DE3904280A1 - Subpikosekunden - elektronenstrahlaustastsystem - Google Patents
Subpikosekunden - elektronenstrahlaustastsystemInfo
- Publication number
- DE3904280A1 DE3904280A1 DE19893904280 DE3904280A DE3904280A1 DE 3904280 A1 DE3904280 A1 DE 3904280A1 DE 19893904280 DE19893904280 DE 19893904280 DE 3904280 A DE3904280 A DE 3904280A DE 3904280 A1 DE3904280 A1 DE 3904280A1
- Authority
- DE
- Germany
- Prior art keywords
- electron beam
- electron
- esas
- frequency line
- frequency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 title claims abstract description 52
- 230000005672 electromagnetic field Effects 0.000 claims abstract description 6
- 238000012360 testing method Methods 0.000 abstract description 4
- 239000003990 capacitor Substances 0.000 description 9
- 239000004020 conductor Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000007704 transition Effects 0.000 description 3
- 230000005684 electric field Effects 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000004870 electrical engineering Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000011089 mechanical engineering Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 230000036962 time dependent Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/045—Beam blanking or chopping, i.e. arrangements for momentarily interrupting exposure to the discharge
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
- Particle Accelerators (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19893904280 DE3904280A1 (de) | 1989-02-14 | 1989-02-14 | Subpikosekunden - elektronenstrahlaustastsystem |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19893904280 DE3904280A1 (de) | 1989-02-14 | 1989-02-14 | Subpikosekunden - elektronenstrahlaustastsystem |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3904280A1 true DE3904280A1 (de) | 1990-08-16 |
| DE3904280C2 DE3904280C2 (https=) | 1991-11-07 |
Family
ID=6373984
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19893904280 Granted DE3904280A1 (de) | 1989-02-14 | 1989-02-14 | Subpikosekunden - elektronenstrahlaustastsystem |
Country Status (1)
| Country | Link |
|---|---|
| DE (1) | DE3904280A1 (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4210185A1 (de) * | 1991-03-28 | 1993-01-14 | Fraunhofer Ges Forschung | Vorrichtung zur erzeugung kurzer teilchenstrahlpulse |
| WO2012008836A3 (en) * | 2010-07-14 | 2012-03-01 | Delmic B.V. | Inspection apparatus and replaceable door for a vacuum chamber of such an inspection apparatus and a method for operating an inspection apparatus |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102009015341A1 (de) | 2009-03-27 | 2010-10-07 | Carl Zeiss Ag | Verfahren und Vorrichtungen zur optischen Untersuchung von Proben |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3339811A1 (de) * | 1983-11-03 | 1985-05-15 | Universität Karlsruhe Institut für Elektrotechnische Grundlagen der Informatik, 7500 Karlsruhe | Ps-elektronenstrahlaustasteinheit |
| EP0233123A2 (en) * | 1986-02-10 | 1987-08-19 | Schlumberger Technologies, Inc. | An improved apparatus for pulsing electron beams |
-
1989
- 1989-02-14 DE DE19893904280 patent/DE3904280A1/de active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3339811A1 (de) * | 1983-11-03 | 1985-05-15 | Universität Karlsruhe Institut für Elektrotechnische Grundlagen der Informatik, 7500 Karlsruhe | Ps-elektronenstrahlaustasteinheit |
| EP0233123A2 (en) * | 1986-02-10 | 1987-08-19 | Schlumberger Technologies, Inc. | An improved apparatus for pulsing electron beams |
Non-Patent Citations (5)
| Title |
|---|
| E. Menzel, E. Kubalek: Elektronenstrahlaustast- systeme, DE-Z: Beitr. elektronenmikroskop. Direkt-abb. Oberfl. 11 (1978), S. 47-66 * |
| H. Hübner, E. Röhm:Generating pico-second elec- tron-pulses with microwave field emission DE-Z: Optik 78 (4), 1988, S. 173-182 * |
| H. Sadorf, H.A. Kratz: Plug-in fast electron beam chopping system, US-Z: Rev. Sci. Instrum. 56 (4), April 1985, S. 567-571 * |
| P.G. May J.-M. Halbout, G.L.-T. Chiu: Noncontact High-Speed Waveform Measurements with the Picose- cond Photoelectron Scanning Electron Microscope US-Z: IEEE J. Quant, Electronics 24 (2) February 1988, S. 234-239 * |
| T. Hosokawa, H. Fujioka, K. Ura: Generation and measurement of subpicosecond electron beam pulses,US-Z: Rev. Sci Instrum. 49 (5), May 1978, S. 624- 628 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4210185A1 (de) * | 1991-03-28 | 1993-01-14 | Fraunhofer Ges Forschung | Vorrichtung zur erzeugung kurzer teilchenstrahlpulse |
| WO2012008836A3 (en) * | 2010-07-14 | 2012-03-01 | Delmic B.V. | Inspection apparatus and replaceable door for a vacuum chamber of such an inspection apparatus and a method for operating an inspection apparatus |
| US8895921B2 (en) | 2010-07-14 | 2014-11-25 | Delmic B.V. | Inspection apparatus and replaceable door for a vacuum chamber of such an inspection apparatus and a method for operating an inspection apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| DE3904280C2 (https=) | 1991-11-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0396019B1 (de) | Ionen-Zyklotron-Resonanz-Spektrometer | |
| DE68926923T2 (de) | Mikrowellenionenquelle | |
| DE69500694T2 (de) | Verfahren und Vorrichtung zur Bestimmung der absoluten Plasmaparameter | |
| EP0208894A2 (de) | Flugzeit-Massenspektrometer mit einem Ionenreflektor | |
| DE1439828B2 (de) | Elektronenmikroskop | |
| CA1256597A (en) | Apparatus for pulsing electron beams | |
| EP0001228B1 (de) | Verbesserung an einer Vorrichtung zur Elektronenstrahleintastung | |
| WO2008101669A1 (de) | Massenspektrometer | |
| DE10029763A1 (de) | Vakuumschaltröhre | |
| DE3726046C2 (https=) | ||
| EP3803367B1 (de) | Ionentransportvorrichtung, ionenmobilitätsspektrometer und ionentrichter | |
| DE4412064C2 (de) | Verfahren zum Messen von gepulsten Elektronenspinresonanz-Signalen und Elektronenspinresonanz-Impulsspektrometer | |
| DE3904280A1 (de) | Subpikosekunden - elektronenstrahlaustastsystem | |
| DE69209561T2 (de) | Strahlaustaster mit hoher Präzision | |
| DE3538407A1 (de) | Ionen-zyklotron-resonanz-spektrometer | |
| DE1498983B2 (de) | Vorrichtung zur Trennung von Ionen mit verschiedener spezifischer elektrischer Ladung | |
| DE10102571A1 (de) | Füllstandsmeßgerät | |
| EP1060399B1 (de) | Emv-prüfeinrichtung für grosse räumlich ausgedehnte systeme | |
| DE4125592A1 (de) | Verfahren und vorrichtung zum abstimmen einer hochfrequenz-quelle, insbesondere zum abstimmen einer mikrowellen-quelle eines elektronenspinresonanz-spektrometers auf einen resonator | |
| DE3605735A1 (de) | Vorrichtung zur erzeugung kurzer elektronen- ionen- oder roentgenimpulse mit hohem richtstrahlwert | |
| DE3315860A1 (de) | Mischer | |
| DE931600C (de) | Resonatorsystem fuer eine Entladungsroehre | |
| WO1992017898A1 (de) | Vorrichtung zur erzeugung kurzer teilchenstrahlpulse | |
| DE2410501C3 (de) | Vorrichtung zur Untersuchung der Kurvenform von Mikrowellensignalen | |
| DE1441244C (de) | Lauffeldröhre mit steuerbarer Ausgangs leistung |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| 8122 | Nonbinding interest in granting licenses declared | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |