DE3878683D1 - Beschleunigungsmesser mit vorrichtung zur unterdrueckung von gleichtakteingangssignalen. - Google Patents

Beschleunigungsmesser mit vorrichtung zur unterdrueckung von gleichtakteingangssignalen.

Info

Publication number
DE3878683D1
DE3878683D1 DE8989901226T DE3878683T DE3878683D1 DE 3878683 D1 DE3878683 D1 DE 3878683D1 DE 8989901226 T DE8989901226 T DE 8989901226T DE 3878683 T DE3878683 T DE 3878683T DE 3878683 D1 DE3878683 D1 DE 3878683D1
Authority
DE
Germany
Prior art keywords
accelerometer
input signals
equivalent input
suppressing
suppressing equivalent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8989901226T
Other languages
English (en)
Other versions
DE3878683T2 (de
Inventor
L Norling
J Cornelius
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sundstrand Corp
Original Assignee
Sundstrand Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sundstrand Corp filed Critical Sundstrand Corp
Application granted granted Critical
Publication of DE3878683D1 publication Critical patent/DE3878683D1/de
Publication of DE3878683T2 publication Critical patent/DE3878683T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
DE8989901226T 1987-10-22 1988-10-10 Beschleunigungsmesser mit vorrichtung zur unterdrueckung von gleichtakteingangssignalen. Expired - Lifetime DE3878683T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/111,984 US4766768A (en) 1987-10-22 1987-10-22 Accelerometer with isolator for common mode inputs
PCT/US1988/003486 WO1989003998A1 (en) 1987-10-22 1988-10-10 Accelerometer with isolator for common mode inputs

Publications (2)

Publication Number Publication Date
DE3878683D1 true DE3878683D1 (de) 1993-04-01
DE3878683T2 DE3878683T2 (de) 1993-06-09

Family

ID=22341504

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8989901226T Expired - Lifetime DE3878683T2 (de) 1987-10-22 1988-10-10 Beschleunigungsmesser mit vorrichtung zur unterdrueckung von gleichtakteingangssignalen.

Country Status (6)

Country Link
US (1) US4766768A (de)
EP (1) EP0341306B1 (de)
JP (1) JPH0648277B2 (de)
DE (1) DE3878683T2 (de)
IL (1) IL87989A (de)
WO (1) WO1989003998A1 (de)

