PL2674015T3 - Indukcyjny palnik plazmowy - Google Patents

Indukcyjny palnik plazmowy

Info

Publication number
PL2674015T3
PL2674015T3 PL12708901T PL12708901T PL2674015T3 PL 2674015 T3 PL2674015 T3 PL 2674015T3 PL 12708901 T PL12708901 T PL 12708901T PL 12708901 T PL12708901 T PL 12708901T PL 2674015 T3 PL2674015 T3 PL 2674015T3
Authority
PL
Poland
Prior art keywords
plasma torch
inductive plasma
inductive
torch
plasma
Prior art date
Application number
PL12708901T
Other languages
English (en)
Inventor
Guillaume Lecomte
Rentier Henri Montagnat
Jean-François Lafleur
Loïc Reboud
Anthony Bardaine
Serge Baret
Original Assignee
Efd Induction Sa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Efd Induction Sa filed Critical Efd Induction Sa
Publication of PL2674015T3 publication Critical patent/PL2674015T3/pl

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/28—Cooling arrangements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electromagnetism (AREA)
  • Plasma Technology (AREA)
PL12708901T 2011-02-11 2012-02-10 Indukcyjny palnik plazmowy PL2674015T3 (pl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1151130A FR2971665B1 (fr) 2011-02-11 2011-02-11 Torche a plasma inductif
EP12708901.9A EP2674015B1 (fr) 2011-02-11 2012-02-10 Torche a plasma inductif

Publications (1)

Publication Number Publication Date
PL2674015T3 true PL2674015T3 (pl) 2017-07-31

Family

ID=45833454

Family Applications (1)

Application Number Title Priority Date Filing Date
PL12708901T PL2674015T3 (pl) 2011-02-11 2012-02-10 Indukcyjny palnik plazmowy

Country Status (5)

Country Link
US (1) US9210786B2 (pl)
EP (1) EP2674015B1 (pl)
FR (1) FR2971665B1 (pl)
PL (1) PL2674015T3 (pl)
WO (1) WO2012107699A1 (pl)

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1271852C2 (de) * 1966-11-05 1975-07-31 Siemens Aktiengesellschaft, 1000 Berlin und 8000 München Plasmabrenner
US4431901A (en) * 1982-07-02 1984-02-14 The United States Of America As Represented By The United States Department Of Energy Induction plasma tube
US4886160A (en) * 1988-11-07 1989-12-12 Kligerman Alan E Carton for containing a plurality of items for transport, storage and display
US4766287A (en) * 1987-03-06 1988-08-23 The Perkin-Elmer Corporation Inductively coupled plasma torch with adjustable sample injector
US5234529A (en) * 1991-10-10 1993-08-10 Johnson Wayne L Plasma generating apparatus employing capacitive shielding and process for using such apparatus
US5877471A (en) 1997-06-11 1999-03-02 The Regents Of The University Of California Plasma torch having a cooled shield assembly
CN1102087C (zh) * 1997-10-15 2003-02-26 东京电子株式会社 处理基片的等离子体处理系统和方法
US5925266A (en) * 1997-10-15 1999-07-20 The Perkin-Elmer Corporation Mounting apparatus for induction coupled plasma torch
JPH11145148A (ja) * 1997-11-06 1999-05-28 Tdk Corp 熱プラズマアニール装置およびアニール方法
DE29823703U1 (de) * 1998-06-15 1999-11-25 Siemens Ag Induktions-Plasmagenerator
US7232767B2 (en) * 2003-04-01 2007-06-19 Mattson Technology, Inc. Slotted electrostatic shield modification for improved etch and CVD process uniformity
DE102004054826A1 (de) * 2004-11-12 2006-05-24 Georg Herdrich Induktiver Plasmagenerator

Also Published As

Publication number Publication date
WO2012107699A1 (fr) 2012-08-16
US9210786B2 (en) 2015-12-08
US20140319106A1 (en) 2014-10-30
FR2971665B1 (fr) 2014-06-20
FR2971665A1 (fr) 2012-08-17
EP2674015B1 (fr) 2016-08-10
EP2674015A1 (fr) 2013-12-18

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