DE3904280C2 - - Google Patents
Info
- Publication number
- DE3904280C2 DE3904280C2 DE19893904280 DE3904280A DE3904280C2 DE 3904280 C2 DE3904280 C2 DE 3904280C2 DE 19893904280 DE19893904280 DE 19893904280 DE 3904280 A DE3904280 A DE 3904280A DE 3904280 C2 DE3904280 C2 DE 3904280C2
- Authority
- DE
- Germany
- Prior art keywords
- electron beam
- blanking system
- frequency line
- beam blanking
- frequency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010894 electron beam technology Methods 0.000 claims description 58
- 230000005672 electromagnetic field Effects 0.000 claims description 4
- 230000007704 transition Effects 0.000 claims description 3
- 239000003990 capacitor Substances 0.000 description 9
- 239000004020 conductor Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000006978 adaptation Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000018109 developmental process Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000004870 electrical engineering Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000011089 mechanical engineering Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000036962 time dependent Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/045—Beam blanking or chopping, i.e. arrangements for momentarily interrupting exposure to the discharge
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
- Particle Accelerators (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19893904280 DE3904280A1 (de) | 1989-02-14 | 1989-02-14 | Subpikosekunden - elektronenstrahlaustastsystem |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19893904280 DE3904280A1 (de) | 1989-02-14 | 1989-02-14 | Subpikosekunden - elektronenstrahlaustastsystem |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3904280A1 DE3904280A1 (de) | 1990-08-16 |
| DE3904280C2 true DE3904280C2 (https=) | 1991-11-07 |
Family
ID=6373984
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19893904280 Granted DE3904280A1 (de) | 1989-02-14 | 1989-02-14 | Subpikosekunden - elektronenstrahlaustastsystem |
Country Status (1)
| Country | Link |
|---|---|
| DE (1) | DE3904280A1 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102009015341A1 (de) | 2009-03-27 | 2010-10-07 | Carl Zeiss Ag | Verfahren und Vorrichtungen zur optischen Untersuchung von Proben |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4210185A1 (de) * | 1991-03-28 | 1993-01-14 | Fraunhofer Ges Forschung | Vorrichtung zur erzeugung kurzer teilchenstrahlpulse |
| NL2005080C2 (en) | 2010-07-14 | 2012-01-17 | Univ Delft Tech | Inspection apparatus and replaceable door for a vacuum chamber of such an inspection apparatus. |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3339811A1 (de) * | 1983-11-03 | 1985-05-15 | Universität Karlsruhe Institut für Elektrotechnische Grundlagen der Informatik, 7500 Karlsruhe | Ps-elektronenstrahlaustasteinheit |
| US4721909A (en) * | 1985-08-16 | 1988-01-26 | Schlumberger Technology Corporation | Apparatus for pulsing electron beams |
-
1989
- 1989-02-14 DE DE19893904280 patent/DE3904280A1/de active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102009015341A1 (de) | 2009-03-27 | 2010-10-07 | Carl Zeiss Ag | Verfahren und Vorrichtungen zur optischen Untersuchung von Proben |
Also Published As
| Publication number | Publication date |
|---|---|
| DE3904280A1 (de) | 1990-08-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE60112427T2 (de) | Gitterlose fokussierungsvorrichtung zur extraktion von ionen für einen flugzeitmassenspektrometer | |
| DE19945178C2 (de) | Meßspitze zur Hochfrequenzmessung und Verfahren zu deren Herstellung | |
| CA1256597A (en) | Apparatus for pulsing electron beams | |
| EP1949491A1 (de) | Hohlleiterübergang | |
| EP0568889A2 (de) | Verfahren zum Kalibrieren eines Netzwerkanalysators | |
| DE3726046C2 (https=) | ||
| DE3904280C2 (https=) | ||
| DE4412064C2 (de) | Verfahren zum Messen von gepulsten Elektronenspinresonanz-Signalen und Elektronenspinresonanz-Impulsspektrometer | |
| EP0259596A1 (de) | Verfahren zum Eliminieren unerwünschter geladener Teilchen aus der Messzelle eines ICR-Spektrometers | |
| DE3538407A1 (de) | Ionen-zyklotron-resonanz-spektrometer | |
| EP1060399B1 (de) | Emv-prüfeinrichtung für grosse räumlich ausgedehnte systeme | |
| DE102012205943B4 (de) | Anordnung zum Kalibrieren einer Messeinrichtung | |
| DE3331931A1 (de) | Verfahren zur qualitativen oder quantitativen potentialmessung an einer mit einer passivierungsschicht versehenen elektronischen schaltung | |
| DE4404046C2 (de) | Verfahren zum Kalibrieren eines zwei Meßtore aufweisenden Netzwerk-Analysators | |
| DE69125412T2 (de) | Vier-Frequenz-Messverfahren für gekoppelte Zwei-Resonator-Kristalle | |
| EP0156007A1 (de) | Korpuskelbeschleunigende Elektrode | |
| DE4210185A1 (de) | Vorrichtung zur erzeugung kurzer teilchenstrahlpulse | |
| DE10151824B4 (de) | Verfahren zur Ermittlung der elektromagnetischen Störaussendung einer Elektronikbaugruppe | |
| EP2137787B1 (de) | Gleichspannungstrenner | |
| DE2410501C3 (de) | Vorrichtung zur Untersuchung der Kurvenform von Mikrowellensignalen | |
| DE1441244C (de) | Lauffeldröhre mit steuerbarer Ausgangs leistung | |
| DE102021209675A1 (de) | Abstimmbare Mikrowellen-Brückenschaltung mittels Phasenschieber und Abschwächer zur Trennung eines Sendesignals von einem Empfangssignal ohne Zirkulator und ESR-Spektrometer | |
| DE2705417A1 (de) | Anordnung zum ein- und austasten des elektronenstrahls eines elektronenmikroskops | |
| DE2410501B2 (de) | Vorrichtung zur Untersuchung der Kurvenform von Mikrowellensignalen | |
| EP0983520A1 (de) | Verfahren und vorrichtungen zur erzeugung und zum empfang von elektromagnetischen feldern zu prüf- und messzwecken |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| 8122 | Nonbinding interest in granting licenses declared | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |