DE3884069T2 - Polysilazan und Verfahren zu dessen Herstellung. - Google Patents

Polysilazan und Verfahren zu dessen Herstellung.

Info

Publication number
DE3884069T2
DE3884069T2 DE88109319T DE3884069T DE3884069T2 DE 3884069 T2 DE3884069 T2 DE 3884069T2 DE 88109319 T DE88109319 T DE 88109319T DE 3884069 T DE3884069 T DE 3884069T DE 3884069 T2 DE3884069 T2 DE 3884069T2
Authority
DE
Germany
Prior art keywords
polysilazane
manufacture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE88109319T
Other languages
English (en)
Other versions
DE3884069D1 (de
Inventor
Hiroyuki Takeuchi
Kaneo Noake
Tamio Serita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JNC Corp
Original Assignee
Chisso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chisso Corp filed Critical Chisso Corp
Application granted granted Critical
Publication of DE3884069D1 publication Critical patent/DE3884069D1/de
Publication of DE3884069T2 publication Critical patent/DE3884069T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C04B35/589—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained from Si-containing polymer precursors or organosilicon monomers
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
    • C04B35/571—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained from Si-containing polymer precursors or organosilicon monomers
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/60—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule in which all the silicon atoms are connected by linkages other than oxygen atoms
    • C08G77/62—Nitrogen atoms
DE88109319T 1987-06-12 1988-06-10 Polysilazan und Verfahren zu dessen Herstellung. Expired - Fee Related DE3884069T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62146657A JPH0662775B2 (ja) 1987-06-12 1987-06-12 新規ポリシラザン及びその製造方法

Publications (2)

Publication Number Publication Date
DE3884069D1 DE3884069D1 (de) 1993-10-21
DE3884069T2 true DE3884069T2 (de) 1994-04-07

Family

ID=15412678

Family Applications (1)

Application Number Title Priority Date Filing Date
DE88109319T Expired - Fee Related DE3884069T2 (de) 1987-06-12 1988-06-10 Polysilazan und Verfahren zu dessen Herstellung.

Country Status (4)

Country Link
US (1) US4950381A (de)
EP (1) EP0296434B1 (de)
JP (1) JPH0662775B2 (de)
DE (1) DE3884069T2 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4975512A (en) * 1987-08-13 1990-12-04 Petroleum Energy Center Reformed polysilazane and method of producing same
JP2741046B2 (ja) * 1988-12-28 1998-04-15 チッソ株式会社 窒化珪素および／あるいは炭化珪素を基とするセラミックス組成物およびその製造方法、成形助剤
US5086126A (en) * 1990-12-24 1992-02-04 Dow Corning Corporation Method for producing functional silazane polymers
DE4114217A1 (de) * 1991-05-01 1992-11-05 Bayer Ag Organische silazanpolymere, verfahren zu ihrer herstellung, sowie ein verfahren zur herstellung von keramikmaterialien daraus
DE4114218A1 (de) * 1991-05-01 1992-11-05 Bayer Ag Organische silazanpolymere, verfahren zu ihrer herstellung, sowie ein verfahren zur herstellung von keramikmaterialien daraus
US5643987A (en) * 1994-05-24 1997-07-01 Exxon Research And Engineering Company Synthesis of microporous ceramics
US5563212A (en) * 1994-05-24 1996-10-08 Exxon Research And Engineering Company Synthesis of microporous ceramics
US5696217A (en) * 1994-05-24 1997-12-09 Exxon Research & Engineering Company Synthesis of microporous ceramics by ammonia pyrolysis of ceramic precursors
US5952421A (en) * 1995-12-27 1999-09-14 Exxon Research And Engineering Co. Synthesis of preceramic polymer-stabilized metal colloids and their conversion to microporous ceramics
US5852088A (en) * 1995-12-27 1998-12-22 Exxon Research And Engineering Company Nanoporous ceramics with catalytic functionality
KR100362834B1 (ko) * 2000-05-02 2002-11-29 삼성전자 주식회사 반도체 장치의 산화막 형성 방법 및 이에 의하여 제조된 반도체 장치
US7053005B2 (en) * 2000-05-02 2006-05-30 Samsung Electronics Co., Ltd. Method of forming a silicon oxide layer in a semiconductor manufacturing process
US6479405B2 (en) * 2000-10-12 2002-11-12 Samsung Electronics Co., Ltd. Method of forming silicon oxide layer in semiconductor manufacturing process using spin-on glass composition and isolation method using the same method
KR100499171B1 (ko) * 2003-07-21 2005-07-01 삼성전자주식회사 스핀온글래스에 의한 산화실리콘막의 형성방법
US7192891B2 (en) * 2003-08-01 2007-03-20 Samsung Electronics, Co., Ltd. Method for forming a silicon oxide layer using spin-on glass
JP4965953B2 (ja) * 2006-09-29 2012-07-04 株式会社東芝 ポリシラザンまたはポリシラザン溶液の取り扱い方法、ポリシラザン溶液、半導体装置の製造方法
JP4482016B2 (ja) 2007-06-29 2010-06-16 株式会社ノリタケカンパニーリミテド 複合セラミックスの製造方法、複合セラミックス、およびセラミックフィルタアセンブリ
JP6871161B2 (ja) * 2014-10-24 2021-05-12 バーサム マテリアルズ ユーエス，リミティド ライアビリティ カンパニー ケイ素含有膜の堆積のための組成物及びそれを使用した方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2564674A (en) * 1947-08-07 1951-08-21 Nicholas D Cheronis Preparation of organic silicon compounds
US2579418A (en) * 1949-01-24 1951-12-18 Edwin L Gustus Polymeric resinous products containing repeating units of silicon linked to nitrogen and process for making same
US3036019A (en) * 1958-11-03 1962-05-22 Richardson Co Modification of silicon-nitrogen containing compounds
US3143514A (en) * 1960-06-15 1964-08-04 Dow Corning Catalytic polymerization of silazanes
DE2834027A1 (de) * 1978-08-03 1980-02-14 Henkel Kgaa Verfahren zur herstellung kondensationsfaehiger, filmbildender organosilazane
US4482669A (en) * 1984-01-19 1984-11-13 Massachusetts Institute Of Technology Preceramic organosilazane polymers
JPS62290730A (ja) * 1986-06-10 1987-12-17 Shin Etsu Chem Co Ltd 有機シラザン重合体の製造方法
US4720532A (en) * 1986-08-22 1988-01-19 Massachusetts Institute Of Technology Organopolysilazane precursors to silicon nitride-rich mixed SiC/Si3 N4

Also Published As

Publication number Publication date
EP0296434A3 (en) 1990-03-14
EP0296434A2 (de) 1988-12-28
DE3884069D1 (de) 1993-10-21
EP0296434B1 (de) 1993-09-15
JPH0662775B2 (ja) 1994-08-17
US4950381A (en) 1990-08-21
JPS63309526A (ja) 1988-12-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee