | 1999-09-09 | Bosch Gmbh Robert | Interferometrische Meßeinrichtung zum Erfassen der Form oder des Abstandes insbesondere rauher Oberflächen |
| DE19819762A1 (de) * | 1998-05-04 | 1999-11-25 | Bosch Gmbh Robert | Interferometrische Meßeinrichtung |
| DE19733890C2 (de) * | 1996-08-04 | 2000-03-16 | Matsushita Electric Industrial Co Ltd | Verfahren zum Vermessen eines Mediums und Vorrichtung dazu |
| WO2001027558A1 (de) * | 1999-10-09 | 2001-04-19 | Robert Bosch Gmbh | Interferometrische messvorrichtung zur formvermessung |
| US6243169B1 (en) | 1997-05-26 | 2001-06-05 | Robert Bosch Gmbh | Interferometric instrument provided with an arrangement for periodically changing a light path of a received beam component |
| WO2002082007A1 (de) * | 2001-04-09 | 2002-10-17 | Robert Bosch Gmbh | Interferometrische messvorrichtung |
| WO2003058163A1 (en) * | 2001-12-05 | 2003-07-17 | Semiconductor Technologies & Instruments, Inc. | System and method for inspection using white light intererometry |
| DE10203797C1 (de) * | 2002-01-31 | 2003-08-14 | Bosch Gmbh Robert | Verfahren und Vorrichtung zur dreidimensionalen interferometrischen Messung |
| US6822746B2 (en) | 2000-07-07 | 2004-11-23 | Robert Bosch Gmbh | Interferometric, low coherence shape measurement device for a plurality of surfaces (valve seat) via several reference planes |
| DE10047495B4 (de) * | 1999-10-09 | 2005-06-09 | Robert Bosch Gmbh | Interferometrische Messvorrichtung zur Formvermessung |
| US6934027B2 (en) | 2000-07-07 | 2005-08-23 | Robert Bosch Gmbh | Interferometric measuring device |
| US6943895B2 (en) | 2000-03-30 | 2005-09-13 | Robert Bosch Gmbh | Interferometric measuring device |
| DE102004045802A1 (de) * | 2004-09-22 | 2006-03-30 | Robert Bosch Gmbh | Interferometrisches System mit Referenzfläche mit einer verspiegelten Zone |
| DE10131779B4 (de) * | 2000-07-07 | 2006-05-11 | Robert Bosch Gmbh | Interferometrische Messvorrichtung |
| DE102004063076A1 (de) * | 2004-12-28 | 2006-07-06 | Robert Bosch Gmbh | Verfahren zur Vermessung einer strukturierten Oberfläche sowie Vorrichtung zur Durchführung des Verfahrens |
| US7106454B2 (en) | 2003-03-06 | 2006-09-12 | Zygo Corporation | Profiling complex surface structures using scanning interferometry |
| US7139081B2 (en) | 2002-09-09 | 2006-11-21 | Zygo Corporation | Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures |
| US7139079B2 (en) | 2001-04-09 | 2006-11-21 | Robert Bosch Gmbh | Interferometric measuring device |
| US7271918B2 (en) | 2003-03-06 | 2007-09-18 | Zygo Corporation | Profiling complex surface structures using scanning interferometry |
| US7289225B2 (en) | 2003-09-15 | 2007-10-30 | Zygo Corporation | Surface profiling using an interference pattern matching template |
| US7321431B2 (en) | 2005-05-19 | 2008-01-22 | Zygo Corporation | Method and system for analyzing low-coherence interferometry signals for information about thin film structures |
| US7324214B2 (en) | 2003-03-06 | 2008-01-29 | Zygo Corporation | Interferometer and method for measuring characteristics of optically unresolved surface features |
| US7324210B2 (en) | 2003-10-27 | 2008-01-29 | Zygo Corporation | Scanning interferometry for thin film thickness and surface measurements |
| US7852487B2 (en) | 2007-03-03 | 2010-12-14 | Polytec Gmbh | Heterodyne interferometer device for optically measuring an object |
| DE10138656B4 (de) * | 2000-08-08 | 2012-06-21 | Mitutoyo Corp. | Oberflächenprofilmesseinrichtung |
| EP2676123A4 (en) * | 2011-02-18 | 2016-01-20 | Gen Hospital Corp | LASER SPECKLE MICROOROMETER FOR MEASURING THE MECHANICAL PROPERTIES OF A BIOLOGICAL TISSUE |
| DE102015113465A1 (de) | 2015-08-14 | 2017-02-16 | Medizinisches Laserzentrum Lübeck GmbH | Verfahren und Vorrichtung zum Ablichten wenigstens einer Schnittfläche im Innern eines Licht streuenden Objekts |
| WO2017145145A1 (en) | 2016-02-25 | 2017-08-31 | ContinUse Biometrics Ltd. | A method and system for monitoring parameters of a moving object |
| CN109959543A (zh) * | 2019-05-05 | 2019-07-02 | 中国人民解放军陆军装甲兵学院 | 散斑标记方法和检测涂层材料损伤的方法 |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4309056B4 (de) * | 1993-03-20 | 2006-05-24 | Häusler, Gerd, Prof. Dr. | Verfahren und Vorrichtung zur Ermittlung der Entfernung und Streuintensität von streuenden Punkten |
| DE19544253B4 (de) * | 1995-11-28 | 2006-06-29 | Jochen Neumann | Verfahren zur Dispersionskompensation bei Interferometern mit nicht symmetrisch zum Referenzstrahlengang ausgefühltem Objektstrahlengang |
| DE19721883C2 (de) * | 1997-05-26 | 1999-04-15 | Bosch Gmbh Robert | Interferometrische Meßvorrichtung |
| US6195168B1 (en) | 1999-07-22 | 2001-02-27 | Zygo Corporation | Infrared scanning interferometry apparatus and method |
| US7869057B2 (en) | 2002-09-09 | 2011-01-11 | Zygo Corporation | Multiple-angle multiple-wavelength interferometer using high-NA imaging and spectral analysis |
| EP1853874B1 (en) | 2005-01-20 | 2009-09-02 | Zygo Corporation | Interferometer for determining characteristics of an object surface |
| US7884947B2 (en) | 2005-01-20 | 2011-02-08 | Zygo Corporation | Interferometry for determining characteristics of an object surface, with spatially coherent illumination |
| DE102005023212B4 (de) * | 2005-05-16 | 2007-07-12 | Häusler, Gerd, Prof. Dr. | Verfahren und Vorrichtung zur schnellen und genauen Weisslichtinterferometrie |
| US7636168B2 (en) | 2005-10-11 | 2009-12-22 | Zygo Corporation | Interferometry method and system including spectral decomposition |
| DE102006007573B4 (de) * | 2006-02-18 | 2009-08-13 | Carl Mahr Holding Gmbh | Verfahren und Vorrichtung zur 3D-Geometrieerfassung von Objektoberflächen |
| WO2008011510A2 (en) | 2006-07-21 | 2008-01-24 | Zygo Corporation | Compensation of systematic effects in low coherence interferometry |
| US7889355B2 (en) | 2007-01-31 | 2011-02-15 | Zygo Corporation | Interferometry for lateral metrology |
| US7619746B2 (en) | 2007-07-19 | 2009-11-17 | Zygo Corporation | Generating model signals for interferometry |
| US8072611B2 (en) | 2007-10-12 | 2011-12-06 | Zygo Corporation | Interferometric analysis of under-resolved features |
| KR101274517B1 (ko) | 2007-11-13 | 2013-06-13 | 지고 코포레이션 | 편광 스캐닝을 이용한 간섭계 |
| JP5290322B2 (ja) | 2007-12-14 | 2013-09-18 | ザイゴ コーポレーション | 走査干渉法を使用した表面構造の解析 |
| US8120781B2 (en) | 2008-11-26 | 2012-02-21 | Zygo Corporation | Interferometric systems and methods featuring spectral analysis of unevenly sampled data |
| DE102010044826B4 (de) * | 2010-09-09 | 2018-05-17 | Visiocraft Gmbh | Detektor sowie Meßvorrichtung und Verfahren zur Bestimmung der Dicke einer Probe |
| CZ306411B6 (cs) * | 2015-05-22 | 2017-01-11 | Fyzikální ústav AV ČR, v.v.i. | Zařízení pro bezkontaktní měření tvaru předmětu |
| DE102016114248B4 (de) * | 2016-08-02 | 2019-11-21 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Vorrichtung zur Vermessung eines Objekts mittels Speckle-Interferometrie und zugehöriges Verfahren |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3318678A1 (de) * | 1983-05-21 | 1984-11-22 | Adolf Friedrich Prof. Dr.-Phys. Fercher | Verfahren und vorrichtung zur interferometrie rauher oberflaechen |
| DE3614332A1 (de) * | 1986-04-28 | 1987-10-29 | Haeusler Gerd | Verfahren und vorrichtung zur empfindlichkeitssteigerung bei der optischen entfernungsmessung |
| US4913547A (en) * | 1988-01-29 | 1990-04-03 | Moran Steven E | Optically phased-locked speckle pattern interferometer |
-
1991
- 1991-03-19 DE DE19914108944 patent/DE4108944A1/de active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3318678A1 (de) * | 1983-05-21 | 1984-11-22 | Adolf Friedrich Prof. Dr.-Phys. Fercher | Verfahren und vorrichtung zur interferometrie rauher oberflaechen |
| DE3614332A1 (de) * | 1986-04-28 | 1987-10-29 | Haeusler Gerd | Verfahren und vorrichtung zur empfindlichkeitssteigerung bei der optischen entfernungsmessung |
| US4913547A (en) * | 1988-01-29 | 1990-04-03 | Moran Steven E | Optically phased-locked speckle pattern interferometer |
Cited By (58)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0746745A4 (en) * | 1993-02-01 | 1997-12-17 | Zygo Corp | METHOD AND APPARATUS FOR QUICK ACQUISITION OF DATA FOR COHERENCE SCANNING INTERFEROMETRY |
| DE4404154A1 (de) * | 1994-02-10 | 1995-08-17 | Fraunhofer Ges Forschung | Verfahren und Vorrichtung zum optischen Untersuchen einer Oberfläche |
| US5519204A (en) * | 1994-04-25 | 1996-05-21 | Cyberoptics Corporation | Method and apparatus for exposure control in light-based measurement instruments |
| US5821527A (en) * | 1994-04-25 | 1998-10-13 | Cyberoptics Corporation | Method and apparatus for exposure control in light-based measurement instruments |
| EP0768511A1 (en) * | 1995-10-16 | 1997-04-16 | European Community | Optical three-dimensional profilometry method based on processing speckle images in partially coherent light, and interferometer implementing such a method |
| DE19733890C2 (de) * | 1996-08-04 | 2000-03-16 | Matsushita Electric Industrial Co Ltd | Verfahren zum Vermessen eines Mediums und Vorrichtung dazu |
| US6297884B1 (en) | 1997-05-26 | 2001-10-02 | Robert Bosch Bmgh | Interferometric instrument provided with an arrangement for producing a frequency shift between two interfering beam components |
| US6252669B1 (en) | 1997-05-26 | 2001-06-26 | Robert Bosch Gmbh | Interferometric instrument provided with an arrangement for producing a frequency shift between two interfering beam components |
| DE19721882C2 (de) * | 1997-05-26 | 1999-04-29 | Bosch Gmbh Robert | Interferometrische Meßvorrichtung |
| DE19721881C2 (de) * | 1997-05-26 | 1999-05-20 | Bosch Gmbh Robert | Interferometrische Meßvorrichtung |
| DE19721881A1 (de) * | 1997-05-26 | 1998-12-03 | Bosch Gmbh Robert | Interferometrische Meßvorrichtung |
| DE19721882A1 (de) * | 1997-05-26 | 1998-12-03 | Bosch Gmbh Robert | Interferometrische Meßvorrichtung |
| US6243169B1 (en) | 1997-05-26 | 2001-06-05 | Robert Bosch Gmbh | Interferometric instrument provided with an arrangement for periodically changing a light path of a received beam component |
| DE29715904U1 (de) * | 1997-09-01 | 1997-10-23 | OMECA Messtechnik GmbH, 14513 Teltow | Interferenzoptische Meßeinrichtung |
| DE19808273A1 (de) * | 1998-02-27 | 1999-09-09 | Bosch Gmbh Robert | Interferometrische Meßeinrichtung zum Erfassen der Form oder des Abstandes insbesondere rauher Oberflächen |
| DE19819762A1 (de) * | 1998-05-04 | 1999-11-25 | Bosch Gmbh Robert | Interferometrische Meßeinrichtung |
| WO2001027558A1 (de) * | 1999-10-09 | 2001-04-19 | Robert Bosch Gmbh | Interferometrische messvorrichtung zur formvermessung |
| US6813029B1 (en) | 1999-10-09 | 2004-11-02 | Robert Bosch Gmbh | Interferometric measuring device for form measurement |
| DE10047495B4 (de) * | 1999-10-09 | 2005-06-09 | Robert Bosch Gmbh | Interferometrische Messvorrichtung zur Formvermessung |
| US6943895B2 (en) | 2000-03-30 | 2005-09-13 | Robert Bosch Gmbh | Interferometric measuring device |
| DE10131779B4 (de) * | 2000-07-07 | 2006-05-11 | Robert Bosch Gmbh | Interferometrische Messvorrichtung |
| US6934027B2 (en) | 2000-07-07 | 2005-08-23 | Robert Bosch Gmbh | Interferometric measuring device |
| US6822746B2 (en) | 2000-07-07 | 2004-11-23 | Robert Bosch Gmbh | Interferometric, low coherence shape measurement device for a plurality of surfaces (valve seat) via several reference planes |
| DE10138656B4 (de) * | 2000-08-08 | 2012-06-21 | Mitutoyo Corp. | Oberflächenprofilmesseinrichtung |
| WO2002082007A1 (de) * | 2001-04-09 | 2002-10-17 | Robert Bosch Gmbh | Interferometrische messvorrichtung |
| US7139079B2 (en) | 2001-04-09 | 2006-11-21 | Robert Bosch Gmbh | Interferometric measuring device |
| WO2003058163A1 (en) * | 2001-12-05 | 2003-07-17 | Semiconductor Technologies & Instruments, Inc. | System and method for inspection using white light intererometry |
| US7158235B2 (en) | 2001-12-05 | 2007-01-02 | Rudolph Technologies, Inc. | System and method for inspection using white light interferometry |
| DE10203797C1 (de) * | 2002-01-31 | 2003-08-14 | Bosch Gmbh Robert | Verfahren und Vorrichtung zur dreidimensionalen interferometrischen Messung |
| US7403289B2 (en) | 2002-09-09 | 2008-07-22 | Zygo Corporation | Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures |
| US7315382B2 (en) | 2002-09-09 | 2008-01-01 | Zygo Corporation | Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures |
| US7139081B2 (en) | 2002-09-09 | 2006-11-21 | Zygo Corporation | Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures |
| US7106454B2 (en) | 2003-03-06 | 2006-09-12 | Zygo Corporation | Profiling complex surface structures using scanning interferometry |
| US7239398B2 (en) | 2003-03-06 | 2007-07-03 | Zygo Corporation | Profiling complex surface structures using height scanning interferometry |
| US7271918B2 (en) | 2003-03-06 | 2007-09-18 | Zygo Corporation | Profiling complex surface structures using scanning interferometry |
| US7324214B2 (en) | 2003-03-06 | 2008-01-29 | Zygo Corporation | Interferometer and method for measuring characteristics of optically unresolved surface features |
| US7289225B2 (en) | 2003-09-15 | 2007-10-30 | Zygo Corporation | Surface profiling using an interference pattern matching template |
| US7289224B2 (en) | 2003-09-15 | 2007-10-30 | Zygo Corporation | Low coherence grazing incidence interferometry for profiling and tilt sensing |
| US7292346B2 (en) | 2003-09-15 | 2007-11-06 | Zygo Corporation | Triangulation methods and systems for profiling surfaces through a thin film coating |
| US7298494B2 (en) | 2003-09-15 | 2007-11-20 | Zygo Corporation | Methods and systems for interferometric analysis of surfaces and related applications |
| US7468799B2 (en) | 2003-10-27 | 2008-12-23 | Zygo Corporation | Scanning interferometry for thin film thickness and surface measurements |
| US7324210B2 (en) | 2003-10-27 | 2008-01-29 | Zygo Corporation | Scanning interferometry for thin film thickness and surface measurements |
| DE102004045802A1 (de) * | 2004-09-22 | 2006-03-30 | Robert Bosch Gmbh | Interferometrisches System mit Referenzfläche mit einer verspiegelten Zone |
| DE102004045802B4 (de) * | 2004-09-22 | 2009-02-05 | Robert Bosch Gmbh | Interferometrisches System mit Referenzfläche mit einer verspiegelten Zone |
| US8035821B2 (en) | 2004-09-22 | 2011-10-11 | Robert Bosch Gmbh | Interferometric system having a reference surface including a mirrored zone |
| DE102004063076A1 (de) * | 2004-12-28 | 2006-07-06 | Robert Bosch Gmbh | Verfahren zur Vermessung einer strukturierten Oberfläche sowie Vorrichtung zur Durchführung des Verfahrens |
| US7564566B2 (en) | 2005-05-19 | 2009-07-21 | Zygo Corporation | Method and system for analyzing low-coherence interferometry signals for information about thin film structures |
| US7321431B2 (en) | 2005-05-19 | 2008-01-22 | Zygo Corporation | Method and system for analyzing low-coherence interferometry signals for information about thin film structures |
| US7852487B2 (en) | 2007-03-03 | 2010-12-14 | Polytec Gmbh | Heterodyne interferometer device for optically measuring an object |
| EP2676123A4 (en) * | 2011-02-18 | 2016-01-20 | Gen Hospital Corp | LASER SPECKLE MICROOROMETER FOR MEASURING THE MECHANICAL PROPERTIES OF A BIOLOGICAL TISSUE |
| DE102015113465A1 (de) | 2015-08-14 | 2017-02-16 | Medizinisches Laserzentrum Lübeck GmbH | Verfahren und Vorrichtung zum Ablichten wenigstens einer Schnittfläche im Innern eines Licht streuenden Objekts |
| WO2017029160A1 (de) | 2015-08-14 | 2017-02-23 | Universität Zu Lübeck | Verfahren und vorrichtung zum ablichten wenigstens einer schnittfläche im innern eines licht streuenden objekts |
| DE102015113465B4 (de) | 2015-08-14 | 2018-05-03 | Medizinisches Laserzentrum Lübeck GmbH | Verfahren und Vorrichtung zum Ablichten wenigstens einer Schnittfläche im Innern eines Licht streuenden Objekts |
| WO2017145145A1 (en) | 2016-02-25 | 2017-08-31 | ContinUse Biometrics Ltd. | A method and system for monitoring parameters of a moving object |
| CN108780004A (zh) * | 2016-02-25 | 2018-11-09 | 康廷尤斯生物测定有限公司 | 用于监测运动对象的参数的方法和系统 |
| EP3420324A4 (en) * | 2016-02-25 | 2019-10-30 | Continuse Biometrics Ltd. | METHOD AND SYSTEM FOR MONITORING THE PARAMETERS OF A MOVING OBJECT |
| US10883818B2 (en) | 2016-02-25 | 2021-01-05 | ContinUse Biometrics Ltd. | Optical transforming and modulated interference pattern of a moving object |
| CN109959543A (zh) * | 2019-05-05 | 2019-07-02 | 中国人民解放军陆军装甲兵学院 | 散斑标记方法和检测涂层材料损伤的方法 |
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| DE4108944C2 (https=) | 1993-07-01 |
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