DE3885044D1 - Ätzverfahren für Metallgegenstände aus Zirkonium. - Google Patents
Ätzverfahren für Metallgegenstände aus Zirkonium.Info
- Publication number
- DE3885044D1 DE3885044D1 DE88114045T DE3885044T DE3885044D1 DE 3885044 D1 DE3885044 D1 DE 3885044D1 DE 88114045 T DE88114045 T DE 88114045T DE 3885044 T DE3885044 T DE 3885044T DE 3885044 D1 DE3885044 D1 DE 3885044D1
- Authority
- DE
- Germany
- Prior art keywords
- zirconium
- etching process
- metal objects
- objects made
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
- C23F1/16—Acidic compositions
- C23F1/26—Acidic compositions for etching refractory metals
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- ing And Chemical Polishing (AREA)
- Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
- Chemically Coating (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US9122587A | 1987-08-31 | 1987-08-31 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3885044D1 true DE3885044D1 (de) | 1993-11-25 |
DE3885044T2 DE3885044T2 (de) | 1994-02-17 |
Family
ID=22226687
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE88114045T Expired - Fee Related DE3885044T2 (de) | 1987-08-31 | 1988-08-29 | Ätzverfahren für Metallgegenstände aus Zirkonium. |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP0305943B1 (de) |
JP (1) | JPS6475685A (de) |
KR (1) | KR890003986A (de) |
DE (1) | DE3885044T2 (de) |
ES (1) | ES2045045T3 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8043466B1 (en) | 1997-03-21 | 2011-10-25 | Lg Display Co., Ltd | Etching apparatus |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3419446A (en) * | 1965-02-15 | 1968-12-31 | Chemcut Corp | Method and means for continuous control of etching rate |
NL6515842A (de) * | 1965-12-07 | 1966-12-27 | ||
DE2828547C2 (de) * | 1978-06-29 | 1982-12-23 | Didier-Werke Ag, 6200 Wiesbaden | Verfahren zur Steuerung oder Regelung der Beizbadzusammensetzung einer Beizanlage |
US4738747A (en) * | 1986-07-22 | 1988-04-19 | Westinghouse Electric Corp. | Process for etching zirconium metallic objects |
-
1988
- 1988-08-29 EP EP88114045A patent/EP0305943B1/de not_active Expired - Lifetime
- 1988-08-29 DE DE88114045T patent/DE3885044T2/de not_active Expired - Fee Related
- 1988-08-29 ES ES88114045T patent/ES2045045T3/es not_active Expired - Lifetime
- 1988-08-31 JP JP63218211A patent/JPS6475685A/ja active Pending
- 1988-08-31 KR KR1019880011240A patent/KR890003986A/ko not_active Application Discontinuation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8043466B1 (en) | 1997-03-21 | 2011-10-25 | Lg Display Co., Ltd | Etching apparatus |
Also Published As
Publication number | Publication date |
---|---|
ES2045045T3 (es) | 1994-01-16 |
JPS6475685A (en) | 1989-03-22 |
KR890003986A (ko) | 1989-04-19 |
EP0305943A2 (de) | 1989-03-08 |
EP0305943B1 (de) | 1993-10-20 |
EP0305943A3 (en) | 1990-01-10 |
DE3885044T2 (de) | 1994-02-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |