EP0305943A3 - Etching process for zirconium metallic objects - Google Patents

Etching process for zirconium metallic objects Download PDF

Info

Publication number
EP0305943A3
EP0305943A3 EP88114045A EP88114045A EP0305943A3 EP 0305943 A3 EP0305943 A3 EP 0305943A3 EP 88114045 A EP88114045 A EP 88114045A EP 88114045 A EP88114045 A EP 88114045A EP 0305943 A3 EP0305943 A3 EP 0305943A3
Authority
EP
European Patent Office
Prior art keywords
etching process
metallic objects
zirconium metallic
zirconium
objects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP88114045A
Other versions
EP0305943B1 (en
EP0305943A2 (en
Inventor
Armand Julian Panson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CBS Corp
Original Assignee
Westinghouse Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Westinghouse Electric Corp filed Critical Westinghouse Electric Corp
Publication of EP0305943A2 publication Critical patent/EP0305943A2/en
Publication of EP0305943A3 publication Critical patent/EP0305943A3/en
Application granted granted Critical
Publication of EP0305943B1 publication Critical patent/EP0305943B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/16—Acidic compositions
    • C23F1/26—Acidic compositions for etching refractory metals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
  • Chemically Coating (AREA)
EP88114045A 1987-08-31 1988-08-29 Etching process for zirconium metallic objects Expired - Lifetime EP0305943B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US9122587A 1987-08-31 1987-08-31
US91225 1993-07-13

Publications (3)

Publication Number Publication Date
EP0305943A2 EP0305943A2 (en) 1989-03-08
EP0305943A3 true EP0305943A3 (en) 1990-01-10
EP0305943B1 EP0305943B1 (en) 1993-10-20

Family

ID=22226687

Family Applications (1)

Application Number Title Priority Date Filing Date
EP88114045A Expired - Lifetime EP0305943B1 (en) 1987-08-31 1988-08-29 Etching process for zirconium metallic objects

Country Status (5)

Country Link
EP (1) EP0305943B1 (en)
JP (1) JPS6475685A (en)
KR (1) KR890003986A (en)
DE (1) DE3885044T2 (en)
ES (1) ES2045045T3 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100265556B1 (en) * 1997-03-21 2000-11-01 구본준 Etching Device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL6515842A (en) * 1965-12-07 1966-12-27
US3419446A (en) * 1965-02-15 1968-12-31 Chemcut Corp Method and means for continuous control of etching rate
DE2828547A1 (en) * 1978-06-29 1980-01-03 Didier Werke Ag Metal pickling bath compsn. control - using sample treated to form ppte. monitored by turbidity meter controlling supply of fresh pickling liq. to bath
EP0254539A1 (en) * 1986-07-22 1988-01-27 Westinghouse Electric Corporation Process of etching zirconium metallic articles

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3419446A (en) * 1965-02-15 1968-12-31 Chemcut Corp Method and means for continuous control of etching rate
NL6515842A (en) * 1965-12-07 1966-12-27
DE2828547A1 (en) * 1978-06-29 1980-01-03 Didier Werke Ag Metal pickling bath compsn. control - using sample treated to form ppte. monitored by turbidity meter controlling supply of fresh pickling liq. to bath
EP0254539A1 (en) * 1986-07-22 1988-01-27 Westinghouse Electric Corporation Process of etching zirconium metallic articles

Also Published As

Publication number Publication date
EP0305943B1 (en) 1993-10-20
DE3885044D1 (en) 1993-11-25
DE3885044T2 (en) 1994-02-17
EP0305943A2 (en) 1989-03-08
JPS6475685A (en) 1989-03-22
ES2045045T3 (en) 1994-01-16
KR890003986A (en) 1989-04-19

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