DE3886962D1 - Induktiv gekoppelter Plasmabrenner. - Google Patents

Induktiv gekoppelter Plasmabrenner.

Info

Publication number
DE3886962D1
DE3886962D1 DE88103413T DE3886962T DE3886962D1 DE 3886962 D1 DE3886962 D1 DE 3886962D1 DE 88103413 T DE88103413 T DE 88103413T DE 3886962 T DE3886962 T DE 3886962T DE 3886962 D1 DE3886962 D1 DE 3886962D1
Authority
DE
Germany
Prior art keywords
plasma
frequency
rectified voltage
induction coil
change
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE88103413T
Other languages
English (en)
Other versions
DE3886962T2 (de
Inventor
Peter J Morrisroe
Andrew T Zander
David C Manning
Peter H Gagne
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applera Corp
Original Assignee
Perkin Elmer Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Perkin Elmer Corp filed Critical Perkin Elmer Corp
Publication of DE3886962D1 publication Critical patent/DE3886962D1/de
Application granted granted Critical
Publication of DE3886962T2 publication Critical patent/DE3886962T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2475—Generating plasma using acoustic pressure discharges

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electromagnetism (AREA)
  • Acoustics & Sound (AREA)
  • Plasma Technology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Arc Welding In General (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
DE88103413T 1987-03-06 1988-03-04 Induktiv gekoppelter Plasmabrenner. Expired - Fee Related DE3886962T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/022,910 US4766287A (en) 1987-03-06 1987-03-06 Inductively coupled plasma torch with adjustable sample injector

Publications (2)

Publication Number Publication Date
DE3886962D1 true DE3886962D1 (de) 1994-02-24
DE3886962T2 DE3886962T2 (de) 1994-04-28

Family

ID=21812062

Family Applications (1)

Application Number Title Priority Date Filing Date
DE88103413T Expired - Fee Related DE3886962T2 (de) 1987-03-06 1988-03-04 Induktiv gekoppelter Plasmabrenner.

Country Status (4)

Country Link
US (1) US4766287A (de)
EP (1) EP0281158B1 (de)
JP (1) JP2758165B2 (de)
DE (1) DE3886962T2 (de)

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US5026464A (en) * 1988-08-31 1991-06-25 Agency Of Industrial Science And Technology Method and apparatus for decomposing halogenated organic compound
US5187344A (en) * 1988-11-10 1993-02-16 Agency Of Industrial Science And Technology Apparatus for decomposing halogenated organic compound
US4997476A (en) * 1988-12-08 1991-03-05 Plasma Energy Corporation Recovery of free aluminum from aluminum dross using plasma energy without use of a salt flux
JPH02215038A (ja) * 1989-02-15 1990-08-28 Hitachi Ltd マイクロ波プラズマ極微量元素分析装置
US4935596A (en) * 1989-04-21 1990-06-19 The Perkin-Elmer Corporation Shutoff detector for unstable plasma or combustion flame
US5083004A (en) * 1989-05-09 1992-01-21 Varian Associates, Inc. Spectroscopic plasma torch for microwave induced plasmas
FR2649850B1 (fr) * 1989-07-12 1993-10-01 Gaz De France Torche a plasma
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US5186621A (en) * 1990-03-28 1993-02-16 The Texas A & M University System Chimney holder and injection tube mount for use in atomic absorption and plasma spectroscopy
US5225656A (en) * 1990-06-20 1993-07-06 General Electric Company Injection tube for powder melting apparatus
US5017751A (en) * 1990-06-21 1991-05-21 Gte Laboratories Incorporated Inductively-coupled RF plasma torch
DE4021182A1 (de) * 1990-07-03 1992-01-16 Plasma Technik Ag Vorrichtung zur beschichtung der oberflaeche von gegenstaenden
US5159173A (en) * 1990-09-26 1992-10-27 General Electric Company Apparatus for reducing plasma constriction by intermediate injection of hydrogen in RF plasma gun
US5291426A (en) * 1991-02-27 1994-03-01 The Perkin-Elmer Corporation Method of correcting spectral data for background
US5272308A (en) * 1991-12-27 1993-12-21 Cetac Technologies Inc. Direct injection micro nebulizer and enclosed filter solvent removal sample introduction system, and method of use
FR2683422B1 (fr) * 1991-10-31 1994-01-21 Rc Durr Sa Generateur haute frequence pour torche a plasma.
JP3167221B2 (ja) * 1992-05-07 2001-05-21 ザ・パーキン・エルマー・コーポレイション 誘導結合プラズマ発生器
US5272618A (en) * 1992-07-23 1993-12-21 General Electric Company Filament current regulator for an X-ray system
RU95106478A (ru) * 1994-04-29 1997-01-20 Моторола Устройство и способ для разложения химических соединений
US5811631A (en) * 1994-04-29 1998-09-22 Motorola, Inc. Apparatus and method for decomposition of chemical compounds using a self-supporting member
US5663476A (en) * 1994-04-29 1997-09-02 Motorola, Inc. Apparatus and method for decomposition of chemical compounds by increasing residence time of a chemical compound in a reaction chamber
US5483337A (en) * 1994-10-19 1996-01-09 Barnard; Thomas W. Spectrometer with selectable radiation from induction plasma light source
US5565983A (en) * 1995-05-26 1996-10-15 The Perkin-Elmer Corporation Optical spectrometer for detecting spectra in separate ranges
US5793013A (en) * 1995-06-07 1998-08-11 Physical Sciences, Inc. Microwave-driven plasma spraying apparatus and method for spraying
US5642190A (en) * 1995-09-01 1997-06-24 Thermo Jarrell Ash Corp. Dual-axis plasma imaging system for use in spectroscopic analysis
DE19713352A1 (de) * 1997-03-29 1998-10-01 Deutsch Zentr Luft & Raumfahrt Plasmabrennersystem
US6150628A (en) * 1997-06-26 2000-11-21 Applied Science And Technology, Inc. Toroidal low-field reactive gas source
US5925266A (en) * 1997-10-15 1999-07-20 The Perkin-Elmer Corporation Mounting apparatus for induction coupled plasma torch
EP0930810A1 (de) * 1997-12-29 1999-07-21 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Plasmabrenner mit Verstellbarer Verteilung und Gasanalysenanlage die diesen Brenner gebraucht
FR2773299B1 (fr) * 1997-12-29 2000-01-21 Air Liquide Torche a plasma a injecteur reglable et installation d'analyse d'un gaz utilisant une telle torche
US6579805B1 (en) * 1999-01-05 2003-06-17 Ronal Systems Corp. In situ chemical generator and method
EP1203441A1 (de) 1999-07-13 2002-05-08 Tokyo Electron Limited Hochfrequenz-stromquelle zur erzeugung eines induktiv gekoppelten plasmas
FR2803286B1 (fr) * 1999-12-30 2002-03-29 Cit Alcatel Procede et dispositif de fabrication de preformes destinees a la realisation de fibres optiques
US6618139B2 (en) * 2000-01-13 2003-09-09 Perkinelmer Instruments Llc Torch glassware for use with inductively coupled plasma-optical emission spectrometer
KR20030034574A (ko) * 2001-10-26 2003-05-09 주식회사 머큐리 광섬유 모재 오버 클래딩용 버너
US7511246B2 (en) 2002-12-12 2009-03-31 Perkinelmer Las Inc. Induction device for generating a plasma
US7106438B2 (en) * 2002-12-12 2006-09-12 Perkinelmer Las, Inc. ICP-OES and ICP-MS induction current
US7375035B2 (en) 2003-04-29 2008-05-20 Ronal Systems Corporation Host and ancillary tool interface methodology for distributed processing
US7429714B2 (en) * 2003-06-20 2008-09-30 Ronal Systems Corporation Modular ICP torch assembly
DE102004046814B3 (de) * 2004-09-27 2006-03-09 Siemens Ag Verfahren und Vorrichtung zur Beeinflussung von Verbrennungsvorgängen, insbesondere zum Betrieb einer Gasturbine
US8633416B2 (en) * 2005-03-11 2014-01-21 Perkinelmer Health Sciences, Inc. Plasmas and methods of using them
US7742167B2 (en) 2005-06-17 2010-06-22 Perkinelmer Health Sciences, Inc. Optical emission device with boost device
US8622735B2 (en) * 2005-06-17 2014-01-07 Perkinelmer Health Sciences, Inc. Boost devices and methods of using them
GB2418293B (en) * 2005-08-10 2007-01-31 Thermo Electron Corp Inductively coupled plasma alignment apparatus and method
EP2007175A4 (de) * 2006-03-07 2014-05-14 Univ Ryukyus Plasmagenerator und verfahren zum erzeugen von plasma damit
JP4874080B2 (ja) * 2006-12-18 2012-02-08 株式会社クボタ 管路の敷設替え方法
JP5014324B2 (ja) * 2008-12-26 2012-08-29 信越化学工業株式会社 固体合成用高周波熱プラズマトーチ
JP2010197080A (ja) * 2009-02-23 2010-09-09 Sii Nanotechnology Inc 誘導結合プラズマ分析装置
AU2011248185B2 (en) * 2010-05-05 2014-10-16 Perkinelmer U.S. Llc Oxidation resistant induction devices
AU2011248179B2 (en) * 2010-05-05 2014-10-02 Perkinelmer U.S. Llc Inductive devices and low flow plasmas using them
FR2971665B1 (fr) * 2011-02-11 2014-06-20 Efd Induction Sa Torche a plasma inductif
WO2012158443A2 (en) 2011-05-13 2012-11-22 Sheperak Thomas J Plasma directed electron beam wound care system apparatus and method
US20160121418A1 (en) * 2012-01-25 2016-05-05 Gordon Hanka Welder Powered Arc Starter
US10477665B2 (en) * 2012-04-13 2019-11-12 Amastan Technologies Inc. Microwave plasma torch generating laminar flow for materials processing
US9516735B2 (en) 2012-07-13 2016-12-06 Perkinelmer Health Sciences, Inc. Torches and methods of using them
CA2879076C (en) 2012-07-13 2020-11-10 Perkinelmer Health Sciences, Inc. Torches and methods of using them
GB2506892B (en) * 2012-10-11 2015-06-10 Thermo Fisher Scient Bremen Apparatus and method for improving throughput in spectrometry
US10370539B2 (en) 2014-01-30 2019-08-06 Monolith Materials, Inc. System for high temperature chemical processing
US11939477B2 (en) 2014-01-30 2024-03-26 Monolith Materials, Inc. High temperature heat integration method of making carbon black
EP3253904B1 (de) 2015-02-03 2020-07-01 Monolith Materials, Inc. Verfahren und vorrichtung zur regenerativen kühlung
CN111601447A (zh) 2015-07-29 2020-08-28 巨石材料公司 Dc等离子体焰炬电力设计方法和设备
CN108290738A (zh) 2015-09-09 2018-07-17 巨石材料公司 圆形多层石墨烯
CN111225488B (zh) * 2015-10-06 2022-09-13 海别得公司 控制等离子体电弧炬以及相关系统和方法
US10834807B1 (en) * 2016-04-01 2020-11-10 Elemental Scientific, Inc. ICP torch assembly with retractable injector
US11492496B2 (en) 2016-04-29 2022-11-08 Monolith Materials, Inc. Torch stinger method and apparatus
EP3592810A4 (de) * 2017-03-08 2021-01-27 Monolith Materials, Inc. Systeme und verfahren zur herstellung von kohlenstoffteilchen mit wärmetransfergas
JP2020517562A (ja) 2017-04-20 2020-06-18 モノリス マテリアルズ インコーポレイテッド 粒子システムと方法
US10616988B2 (en) * 2017-06-20 2020-04-07 The Esab Group Inc. Electromechanical linearly actuated electrode
CN111278767A (zh) 2017-08-28 2020-06-12 巨石材料公司 用于颗粒生成的系统和方法
CN108834296B (zh) * 2018-06-27 2020-07-10 安徽航天环境工程有限公司 一种微波等离子装置
EP3712923A1 (de) 2019-03-18 2020-09-23 ETH Zurich Ionenquelle für induktiv gekoppelte plasmamassenspektrometrie

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US29304A (en) * 1860-07-24 Compensating lever-sprincr
GB1033392A (en) * 1962-06-20 1966-06-22 Atomic Energy Authority Uk Improvements in or relating to induction coupled plasma generators
US3324334A (en) * 1966-03-15 1967-06-06 Massachusetts Inst Technology Induction plasma torch with means for recirculating the plasma
US3546522A (en) * 1967-06-21 1970-12-08 Humphreys Corp Induction plasma generator with gas sheath forming chamber
US3648015A (en) * 1970-07-20 1972-03-07 Thomas E Fairbairn Radio frequency generated electron beam torch
DE2340793A1 (de) * 1973-08-11 1975-03-06 Messer Griesheim Gmbh Einrichtung zum stabilisieren und zuenden von lichtboegen
US4266113A (en) * 1979-07-02 1981-05-05 The United States Of America As Represented By The Secretary Of The Navy Dismountable inductively-coupled plasma torch apparatus
US4306175A (en) * 1980-02-29 1981-12-15 Instrumentation Laboratory Inc. Induction plasma system
JPS5945900U (ja) * 1982-09-17 1984-03-27 住友電気工業株式会社 高周波誘導プラズマ用ト−チ
US4482246A (en) * 1982-09-20 1984-11-13 Meyer Gerhard A Inductively coupled plasma discharge in flowing non-argon gas at atmospheric pressure for spectrochemical analysis
US4629940A (en) * 1984-03-02 1986-12-16 The Perkin-Elmer Corporation Plasma emission source
US4575609A (en) * 1984-03-06 1986-03-11 The United States Of America As Represented By The United States Department Of Energy Concentric micro-nebulizer for direct sample insertion
JPS6358799A (ja) * 1986-08-28 1988-03-14 日本高周波株式会社 反応試料噴出部をプラズマ・フレ−ム中に挿入した高周波プラズマ反応装置

Also Published As

Publication number Publication date
EP0281158A2 (de) 1988-09-07
US4766287A (en) 1988-08-23
DE3886962T2 (de) 1994-04-28
EP0281158B1 (de) 1994-01-12
JP2758165B2 (ja) 1998-05-28
JPS64699A (en) 1989-01-05
EP0281158A3 (en) 1989-10-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee