DE3932228C2 - - Google Patents

Info

Publication number
DE3932228C2
DE3932228C2 DE3932228A DE3932228A DE3932228C2 DE 3932228 C2 DE3932228 C2 DE 3932228C2 DE 3932228 A DE3932228 A DE 3932228A DE 3932228 A DE3932228 A DE 3932228A DE 3932228 C2 DE3932228 C2 DE 3932228C2
Authority
DE
Germany
Prior art keywords
rotor
pump
stator
blades
side channel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE3932228A
Other languages
German (de)
English (en)
Other versions
DE3932228A1 (de
Inventor
Masahiro Tochigi Jp Mase
Seiji Sakagami
Takeshi Ibaraki Jp Okawada
Shinjiroo Abiko Jp Ueda
Yoshihisa Awada
Takashi Ibaraki Jp Nagaoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP63240727A external-priority patent/JP2557495B2/ja
Priority claimed from JP1083921A external-priority patent/JP2585420B2/ja
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of DE3932228A1 publication Critical patent/DE3932228A1/de
Application granted granted Critical
Publication of DE3932228C2 publication Critical patent/DE3932228C2/de
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DE3932228A 1988-09-28 1989-09-27 Turbovakuumpumpe Granted DE3932228A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP63240727A JP2557495B2 (ja) 1988-09-28 1988-09-28 多段円周流形真空ポンプ
JP1083921A JP2585420B2 (ja) 1989-04-04 1989-04-04 ターボ真空ポンプ

Publications (2)

Publication Number Publication Date
DE3932228A1 DE3932228A1 (de) 1990-04-05
DE3932228C2 true DE3932228C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-08-29

Family

ID=26424954

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3932228A Granted DE3932228A1 (de) 1988-09-28 1989-09-27 Turbovakuumpumpe

Country Status (2)

Country Link
US (1) US5020969A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE3932228A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10056144A1 (de) * 2000-11-13 2002-05-23 Pfeiffer Vacuum Gmbh Gasreibungspumpe

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2030561T3 (es) * 1988-06-24 1992-11-01 Siemens Aktiengesellschaft Grupo de bombas de vacio de varias fases.
JPH0330596U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1989-07-31 1991-03-26
US5238362A (en) * 1990-03-09 1993-08-24 Varian Associates, Inc. Turbomolecular pump
JP2928615B2 (ja) * 1990-09-28 1999-08-03 株式会社日立製作所 ターボ真空ポンプ
JPH0783189A (ja) * 1993-09-17 1995-03-28 Hitachi Ltd ターボ真空ポンプ
US5449270A (en) * 1994-06-24 1995-09-12 Varian Associates, Inc. Tangential flow pumping channel for turbomolecular pumps
JPH0886298A (ja) * 1994-09-19 1996-04-02 Hitachi Ltd ドライターボ真空ポンプ
GB9609281D0 (en) * 1996-05-03 1996-07-10 Boc Group Plc Improved vacuum pumps
US6116851A (en) * 1997-07-16 2000-09-12 Fluid Equipment Development Company, Llc Channel-type pump
DE29717079U1 (de) * 1997-09-24 1997-11-06 Leybold Vakuum GmbH, 50968 Köln Compoundpumpe
US6179573B1 (en) * 1999-03-24 2001-01-30 Varian, Inc. Vacuum pump with inverted motor
DE19937392A1 (de) * 1999-08-07 2001-02-08 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit pumpaktiven Elementen
DE10224604B4 (de) * 2002-06-04 2014-01-30 Oerlikon Leybold Vacuum Gmbh Evakuierungseinrichtung
GB0229352D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement and method of operating same
GB0229353D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping system and method of operating a vacuum pumping arrangement
GB0409139D0 (en) † 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
US20080105617A1 (en) * 2006-06-14 2008-05-08 Eli Oklejas Two pass reverse osmosis system
US8016545B2 (en) 2006-06-14 2011-09-13 Fluid Equipment Development Company, Llc Thrust balancing in a centrifugal pump
US8128821B2 (en) 2006-06-14 2012-03-06 Fluid Equipment Development Company, Llc Reverse osmosis system with control based on flow rates in the permeate and brine streams
US8529761B2 (en) 2007-02-13 2013-09-10 Fluid Equipment Development Company, Llc Central pumping and energy recovery in a reverse osmosis system
US8808538B2 (en) * 2008-01-04 2014-08-19 Fluid Equipment Development Company, Llc Batch-operated reverse osmosis system
US7892429B2 (en) 2008-01-28 2011-02-22 Fluid Equipment Development Company, Llc Batch-operated reverse osmosis system with manual energization
US8710406B2 (en) * 2008-09-19 2014-04-29 Conair Corporation Safety device and method for electric heating appliances
US8529191B2 (en) * 2009-02-06 2013-09-10 Fluid Equipment Development Company, Llc Method and apparatus for lubricating a thrust bearing for a rotating machine using pumpage
DE102012003680A1 (de) 2012-02-23 2013-08-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP3424586A1 (en) 2012-04-20 2019-01-09 Fluid Equipment Development Company, LLC Reverse osmosis system with energy recovery devices
DE102013203577A1 (de) * 2013-03-01 2014-09-04 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102013108482A1 (de) * 2013-08-06 2015-02-12 Pfeiffer Vacuum Gmbh Vakuumpumpstufe
DE202013008470U1 (de) * 2013-09-24 2015-01-08 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
US9975089B2 (en) 2016-10-17 2018-05-22 Fluid Equipment Development Company, Llc Method and system for performing a batch reverse osmosis process using a tank with a movable partition
US11085457B2 (en) 2017-05-23 2021-08-10 Fluid Equipment Development Company, Llc Thrust bearing system and method for operating the same
US10801512B2 (en) 2017-05-23 2020-10-13 Vector Technologies Llc Thrust bearing system and method for operating the same
US10557471B2 (en) * 2017-11-16 2020-02-11 L Dean Stansbury Turbomolecular vacuum pump for ionized matter and plasma fields
JP7463150B2 (ja) * 2020-03-19 2024-04-08 エドワーズ株式会社 真空ポンプ及び真空ポンプ用部品
JP7531313B2 (ja) * 2020-06-05 2024-08-09 エドワーズ株式会社 真空ポンプおよび真空ポンプの回転体

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE790969A (fr) * 1971-11-16 1973-05-07 Cit Alcatel Pivot pour pompes moleculaires rotatives
JPS61247893A (ja) * 1985-04-26 1986-11-05 Hitachi Ltd 真空ポンプ
JPS6229796A (ja) * 1985-07-31 1987-02-07 Hitachi Ltd 真空ポンプ
JPS62113887A (ja) * 1985-11-13 1987-05-25 Hitachi Ltd 真空ポンプ
JPS62153597A (ja) * 1985-12-27 1987-07-08 Hitachi Ltd 真空ポンプ
DE3613344A1 (de) * 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik Turbomolekular-vakuumpumpe fuer hoeheren druck
JPH0689756B2 (ja) * 1986-05-02 1994-11-14 株式会社日立製作所 ドライ真空ポンプ
JPS63147989A (ja) * 1986-12-09 1988-06-20 Daikin Ind Ltd 複合真空ポンプ
JPS63154891A (ja) * 1986-12-18 1988-06-28 Osaka Shinku Kiki Seisakusho:Kk ねじ溝式真空ポンプ
JPS63159695A (ja) * 1986-12-23 1988-07-02 Shimadzu Corp タ−ボ分子ポンプ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10056144A1 (de) * 2000-11-13 2002-05-23 Pfeiffer Vacuum Gmbh Gasreibungspumpe

Also Published As

Publication number Publication date
DE3932228A1 (de) 1990-04-05
US5020969A (en) 1991-06-04

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8363 Opposition against the patent
8365 Fully valid after opposition proceedings
8339 Ceased/non-payment of the annual fee