DE3881606T2 - Vorrichtung zur Messung der Last der Kristallstangenziehung. - Google Patents

Vorrichtung zur Messung der Last der Kristallstangenziehung.

Info

Publication number
DE3881606T2
DE3881606T2 DE88113104T DE3881606T DE3881606T2 DE 3881606 T2 DE3881606 T2 DE 3881606T2 DE 88113104 T DE88113104 T DE 88113104T DE 3881606 T DE3881606 T DE 3881606T DE 3881606 T2 DE3881606 T2 DE 3881606T2
Authority
DE
Germany
Prior art keywords
measuring
load
crystal rod
rod pull
pull
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE88113104T
Other languages
English (en)
Other versions
DE3881606D1 (de
Inventor
Nobuo Katsuoka
Kouji Mizuishi
Yoshihiro Hirano
Kenichi Sato
Seiichiro Otsuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Publication of DE3881606D1 publication Critical patent/DE3881606D1/de
Application granted granted Critical
Publication of DE3881606T2 publication Critical patent/DE3881606T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20—Controlling or regulating
    • C30B15/22—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
    • C30B15/28—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal using weight changes of the crystal or the melt, e.g. flotation methods
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1004—Apparatus with means for measuring, testing, or sensing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1072—Seed pulling including details of means providing product movement [e.g., shaft guides, servo means]
DE88113104T 1987-08-18 1988-08-12 Vorrichtung zur Messung der Last der Kristallstangenziehung. Expired - Fee Related DE3881606T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62204843A JPS6447914A (en) 1987-08-18 1987-08-18 Apparatus for measuring crystal-rod lifting load

Publications (2)

Publication Number Publication Date
DE3881606D1 DE3881606D1 (de) 1993-07-15
DE3881606T2 true DE3881606T2 (de) 1993-10-07

Family

ID=16497312

Family Applications (1)

Application Number Title Priority Date Filing Date
DE88113104T Expired - Fee Related DE3881606T2 (de) 1987-08-18 1988-08-12 Vorrichtung zur Messung der Last der Kristallstangenziehung.

Country Status (4)

Country Link
US (1) US4916955A (de)
EP (1) EP0303977B1 (de)
JP (1) JPS6447914A (de)
DE (1) DE3881606T2 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69017642T2 (de) * 1989-12-22 1995-07-06 Shinetsu Handotai Kk Vorrichtung zur Herstellung von Einkristallen nach dem Czochralski-Verfahren.
JPH0785489B2 (ja) * 1991-02-08 1995-09-13 信越半導体株式会社 単結晶の直径計測方法
DE9213961U1 (de) * 1992-10-16 1992-12-17 Gpa Gesellschaft Fuer Prozess-Automation Mbh, 2000 Hamburg, De
JP3109564B2 (ja) * 1995-03-27 2000-11-20 大倉電気株式会社 成長結晶体の重量測定装置
US5582642A (en) * 1995-06-20 1996-12-10 Memc Electronic Materials, Inc. Apparatus and method for adjusting the position of a pull wire of a crystal pulling machine
JP3615291B2 (ja) * 1995-12-25 2005-02-02 信越半導体株式会社 引上げ結晶重量測定装置
US5888299A (en) * 1995-12-27 1999-03-30 Shin-Etsu Handotai Co., Ltd. Apparatus for adjusting initial position of melt surface
US5932007A (en) * 1996-06-04 1999-08-03 General Signal Technology Corporation Method and apparatus for securely supporting a growing crystal in a czochralski crystal growth system
JP3438492B2 (ja) * 1996-10-18 2003-08-18 信越半導体株式会社 単結晶の引上げ方法
TW486572B (en) * 1997-02-04 2002-05-11 Komatsu Denshi Kinzoku Kk Device for dragging crystalline
US6019841A (en) * 1997-03-24 2000-02-01 G.T. Equuipment Technologies Inc. Method and apparatus for synthesis and growth of semiconductor crystals
US5935328A (en) * 1997-11-25 1999-08-10 Memc Electronic Materials, Inc. Apparatus for use in crystal pulling
DE69926091T2 (de) * 1998-03-13 2006-04-20 Shin-Etsu Handotai Co., Ltd. Verfahren und Vorrichtung zum Messen der mechanischen Festigkeit des Halsteils eines Kristallkeimes
US6051064A (en) * 1998-08-20 2000-04-18 Seh America, Inc. Apparatus for weighing crystals during Czochralski crystal growing
US8347740B2 (en) * 2009-03-31 2013-01-08 Memc Electronic Materials, Inc. Systems for weighing a pulled object having a changing weight
US20120216623A1 (en) * 2010-02-11 2012-08-30 Phelps Matthew B In situ roof covering test method & device
US9128011B1 (en) 2010-02-11 2015-09-08 Associate Professional Engineering & Construction Llc Method and device for testing extraction load
CN102851732B (zh) * 2012-09-26 2015-08-19 南京晶升能源设备有限公司 蓝宝石单晶炉的称重机构
US11255024B2 (en) 2019-06-18 2022-02-22 Linton Crystal Technologies Corp. Seed lifting and rotating system for use in crystal growth
US11891721B2 (en) 2020-12-09 2024-02-06 Linton Kayex Technology Co., Ltd Spool-balanced seed lift