Families Citing this family (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5274797A (en) * 1986-05-30 1993-12-28 Bull Hn Information Systems Inc. Multiprocessor system with centralized initialization, testing and monitoring of the system and providing centralized timing
FR2627592B1 (fr) * 1988-02-22 1990-07-27 Sagem Accelerometre pendulaire non asservi a poutre resonante
US4872343A (en) * 1988-08-10 1989-10-10 Sundstrand Data Control, Inc. Matched pairs of force transducers
US4945765A (en) * 1988-08-31 1990-08-07 Kearfott Guidance & Navigation Corp. Silicon micromachined accelerometer
US4879914A (en) * 1989-02-27 1989-11-14 Sundstrand Data Control, Inc. Unitary push-pull force transducer
US5165279A (en) * 1989-07-06 1992-11-24 Sundstrand Corporation Monolithic accelerometer with flexurally mounted force transducer
FR2650895B1 (fr) * 1989-08-08 1991-10-11 Onera (Off Nat Aerospatiale) Capteur accelerometrique a poutres vibrant en flexion
US5058430A (en) * 1989-12-29 1991-10-22 Honeywell Inc. Sensor capsule mounting
WO1991019986A1 (en) * 1990-06-11 1991-12-26 Sundstrand Data Control, Inc. Accelerometer with flexure isolation
CN1027011C (zh) * 1990-07-12 1994-12-14 涂相征 一种硅梁压阻加速度传感器及其制造方法
EP0543901B1 (de) * 1990-08-17 1995-10-04 Analog Devices, Inc. Monolithischer beschleunigungsmesser
US5417111A (en) * 1990-08-17 1995-05-23 Analog Devices, Inc. Monolithic chip containing integrated circuitry and suspended microstructure
US5314572A (en) * 1990-08-17 1994-05-24 Analog Devices, Inc. Method for fabricating microstructures
US5111694A (en) * 1990-08-17 1992-05-12 Sundstrand Corporation Accelerometer with rebalance coil stress isolation
US5326726A (en) * 1990-08-17 1994-07-05 Analog Devices, Inc. Method for fabricating monolithic chip containing integrated circuitry and suspended microstructure
US5205171A (en) * 1991-01-11 1993-04-27 Northrop Corporation Miniature silicon accelerometer and method
US5243278A (en) * 1991-02-08 1993-09-07 Sundstrand Corporation Differential angular velocity sensor that is sensitive in only one degree of freedom
US5331853A (en) * 1991-02-08 1994-07-26 Alliedsignal Inc. Micromachined rate and acceleration sensor
US5241861A (en) * 1991-02-08 1993-09-07 Sundstrand Corporation Micromachined rate and acceleration sensor
US5168756A (en) * 1991-02-08 1992-12-08 Sundstrand Corporation Dithering coriolis rate and acceleration sensor utilizing a permanent magnet
US5396797A (en) * 1991-02-08 1995-03-14 Alliedsignal Inc. Triaxial angular rate and acceleration sensor
FR2685964B1 (fr) * 1992-01-06 1996-06-07 Onera (Off Nat Aerospatiale) Capteur accelerometrique miniature a lames vibrant en flexion.
US5391844A (en) 1992-04-03 1995-02-21 Weigh-Tronix Inc Load cell
US5442146A (en) 1992-04-03 1995-08-15 Weigh-Tronix, Inc. Counting scale and load cell assembly therefor
US5336854A (en) 1992-04-03 1994-08-09 Weigh-Tronix, Inc. Electronic force sensing load cell
US5313023A (en) 1992-04-03 1994-05-17 Weigh-Tronix, Inc. Load cell
US5456110A (en) * 1993-11-12 1995-10-10 Alliedsignal Inc. Dual pendulum vibrating beam accelerometer
US5594170A (en) * 1994-06-15 1997-01-14 Alliedsignal Inc. Kip cancellation in a pendulous silicon accelerometer
DE69509312T2 (de) * 1994-06-29 1999-11-04 New Sd Inc Beschleunigungsmesser sowie Verfahren zu seiner Herstellung
JP3114580B2 (ja) * 1995-08-24 2000-12-04 株式会社村田製作所 加速度センサ
WO1997047977A1 (en) * 1996-06-11 1997-12-18 Alliedsignal Inc. Compensation of second-order non-linearity in sensors employing double-ended tuning forks
US6723284B1 (en) 1997-04-11 2004-04-20 University Of Pittsburgh Membrane apparatus with enhanced mass transfer, heat transfer and pumping capabilities via active mixing
US6106776A (en) * 1997-04-11 2000-08-22 University Of Pittsburgh Membrane apparatus with enhanced mass transfer via active mixing
US6217826B1 (en) 1997-04-11 2001-04-17 University Of Pittsburgh Membrane apparatus with enhanced mass transfer, heat transfer and pumping capabilities via active mixing
US5905201A (en) * 1997-10-28 1999-05-18 Alliedsignal Inc. Micromachined rate and acceleration sensor and method
US6351891B1 (en) 1997-12-18 2002-03-05 Honeywell International, Inc. Miniature directional indication instrument
US6301965B1 (en) 1999-12-14 2001-10-16 Sandia Corporation Microelectromechanical accelerometer with resonance-cancelling control circuit including an idle state
US6393913B1 (en) 2000-02-08 2002-05-28 Sandia Corporation Microelectromechanical dual-mass resonator structure
US6662655B2 (en) * 2000-10-31 2003-12-16 Honeywell International, Inc. Net zero isolator
US6595056B2 (en) 2001-02-07 2003-07-22 Litton Systems, Inc Micromachined silicon gyro using tuned accelerometer
US6474160B1 (en) 2001-05-24 2002-11-05 Northrop Grumman Corporation Counterbalanced silicon tuned multiple accelerometer-gyro
US6619121B1 (en) 2001-07-25 2003-09-16 Northrop Grumman Corporation Phase insensitive quadrature nulling method and apparatus for coriolis angular rate sensors
US6874363B1 (en) 2003-10-31 2005-04-05 Honeywell International, Inc. Trapped charge field bias vibrating beam accelerometer
US7444883B2 (en) * 2005-12-22 2008-11-04 Honeywell International Inc. Vibrating beam force transducer
US7467553B2 (en) * 2005-12-22 2008-12-23 Honeywell International Inc. Capacitively coupled resonator drive
CN100397086C (zh) * 2007-07-09 2008-06-25 北京信息工程学院 新型压电石英加速度计
US8499629B2 (en) * 2008-10-10 2013-08-06 Honeywell International Inc. Mounting system for torsional suspension of a MEMS device
JP2012242343A (ja) * 2011-05-24 2012-12-10 Seiko Epson Corp 加速度センサー及び加速度検出装置
US9164117B2 (en) * 2012-10-19 2015-10-20 Honeywell International Inc. Stress reduction components for sensors
US10859596B2 (en) 2018-07-20 2020-12-08 Honeywell International Inc. Mechanically-isolated in-plane pendulous vibrating beam accelerometer

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4221131A (en) * 1979-05-29 1980-09-09 The Singer Company Vibrating beam accelerometer
US4517841A (en) * 1983-01-06 1985-05-21 Sundstrand Data Control, Inc. Accelerometer with beam resonator force transducer
US4658174A (en) * 1986-03-20 1987-04-14 The Singer Company-Kearfott Division Vibrating beam force transducer with angled isolator springs
US4718275A (en) * 1986-06-27 1988-01-12 Sundstrand Data Control, Inc. Accelerometer with floating beam temperature compensation

Also Published As

Publication number Publication date
US4766768A (en) 1988-08-30
EP0341306A4 (en) 1991-05-08
JPH01503414A (ja) 1989-11-16
IL87989A (en) 1991-12-15
DE3878683T2 (de) 1993-06-09
JPH0648277B2 (ja) 1994-06-22
WO1989003998A1 (en) 1989-05-05
EP0341306A1 (de) 1989-11-15
EP0341306B1 (de) 1993-02-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition