DE3889160D1 - Supraleitender Dünnfilm und Verfahren, um diesen zu präparieren. - Google Patents

Supraleitender Dünnfilm und Verfahren, um diesen zu präparieren.

Info

Publication number
DE3889160D1
DE3889160D1 DE3889160T DE3889160T DE3889160D1 DE 3889160 D1 DE3889160 D1 DE 3889160D1 DE 3889160 T DE3889160 T DE 3889160T DE 3889160 T DE3889160 T DE 3889160T DE 3889160 D1 DE3889160 D1 DE 3889160D1
Authority
DE
Germany
Prior art keywords
prepare
thin film
superconducting thin
superconducting
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE3889160T
Other languages
English (en)
Other versions
DE3889160T2 (de
Inventor
Hideo C O Itami Works Itozaki
Saburo C O Itami Works Tanaka
Nobuhiko C O Itami Work Fujita
Shuji C O Itami Works Of Yazu
Tetsuji C O Itami Works Jodai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Publication of DE3889160D1 publication Critical patent/DE3889160D1/de
Application granted granted Critical
Publication of DE3889160T2 publication Critical patent/DE3889160T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
    • H10N60/0381—Processes for depositing or forming copper oxide superconductor layers by evaporation, e.g. MBE
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0661—Processes performed after copper oxide formation, e.g. patterning
    • H10N60/0716—Passivating
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
    • H10N60/0408—Processes for depositing or forming copper oxide superconductor layers by sputtering
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/922—Static electricity metal bleed-off metallic stock
    • Y10S428/9265—Special properties
    • Y10S428/93—Electric superconducting
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701—Coated or thin film device, i.e. active or passive
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701—Coated or thin film device, i.e. active or passive
    • Y10S505/702—Josephson junction present
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701—Coated or thin film device, i.e. active or passive
    • Y10S505/703—Microelectronic device with superconducting conduction line
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/704—Wire, fiber, or cable
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49014—Superconductor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31511—Of epoxy ether
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31652—Of asbestos
    • Y10T428/31663—As siloxane, silicone or silane
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31721—Of polyimide

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
DE3889160T 1987-07-27 1988-07-27 Supraleitender Dünnfilm und Verfahren, um diesen zu präparieren. Expired - Fee Related DE3889160T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18681287 1987-07-27

Publications (2)

Publication Number Publication Date
DE3889160D1 true DE3889160D1 (de) 1994-05-26
DE3889160T2 DE3889160T2 (de) 1994-11-03

Family

ID=16195023

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3889160T Expired - Fee Related DE3889160T2 (de) 1987-07-27 1988-07-27 Supraleitender Dünnfilm und Verfahren, um diesen zu präparieren.

Country Status (4)

Country Link
US (1) US4942142A (de)
EP (1) EP0301962B1 (de)
DE (1) DE3889160T2 (de)
HK (1) HK87296A (de)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5232903A (en) * 1987-05-06 1993-08-03 Semiconductor Energy Laboratory Co., Ltd. Oxide superconducting device having uniform oxygen concentration
US5132283A (en) * 1987-12-28 1992-07-21 Ford Motor Company Thin film superconductor assembly and method of making the same
US4914080A (en) * 1988-01-27 1990-04-03 Fujitsu Limited Method for fabricating superconductive film
US5079221A (en) * 1988-02-23 1992-01-07 Fujitsu Limited Superconductor passivated by an organic film and a method for forming the organic film
EP0341502A3 (de) * 1988-05-07 1989-12-27 Fujitsu Limited Kryoelektronische Einrichtung mit einem keramischen Supraleiter
JPH0286014A (ja) * 1988-06-17 1990-03-27 Sumitomo Electric Ind Ltd 複合酸化物超電導薄膜と、その成膜方法
US5268060A (en) * 1988-07-05 1993-12-07 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing oxide superconducting materials
US4997808A (en) * 1988-12-27 1991-03-05 Eastman Kodak Company Superconductive ceramic oxide combination
US5300487A (en) * 1988-12-30 1994-04-05 Troy Investments Inc. Nonspecular reflector with diffusely reflecting superconductor and protection coating
CA2010335A1 (en) * 1989-03-09 1990-09-09 Ronald H. Baney Method for protective coating superconductors
DE69018303T2 (de) * 1989-04-17 1995-11-09 Ngk Insulators Ltd Supraleitende Struktur zur magnetischen Abschirmung.
DE69009109T2 (de) * 1989-07-05 1994-09-15 Canon Kk Vorrichtung und Verfahren zur Lichtmessung.
JPH0354116A (ja) * 1989-07-24 1991-03-08 Sumitomo Electric Ind Ltd 複合酸化物超電導薄膜および作製方法
US5266830A (en) * 1990-08-03 1993-11-30 Sharp Kabushiki Kaisha Hetero junction bipolar transistor with reduced surface recombination current
JPH06196764A (ja) * 1990-10-29 1994-07-15 Biomagnetic Technol Inc ポリマー絶縁材料を用いるスクイッド
US5114910A (en) * 1990-11-01 1992-05-19 Hughes Aircraft Company Passivation of thin film oxide superconductors
US5272133A (en) * 1990-11-01 1993-12-21 Hughes Aircraft Company Passivation of thin film oxide superconductors
CA2053549A1 (en) * 1990-11-15 1992-05-16 John A. Agostinelli Construction of high temperature josephson junction device
CA2062294C (en) * 1991-03-04 1997-01-14 Hiroshi Inada Thin film of oxide superconductor possessing locally different crystal orientations and processes for preparing the same
WO1992020092A1 (en) * 1991-05-08 1992-11-12 Superconductor Technologies, Inc. Passivation coating for superconducting thin film device
DE4115872A1 (de) * 1991-05-15 1992-11-19 Basf Ag Verfahren zur herstellung duenner polyimidschutzschichten auf keramischen supraleitern oder hochtemperatursupraleitern
US5212147A (en) * 1991-05-15 1993-05-18 Hewlett-Packard Company Method of forming a patterned in-situ high Tc superconductive film
US5449659A (en) * 1991-07-05 1995-09-12 Conductus, Inc. Method of bonding multilayer structures of crystalline materials
US5514484A (en) * 1992-11-05 1996-05-07 Fuji Xerox Co., Ltd. Oriented ferroelectric thin film
DE69309306T2 (de) * 1992-12-15 1997-09-04 Du Pont Elektrische Verbindungsstrukturen
US5310705A (en) * 1993-01-04 1994-05-10 The United States Of America As Represented By The United States Department Of Energy High-field magnets using high-critical-temperature superconducting thin films
DE4304573A1 (de) * 1993-02-16 1994-08-18 Forschungsgesellschaft Fuer In Passivierungsschicht für Hochtemperatur-Supraleiter und Verfahren zu ihrer Aufbringung
US5761017A (en) * 1995-06-15 1998-06-02 Illinois Superconductor Corporation High temperature superconductor element for a fault current limiter
JP3846550B2 (ja) * 1999-03-16 2006-11-15 セイコーエプソン株式会社 半導体装置及びその製造方法、回路基板並びに電子機器
US7799968B2 (en) 2001-12-21 2010-09-21 Kimberly-Clark Worldwide, Inc. Sponge-like pad comprising paper layers and method of manufacture
JP4711249B2 (ja) * 2002-08-01 2011-06-29 独立行政法人産業技術総合研究所 超伝導集積回路及びその作製方法
US7994079B2 (en) 2002-12-17 2011-08-09 Kimberly-Clark Worldwide, Inc. Meltblown scrubbing product

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0287325B1 (de) * 1987-04-13 1994-07-27 Hitachi, Ltd. Supraleitendes Material und Verfahren zu dessen Herstellung
EP0293981A3 (de) * 1987-06-04 1990-10-10 Imi Titanium Limited Verfahren zur Herstellung eines anorganischen Halbleiterverbundwerkstoffes und so erzeugte Produkte

Also Published As

Publication number Publication date
HK87296A (en) 1996-05-24
US4942142A (en) 1990-07-17
EP0301962A2 (de) 1989-02-01
EP0301962A3 (en) 1990-02-07
DE3889160T2 (de) 1994-11-03
EP0301962B1 (de) 1994-04-20

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee