EP2674015B1 - Torche a plasma inductif - Google Patents

Torche a plasma inductif Download PDF

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Publication number
EP2674015B1
EP2674015B1 EP12708901.9A EP12708901A EP2674015B1 EP 2674015 B1 EP2674015 B1 EP 2674015B1 EP 12708901 A EP12708901 A EP 12708901A EP 2674015 B1 EP2674015 B1 EP 2674015B1
Authority
EP
European Patent Office
Prior art keywords
cage
plasma torch
cylinder
inductive plasma
confinement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP12708901.9A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP2674015A1 (fr
Inventor
Guillaume Lecomte
Henri MONTAGNAT RENTIER
Jean-François LAFLEUR
Loïc REBOUD
Anthony BARDAINE
Serge BARET
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EFD Induction SAS
Original Assignee
EFD Induction SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EFD Induction SAS filed Critical EFD Induction SAS
Priority to PL12708901T priority Critical patent/PL2674015T3/pl
Publication of EP2674015A1 publication Critical patent/EP2674015A1/fr
Application granted granted Critical
Publication of EP2674015B1 publication Critical patent/EP2674015B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/28—Cooling arrangements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor

Definitions

  • the present invention relates to inductive plasma torches.
  • a plasma gas is injected into a containment cage where it is subjected to an alternating magnetic field which ionizes the gas to form a plasma.
  • Cold containment cages consisting of sectorized conductive cylinders cooled by the circulation of a liquid are commonly used.
  • the figure 1 is a perspective view cut along a vertical plane of an inductive plasma torch with cold containment cage of the type described in the patent US 5877471 .
  • the containment cage 1 is composed of multiple non-contiguous metallic parallel tubes 2, arranged to define together a hollow cylinder.
  • the tubes 2 extend between a bottom 3 of the upper side and a cap 4 of the lower side.
  • the upper part of the containment cage 1 is surrounded by an inductor winding 5.
  • a gas injector 7 enters the containment cage 1 through the cover 4 to the level of the inductor winding 5.
  • the bottom 3 is pierced with a flame exit opening.
  • the assembly is stiffened by bars 8 connecting the bottom 3 and the cover 4 to the outside of the containment cage 1.
  • the containment cage 1 is sealed by a sheath made of an insulating material, not shown in FIG. figure 1 , surrounding all the tubes 2.
  • the inductor winding 5 is hollow and there circulates a cooling liquid.
  • the tubes 2 are also traversed by a coolant injected and discharged from the hood 4.
  • an axial alternating magnetic field is created for ionizing the injected plasmagene gas in the confinement cage 1 to form a plasma.
  • the magnetic field is capable of creating eddy currents in the various conducting materials composing the torch. These currents have two adverse effects. They heat Joule effect conductors and induce attenuation of the axial magnetic field.
  • the fact that the containment cage consists of non-contiguous parallel tubes is equivalent to a sectorization of this cage, which means that the magnetic field can pass through with a certain attenuation while the eddy currents can not circulate around this cage.
  • An object of an embodiment of the present invention is to provide an inductive plasma torch, all elements of which are suitably cooled.
  • Another object of an embodiment of the present invention is to provide an inductive plasma torch whose manufacture and assembly are simple.
  • Another object of an embodiment of the present invention is to provide an inductive plasma torch.
  • Another object of an embodiment of the present invention is to provide an inductive plasma torch with improved electrical efficiency.
  • Another object of an embodiment of the present invention is to provide an inductive plasma torch able to operate in the presence of a radiating medium at high temperature in front of this torch.
  • Another object of an embodiment of the present invention is to provide an inductive plasma torch provided with protection against spurious radiation from the magnetic field.
  • An object of an embodiment of the present invention is to provide an inductive plasma torch of reduced volume.
  • an embodiment of the present invention provides an inductive plasma torch comprising a cylindrical metal confinement cage, a metal element integral with the confinement cage extending radially outwardly from the periphery of one end of that and an inductor surrounding the confinement cage, in which the confinement cage and said element are divided along axial planes in regularly distributed sectors, and in which the sectors are alternately joined by a portion of the confinement cage on the side opposite to the element and by a portion of said element on the opposite side to the containment cage.
  • said element is a laterally extending bottom.
  • said element comprises a cylindrical outer cage, concentric with the containment cage and secured to it by the bottom.
  • the containment cage and said element are traversed by pipes.
  • the containment cage and said element are made of copper.
  • One embodiment of the present invention provides a method of manufacturing an inductive plasma torch, in which a block of metallic material is formed comprising a first cylinder and an element integral with the first cylinder by a radially extending end thereof. outwardly from the periphery of an end of the first cylinder, and in which axial slots are provided to define sectors in said block, each slot passing through the element or the first cylinder and the cut being alternately interrupted at a low distance from an edge of the element opposite to the first cylinder and at a short distance from an edge of the first cylinder opposite the element.
  • said element is a laterally extending bottom.
  • said element is a second cylinder concentric and secured to the first cylinder by a bottom.
  • said block is formed by milling.
  • the conductive material is copper.
  • pipes are formed in the thickness of the cylinder and said element.
  • the Figure 2A illustrates an embodiment of an inductive plasma torch with cold walls.
  • the plasma torch comprises a cooled metal containment cage 1 in the form of a cylinder.
  • the containment cage is integral with a cooled metal bottom 10 extending laterally outwardly from the periphery of the upper end of the containment cage 1 (flame outlet side), this bottom serving as a heat shield compared to a warm environment, for example a bath of a molten material, receiving the flame of the torch.
  • a cover 4 is mounted on the lower side.
  • the containment cage 1 and the bottom 10 form a single element which is divided into sectors by axial slots.
  • the slots are interrupted so that the sectors are secured alternately by junction regions 11 extending between sectorized portions adjacent to the confinement cage 1 on the side opposite the bottom 10 and by junction regions 12 extending between sectored portions close to the bottom 10 on the opposite side to the containment cage 1.
  • An inductor winding 5 disposed on the bottom side 10 surrounds the containment cage 1.
  • the Figure 2B is a perspective view illustrating magnetically three adjacent sectors of the containment cage and the bottom of the inductive plasma torch of the Figure 2A .
  • the Figure 2B illustrates in particular internal pipes for the circulation of a cooling fluid in the thickness of the constituent metal of the containment cage 1 and the bottom 10.
  • a pipe 30 comprises five sections 30-1 to 30-5 of pipe formed inside the walls of the containment cage 1 and the bottom 10. Each section communicates with the next section.
  • the section 30-1 extends vertically from an opening 32 in the lower part of the containment cage 1 of the sector 101 to a region 30-a located in the bottom 10 of the sector 101.
  • the section 30- 2 extends radially in the bottom 10 of the sector 101 of the region 30-a to a region 30-b located at the end of the bottom 10 of the sector 101 opposite the containment cage 1.
  • the section 30-3 s' extends in the background 10 from the region 30-b to a region 30-c located in the bottom 10 of the sector 102 and symmetrical to the region 30-b of the sector 101.
  • the section 30-4 extends radially in the bottom 10 of the sector 102 of the region 30-c at a region 30-d located at the containment cage 1 of the sector 102.
  • the section 30-5 extends vertically in the containment cage 1 of the sector 102 of the region 30-d to an opening 33 in the lower part of the containment cage 1 of the sector 102.
  • the figure 3A illustrates another embodiment of an inductive plasma torch.
  • the inductive plasma torch comprises a containment cage 1 in the form of a cylinder and an outer cage 9 in the form of a coaxial cylinder.
  • the containment cage 1 and the outer cage 9 are connected to the upper side (flame exit side) by a bottom 10.
  • a cap 4 is mounted on the lower side.
  • the containment cage 1, the outer cage 9 and the bottom 10 form a single metal element, for example copper, which is divided into sectors by axial slots.
  • the slots are interrupted so that the sectors are secured, on the opposite side to the bottom, alternately by junction regions 11 extending between sectorized portions adjacent to the containment cage 1 and by junction regions 13 extending between sectored portions adjacent to the outer cage 9.
  • An inductor winding 5 disposed on the bottom side 10 surrounds the containment cage 1.
  • the external cage is intended to limit the electromagnetic radiation emitted to the outside.
  • the figure 3B is a perspective view illustrating magnetically three adjacent sectors of the containment cage, the outer cage and the bottom of the figure 3A .
  • the central part of the containment cage 1 is punctured for the sake of clarity.
  • the figure 3B illustrates in particular internal pipes for the circulation of a fluid of cooling in the thickness of the constituent metal of the containment cage 1, the outer cage 9 and the bottom 10.
  • a pipe 30 comprises seven sections of pipe 30-1, 30-2, 30-6 to 30-8, 30-4 and 30-5 formed inside the walls of the containment cage 1, the outer cage 9 and the bottom 10. Each section communicates with the next section.
  • the section 30-1 extends vertically from an opening 32 in the lower part of the containment cage 1 of the sector 101 to a region 30-a located in the bottom 10 of the sector 101.
  • the section 30- 2 extends radially in the bottom 10 of the sector 101 of the region 30-a to a region 30-b located at the outer cage of the sector 101.
  • the section 30-6 extends vertically in the outer cage of the sector 101 from region 30-b to a region 30-e.
  • the section 30-7 extends horizontally in the outer cage of the region 30-e in the sector 101 to a region 30-f in the sector 102.
  • the section 30-8 extends vertically in the outer cage of the sector 102 from the region 30-f to a region 30-c located in the bottom 10 of the sector 102.
  • the section 30-4 extends radially in the bottom 10 of the sector 102 of the region 30-c to a region 30-d located at the level of the containment cage 1 of the sector 102.
  • the section 30-5 extends vertically in the containment cage 1 of the sector 102 of the end 30-d to an opening 33 in the lower part of the containment cage 1 of sector 102.
  • the cooling fluid is injected into the pipes 30 through the openings 32 and discharged through the openings 33.
  • the pipe sections are for example made by drilling. They are closed by insertion of plugs and / or by soldering at the piercing outlets at locations where the pipe 30 is not to be opened.
  • the containment cage, the bottom and preferably the outer cage when it is provided are sealed by filling the spacing between the sectors by an electrical insulator.
  • the manufacture of such plasma torches is simple since the containment cage, the bottom and, if it is provided, the outer cage form a single element.
  • This element can be made by molding, machining or by welding different sub-elements.
  • it may be from a copper block which is milled to define the bottom, the confinement cylinder and possibly the outer cylinder. Once this block is formed, simple sawing operations will allow division into sectors. Of course, this is susceptible of many variations.
  • the cylinder or cylinders and the bottom may be manufactured separately and welded or otherwise assembled and split to ensure division into sectors while maintaining the consistency of the whole.
  • An advantage of the torch structures described herein is their ease of assembly. Indeed, the entire inner cage, the bottom and possibly the outer cage is a one-piece assembly that is easy to assemble.
  • Another advantage lies in the uniqueness of the cooling circuit.
  • the plasma torch comprising a sectored external cage is particularly compact. Indeed, the inductor is located in a cold zone and protected from dust from the external environment, the dimensions of the plasma torch can be reduced without fear of breakdowns related to the strong alternating currents flowing in the inductor. Conversely, at fixed torch volume, the torch structure comprising a sectorized outer cage described herein may be associated with a more powerful AC generator than in the case of prior structures. For example, for the dimensions specified above, the power of the generator is limited to 200 kW for a torch structure equivalent to that described in FIG. figure 1 against 350 kW for the torch structure comprising a monobloc sectorized assembly.
  • the containment cage, the bottom and, if it is provided, the outer cage are made of copper.
  • the cover is fluoropolymer type PTFE GF25, better known as Teflon.
  • the outer diameter of the outer cage is 210 mm
  • the inner diameter of the containment cage is 50 mm
  • the outer diameter of the inductor winding is 110 mm.
  • the height of the containment cage and outer cage is 290 mm.
  • the thickness of the containment cage is 10 mm.
  • the injector enters the containment cage up to a distance of 70 mm from the bottom.
  • the inductor winding starts at 30 mm from the bottom and ends at 110 mm from the bottom.
  • the containment cage, the bottom and according to the embodiment of the outer cage are divided into 12 regularly distributed sectors.
  • the sectorization, when extended to the lower edge of the containment cage is interrupted at 20 mm from the edge of the outer cage or the bottom according to the embodiment.
  • the spacing between sectors is 1.5 mm.
  • the diameter of the pipes in the containment cage, the bottom and according to the embodiment the outer cage is 3 mm.
  • the number of sectors may be chosen by those skilled in the art to optimize the characteristics of the torch, and in particular to promote the propagation of the magnetic field towards the interior of the structure and limit its propagation to the outside of the structure when the plasma torch is provided with a sectored outer cage.
  • the thickness of the outer cage is greater than that of the containment cage.
  • a crown made of a refractory material constituting a thermal shield protecting the bottom against the heat radiation produced by the material heated by the plasma torch can be added to the bottom of the outer side.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electromagnetism (AREA)
  • Plasma Technology (AREA)
EP12708901.9A 2011-02-11 2012-02-10 Torche a plasma inductif Not-in-force EP2674015B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PL12708901T PL2674015T3 (pl) 2011-02-11 2012-02-10 Indukcyjny palnik plazmowy

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1151130A FR2971665B1 (fr) 2011-02-11 2011-02-11 Torche a plasma inductif
PCT/FR2012/050295 WO2012107699A1 (fr) 2011-02-11 2012-02-10 Torche a plasma inductif

Publications (2)

Publication Number Publication Date
EP2674015A1 EP2674015A1 (fr) 2013-12-18
EP2674015B1 true EP2674015B1 (fr) 2016-08-10

Family

ID=45833454

Family Applications (1)

Application Number Title Priority Date Filing Date
EP12708901.9A Not-in-force EP2674015B1 (fr) 2011-02-11 2012-02-10 Torche a plasma inductif

Country Status (5)

Country Link
US (1) US9210786B2 (pl)
EP (1) EP2674015B1 (pl)
FR (1) FR2971665B1 (pl)
PL (1) PL2674015T3 (pl)
WO (1) WO2012107699A1 (pl)

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1271852C2 (de) * 1966-11-05 1975-07-31 Siemens Aktiengesellschaft, 1000 Berlin und 8000 München Plasmabrenner
US4431901A (en) * 1982-07-02 1984-02-14 The United States Of America As Represented By The United States Department Of Energy Induction plasma tube
US4886160A (en) * 1988-11-07 1989-12-12 Kligerman Alan E Carton for containing a plurality of items for transport, storage and display
US4766287A (en) * 1987-03-06 1988-08-23 The Perkin-Elmer Corporation Inductively coupled plasma torch with adjustable sample injector
US5234529A (en) * 1991-10-10 1993-08-10 Johnson Wayne L Plasma generating apparatus employing capacitive shielding and process for using such apparatus
US5877471A (en) * 1997-06-11 1999-03-02 The Regents Of The University Of California Plasma torch having a cooled shield assembly
US5925266A (en) * 1997-10-15 1999-07-20 The Perkin-Elmer Corporation Mounting apparatus for induction coupled plasma torch
KR20010024504A (ko) * 1997-10-15 2001-03-26 히가시 데쓰로 플라즈마의 밀도분포를 조정하기 위한 장치 및 방법
JPH11145148A (ja) * 1997-11-06 1999-05-28 Tdk Corp 熱プラズマアニール装置およびアニール方法
DE29823703U1 (de) * 1998-06-15 1999-11-25 Siemens AG, 80333 München Induktions-Plasmagenerator
US7232767B2 (en) * 2003-04-01 2007-06-19 Mattson Technology, Inc. Slotted electrostatic shield modification for improved etch and CVD process uniformity
DE102004054826A1 (de) * 2004-11-12 2006-05-24 Georg Herdrich Induktiver Plasmagenerator

Also Published As

Publication number Publication date
PL2674015T3 (pl) 2017-07-31
EP2674015A1 (fr) 2013-12-18
WO2012107699A1 (fr) 2012-08-16
FR2971665A1 (fr) 2012-08-17
US20140319106A1 (en) 2014-10-30
US9210786B2 (en) 2015-12-08
FR2971665B1 (fr) 2014-06-20

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