DE3684261D1 - Duennschichtkondensatoren und verfahren zu ihrer herstellung. - Google Patents

Duennschichtkondensatoren und verfahren zu ihrer herstellung.

Info

Publication number
DE3684261D1
DE3684261D1 DE8686202286T DE3684261T DE3684261D1 DE 3684261 D1 DE3684261 D1 DE 3684261D1 DE 8686202286 T DE8686202286 T DE 8686202286T DE 3684261 T DE3684261 T DE 3684261T DE 3684261 D1 DE3684261 D1 DE 3684261D1
Authority
DE
Germany
Prior art keywords
production
thick film
film capacitors
capacitors
thick
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8686202286T
Other languages
English (en)
Inventor
Avner Shaulov
Walter Karl Zwicker
Myron Frommer
Stanley Lukasik
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Application granted granted Critical
Publication of DE3684261D1 publication Critical patent/DE3684261D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/005—Electrodes
    • H01G4/008—Selection of materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/018—Dielectrics
    • H01G4/06—Solid dielectrics
    • H01G4/08—Inorganic dielectrics
    • H01G4/12—Ceramic dielectrics
    • H01G4/1209—Ceramic dielectrics characterised by the ceramic dielectric material
    • H01G4/1254—Ceramic dielectrics characterised by the ceramic dielectric material based on niobium or tungsteen, tantalum oxides or niobates, tantalates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • H01L28/55—Capacitors with a dielectric comprising a perovskite structure material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making
    • Y10T29/435—Solid dielectric type

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Physical Vapour Deposition (AREA)
  • Semiconductor Integrated Circuits (AREA)
DE8686202286T 1985-12-23 1986-12-16 Duennschichtkondensatoren und verfahren zu ihrer herstellung. Expired - Lifetime DE3684261D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/812,158 US4631633A (en) 1985-12-23 1985-12-23 Thin film capacitors and method of making the same

Publications (1)

Publication Number Publication Date
DE3684261D1 true DE3684261D1 (de) 1992-04-16

Family

ID=25208698

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686202286T Expired - Lifetime DE3684261D1 (de) 1985-12-23 1986-12-16 Duennschichtkondensatoren und verfahren zu ihrer herstellung.

Country Status (5)

Country Link
US (1) US4631633A (de)
EP (1) EP0227183B1 (de)
JP (1) JPS62158311A (de)
AU (1) AU6685786A (de)
DE (1) DE3684261D1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0175988A2 (de) * 1984-09-24 1986-04-02 Allied Corporation Verfahren zur Herstellung von Kondensatoren und nach diesem Verfahren hergestellte Kondensatoren
US4853659A (en) * 1988-03-17 1989-08-01 Amp Incorporated Planar pi-network filter assembly having capacitors formed on opposing surfaces of an inductive member
CH676523A5 (de) * 1988-06-01 1991-01-31 Cerberus Ag
KR930003790B1 (ko) * 1990-07-02 1993-05-10 삼성전자 주식회사 반도체 장치의 캐패시터용 유전체
DE69205063T2 (de) * 1991-05-16 1996-02-29 Nippon Electric Co Dünnschichtkondensator.
US5383088A (en) * 1993-08-09 1995-01-17 International Business Machines Corporation Storage capacitor with a conducting oxide electrode for metal-oxide dielectrics
US5414588A (en) * 1993-09-20 1995-05-09 The Regents Of The University Of California High performance capacitors using nano-structure multilayer materials fabrication
KR100359721B1 (ko) * 1999-05-07 2002-11-04 (주)세렉트론 저온에서 금속전극과 동시 소성가능한 유전체 세라믹 조성물
US7327582B2 (en) * 2000-09-21 2008-02-05 Ultrasource, Inc. Integrated thin film capacitor/inductor/interconnect system and method
AU2001296281A1 (en) 2000-09-21 2002-04-02 Michaeld. Casper Integrated thin film capacitor/inductor/interconnect system and method
US6890629B2 (en) * 2001-09-21 2005-05-10 Michael D. Casper Integrated thin film capacitor/inductor/interconnect system and method
US6998696B2 (en) * 2001-09-21 2006-02-14 Casper Michael D Integrated thin film capacitor/inductor/interconnect system and method
US7425877B2 (en) * 2001-09-21 2008-09-16 Ultrasource, Inc. Lange coupler system and method
SG107103A1 (en) * 2002-05-24 2004-11-29 Ntu Ventures Private Ltd Process for producing nanocrystalline composites
JP4429346B2 (ja) * 2007-08-31 2010-03-10 富士通株式会社 半導体装置及びその製造方法
US8813325B2 (en) * 2011-04-12 2014-08-26 Intermolecular, Inc. Method for fabricating a DRAM capacitor

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3279947A (en) * 1966-10-18 High capacitance device
NL253240A (de) * 1959-07-01
NL259884A (de) * 1960-01-14
US3326718A (en) * 1963-12-30 1967-06-20 Hughes Aircraft Co Method for making an electrical capacitor
US3470018A (en) * 1964-08-24 1969-09-30 Melpar Inc Thin film capacitor
US3394290A (en) * 1966-08-24 1968-07-23 Otis F. Boykin Thin film capacitor
JPS4870855A (de) * 1971-12-29 1973-09-26
US4038167A (en) * 1976-02-09 1977-07-26 Corning Glass Works Method of forming a thin film capacitor
JPS56147424A (en) * 1980-04-17 1981-11-16 Tdk Electronics Co Ltd Method of manufacturing laminated composite part
WO1983004339A1 (en) * 1982-05-28 1983-12-08 Matsushita Electric Industrial Co., Ltd. Thin film electric field light-emitting device

Also Published As

Publication number Publication date
US4631633A (en) 1986-12-23
EP0227183A3 (en) 1989-04-19
JPS62158311A (ja) 1987-07-14
AU6685786A (en) 1987-06-25
EP0227183B1 (de) 1992-03-11
EP0227183A2 (de) 1987-07-01

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: PHILIPS ELECTRONICS N.V., EINDHOVEN, NL

8339 Ceased/non-payment of the annual fee