DE4103994C2 - - Google Patents

Info

Publication number
DE4103994C2
DE4103994C2 DE4103994A DE4103994A DE4103994C2 DE 4103994 C2 DE4103994 C2 DE 4103994C2 DE 4103994 A DE4103994 A DE 4103994A DE 4103994 A DE4103994 A DE 4103994A DE 4103994 C2 DE4103994 C2 DE 4103994C2
Authority
DE
Germany
Prior art keywords
layer
heat
mass
ceramic
outer layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE4103994A
Other languages
German (de)
English (en)
Other versions
DE4103994A1 (de
Inventor
Boris Alex'evic Movcan
Igor Sergeevic Malasenko
Nikolaj Ivanovic Grechanjuk
Konstantin Juvenal'evic Yakovchuk
Sergej Viktorovic Kiew/Kiev Ua Domoroslov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Institut Elektrosvarki Imeni E O Patona Akademii Nauk Ukrainskoi Ssr
Original Assignee
Institut Elektrosvarki Imeni E O Patona Akademii Nauk Ukrainskoi Ssr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Institut Elektrosvarki Imeni E O Patona Akademii Nauk Ukrainskoi Ssr filed Critical Institut Elektrosvarki Imeni E O Patona Akademii Nauk Ukrainskoi Ssr
Publication of DE4103994A1 publication Critical patent/DE4103994A1/de
Application granted granted Critical
Publication of DE4103994C2 publication Critical patent/DE4103994C2/de
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58After-treatment
    • C23C14/5806Thermal treatment
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08Oxides
    • C23C14/083Oxides of refractory metals or yttrium
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • C23C14/16Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58After-treatment
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01DNON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
    • F01D5/00Blades; Blade-carrying members; Heating, heat-insulating, cooling or antivibration means on the blades or the members
    • F01D5/12Blades
    • F01D5/28Selecting particular materials; Particular measures relating thereto; Measures against erosion or corrosion
    • F01D5/288Protective coatings for blades
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02TCLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T50/00Aeronautics or air transport
    • Y02T50/60Efficient propulsion technologies, e.g. for aircraft

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Turbine Rotor Nozzle Sealing (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
DE4103994A 1991-02-11 1991-02-09 Schutzueberzug vom typ metall-keramik fuer einzelteile aus hitzebestaendigen legierungen Granted DE4103994A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB9102806A GB2252567B (en) 1991-02-11 1991-02-11 Metal/ceramic protective coating for superalloy articles

Publications (2)

Publication Number Publication Date
DE4103994A1 DE4103994A1 (de) 1992-08-13
DE4103994C2 true DE4103994C2 (enExample) 1993-06-09

Family

ID=10689814

Family Applications (1)

Application Number Title Priority Date Filing Date
DE4103994A Granted DE4103994A1 (de) 1991-02-11 1991-02-09 Schutzueberzug vom typ metall-keramik fuer einzelteile aus hitzebestaendigen legierungen

Country Status (2)

Country Link
DE (1) DE4103994A1 (enExample)
GB (1) GB2252567B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10005998A1 (de) * 2000-02-11 2001-08-23 Audi Ag Wärmeschutzbeschichtung

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4226272C1 (de) * 1992-08-08 1994-02-10 Mtu Muenchen Gmbh Verfahren zur Behandlung von MCrAlZ-Schichten und mit dem Verfahren hergestellte Bauteile
EP0705911B1 (en) * 1994-10-04 2001-12-05 General Electric Company Thermal barrier coating
WO1996015284A1 (en) * 1994-11-09 1996-05-23 Cametoid Advanced Technologies Inc. Method of producing reactive element modified-aluminide diffusion coatings
JP3571052B2 (ja) * 1995-07-25 2004-09-29 シーメンス アクチエンゲゼルシヤフト 金属本体を備えた製品
US5683825A (en) * 1996-01-02 1997-11-04 General Electric Company Thermal barrier coating resistant to erosion and impact by particulate matter
US5824423A (en) * 1996-02-07 1998-10-20 N.V. Interturbine Thermal barrier coating system and methods
UA23886C2 (uk) * 1996-03-12 2002-04-15 Юнайтед Технолоджіз Корп. Пратт Енд Уітні Спосіб виготовлення пустотілих виробів складної форми
JP3302589B2 (ja) * 1997-02-06 2002-07-15 株式会社日立製作所 セラミック被覆ガスタービン動翼
FR2779448B1 (fr) * 1998-06-04 2000-12-15 Snecma Revetement ceramique a faible conductivite thermique et de type barriere thermique, procede de depot d'un tel revetement ceramique, et piece metallique protegee par ce revetement ceramique
JP3510993B2 (ja) 1999-12-10 2004-03-29 トーカロ株式会社 プラズマ処理容器内部材およびその製造方法
TW514996B (en) 1999-12-10 2002-12-21 Tokyo Electron Ltd Processing apparatus with a chamber having therein a high-corrosion-resistant sprayed film
CN1433486A (zh) * 2000-06-08 2003-07-30 表面工程设计产品公司 高温不锈钢涂覆系统
US6837966B2 (en) 2002-09-30 2005-01-04 Tokyo Electron Limeted Method and apparatus for an improved baffle plate in a plasma processing system
US7166200B2 (en) 2002-09-30 2007-01-23 Tokyo Electron Limited Method and apparatus for an improved upper electrode plate in a plasma processing system
US7166166B2 (en) 2002-09-30 2007-01-23 Tokyo Electron Limited Method and apparatus for an improved baffle plate in a plasma processing system
US7204912B2 (en) 2002-09-30 2007-04-17 Tokyo Electron Limited Method and apparatus for an improved bellows shield in a plasma processing system
US6798519B2 (en) 2002-09-30 2004-09-28 Tokyo Electron Limited Method and apparatus for an improved optical window deposition shield in a plasma processing system
US7137353B2 (en) 2002-09-30 2006-11-21 Tokyo Electron Limited Method and apparatus for an improved deposition shield in a plasma processing system
US7147749B2 (en) 2002-09-30 2006-12-12 Tokyo Electron Limited Method and apparatus for an improved upper electrode plate with deposition shield in a plasma processing system
TW200423195A (en) 2002-11-28 2004-11-01 Tokyo Electron Ltd Internal member of a plasma processing vessel
KR101016913B1 (ko) 2003-03-31 2011-02-22 도쿄엘렉트론가부시키가이샤 처리요소용 배리어층 및 그의 형성방법
US7560376B2 (en) 2003-03-31 2009-07-14 Tokyo Electron Limited Method for adjoining adjacent coatings on a processing element
WO2006052277A2 (en) * 2004-09-16 2006-05-18 Aeromet Technologies, Inc. Gas turbine engine components with aluminide coatings and method of forming such aluminide coatings on gas turbine engine components
US20060057418A1 (en) 2004-09-16 2006-03-16 Aeromet Technologies, Inc. Alluminide coatings containing silicon and yttrium for superalloys and method of forming such coatings
US7552521B2 (en) 2004-12-08 2009-06-30 Tokyo Electron Limited Method and apparatus for improved baffle plate
US9133718B2 (en) 2004-12-13 2015-09-15 Mt Coatings, Llc Turbine engine components with non-aluminide silicon-containing and chromium-containing protective coatings and methods of forming such non-aluminide protective coatings
US7601242B2 (en) 2005-01-11 2009-10-13 Tokyo Electron Limited Plasma processing system and baffle assembly for use in plasma processing system
US20060154093A1 (en) * 2005-01-13 2006-07-13 General Electric Company Multilayered environmental barrier coating and related articles and methods
DE102006001864A1 (de) 2006-01-13 2007-07-19 Mtu Aero Engines Gmbh Verschleißschutzbeschichtung
RU2375499C2 (ru) * 2007-12-20 2009-12-10 Федеральное государственное унитарное предприятие "Московское машиностроительное производственное предприятие "Салют" Способ получения многослойного теплозащитного покрытия на деталях из жаропрочных сплавов
GB2475850A (en) * 2009-12-02 2011-06-08 Rolls Royce Plc An Abrasive Layer and a Method Of Applying an Abrasive Layer on a Turbomachine Component
CN115028447B (zh) * 2022-05-27 2023-03-24 北京科技大学 一种基于相分离的亚微米级氧化锆陶瓷微球及其制备方法和应用

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4248940A (en) * 1977-06-30 1981-02-03 United Technologies Corporation Thermal barrier coating for nickel and cobalt base super alloys
US4481237A (en) * 1981-12-14 1984-11-06 United Technologies Corporation Method of applying ceramic coatings on a metallic substrate
IL75304A (en) * 1984-06-08 1989-03-31 United Technologies Corp Coated superalloy articles and method of strengthening same
EP0185603B1 (en) * 1984-11-28 1989-11-08 United Technologies Corporation Improved durability metallic-ceramic turbine air seals
IL84067A (en) * 1986-10-30 1992-03-29 United Technologies Corp Thermal barrier coating system
GB8715713D0 (en) * 1987-07-03 1987-10-21 Atomic Energy Authority Uk Metal substrate coatings
US4851300A (en) * 1988-05-09 1989-07-25 United Technologies Corporation Precoat for improving platinum thin film adhesion
US4936745A (en) * 1988-12-16 1990-06-26 United Technologies Corporation Thin abradable ceramic air seal

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10005998A1 (de) * 2000-02-11 2001-08-23 Audi Ag Wärmeschutzbeschichtung
DE10005998B4 (de) * 2000-02-11 2004-05-13 Audi Ag Wärmeschutzbeschichtung sowie Verwendung einer Wärmeschutzbeschichtung zur Beschichtung eines Wärmestrahlung abgebenden Bauteiles

Also Published As

Publication number Publication date
GB2252567B (en) 1994-09-14
DE4103994A1 (de) 1992-08-13
GB9102806D0 (en) 1991-03-27
GB2252567A (en) 1992-08-12

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee