DE3885044T2 - Ätzverfahren für Metallgegenstände aus Zirkonium. - Google Patents

Ätzverfahren für Metallgegenstände aus Zirkonium.

Info

Publication number
DE3885044T2
DE3885044T2 DE88114045T DE3885044T DE3885044T2 DE 3885044 T2 DE3885044 T2 DE 3885044T2 DE 88114045 T DE88114045 T DE 88114045T DE 3885044 T DE3885044 T DE 3885044T DE 3885044 T2 DE3885044 T2 DE 3885044T2
Authority
DE
Germany
Prior art keywords
etching process
metal objects
zirconium metal
zirconium
objects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE88114045T
Other languages
English (en)
Other versions
DE3885044D1 (de
Inventor
Armand Julian Panson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CBS Corp
Original Assignee
Westinghouse Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Westinghouse Electric Corp filed Critical Westinghouse Electric Corp
Publication of DE3885044D1 publication Critical patent/DE3885044D1/de
Application granted granted Critical
Publication of DE3885044T2 publication Critical patent/DE3885044T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/16—Acidic compositions
    • C23F1/26—Acidic compositions for etching refractory metals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
  • Chemically Coating (AREA)
DE88114045T 1987-08-31 1988-08-29 Ätzverfahren für Metallgegenstände aus Zirkonium. Expired - Fee Related DE3885044T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US9122587A 1987-08-31 1987-08-31

Publications (2)

Publication Number Publication Date
DE3885044D1 DE3885044D1 (de) 1993-11-25
DE3885044T2 true DE3885044T2 (de) 1994-02-17

Family

ID=22226687

Family Applications (1)

Application Number Title Priority Date Filing Date
DE88114045T Expired - Fee Related DE3885044T2 (de) 1987-08-31 1988-08-29 Ätzverfahren für Metallgegenstände aus Zirkonium.

Country Status (5)

Country Link
EP (1) EP0305943B1 (de)
JP (1) JPS6475685A (de)
KR (1) KR890003986A (de)
DE (1) DE3885044T2 (de)
ES (1) ES2045045T3 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19810810B4 (de) * 1997-03-21 2006-09-21 Lg. Philips Lcd Co., Ltd. Verfahren zum Nassätzen eines LCD-Glassubstrats sowie Ätzvorrichtung zur Durchführung des Verfahrens

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3419446A (en) * 1965-02-15 1968-12-31 Chemcut Corp Method and means for continuous control of etching rate
NL6515842A (de) * 1965-12-07 1966-12-27
DE2828547C2 (de) * 1978-06-29 1982-12-23 Didier-Werke Ag, 6200 Wiesbaden Verfahren zur Steuerung oder Regelung der Beizbadzusammensetzung einer Beizanlage
US4738747A (en) * 1986-07-22 1988-04-19 Westinghouse Electric Corp. Process for etching zirconium metallic objects

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19810810B4 (de) * 1997-03-21 2006-09-21 Lg. Philips Lcd Co., Ltd. Verfahren zum Nassätzen eines LCD-Glassubstrats sowie Ätzvorrichtung zur Durchführung des Verfahrens

Also Published As

Publication number Publication date
EP0305943B1 (de) 1993-10-20
DE3885044D1 (de) 1993-11-25
EP0305943A2 (de) 1989-03-08
EP0305943A3 (en) 1990-01-10
JPS6475685A (en) 1989-03-22
ES2045045T3 (es) 1994-01-16
KR890003986A (ko) 1989-04-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee