DE4003184A1 - Verfahren zur zuechtung von mischkristallen aus schmelzen oxidischer vielstoffsysteme - Google Patents
Verfahren zur zuechtung von mischkristallen aus schmelzen oxidischer vielstoffsystemeInfo
- Publication number
- DE4003184A1 DE4003184A1 DE4003184A DE4003184A DE4003184A1 DE 4003184 A1 DE4003184 A1 DE 4003184A1 DE 4003184 A DE4003184 A DE 4003184A DE 4003184 A DE4003184 A DE 4003184A DE 4003184 A1 DE4003184 A1 DE 4003184A1
- Authority
- DE
- Germany
- Prior art keywords
- composition
- cations
- mixed
- mixed crystals
- crystals
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000013078 crystal Substances 0.000 title claims description 155
- 238000000034 method Methods 0.000 title claims description 41
- 238000002844 melting Methods 0.000 title description 6
- 230000008018 melting Effects 0.000 title description 6
- 150000001768 cations Chemical class 0.000 claims description 73
- 239000000203 mixture Substances 0.000 claims description 67
- 150000002500 ions Chemical class 0.000 claims description 34
- 239000000155 melt Substances 0.000 claims description 23
- 239000000758 substrate Substances 0.000 claims description 23
- 238000004519 manufacturing process Methods 0.000 claims description 16
- 239000001301 oxygen Substances 0.000 claims description 16
- 229910052760 oxygen Inorganic materials 0.000 claims description 16
- -1 oxygen ions Chemical group 0.000 claims description 15
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 8
- 150000002910 rare earth metals Chemical class 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 238000009826 distribution Methods 0.000 description 17
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical group [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 8
- 239000010955 niobium Substances 0.000 description 6
- 239000002887 superconductor Substances 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- 239000012071 phase Substances 0.000 description 5
- 238000004458 analytical method Methods 0.000 description 4
- 229910052741 iridium Inorganic materials 0.000 description 4
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 4
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical group [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 4
- 229910052715 tantalum Inorganic materials 0.000 description 4
- 229910002244 LaAlO3 Inorganic materials 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000009897 systematic effect Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910002331 LaGaO3 Inorganic materials 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000000407 epitaxy Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 229910002370 SrTiO3 Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 238000003877 atomic layer epitaxy Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000013590 bulk material Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000002223 garnet Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum oxide Inorganic materials [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 description 1
- 238000004943 liquid phase epitaxy Methods 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- KTUFCUMIWABKDW-UHFFFAOYSA-N oxo(oxolanthaniooxy)lanthanum Chemical compound O=[La]O[La]=O KTUFCUMIWABKDW-UHFFFAOYSA-N 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 229910052596 spinel Inorganic materials 0.000 description 1
- 239000011029 spinel Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 238000004260 weight control Methods 0.000 description 1
- 238000004876 x-ray fluorescence Methods 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/16—Oxides
- C30B29/22—Complex oxides
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE4003184A DE4003184A1 (de) | 1990-02-03 | 1990-02-03 | Verfahren zur zuechtung von mischkristallen aus schmelzen oxidischer vielstoffsysteme |
| EP91200183A EP0441429A2 (de) | 1990-02-03 | 1991-01-30 | Verfahren zur Züchtung von Mischkristallen aus Schmelzen oxidischer Vielstoffsysteme |
| US07/650,397 US5160401A (en) | 1990-02-03 | 1991-02-01 | Method of growing mixed crystals from melts of oxidic multicomponent systems |
| JP3033440A JPH04214095A (ja) | 1990-02-03 | 1991-02-04 | 混晶の成長方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE4003184A DE4003184A1 (de) | 1990-02-03 | 1990-02-03 | Verfahren zur zuechtung von mischkristallen aus schmelzen oxidischer vielstoffsysteme |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE4003184A1 true DE4003184A1 (de) | 1991-08-08 |
Family
ID=6399341
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE4003184A Withdrawn DE4003184A1 (de) | 1990-02-03 | 1990-02-03 | Verfahren zur zuechtung von mischkristallen aus schmelzen oxidischer vielstoffsysteme |
Country Status (4)
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0532815A1 (en) * | 1991-09-16 | 1993-03-24 | International Business Machines Corporation | Method for manufacturing lattice-matched substrates for high-Tc superconductor films |
| EP0624664B1 (en) * | 1993-05-10 | 1999-01-07 | International Superconductivity Technology Center | Method of preparing metal oxide crystal |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5431470B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1971-12-15 | 1979-10-06 | ||
| DD140678A1 (de) * | 1978-12-01 | 1980-03-19 | Peter Reiche | Verfahren zur herstellung von strontium-bariumniobat-einkristallen |
| US4724038A (en) * | 1986-06-02 | 1988-02-09 | Hughes Aircraft Company | Process for preparing single crystal binary metal oxides of improved purity |
| NL8800155A (nl) * | 1988-01-25 | 1989-08-16 | Philips Nv | Granaat en werkwijzen voor het bereiden van een granaat. |
| US4944833A (en) * | 1988-03-04 | 1990-07-31 | Litton Systems, Inc. | Czochralski pulling of monocrystalline lanthanum orthogallate |
-
1990
- 1990-02-03 DE DE4003184A patent/DE4003184A1/de not_active Withdrawn
-
1991
- 1991-01-30 EP EP91200183A patent/EP0441429A2/de not_active Withdrawn
- 1991-02-01 US US07/650,397 patent/US5160401A/en not_active Expired - Fee Related
- 1991-02-04 JP JP3033440A patent/JPH04214095A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| US5160401A (en) | 1992-11-03 |
| EP0441429A3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1994-03-09 |
| JPH04214095A (ja) | 1992-08-05 |
| EP0441429A2 (de) | 1991-08-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8139 | Disposal/non-payment of the annual fee |