EP2674015B1 - Inductive plasma torch - Google Patents

Inductive plasma torch Download PDF

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Publication number
EP2674015B1
EP2674015B1 EP12708901.9A EP12708901A EP2674015B1 EP 2674015 B1 EP2674015 B1 EP 2674015B1 EP 12708901 A EP12708901 A EP 12708901A EP 2674015 B1 EP2674015 B1 EP 2674015B1
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EP
European Patent Office
Prior art keywords
cage
plasma torch
cylinder
inductive plasma
confinement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP12708901.9A
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German (de)
French (fr)
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EP2674015A1 (en
Inventor
Guillaume Lecomte
Henri MONTAGNAT RENTIER
Jean-François LAFLEUR
Loïc REBOUD
Anthony BARDAINE
Serge BARET
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EFD Induction SAS
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EFD Induction SAS
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Publication date
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Priority to PL12708901T priority Critical patent/PL2674015T3/en
Publication of EP2674015A1 publication Critical patent/EP2674015A1/en
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Publication of EP2674015B1 publication Critical patent/EP2674015B1/en
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/28—Cooling arrangements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor

Definitions

  • the present invention relates to inductive plasma torches.
  • a plasma gas is injected into a containment cage where it is subjected to an alternating magnetic field which ionizes the gas to form a plasma.
  • Cold containment cages consisting of sectorized conductive cylinders cooled by the circulation of a liquid are commonly used.
  • the figure 1 is a perspective view cut along a vertical plane of an inductive plasma torch with cold containment cage of the type described in the patent US 5877471 .
  • the containment cage 1 is composed of multiple non-contiguous metallic parallel tubes 2, arranged to define together a hollow cylinder.
  • the tubes 2 extend between a bottom 3 of the upper side and a cap 4 of the lower side.
  • the upper part of the containment cage 1 is surrounded by an inductor winding 5.
  • a gas injector 7 enters the containment cage 1 through the cover 4 to the level of the inductor winding 5.
  • the bottom 3 is pierced with a flame exit opening.
  • the assembly is stiffened by bars 8 connecting the bottom 3 and the cover 4 to the outside of the containment cage 1.
  • the containment cage 1 is sealed by a sheath made of an insulating material, not shown in FIG. figure 1 , surrounding all the tubes 2.
  • the inductor winding 5 is hollow and there circulates a cooling liquid.
  • the tubes 2 are also traversed by a coolant injected and discharged from the hood 4.
  • an axial alternating magnetic field is created for ionizing the injected plasmagene gas in the confinement cage 1 to form a plasma.
  • the magnetic field is capable of creating eddy currents in the various conducting materials composing the torch. These currents have two adverse effects. They heat Joule effect conductors and induce attenuation of the axial magnetic field.
  • the fact that the containment cage consists of non-contiguous parallel tubes is equivalent to a sectorization of this cage, which means that the magnetic field can pass through with a certain attenuation while the eddy currents can not circulate around this cage.
  • An object of an embodiment of the present invention is to provide an inductive plasma torch, all elements of which are suitably cooled.
  • Another object of an embodiment of the present invention is to provide an inductive plasma torch whose manufacture and assembly are simple.
  • Another object of an embodiment of the present invention is to provide an inductive plasma torch.
  • Another object of an embodiment of the present invention is to provide an inductive plasma torch with improved electrical efficiency.
  • Another object of an embodiment of the present invention is to provide an inductive plasma torch able to operate in the presence of a radiating medium at high temperature in front of this torch.
  • Another object of an embodiment of the present invention is to provide an inductive plasma torch provided with protection against spurious radiation from the magnetic field.
  • An object of an embodiment of the present invention is to provide an inductive plasma torch of reduced volume.
  • an embodiment of the present invention provides an inductive plasma torch comprising a cylindrical metal confinement cage, a metal element integral with the confinement cage extending radially outwardly from the periphery of one end of that and an inductor surrounding the confinement cage, in which the confinement cage and said element are divided along axial planes in regularly distributed sectors, and in which the sectors are alternately joined by a portion of the confinement cage on the side opposite to the element and by a portion of said element on the opposite side to the containment cage.
  • said element is a laterally extending bottom.
  • said element comprises a cylindrical outer cage, concentric with the containment cage and secured to it by the bottom.
  • the containment cage and said element are traversed by pipes.
  • the containment cage and said element are made of copper.
  • One embodiment of the present invention provides a method of manufacturing an inductive plasma torch, in which a block of metallic material is formed comprising a first cylinder and an element integral with the first cylinder by a radially extending end thereof. outwardly from the periphery of an end of the first cylinder, and in which axial slots are provided to define sectors in said block, each slot passing through the element or the first cylinder and the cut being alternately interrupted at a low distance from an edge of the element opposite to the first cylinder and at a short distance from an edge of the first cylinder opposite the element.
  • said element is a laterally extending bottom.
  • said element is a second cylinder concentric and secured to the first cylinder by a bottom.
  • said block is formed by milling.
  • the conductive material is copper.
  • pipes are formed in the thickness of the cylinder and said element.
  • the Figure 2A illustrates an embodiment of an inductive plasma torch with cold walls.
  • the plasma torch comprises a cooled metal containment cage 1 in the form of a cylinder.
  • the containment cage is integral with a cooled metal bottom 10 extending laterally outwardly from the periphery of the upper end of the containment cage 1 (flame outlet side), this bottom serving as a heat shield compared to a warm environment, for example a bath of a molten material, receiving the flame of the torch.
  • a cover 4 is mounted on the lower side.
  • the containment cage 1 and the bottom 10 form a single element which is divided into sectors by axial slots.
  • the slots are interrupted so that the sectors are secured alternately by junction regions 11 extending between sectorized portions adjacent to the confinement cage 1 on the side opposite the bottom 10 and by junction regions 12 extending between sectored portions close to the bottom 10 on the opposite side to the containment cage 1.
  • An inductor winding 5 disposed on the bottom side 10 surrounds the containment cage 1.
  • the Figure 2B is a perspective view illustrating magnetically three adjacent sectors of the containment cage and the bottom of the inductive plasma torch of the Figure 2A .
  • the Figure 2B illustrates in particular internal pipes for the circulation of a cooling fluid in the thickness of the constituent metal of the containment cage 1 and the bottom 10.
  • a pipe 30 comprises five sections 30-1 to 30-5 of pipe formed inside the walls of the containment cage 1 and the bottom 10. Each section communicates with the next section.
  • the section 30-1 extends vertically from an opening 32 in the lower part of the containment cage 1 of the sector 101 to a region 30-a located in the bottom 10 of the sector 101.
  • the section 30- 2 extends radially in the bottom 10 of the sector 101 of the region 30-a to a region 30-b located at the end of the bottom 10 of the sector 101 opposite the containment cage 1.
  • the section 30-3 s' extends in the background 10 from the region 30-b to a region 30-c located in the bottom 10 of the sector 102 and symmetrical to the region 30-b of the sector 101.
  • the section 30-4 extends radially in the bottom 10 of the sector 102 of the region 30-c at a region 30-d located at the containment cage 1 of the sector 102.
  • the section 30-5 extends vertically in the containment cage 1 of the sector 102 of the region 30-d to an opening 33 in the lower part of the containment cage 1 of the sector 102.
  • the figure 3A illustrates another embodiment of an inductive plasma torch.
  • the inductive plasma torch comprises a containment cage 1 in the form of a cylinder and an outer cage 9 in the form of a coaxial cylinder.
  • the containment cage 1 and the outer cage 9 are connected to the upper side (flame exit side) by a bottom 10.
  • a cap 4 is mounted on the lower side.
  • the containment cage 1, the outer cage 9 and the bottom 10 form a single metal element, for example copper, which is divided into sectors by axial slots.
  • the slots are interrupted so that the sectors are secured, on the opposite side to the bottom, alternately by junction regions 11 extending between sectorized portions adjacent to the containment cage 1 and by junction regions 13 extending between sectored portions adjacent to the outer cage 9.
  • An inductor winding 5 disposed on the bottom side 10 surrounds the containment cage 1.
  • the external cage is intended to limit the electromagnetic radiation emitted to the outside.
  • the figure 3B is a perspective view illustrating magnetically three adjacent sectors of the containment cage, the outer cage and the bottom of the figure 3A .
  • the central part of the containment cage 1 is punctured for the sake of clarity.
  • the figure 3B illustrates in particular internal pipes for the circulation of a fluid of cooling in the thickness of the constituent metal of the containment cage 1, the outer cage 9 and the bottom 10.
  • a pipe 30 comprises seven sections of pipe 30-1, 30-2, 30-6 to 30-8, 30-4 and 30-5 formed inside the walls of the containment cage 1, the outer cage 9 and the bottom 10. Each section communicates with the next section.
  • the section 30-1 extends vertically from an opening 32 in the lower part of the containment cage 1 of the sector 101 to a region 30-a located in the bottom 10 of the sector 101.
  • the section 30- 2 extends radially in the bottom 10 of the sector 101 of the region 30-a to a region 30-b located at the outer cage of the sector 101.
  • the section 30-6 extends vertically in the outer cage of the sector 101 from region 30-b to a region 30-e.
  • the section 30-7 extends horizontally in the outer cage of the region 30-e in the sector 101 to a region 30-f in the sector 102.
  • the section 30-8 extends vertically in the outer cage of the sector 102 from the region 30-f to a region 30-c located in the bottom 10 of the sector 102.
  • the section 30-4 extends radially in the bottom 10 of the sector 102 of the region 30-c to a region 30-d located at the level of the containment cage 1 of the sector 102.
  • the section 30-5 extends vertically in the containment cage 1 of the sector 102 of the end 30-d to an opening 33 in the lower part of the containment cage 1 of sector 102.
  • the cooling fluid is injected into the pipes 30 through the openings 32 and discharged through the openings 33.
  • the pipe sections are for example made by drilling. They are closed by insertion of plugs and / or by soldering at the piercing outlets at locations where the pipe 30 is not to be opened.
  • the containment cage, the bottom and preferably the outer cage when it is provided are sealed by filling the spacing between the sectors by an electrical insulator.
  • the manufacture of such plasma torches is simple since the containment cage, the bottom and, if it is provided, the outer cage form a single element.
  • This element can be made by molding, machining or by welding different sub-elements.
  • it may be from a copper block which is milled to define the bottom, the confinement cylinder and possibly the outer cylinder. Once this block is formed, simple sawing operations will allow division into sectors. Of course, this is susceptible of many variations.
  • the cylinder or cylinders and the bottom may be manufactured separately and welded or otherwise assembled and split to ensure division into sectors while maintaining the consistency of the whole.
  • An advantage of the torch structures described herein is their ease of assembly. Indeed, the entire inner cage, the bottom and possibly the outer cage is a one-piece assembly that is easy to assemble.
  • Another advantage lies in the uniqueness of the cooling circuit.
  • the plasma torch comprising a sectored external cage is particularly compact. Indeed, the inductor is located in a cold zone and protected from dust from the external environment, the dimensions of the plasma torch can be reduced without fear of breakdowns related to the strong alternating currents flowing in the inductor. Conversely, at fixed torch volume, the torch structure comprising a sectorized outer cage described herein may be associated with a more powerful AC generator than in the case of prior structures. For example, for the dimensions specified above, the power of the generator is limited to 200 kW for a torch structure equivalent to that described in FIG. figure 1 against 350 kW for the torch structure comprising a monobloc sectorized assembly.
  • the containment cage, the bottom and, if it is provided, the outer cage are made of copper.
  • the cover is fluoropolymer type PTFE GF25, better known as Teflon.
  • the outer diameter of the outer cage is 210 mm
  • the inner diameter of the containment cage is 50 mm
  • the outer diameter of the inductor winding is 110 mm.
  • the height of the containment cage and outer cage is 290 mm.
  • the thickness of the containment cage is 10 mm.
  • the injector enters the containment cage up to a distance of 70 mm from the bottom.
  • the inductor winding starts at 30 mm from the bottom and ends at 110 mm from the bottom.
  • the containment cage, the bottom and according to the embodiment of the outer cage are divided into 12 regularly distributed sectors.
  • the sectorization, when extended to the lower edge of the containment cage is interrupted at 20 mm from the edge of the outer cage or the bottom according to the embodiment.
  • the spacing between sectors is 1.5 mm.
  • the diameter of the pipes in the containment cage, the bottom and according to the embodiment the outer cage is 3 mm.
  • the number of sectors may be chosen by those skilled in the art to optimize the characteristics of the torch, and in particular to promote the propagation of the magnetic field towards the interior of the structure and limit its propagation to the outside of the structure when the plasma torch is provided with a sectored outer cage.
  • the thickness of the outer cage is greater than that of the containment cage.
  • a crown made of a refractory material constituting a thermal shield protecting the bottom against the heat radiation produced by the material heated by the plasma torch can be added to the bottom of the outer side.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electromagnetism (AREA)
  • Plasma Technology (AREA)

Description

Domaine de l'inventionField of the invention

La présente invention concerne les torches à plasma inductif.The present invention relates to inductive plasma torches.

Exposé de l'art antérieurPresentation of the prior art

Dans une torche à plasma inductif, un gaz plasmagène est injecté dans une cage de confinement où il est soumis à un champ magnétique alternatif qui ionise le gaz pour former un plasma.In an inductively coupled plasma torch, a plasma gas is injected into a containment cage where it is subjected to an alternating magnetic field which ionizes the gas to form a plasma.

La cage de confinement d'une torche à plasma inductif doit présenter plusieurs caractéristiques :

  • être étanche aux gaz,
  • laisser passer le champ magnétique, et
  • résister à de très hautes températures puisque la température au coeur du plasma peut atteindre des valeurs de l'ordre de 7000°C.
The containment cage of an inductive plasma torch must have several characteristics:
  • be gas tight,
  • let the magnetic field pass, and
  • to withstand very high temperatures since the temperature at the heart of the plasma can reach values of the order of 7000 ° C.

On utilise couramment des cages de confinement froides constituées de cylindres conducteurs sectorisés refroidis par circulation d'un liquide.Cold containment cages consisting of sectorized conductive cylinders cooled by the circulation of a liquid are commonly used.

La figure 1 est une vue en perspective coupée selon un plan vertical d'une torche à plasma inductif à cage de confinement froide du type de celle décrite dans le brevet US 5877471 .The figure 1 is a perspective view cut along a vertical plane of an inductive plasma torch with cold containment cage of the type described in the patent US 5877471 .

La cage de confinement 1 est composée de multiples tubes parallèles métalliques 2 non jointifs, disposés pour définir ensemble un cylindre creux. Les tubes 2 s'étendent entre un fond 3 du côté supérieur et un capot 4 du côté inférieur. La partie supérieure de la cage de confinement 1 est entourée d'un enroulement inducteur 5. Un injecteur de gaz 7 pénètre dans la cage de confinement 1 au travers du capot 4 jusqu'au niveau de l'enroulement inducteur 5. Le fond 3 est percé d'une ouverture de sortie de flamme. L'ensemble est rigidifié par des barreaux 8 reliant le fond 3 et le capot 4 à l'extérieur de la cage de confinement 1.The containment cage 1 is composed of multiple non-contiguous metallic parallel tubes 2, arranged to define together a hollow cylinder. The tubes 2 extend between a bottom 3 of the upper side and a cap 4 of the lower side. The upper part of the containment cage 1 is surrounded by an inductor winding 5. A gas injector 7 enters the containment cage 1 through the cover 4 to the level of the inductor winding 5. The bottom 3 is pierced with a flame exit opening. The assembly is stiffened by bars 8 connecting the bottom 3 and the cover 4 to the outside of the containment cage 1.

La cage de confinement 1 est étanchéifiée par une gaine en un matériau isolant, non représentée en figure 1, entourant l'ensemble des tubes 2.The containment cage 1 is sealed by a sheath made of an insulating material, not shown in FIG. figure 1 , surrounding all the tubes 2.

L'enroulement inducteur 5 est creux et il y circule un liquide de refroidissement. Les tubes 2 sont également parcourus par un liquide de refroidissement injecté et évacué depuis le capot 4.The inductor winding 5 is hollow and there circulates a cooling liquid. The tubes 2 are also traversed by a coolant injected and discharged from the hood 4.

Une autre torche à plasma comprenant une cage de confinement métalique, cylindrique et sectorisée est divulguée dans le document US-A-5 234 529 .Another plasma torch comprising a cylindrical and sectorized metal confinement cage is disclosed in the document US-A-5,234,529 .

Lorsqu'un courant alternatif parcourt l'inducteur 5, il se crée un champ magnétique alternatif axial destiné à ioniser le gaz plasmagène injecté dans la cage de confinement 1 pour former un plasma Le champ magnétique est susceptible de créer des courants de Foucault dans les divers matériaux conducteurs composant la torche. Ces courants ont deux effets néfastes. Ils échauffent par effet Joule les conducteurs et induisent une atténuation du champ magnétique axial. Le fait que la cage de confinement soit constituée de tubes parallèles non jointifs équivaut à une sectorisation de cette cage, ce qui entraîne que le champ magnétique peut la traverser avec une certaine atténuation alors que les courants de Foucault ne peuvent circuler autour de cette cage. Il se pose toutefois un problème en ce qui concerne le fond et le capot, et notamment le fond disposé autour d'une région portée en fonctionnement à très haute température par la flamme de la torche. Il se pose également un problème de parasitage provoqué par le champ magnétique alternatif rayonné à l'extérieur de la torche.When an alternating current flows through the inductor 5, an axial alternating magnetic field is created for ionizing the injected plasmagene gas in the confinement cage 1 to form a plasma. The magnetic field is capable of creating eddy currents in the various conducting materials composing the torch. These currents have two adverse effects. They heat Joule effect conductors and induce attenuation of the axial magnetic field. The fact that the containment cage consists of non-contiguous parallel tubes is equivalent to a sectorization of this cage, which means that the magnetic field can pass through with a certain attenuation while the eddy currents can not circulate around this cage. However, there is a problem with regard to the bottom and the hood, and in particular the bottom disposed around a region carried into operation at very high temperature by the flame of the torch. It arises also a problem of interference caused by the alternating magnetic field radiated outside the torch.

Résumésummary

Un objet d'un mode de réalisation de la présente invention est de prévoir une torche à plasma inductif dont tous les éléments sont convenablement refroidis.An object of an embodiment of the present invention is to provide an inductive plasma torch, all elements of which are suitably cooled.

Un autre objet d'un mode de réalisation de la présente invention est de prévoir une torche à plasma inductif dont la fabrication et l'assemblage sont simples.Another object of an embodiment of the present invention is to provide an inductive plasma torch whose manufacture and assembly are simple.

Un autre objet d'un mode de réalisation de la présente invention est de prévoir une torche à plasma inductif.Another object of an embodiment of the present invention is to provide an inductive plasma torch.

Un autre objet d'un mode de réalisation de la présente invention est de prévoir une torche à plasma inductif de rendement électrique amélioré.Another object of an embodiment of the present invention is to provide an inductive plasma torch with improved electrical efficiency.

Un autre objet d'un mode de réalisation de la présente invention est de prévoir une torche à plasma inductif apte à fonctionner en présence d'un milieu rayonnant à haute température en face de cette torche.Another object of an embodiment of the present invention is to provide an inductive plasma torch able to operate in the presence of a radiating medium at high temperature in front of this torch.

Un autre objet d'un mode de réalisation de la présente invention est de prévoir une torche à plasma inductif munie d'une protection à l'encontre des rayonnements parasites du champ magnétique.Another object of an embodiment of the present invention is to provide an inductive plasma torch provided with protection against spurious radiation from the magnetic field.

Un objet d'un mode de réalisation de la présente invention est de prévoir une torche à plasma inductif de volume réduit.An object of an embodiment of the present invention is to provide an inductive plasma torch of reduced volume.

Ainsi, un mode de réalisation de la présente invention prévoit une torche à plasma inductif comprenant une cage de confinement métallique cylindrique, un élément métallique solidaire de la cage de confinement partant radialement, vers l'extérieur, de la périphérie d'une extrémité de celle-ci, et un inducteur entourant la cage de confinement, dans laquelle la cage de confinement et ledit élément sont divisés selon des plans axiaux en secteurs régulièrement répartis, et dans laquelle les secteurs sont solidarisés alternativement par une portion de la cage de confinement du côté opposé à l'élément et par une portion dudit élément du côté opposé à la cage de confinement.Thus, an embodiment of the present invention provides an inductive plasma torch comprising a cylindrical metal confinement cage, a metal element integral with the confinement cage extending radially outwardly from the periphery of one end of that and an inductor surrounding the confinement cage, in which the confinement cage and said element are divided along axial planes in regularly distributed sectors, and in which the sectors are alternately joined by a portion of the confinement cage on the side opposite to the element and by a portion of said element on the opposite side to the containment cage.

Selon un mode de réalisation de la présente invention, ledit élément est un fond s'étendant latéralement.According to an embodiment of the present invention, said element is a laterally extending bottom.

Selon un mode de réalisation de la présente invention, ledit élément comprend une cage externe cylindrique, concentrique de la cage de confinement et solidaire de celle-ci par le fond.According to an embodiment of the present invention, said element comprises a cylindrical outer cage, concentric with the containment cage and secured to it by the bottom.

Selon un mode de réalisation de la présente invention, la cage de confinement et ledit élément sont traversés par des canalisations.According to one embodiment of the present invention, the containment cage and said element are traversed by pipes.

Selon un mode de réalisation de la présente invention, la cage de confinement et ledit élément sont en cuivre.According to one embodiment of the present invention, the containment cage and said element are made of copper.

Un mode de réalisation de la présente invention prévoit un procédé de fabrication d'une torche à plasma inductif, dans lequel on forme un bloc de matériau métallique comprenant un premier cylindre et un élément solidaire du premier cylindre par une extrémité de celui-ci partant radialement vers l'extérieur de la périphérie d'une extrémité du premier cylindre, et dans lequel on ménage des fentes axiales pour définir des secteurs dans ledit bloc, chaque fente traversant l'élément ou le premier cylindre et la découpe étant alternativement interrompue à une faible distance d'un bord de l'élément opposé au premier cylindre et à une faible distance d'un bord du premier cylindre opposé à l'élément.One embodiment of the present invention provides a method of manufacturing an inductive plasma torch, in which a block of metallic material is formed comprising a first cylinder and an element integral with the first cylinder by a radially extending end thereof. outwardly from the periphery of an end of the first cylinder, and in which axial slots are provided to define sectors in said block, each slot passing through the element or the first cylinder and the cut being alternately interrupted at a low distance from an edge of the element opposite to the first cylinder and at a short distance from an edge of the first cylinder opposite the element.

Selon un mode de réalisation de la présente invention, ledit élément est un fond s'étendant latéralement.According to an embodiment of the present invention, said element is a laterally extending bottom.

Selon un mode de réalisation de la présente invention, ledit élément est un second cylindre concentrique et solidarisé au premier cylindre par un fond.According to an embodiment of the present invention, said element is a second cylinder concentric and secured to the first cylinder by a bottom.

Selon un mode de réalisation de la présente invention, ledit bloc est formé par fraisage.According to an embodiment of the present invention, said block is formed by milling.

Selon un mode de réalisation de la présente invention, le matériau conducteur est du cuivre.According to one embodiment of the present invention, the conductive material is copper.

Selon un mode de réalisation de la présente invention, des canalisations sont formées dans l'épaisseur du cylindre et dudit élément.According to one embodiment of the present invention, pipes are formed in the thickness of the cylinder and said element.

Brève description des dessinsBrief description of the drawings

Ces objets, caractéristiques et avantages, ainsi que d'autres seront exposés en détail dans la description suivante de modes de réalisation particuliers faite à titre non-limitatif en relation avec les figures jointes parmi lesquelles :

  • la figure 1 est une vue en perspective coupée selon un plan vertical d'une torche à plasma inductif à cage de confinement froide du type de celle décrite dans le brevet US 5877471 ,
  • la figure 2A est une vue en perspective coupée selon un plan vertical d'une torche à plasma inductif selon un mode de réalisation de la présente invention,
  • la figure 2B est une vue en perspective illustrant trois secteurs adjacents de la cage de confinement et du fond de la torche à plasma de la figure 2A,
  • la figure 3A est une vue en perspective coupée selon un plan vertical d'une torche à plasma inductif selon un autre mode de réalisation de la présente invention, et
  • la figure 3B est une vue en perspective illustrant trois secteurs adjacents de la cage de confinement, de la cage externe et du fond de la torche à plasma de la figure 3A.
These and other objects, features, and advantages will be set forth in detail in the following description of particular embodiments in a non-limitative manner with reference to the accompanying figures in which:
  • the figure 1 is a perspective view cut along a vertical plane of an inductive plasma torch with cold containment cage of the type described in the patent US 5877471 ,
  • the Figure 2A is a perspective view cut along a vertical plane of an inductive plasma torch according to an embodiment of the present invention,
  • the Figure 2B is a perspective view illustrating three adjacent sectors of the containment cage and the bottom of the plasma torch of the Figure 2A ,
  • the figure 3A is a perspective view cut along a vertical plane of an inductive plasma torch according to another embodiment of the present invention, and
  • the figure 3B is a perspective view illustrating three adjacent sectors of the containment cage, the outer cage and the bottom of the plasma torch of the figure 3A .

De mêmes références désignent de mêmes éléments dans les diverses figures.The same references designate the same elements in the various figures.

Description détailléedetailed description

La figure 2A illustre un mode de réalisation d'une torche à plasma inductif à parois froides. La torche à plasma comprend une cage de confinement métallique refroidie 1 en forme de cylindre. La cage de confinement est solidaire d'un fond métallique refroidi 10 s'étendant latéralement vers l'extérieur depuis la périphérie de l'extrémité supérieure de la cage de confinement 1 (côté de sortie de flamme), ce fond servant d'écran thermique par rapport à un milieu chaud, par exemple un bain d'un matériau fondu, recevant la flamme de la torche. Un capot 4 est monté du côté inférieur. La cage de confinement 1 et le fond 10 forment un élément unique qui est divisé en secteurs par des fentes axiales. Les fentes sont interrompues de sorte que les secteurs sont solidaires alternativement par des régions de jonction 11 s'étendant entre des parties sectorisées voisines de la cage de confinement 1 du côté opposé au fond 10 et par des régions de jonction 12 s'étendant entre des parties sectorisées voisines du fond 10 du côté opposé à la cage de confinement 1. Un enroulement inducteur 5 disposé du côté du fond 10 entoure la cage de confinement 1. Un injecteur de gaz 7, non intégralement représenté, pénètre dans la cage de confinement 1 au travers du capot 4 jusqu'au niveau de l'enroulement inducteur 5.The Figure 2A illustrates an embodiment of an inductive plasma torch with cold walls. The plasma torch comprises a cooled metal containment cage 1 in the form of a cylinder. The containment cage is integral with a cooled metal bottom 10 extending laterally outwardly from the periphery of the upper end of the containment cage 1 (flame outlet side), this bottom serving as a heat shield compared to a warm environment, for example a bath of a molten material, receiving the flame of the torch. A cover 4 is mounted on the lower side. The containment cage 1 and the bottom 10 form a single element which is divided into sectors by axial slots. The slots are interrupted so that the sectors are secured alternately by junction regions 11 extending between sectorized portions adjacent to the confinement cage 1 on the side opposite the bottom 10 and by junction regions 12 extending between sectored portions close to the bottom 10 on the opposite side to the containment cage 1. An inductor winding 5 disposed on the bottom side 10 surrounds the containment cage 1. A gas injector 7, not fully represented, enters the containment cage 1 through the cover 4 to the level of the inductor winding 5.

La figure 2B est une vue en perspective illustrant de façon agrandie trois secteurs adjacents de la cage de confinement et du fond de la torche à plasma inductif de la figure 2A. La figure 2B illustre en particulier des canalisations internes permettant la circulation d'un fluide de refroidissement dans l'épaisseur du métal constitutif de la cage de confinement 1 et du fond 10.The Figure 2B is a perspective view illustrating magnetically three adjacent sectors of the containment cage and the bottom of the inductive plasma torch of the Figure 2A . The Figure 2B illustrates in particular internal pipes for the circulation of a cooling fluid in the thickness of the constituent metal of the containment cage 1 and the bottom 10.

On considère un couple de secteurs adjacents 101 et 102 solidaires l'un de l'autre par une jonction 12 située à l'extrémité du fond 10 opposée à la cage de confinement 1 et solidaires des secteurs voisins par des jonctions 11 situées à l'extrémité inférieure de la cage de confinement 1. Une canalisation 30 comprend cinq tronçons 30-1 à 30-5 de canalisation formés à l'intérieur des parois de la cage de confinement 1 et du fond 10. Chaque tronçon communique avec le tronçon suivant. Le tronçon 30-1 s'étend verticalement à partir d'une ouverture 32 dans la partie inférieure de la cage de confinement 1 du secteur 101 jusqu'à une région 30-a située dans le fond 10 du secteur 101. Le tronçon 30-2 s'étend radialement dans le fond 10 du secteur 101 de la région 30-a à une région 30-b située à l'extrêmité du fond 10 du secteur 101 opposée à la cage de confinement 1. Le tronçon 30-3 s'étend dans le fond 10 de la région 30-b à une région 30-c située dans le fond 10 du secteur 102 et symétrique de la région 30-b du secteur 101. Le tronçon 30-4 s'étend radialement dans le fond 10 du secteur 102 de la région 30-c à une région 30-d située au niveau de la cage de confinement 1 du secteur 102. Le tronçon 30-5 s'étend verticalement dans la cage de confinement 1 du secteur 102 de la région 30-d à une ouverture 33 dans la partie inférieure de la cage de confinement 1 du secteur 102.A couple of adjacent sectors 101 and 102 integral with each other by a junction 12 located at the end of the bottom 10 opposite the containment cage 1 and integral with neighboring sectors by junctions 11 located at the lower end of the containment cage 1. A pipe 30 comprises five sections 30-1 to 30-5 of pipe formed inside the walls of the containment cage 1 and the bottom 10. Each section communicates with the next section. The section 30-1 extends vertically from an opening 32 in the lower part of the containment cage 1 of the sector 101 to a region 30-a located in the bottom 10 of the sector 101. The section 30- 2 extends radially in the bottom 10 of the sector 101 of the region 30-a to a region 30-b located at the end of the bottom 10 of the sector 101 opposite the containment cage 1. The section 30-3 s' extends in the background 10 from the region 30-b to a region 30-c located in the bottom 10 of the sector 102 and symmetrical to the region 30-b of the sector 101. The section 30-4 extends radially in the bottom 10 of the sector 102 of the region 30-c at a region 30-d located at the containment cage 1 of the sector 102. The section 30-5 extends vertically in the containment cage 1 of the sector 102 of the region 30-d to an opening 33 in the lower part of the containment cage 1 of the sector 102.

La figure 3A illustre un autre mode de réalisation d'une torche à plasma inductif. La torche à plasma inductif comprend une cage de confinement 1 en forme de cylindre et une cage externe 9 en forme de cylindre coaxial. La cage de confinement 1 et la cage externe 9 sont reliées du côté supérieur (côté de sortie de flamme) par un fond 10. Un capot 4 est monté du côté inférieur. La cage de confinement 1, la cage externe 9 et le fond 10 forment un élément métallique unique, par exemple en cuivre, qui est divisé en secteurs par des fentes axiales. Les fentes sont interrompues de sorte que les secteurs sont solidaires, du côté opposé au fond, alternativement par des régions de jonction 11 s'étendant entre des parties sectorisées voisines de la cage de confinement 1 et par des régions de jonction 13 s'étendant entre des parties sectorisées voisines de la cage externe 9. Un enroulement inducteur 5 disposé du côté du fond 10 entoure la cage de confinement 1. Un injecteur de gaz 7, non intégralement représenté, pénètre dans la cage de confinement 1 au travers du capot 4 jusqu'au niveau de l'enroulement inducteur 5. La cage externe a pour objet de limiter les rayonnements électromagnétiques émis vers l'extérieur.The figure 3A illustrates another embodiment of an inductive plasma torch. The inductive plasma torch comprises a containment cage 1 in the form of a cylinder and an outer cage 9 in the form of a coaxial cylinder. The containment cage 1 and the outer cage 9 are connected to the upper side (flame exit side) by a bottom 10. A cap 4 is mounted on the lower side. The containment cage 1, the outer cage 9 and the bottom 10 form a single metal element, for example copper, which is divided into sectors by axial slots. The slots are interrupted so that the sectors are secured, on the opposite side to the bottom, alternately by junction regions 11 extending between sectorized portions adjacent to the containment cage 1 and by junction regions 13 extending between sectored portions adjacent to the outer cage 9. An inductor winding 5 disposed on the bottom side 10 surrounds the containment cage 1. A gas injector 7, not fully shown, enters the containment cage 1 through the hood 4 until at the level of the inductor winding 5. The external cage is intended to limit the electromagnetic radiation emitted to the outside.

La figure 3B est une vue en perspective illustrant de façon agrandie trois secteurs adjacents de la cage de confinement, de la cage externe et du fond de la figure 3A. La partie centrale de la cage de confinement 1 est crevée par souci de clarté. La figure 3B illustre en particulier des canalisations internes permettant la circulation d'un fluide de refroidissement dans l'épaisseur du métal constitutif de la cage de confinement 1, de la cage externe 9 et du fond 10.The figure 3B is a perspective view illustrating magnetically three adjacent sectors of the containment cage, the outer cage and the bottom of the figure 3A . The central part of the containment cage 1 is punctured for the sake of clarity. The figure 3B illustrates in particular internal pipes for the circulation of a fluid of cooling in the thickness of the constituent metal of the containment cage 1, the outer cage 9 and the bottom 10.

On considère un couple de secteurs adjacents 101 et 102 solidaires l'un de l'autre par une jonction 13 située à l'extrémité inférieure de la cage externe 9 et solidaires des secteurs voisins par des jonctions 11 situées à l'extrémité inférieure de la cage de confinement 1. Une canalisation 30 comprend sept tronçons de canalisation 30-1, 30-2, 30-6 à 30-8, 30-4 et 30-5 formés à l'intérieur des parois de la cage de confinement 1, de la cage externe 9 et du fond 10. Chaque tronçon communique avec le tronçon suivant. Le tronçon 30-1 s'étend verticalement à partir d'une ouverture 32 dans la partie inférieure de la cage de confinement 1 du secteur 101 jusqu'à une région 30-a située dans le fond 10 du secteur 101. Le tronçon 30-2 s'étend radialement dans le fond 10 du secteur 101 de la région 30-a à une région 30-b située au niveau de la cage externe du secteur 101. Le tronçon 30-6 s'étend verticalement dans la cage externe du secteur 101 de la région 30-b jusqu'à une région 30-e. Le tronçon 30-7 s'étend horizontalement dans la cage externe de la région 30-e dans le secteur 101 à une région 30-f dans le secteur 102. Le tronçon 30-8 s'étend verticalement dans la cage externe du secteur 102 de la région 30-f à une région 30-c située dans le fond 10 du secteur 102. Le tronçon 30-4 s'étend radialement dans le fond 10 du secteur 102 de la région 30-c à une région 30-d située au niveau de la cage de confinement 1 du secteur 102. Le tronçon 30-5 s'étend verticalement dans la cage de confinement 1 du secteur 102 de l'extrémité 30-d à une ouverture 33 dans la partie inférieure de la cage de confinement 1 du secteur 102.A pair of adjacent sectors 101 and 102 secured to each other by a junction 13 situated at the lower end of the outer cage 9 and integral with neighboring sectors by junctions 11 located at the lower end of the containment cage 1. A pipe 30 comprises seven sections of pipe 30-1, 30-2, 30-6 to 30-8, 30-4 and 30-5 formed inside the walls of the containment cage 1, the outer cage 9 and the bottom 10. Each section communicates with the next section. The section 30-1 extends vertically from an opening 32 in the lower part of the containment cage 1 of the sector 101 to a region 30-a located in the bottom 10 of the sector 101. The section 30- 2 extends radially in the bottom 10 of the sector 101 of the region 30-a to a region 30-b located at the outer cage of the sector 101. The section 30-6 extends vertically in the outer cage of the sector 101 from region 30-b to a region 30-e. The section 30-7 extends horizontally in the outer cage of the region 30-e in the sector 101 to a region 30-f in the sector 102. The section 30-8 extends vertically in the outer cage of the sector 102 from the region 30-f to a region 30-c located in the bottom 10 of the sector 102. The section 30-4 extends radially in the bottom 10 of the sector 102 of the region 30-c to a region 30-d located at the level of the containment cage 1 of the sector 102. The section 30-5 extends vertically in the containment cage 1 of the sector 102 of the end 30-d to an opening 33 in the lower part of the containment cage 1 of sector 102.

En figures 2B et 3B, le fluide de refroidissement est injecté dans les canalisations 30 par les ouvertures 32 et évacué par les ouvertures 33.In Figures 2B and 3B , the cooling fluid is injected into the pipes 30 through the openings 32 and discharged through the openings 33.

Les tronçons de canalisation sont par exemple réalisés par perçage. Ils sont obturés par insertion de bouchons et/ou par brasure aux débouchés de perçage aux emplacements où la canalisation 30 ne doit pas être ouverte.The pipe sections are for example made by drilling. They are closed by insertion of plugs and / or by soldering at the piercing outlets at locations where the pipe 30 is not to be opened.

