FR2773299B1 - Torche a plasma a injecteur reglable et installation d'analyse d'un gaz utilisant une telle torche - Google Patents

Torche a plasma a injecteur reglable et installation d'analyse d'un gaz utilisant une telle torche

Info

Publication number
FR2773299B1
FR2773299B1 FR9716619A FR9716619A FR2773299B1 FR 2773299 B1 FR2773299 B1 FR 2773299B1 FR 9716619 A FR9716619 A FR 9716619A FR 9716619 A FR9716619 A FR 9716619A FR 2773299 B1 FR2773299 B1 FR 2773299B1
Authority
FR
France
Prior art keywords
torch
gas analysis
adjustable injector
analysis installation
plasma torch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9716619A
Other languages
English (en)
Other versions
FR2773299A1 (fr
Inventor
Martine Carre
Eric Coffre
Christian Trassy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA, LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude filed Critical Air Liquide SA
Priority to FR9716619A priority Critical patent/FR2773299B1/fr
Priority to EP98402992A priority patent/EP0930810A1/fr
Priority to TW087120614A priority patent/TW412636B/zh
Priority to SG1998005896A priority patent/SG71892A1/en
Priority to JP10370101A priority patent/JPH11248632A/ja
Priority to KR1019980063916A priority patent/KR19990063580A/ko
Priority to US09/221,163 priority patent/US6236012B1/en
Priority to CN98126221.XA priority patent/CN1235274A/zh
Publication of FR2773299A1 publication Critical patent/FR2773299A1/fr
Application granted granted Critical
Publication of FR2773299B1 publication Critical patent/FR2773299B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
FR9716619A 1997-12-29 1997-12-29 Torche a plasma a injecteur reglable et installation d'analyse d'un gaz utilisant une telle torche Expired - Fee Related FR2773299B1 (fr)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FR9716619A FR2773299B1 (fr) 1997-12-29 1997-12-29 Torche a plasma a injecteur reglable et installation d'analyse d'un gaz utilisant une telle torche
EP98402992A EP0930810A1 (fr) 1997-12-29 1998-11-30 Torche à plasma à injecteur réglable et installation d'analyse d'un gaz utilisant une telle torche
TW087120614A TW412636B (en) 1997-12-29 1998-12-11 Plasma torch with an adjustable injector and gas analyser using such a torch
SG1998005896A SG71892A1 (en) 1997-12-29 1998-12-22 Plasma torch with an adjustable injector and gas analyser using such a torch
JP10370101A JPH11248632A (ja) 1997-12-29 1998-12-25 調整可能なインゼクタ―を有するプラズマト―チおよびその様なト―チを用いる気体分析装置
KR1019980063916A KR19990063580A (ko) 1997-12-29 1998-12-28 조정 가능한 분사기가 구비된 플라즈마 토오치와 이 토오치를사용하는 가스 분석기
US09/221,163 US6236012B1 (en) 1997-12-29 1998-12-28 Plasma torch with an adjustable injector and gas analyzer using such a torch
CN98126221.XA CN1235274A (zh) 1997-12-29 1998-12-29 有可调喷射器的等离子喷管和使用该喷管的气体分析仪

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9716619A FR2773299B1 (fr) 1997-12-29 1997-12-29 Torche a plasma a injecteur reglable et installation d'analyse d'un gaz utilisant une telle torche

Publications (2)

Publication Number Publication Date
FR2773299A1 FR2773299A1 (fr) 1999-07-02
FR2773299B1 true FR2773299B1 (fr) 2000-01-21

Family

ID=9515229

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9716619A Expired - Fee Related FR2773299B1 (fr) 1997-12-29 1997-12-29 Torche a plasma a injecteur reglable et installation d'analyse d'un gaz utilisant une telle torche

Country Status (1)

Country Link
FR (1) FR2773299B1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2928641B1 (fr) 2008-03-14 2010-03-26 Centre Nat Rech Scient Procede de purification de silicium pour applications photovoltaiques

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2604787B1 (fr) * 1986-10-03 1989-05-12 Commissariat Energie Atomique Dispositif d'analyse d'elements par spectrometrie a plasma inductif engendre par de l'air
JPS63210754A (ja) * 1987-02-27 1988-09-01 Shimadzu Corp Ｉｃｐ発光分析用試料導入装置
US4766287A (en) * 1987-03-06 1988-08-23 The Perkin-Elmer Corporation Inductively coupled plasma torch with adjustable sample injector
FR2616614B1 (fr) * 1987-06-10 1989-10-20 Air Liquide Torche a plasma micro-onde, dispositif comportant une telle torche et procede pour la fabrication de poudre les mettant en oeuvre
US4926021A (en) * 1988-09-09 1990-05-15 Amax Inc. Reactive gas sample introduction system for an inductively coupled plasma mass spectrometer

Also Published As

Publication number Publication date
FR2773299A1 (fr) 1999-07-02

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Legal Events

Date Code Title Description
ST Notification of lapse