DE29823703U1 - Induktions-Plasmagenerator - Google Patents

Induktions-Plasmagenerator

Info

Publication number
DE29823703U1
DE29823703U1 DE29823703U DE29823703U DE29823703U1 DE 29823703 U1 DE29823703 U1 DE 29823703U1 DE 29823703 U DE29823703 U DE 29823703U DE 29823703 U DE29823703 U DE 29823703U DE 29823703 U1 DE29823703 U1 DE 29823703U1
Authority
DE
Germany
Prior art keywords
induction coil
plasma generator
holder
induction plasma
induction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE29823703U
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Priority to DE29823703U priority Critical patent/DE29823703U1/de
Publication of DE29823703U1 publication Critical patent/DE29823703U1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/42—Plasma torches using an arc with provisions for introducing materials into the plasma, e.g. powder, liquid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0871—Heating or cooling of the reactor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0873—Materials to be treated
    • B01J2219/0875—Gas
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0894—Processes carried out in the presence of a plasma

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Electromagnetism (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Plasma Technology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)

Description

Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt

Claims (5)

1. Induktions-Plasmagenerator, mit einer Zuführung für ein Material in fester, flüssiger oder gasförmiger Form für ein Aerosol und mit einer Induktionsspule zur Verdampfung des in der Zuführung als Aerosol vorliegenden Materials, wobei die Induktionsspule sich in einer Schutzgasatmosphäre befindet, wozu eine Zelle für Schutzgas mit einer Halterung für die Induktionsspule vorhanden ist, dadurch ge­ kennzeichnet, daß die Innenwand der Halterung (8) mit spiralförmigen Profilrillen (28) ausgebildet ist, welche die Windungen der Induktionsspule (14) aufnehmen.
2. Vorrichtung nach Anspruch 1, dadurch ge­ kennzeichnet, daß die Profilrillen (28) mit einer leitfähigen Schicht (29), beispielsweise aus Graphit, belegt sind.
3. Vorrichtung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß der Halterung (8) für die Induktionsspule (4) flexible Mittel (17, 18) zugeordnet sind, so daß die Induktionsspule (14) beweglich und justierbar angeordnet ist.
4. Vorrichtung nach Anspruch 6, dadurch ge­ kennzeichnet, daß die flexiblen Halterungen Faltenbälge (17, 18) sind.
5. Vorrichtung nach Anspruch 1, dadurch ge­ kennzeichnet, daß das Schutzgas (6) in der Zelle SF6 enthält.
DE29823703U 1998-06-15 1998-06-15 Induktions-Plasmagenerator Expired - Lifetime DE29823703U1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE29823703U DE29823703U1 (de) 1998-06-15 1998-06-15 Induktions-Plasmagenerator

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE29823703U DE29823703U1 (de) 1998-06-15 1998-06-15 Induktions-Plasmagenerator
DE19826552 1998-06-15

Publications (1)

Publication Number Publication Date
DE29823703U1 true DE29823703U1 (de) 1999-11-25

Family

ID=26046814

Family Applications (1)

Application Number Title Priority Date Filing Date
DE29823703U Expired - Lifetime DE29823703U1 (de) 1998-06-15 1998-06-15 Induktions-Plasmagenerator

Country Status (1)

Country Link
DE (1) DE29823703U1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012107699A1 (fr) * 2011-02-11 2012-08-16 Efd Induction Sa Torche a plasma inductif

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012107699A1 (fr) * 2011-02-11 2012-08-16 Efd Induction Sa Torche a plasma inductif
FR2971665A1 (fr) * 2011-02-11 2012-08-17 Efd Induction Sa Torche a plasma inductif
US9210786B2 (en) 2011-02-11 2015-12-08 Efd Induction Sa Inductive plasma torch

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Legal Events

Date Code Title Description
R207 Utility model specification

Effective date: 19991230

R150 Term of protection extended to 6 years

Effective date: 20020122

R157 Lapse of ip right after 6 years

Effective date: 20050101