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2656719A (en) * 1950-09-05 1953-10-27 Martin Decker Corp Traveling line load indicator
US3289473A (en) * 1964-07-14 1966-12-06 Zd Y V I Plzen Narodni Podnik Tension measuring apparatus
SU469285A1 (ru) * 1972-07-21 1985-05-07 Подольский химико-металлургический завод Устройство дл вращени ,вертикального перемещени и взвешивани слитка,выт гиваемого из расплава по способу Чохральского
US4352785A (en) * 1982-01-04 1982-10-05 Western Electric Co., Inc. Crystal grower with torque supportive collapsible pulling mechanism
DE3306049A1 (de) * 1983-02-22 1984-08-23 Leybold-Heraeus GmbH, 5000 Köln Vorrichtung zum ziehen eines einkristalls aus einem tiegel
US4663128A (en) * 1985-03-06 1987-05-05 Ferrofluidics Corporation Pulling head for a crystal growing furnace

Also Published As

Publication number Publication date
EP0303977B1 (de) 1993-06-09
JPH0519087B2 (de) 1993-03-15
JPS6447914A (en) 1989-02-22
DE3881606D1 (de) 1993-07-15
US4916955A (en) 1990-04-17
EP0303977A3 (en) 1990-04-11
EP0303977A2 (de) 1989-02-22

Similar Documents

Publication Publication Date Title
DE3881606T2 (de) Vorrichtung zur Messung der Last der Kristallstangenziehung.
DE3882426D1 (de) Untersuchungsgeraet zur messung der sauerstoffsaettigung.
DE3882272T2 (de) Untersuchungsgerät zur Messung der Sauerstoffsättigung.
DE3587891D1 (de) Vorrichtung zur Messung des Herzzeitvolumens.
DE3882273D1 (de) Untersuchungsgeraet zur messung der sauerstoffsaettigung.
DE69014108T2 (de) Vorrichtung zur Messung der Giergeschwindigkeit.
DE68921630T2 (de) Vorrichtung zur Messung von kleinen Verschiebungen.
DE68927757D1 (de) Vorrichtung zur Nachkalibrierung eines Aufzugslastmesssystems
DE3883593T2 (de) Vorrichtung zur Messung von Höhendifferenzen.
DE68909780D1 (de) Vorrichtung zur messung der thermischen eigenschaften einer substanzprobe.
DE69225713D1 (de) Vorrichtung zur messung der steifheit von starrem gewebe
DE3856390D1 (de) Vorrichtung zur Messung des Herzzeitvolumens
DE69013013T2 (de) Vorrichtung zur Messung des Herzzeitvolumens.
DE3783907T2 (de) Vorrichtung zur pruefung der seitenwand einer flasche.
DE69012227T2 (de) Vorrichtung zur Messung von Verschiebungen.
DE3882274D1 (de) Untersuchungsgeraet zur messung der sauerstoffsaettigung.
DE69124189T2 (de) Vorrichtung zur messung der blattlänge
DE3851816D1 (de) Gerät zur Messung der Entfernung zu einem Objekt.
DE68913155D1 (de) Vorrichtung zur Messung der Achsenabweichung eines Kristallziehdrahtes.
DE68916576D1 (de) Vorrichtung zur Messung der Kennzeichen der optischen Frequenzmodulation.
DE68919141T2 (de) Detektorvorrichtung zur Messung der Abweichung der Scharfeinstellung.
DE3675629D1 (de) Vorrichtung zur messung der drehgeschwindigkeit.
DE68901366D1 (de) Angelwinde mit vorrichtung zur anzeige der bremskraft.
DE3676068D1 (de) Vorrichtung zur messung der fluoreszenz eines feststoffes.
DD217680A3 (de) Vorrichtung zur messung der lageveraenderung von koerperpunkten

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee