FR2971665B1 - Torche a plasma inductif - Google Patents

Torche a plasma inductif

Info

Publication number
FR2971665B1
FR2971665B1 FR1151130A FR1151130A FR2971665B1 FR 2971665 B1 FR2971665 B1 FR 2971665B1 FR 1151130 A FR1151130 A FR 1151130A FR 1151130 A FR1151130 A FR 1151130A FR 2971665 B1 FR2971665 B1 FR 2971665B1
Authority
FR
France
Prior art keywords
plasma torch
inductive plasma
inductive
torch
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1151130A
Other languages
English (en)
Other versions
FR2971665A1 (fr
Inventor
Guillaume Lecomte
Rentier Henri Montagnat
Jean-Francois Lafleur
Loic Reboud
Anthony Bardaine
Serge Baret
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EFD Induction SAS
Original Assignee
EFD Induction SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EFD Induction SAS filed Critical EFD Induction SAS
Priority to FR1151130A priority Critical patent/FR2971665B1/fr
Priority to PCT/FR2012/050295 priority patent/WO2012107699A1/fr
Priority to US13/984,438 priority patent/US9210786B2/en
Priority to PL12708901T priority patent/PL2674015T3/pl
Priority to EP12708901.9A priority patent/EP2674015B1/fr
Publication of FR2971665A1 publication Critical patent/FR2971665A1/fr
Application granted granted Critical
Publication of FR2971665B1 publication Critical patent/FR2971665B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/28—Cooling arrangements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electromagnetism (AREA)
  • Plasma Technology (AREA)
FR1151130A 2011-02-11 2011-02-11 Torche a plasma inductif Expired - Fee Related FR2971665B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR1151130A FR2971665B1 (fr) 2011-02-11 2011-02-11 Torche a plasma inductif
PCT/FR2012/050295 WO2012107699A1 (fr) 2011-02-11 2012-02-10 Torche a plasma inductif
US13/984,438 US9210786B2 (en) 2011-02-11 2012-02-10 Inductive plasma torch
PL12708901T PL2674015T3 (pl) 2011-02-11 2012-02-10 Indukcyjny palnik plazmowy
EP12708901.9A EP2674015B1 (fr) 2011-02-11 2012-02-10 Torche a plasma inductif

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1151130A FR2971665B1 (fr) 2011-02-11 2011-02-11 Torche a plasma inductif

Publications (2)

Publication Number Publication Date
FR2971665A1 FR2971665A1 (fr) 2012-08-17
FR2971665B1 true FR2971665B1 (fr) 2014-06-20

Family

ID=45833454

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1151130A Expired - Fee Related FR2971665B1 (fr) 2011-02-11 2011-02-11 Torche a plasma inductif

Country Status (5)

Country Link
US (1) US9210786B2 (fr)
EP (1) EP2674015B1 (fr)
FR (1) FR2971665B1 (fr)
PL (1) PL2674015T3 (fr)
WO (1) WO2012107699A1 (fr)

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1271852C2 (de) * 1966-11-05 1975-07-31 Siemens Aktiengesellschaft, 1000 Berlin und 8000 München Plasmabrenner
US4431901A (en) * 1982-07-02 1984-02-14 The United States Of America As Represented By The United States Department Of Energy Induction plasma tube
US4886160A (en) * 1988-11-07 1989-12-12 Kligerman Alan E Carton for containing a plurality of items for transport, storage and display
US4766287A (en) * 1987-03-06 1988-08-23 The Perkin-Elmer Corporation Inductively coupled plasma torch with adjustable sample injector
US5234529A (en) * 1991-10-10 1993-08-10 Johnson Wayne L Plasma generating apparatus employing capacitive shielding and process for using such apparatus
US5877471A (en) * 1997-06-11 1999-03-02 The Regents Of The University Of California Plasma torch having a cooled shield assembly
JP2001520452A (ja) * 1997-10-15 2001-10-30 東京エレクトロン株式会社 プラズマの密度分布を調節する装置及び方法
US5925266A (en) * 1997-10-15 1999-07-20 The Perkin-Elmer Corporation Mounting apparatus for induction coupled plasma torch
JPH11145148A (ja) * 1997-11-06 1999-05-28 Tdk Corp 熱プラズマアニール装置およびアニール方法
DE29823703U1 (de) * 1998-06-15 1999-11-25 Siemens Ag Induktions-Plasmagenerator
US7232767B2 (en) * 2003-04-01 2007-06-19 Mattson Technology, Inc. Slotted electrostatic shield modification for improved etch and CVD process uniformity
DE102004054826A1 (de) * 2004-11-12 2006-05-24 Georg Herdrich Induktiver Plasmagenerator

Also Published As

Publication number Publication date
EP2674015A1 (fr) 2013-12-18
EP2674015B1 (fr) 2016-08-10
US9210786B2 (en) 2015-12-08
FR2971665A1 (fr) 2012-08-17
WO2012107699A1 (fr) 2012-08-16
PL2674015T3 (pl) 2017-07-31
US20140319106A1 (en) 2014-10-30

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Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 6

PLFP Fee payment

Year of fee payment: 7

ST Notification of lapse

Effective date: 20181031