On comprendra que les structures et les formes des canalisations illustrées en figure 2B et 3B ne représentent que des exemples de réalisation possible. De nombreuses autres structures pourront être prévues. En particulier, on pourra prévoir plusieurs canalisations par secteur.It will be understood that the structures and the shapes of the pipes illustrated in Figure 2B and 3B are only examples of possible realization. Many other structures can be planned. In particular, it will be possible to provide several pipes per sector.

La cage de confinement, le fond et de préférence la cage externe quand elle est prévue sont étanchéifiés en comblant l'espacement entre les secteurs par un isolant électrique.The containment cage, the bottom and preferably the outer cage when it is provided are sealed by filling the spacing between the sectors by an electrical insulator.

La fabrication de telles torches à plasma est simple puisque la cage de confinement, le fond et, si elle est prévue, la cage externe ne forment qu'un seul et même élément. Cet élément peut être réalisé par moulage, usinage ou encore par soudage de différents sous-éléments. Pour la fabrication de cet ensemble monobloc, on pourra partir d'un bloc de cuivre qui est fraisé pour définir le fond, le cylindre de confinement et éventuellement le cylindre externe. Une fois ce bloc formé, des opérations de sciage simple permettront la division en secteurs. Bien entendu, ceci est susceptible de nombreuses variantes. Par exemple, le ou les cylindres et le fond pourront être fabriqués séparément et soudés ou assemblés d'une autre manière et fendus pour assurer la division en secteurs tout en maintenant la cohérence de l'ensemble.The manufacture of such plasma torches is simple since the containment cage, the bottom and, if it is provided, the outer cage form a single element. This element can be made by molding, machining or by welding different sub-elements. For the manufacture of this monobloc assembly, it may be from a copper block which is milled to define the bottom, the confinement cylinder and possibly the outer cylinder. Once this block is formed, simple sawing operations will allow division into sectors. Of course, this is susceptible of many variations. For example, the cylinder or cylinders and the bottom may be manufactured separately and welded or otherwise assembled and split to ensure division into sectors while maintaining the consistency of the whole.

Un avantage des structures de torche décrites ici réside dans leur simplicité d'assemblage. En effet, l'ensemble de la cage interne, du fond et éventuellement la cage externe est un ensemble monobloc qui est donc facile à assembler.An advantage of the torch structures described herein is their ease of assembly. Indeed, the entire inner cage, the bottom and possibly the outer cage is a one-piece assembly that is easy to assemble.

Un autre avantage réside dans l'unicité du circuit de refroidissement.Another advantage lies in the uniqueness of the cooling circuit.

La torche à plasma comprenant une cage externe sectorisée est particulièrement compacte. En effet, l'inducteur est situé dans une zone froide et à l'abri des poussières de l'environnement extérieur, les dimensions de la torche à plasma peuvent être réduites sans crainte de claquages liés aux forts courants alternatifs circulant dans l'inducteur. Inversement, à volume de torche fixé, la structure de torche comprenant une cage externe sectorisée décrite ici peut être associée à un générateur de courant alternatif plus puissant que dans le cas des structures antérieures. Par exemple, pour les dimensions précisées ci-avant, la puissance du générateur est limitée à 200 kW pour une structure de torche équivalente à celle décrite en figure 1 contre 350 kW pour la structure de torche comprenant un ensemble sectorisé monobloc.The plasma torch comprising a sectored external cage is particularly compact. Indeed, the inductor is located in a cold zone and protected from dust from the external environment, the dimensions of the plasma torch can be reduced without fear of breakdowns related to the strong alternating currents flowing in the inductor. Conversely, at fixed torch volume, the torch structure comprising a sectorized outer cage described herein may be associated with a more powerful AC generator than in the case of prior structures. For example, for the dimensions specified above, the power of the generator is limited to 200 kW for a torch structure equivalent to that described in FIG. figure 1 against 350 kW for the torch structure comprising a monobloc sectorized assembly.

Dans un exemple de réalisation, la cage de confinement, le fond et, si elle est prévue, la cage externe sont en cuivre. Le capot est en polymère fluoré du type du PTFE GF25, plus connu sous le nom de Téflon. Le diamètre extérieur de la cage externe est de 210 mm, le diamètre intérieur de la cage de confinement est 50 mm, et le diamètre externe de l'enroulement inducteur est de 110 mm. La hauteur de la cage de confinement et de la cage externe est de 290 mm. L'épaisseur de la cage de confinement est de 10 mm. L'injecteur pénètre dans la cage de confinement jusqu'à une distance de 70 mm du fond. L'enroulement inducteur débute à 30 mm du fond et se termine à 110 mm du fond. La cage de confinement, le fond et selon le mode de réalisation la cage externe sont divisés en 12 secteurs régulièrement répartis. La sectorisation, lorsqu'elle est prolongée jusqu'au bord inférieur de la cage de confinement est interrompue à 20 mm du bord de la cage externe ou du fond selon le mode de réalisation. L'espacement entre les secteurs est de 1,5 mm. Le diamètre des canalisations dans la cage de confinement, le fond et selon le mode de réalisation la cage externe est de 3 mm.In an exemplary embodiment, the containment cage, the bottom and, if it is provided, the outer cage are made of copper. The cover is fluoropolymer type PTFE GF25, better known as Teflon. The outer diameter of the outer cage is 210 mm, the inner diameter of the containment cage is 50 mm, and the outer diameter of the inductor winding is 110 mm. The height of the containment cage and outer cage is 290 mm. The thickness of the containment cage is 10 mm. The injector enters the containment cage up to a distance of 70 mm from the bottom. The inductor winding starts at 30 mm from the bottom and ends at 110 mm from the bottom. The containment cage, the bottom and according to the embodiment of the outer cage are divided into 12 regularly distributed sectors. The sectorization, when extended to the lower edge of the containment cage is interrupted at 20 mm from the edge of the outer cage or the bottom according to the embodiment. The spacing between sectors is 1.5 mm. The diameter of the pipes in the containment cage, the bottom and according to the embodiment the outer cage is 3 mm.

Des modes de réalisation particuliers de la présente invention ont été décrits. Diverses variantes et modifications apparaîtront à l'homme de l'art. En particulier, la forme et les dimensions de la cage de confinement, la forme et les dimensions de la cage externe, le circuit de refroidissement, la nature du matériau constituant la cage de confinement, la cage externe ou le fond et la méthode pour étanchéifier la cage de confinement, le fond et la cage externe seront choisis par l'homme de l'art en fonction des performances désirées de la torche à plasma.Particular embodiments of the present invention have been described. Various variations and modifications will be apparent to those skilled in the art. In particular, the shape and dimensions of the containment cage, the shape and dimensions of the outer cage, the cooling circuit, the nature of the material constituting the containment cage, the outer cage or the bottom and the method for sealing the containment cage, the bottom and the outer cage will be selected by those skilled in the art depending on the desired performance of the plasma torch.

Le nombre de secteurs pourra être choisi par l'homme de l'art pour optimiser les caractéristiques de la torche, et notamment pour favoriser la propagation du champ magnétique vers l'intérieur de la structure et limiter sa propagation vers l'extérieur de la structure lorsque la torche à plasma est munie d'une cage externe sectorisée.The number of sectors may be chosen by those skilled in the art to optimize the characteristics of the torch, and in particular to promote the propagation of the magnetic field towards the interior of the structure and limit its propagation to the outside of the structure when the plasma torch is provided with a sectored outer cage.

Dans un mode de réalisation, on pourra choisir que l'épaisseur de la cage externe soit supérieure à celle de la cage de confinement.In one embodiment, it may be chosen that the thickness of the outer cage is greater than that of the containment cage.

Différentes variantes usuelles de réalisation des torches à plasma n'ont pas été décrites ici. En particulier on pourra adjoindre au fond du côté extérieur, une couronne en un matériau réfractaire constituant un bouclier thermique protégeant le fond contre le rayonnement thermique produit par le matériau chauffé par la torche à plasma.Various customary embodiments of plasma torches have not been described here. In particular, a crown made of a refractory material constituting a thermal shield protecting the bottom against the heat radiation produced by the material heated by the plasma torch can be added to the bottom of the outer side.

L'étendue de l'invention est définie par les revendications jointes.The scope of the invention is defined by the appended claims.

Claims (11)

  1. An inductive plasma torch, comprising:
    a cylindrical metal confinement cage (1),
    a metal element (10) rigidly attached to the confinement cage (1), radially extending, outwards, from the periphery of an end thereof, and
    an inductor (5) surrounding the confinement cage (1),
    wherein the confinement cage (1) and said element are divided along axial planes into regularly distributed sectors, and wherein the sectors are alternately rigidly attached by a portion of the confinement cage (1) on the side of the cage opposite to the element (10) and by a portion of said element on the side of the element opposite to the confinement cage (1).
  2. The inductive plasma torch of claim 1, wherein said element is a laterally-extending bottom part (10).
  3. The inductive plasma torch of claim 2, wherein said element comprises an external cylindrical cage (9), concentric to the confinement cage (1) and attached thereto by the bottom part (10).
  4. The inductive plasma torch of any of claims 1 to 3, wherein the confinement cage (1) and said element are crossed by ducts (30).
  5. The inductive plasma torch of any of claims 1 to 4, wherein the confinement cage (1) and said element are made of copper.
  6. A method for manufacturing the inductive plasma torch of any of claims 1 to 5, wherein a block of a metallic material, comprising a first cylinder and an element rigidly attached to the first cylinder by one end thereof radially extending outwards from the periphery of an end of the first cylinder, is formed, and wherein axial slots are formed to define sectors in said block, each slot crossing the element or the first cylinder and the cutting being alternately interrupted a short distance from an edge of the element opposite to the first cylinder and at a short distance from an edge of the first cylinder opposite to the element.
  7. The inductive plasma torch forming method of claim 6, wherein said element is a laterally-extending bottom part.
  8. The inductive plasma torch forming method of claim 6, wherein said element is a second cylinder concentric to and rigidly attached to the first cylinder by a bottom part.
  9. The method of any of claims 6 to 8, wherein said block is formed by milling.
  10. The method of any of claims 6 to 9, wherein the conductive material is copper.
  11. The method of any of claims 6 to 10, wherein ducts (30) are formed across the thickness of the cylinder and of said element.
EP12708901.9A 2011-02-11 2012-02-10 Inductive plasma torch Not-in-force EP2674015B1 (en)

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FR1151130A FR2971665B1 (en) 2011-02-11 2011-02-11 INDUCTIVE PLASMA TORCH
PCT/FR2012/050295 WO2012107699A1 (en) 2011-02-11 2012-02-10 Inductive plasma torch

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EP (1) EP2674015B1 (en)
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Publication number Priority date Publication date Assignee Title
DE1271852C2 (en) * 1966-11-05 1975-07-31 Siemens Aktiengesellschaft, 1000 Berlin und 8000 München PLASMA BURNER
US4431901A (en) * 1982-07-02 1984-02-14 The United States Of America As Represented By The United States Department Of Energy Induction plasma tube
US4886160A (en) * 1988-11-07 1989-12-12 Kligerman Alan E Carton for containing a plurality of items for transport, storage and display
US4766287A (en) * 1987-03-06 1988-08-23 The Perkin-Elmer Corporation Inductively coupled plasma torch with adjustable sample injector
US5234529A (en) * 1991-10-10 1993-08-10 Johnson Wayne L Plasma generating apparatus employing capacitive shielding and process for using such apparatus
US5877471A (en) * 1997-06-11 1999-03-02 The Regents Of The University Of California Plasma torch having a cooled shield assembly
US5925266A (en) * 1997-10-15 1999-07-20 The Perkin-Elmer Corporation Mounting apparatus for induction coupled plasma torch
JP2001520452A (en) * 1997-10-15 2001-10-30 東京エレクトロン株式会社 Apparatus and method for adjusting plasma density distribution
JPH11145148A (en) * 1997-11-06 1999-05-28 Tdk Corp Apparatus and method for heat plasma annealing
DE29823703U1 (en) * 1998-06-15 1999-11-25 Siemens Ag Induction plasma generator
US7232767B2 (en) * 2003-04-01 2007-06-19 Mattson Technology, Inc. Slotted electrostatic shield modification for improved etch and CVD process uniformity
DE102004054826A1 (en) * 2004-11-12 2006-05-24 Georg Herdrich Inductive plasma generator for space reentry simulation has plasma generating tube surrounded by magnetic coil and cooler with branched holding flanges and O rings

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US9210786B2 (en) 2015-12-08
US20140319106A1 (en) 2014-10-30
PL2674015T3 (en) 2017-07-31
FR2971665B1 (en) 2014-06-20
FR2971665A1 (en) 2012-08-17
WO2012107699A1 (en) 2012-08-16

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