DE3856076D1 - Nachweis von flüssigkeitsströmungen - Google Patents

Nachweis von flüssigkeitsströmungen

Info

Publication number
DE3856076D1
DE3856076D1 DE3856076T DE3856076T DE3856076D1 DE 3856076 D1 DE3856076 D1 DE 3856076D1 DE 3856076 T DE3856076 T DE 3856076T DE 3856076 T DE3856076 T DE 3856076T DE 3856076 D1 DE3856076 D1 DE 3856076D1
Authority
DE
Germany
Prior art keywords
detection
liquid flows
flows
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE3856076T
Other languages
English (en)
Other versions
DE3856076T2 (de
Inventor
Fred Sittler
James Crabtree
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rosemount Inc
Original Assignee
Rosemount Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rosemount Inc filed Critical Rosemount Inc
Publication of DE3856076D1 publication Critical patent/DE3856076D1/de
Application granted granted Critical
Publication of DE3856076T2 publication Critical patent/DE3856076T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
    • G01N27/18—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by changes in the thermal conductivity of a surrounding material to be tested
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N2030/022—Column chromatography characterised by the kind of separation mechanism
    • G01N2030/025—Gas chromatography
DE3856076T 1987-10-14 1988-09-28 Nachweis von flüssigkeitsströmungen Expired - Lifetime DE3856076T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/108,487 US4909078A (en) 1987-10-14 1987-10-14 Fluid flow detector
PCT/US1988/003350 WO1989003512A1 (en) 1987-10-14 1988-09-28 Fluid flow detector

Publications (2)

Publication Number Publication Date
DE3856076D1 true DE3856076D1 (de) 1998-01-08
DE3856076T2 DE3856076T2 (de) 1998-06-18

Family

ID=22322498

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3856076T Expired - Lifetime DE3856076T2 (de) 1987-10-14 1988-09-28 Nachweis von flüssigkeitsströmungen

Country Status (6)

Country Link
US (1) US4909078A (de)
EP (1) EP0380581B1 (de)
JP (1) JP2578365B2 (de)
CA (1) CA1314413C (de)
DE (1) DE3856076T2 (de)
WO (1) WO1989003512A1 (de)

Families Citing this family (51)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4012081A1 (de) * 1990-04-14 1991-10-17 Bosch Gmbh Robert Verfahren und anordnung zum messen von luftmengen
DE4012080A1 (de) * 1990-04-14 1991-10-17 Bosch Gmbh Robert Verfahren zum aufbau von mikromechanischen sensoren
US5237867A (en) * 1990-06-29 1993-08-24 Siemens Automotive L.P. Thin-film air flow sensor using temperature-biasing resistive element
FR2670579A1 (fr) * 1990-12-14 1992-06-19 Schlumberger Ind Sa Capteur semi-conducteur de debit.
US5313832A (en) * 1991-12-23 1994-05-24 Ford Motor Company Composite mass air flow sensor
US5231878A (en) * 1991-12-23 1993-08-03 Ford Motor Company Mass air flow sensor
DE4224518C2 (de) * 1992-07-24 1996-03-14 Siemens Ag Strömungssensor und Verfahren zu seiner Herstellung
WO1994028372A1 (en) * 1993-05-25 1994-12-08 Rosemount Inc. Organic chemical sensor
US5392647A (en) * 1993-06-07 1995-02-28 Ricoh Seiki Company, Ltd. Flow sensor
US5423212A (en) * 1993-06-18 1995-06-13 Ricoh Seiki Company, Ltd. Flow sensor
US5808179A (en) * 1995-09-29 1998-09-15 Rosemount Analytical Inc. Modular gas chromatograph
US6076392A (en) * 1997-08-18 2000-06-20 Metasensors, Inc. Method and apparatus for real time gas analysis
US6223593B1 (en) * 1997-12-31 2001-05-01 Honeywell International Inc. Self-oscillating fluid sensor
US6169965B1 (en) 1997-12-31 2001-01-02 Honeywell International Inc. Fluid property and flow sensing via a common frequency generator and FFT
DE19851966A1 (de) * 1998-11-11 2000-05-18 Bosch Gmbh Robert Keramisches Schichtsystem und Verfahren zur Herstellung einer keramischen Heizeinrichtung
DE19906100C2 (de) * 1999-02-13 2003-07-31 Sls Micro Technology Gmbh Thermischer Durchflußsensor in Mikrosystemtechnik
WO2000050890A1 (en) 1999-02-25 2000-08-31 Metasensors, Inc. Methods and apparatus for real time fluid analysis
EP1181239A1 (de) 1999-03-31 2002-02-27 Siemens Aktiengesellschaft Verfahren zur herstellung von freitragenden mikrostrukturen, von dünnen flachteilen oder von membranen und verwendung nach diesem verfahren hergestellter mikrostrukturen als widerstandsgitter in einer einrichtung zur messung schwacher gasströmungen
US6393894B1 (en) 1999-07-27 2002-05-28 Honeywell International Inc. Gas sensor with phased heaters for increased sensitivity
WO2001018500A1 (de) * 1999-09-09 2001-03-15 Sensirion Ag Verfahren und vorrichtung zur präzisions-massenflussmessung
US6502459B1 (en) 2000-09-01 2003-01-07 Honeywell International Inc. Microsensor for measuring velocity and angular direction of an incoming air stream
US6631638B2 (en) 2001-01-30 2003-10-14 Rosemount Aerospace Inc. Fluid flow sensor
AUPR806801A0 (en) * 2001-10-03 2001-10-25 Davey Products Pty Ltd Pump control system
JP3706358B2 (ja) * 2002-07-04 2005-10-12 三菱電機株式会社 気体流量・温度測定素子
US6825681B2 (en) * 2002-07-19 2004-11-30 Delta Design, Inc. Thermal control of a DUT using a thermal control substrate
US20040224422A1 (en) * 2002-09-27 2004-11-11 Ulrich Bonne Phased micro analyzer III, IIIA
US7104112B2 (en) * 2002-09-27 2006-09-12 Honeywell International Inc. Phased micro analyzer IV
US7494326B2 (en) * 2003-12-31 2009-02-24 Honeywell International Inc. Micro ion pump
US20040223882A1 (en) * 2002-09-27 2004-11-11 Ulrich Bonne Micro-plasma sensor system
WO2004029602A2 (en) * 2002-09-27 2004-04-08 Honeywell International Inc. Phased micro analyser
US7000452B2 (en) * 2002-09-27 2006-02-21 Honeywell International Inc. Phased micro fluid analyzer
US20050063865A1 (en) * 2002-09-27 2005-03-24 Ulrich Bonne Phased VII micro fluid analyzer having a modular structure
US7530257B2 (en) 2002-09-27 2009-05-12 Honeywell International Inc. Phased micro analyzer VIII
EP1426740B1 (de) * 2002-11-27 2014-11-19 Sensirion Holding AG Vorrichtung zur Messung des Flusses und mindestens eines Materialparameters eines Fluids
US9029028B2 (en) 2003-12-29 2015-05-12 Honeywell International Inc. Hydrogen and electrical power generator
US20050142035A1 (en) * 2003-12-31 2005-06-30 Ulrich Bonne Micro-discharge sensor system
US7518380B2 (en) * 2005-05-17 2009-04-14 Honeywell International Inc. Chemical impedance detectors for fluid analyzers
US7578167B2 (en) * 2005-05-17 2009-08-25 Honeywell International Inc. Three-wafer channel structure for a fluid analyzer
JP4765458B2 (ja) * 2005-07-22 2011-09-07 横河電機株式会社 フローセンサ
US7255001B1 (en) * 2006-07-25 2007-08-14 Honeywell International Inc. Thermal fluid flow sensor and method of forming same technical field
US7780343B2 (en) * 2007-07-09 2010-08-24 Siargo Ltd. Micromachined gas and liquid concentration sensor and method of making the same
US7513149B1 (en) 2007-11-30 2009-04-07 Honeywell International Inc. Robust MEMS flow die with integrated protective flow channel
US8968560B2 (en) * 2007-12-06 2015-03-03 Schlumberger Technology Corporation Chromatography using multiple detectors
US7878056B2 (en) * 2007-12-19 2011-02-01 Siargo Ltd. Micromachined thermal mass flow sensor with self-cleaning capability and methods of making the same
EP2175246B1 (de) 2008-10-09 2017-07-19 Sensirion AG Verfahren zur Messung eines Parameters einer Fluidzusammensetzung mithilfe eines Flusssensors
EP2204555B1 (de) * 2009-01-02 2011-08-03 Sensirion AG Ammoniakspeichersystem
JP5114463B2 (ja) * 2009-09-25 2013-01-09 日立オートモティブシステムズ株式会社 発熱抵抗式空気流量測定装置
EP2392898B1 (de) 2010-06-04 2017-12-13 Sensirion AG Sensorensystem
US8286478B2 (en) * 2010-12-15 2012-10-16 Honeywell International Inc. Sensor bridge with thermally isolating apertures
FR3065281B1 (fr) * 2017-04-18 2019-06-14 Centre National De La Recherche Scientifique Dispositif de mesure de vitesse ou de debit de gaz
EP3546931B1 (de) 2018-03-28 2021-07-21 Siemens Aktiengesellschaft Thermoresistiver gassensor, strömungssensor und wärmeleitfähigkeitssensor

Family Cites Families (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US30105A (en) * 1860-09-18 Fruit-drying attachment to cooking-stoves
SE391036B (sv) * 1973-12-03 1977-01-31 Elektronik Konstruktions Ab Anordning for metning och/eller overvakning av ett strommande mediums stromningshastighet
US3971247A (en) * 1974-11-15 1976-07-27 Rodder Jerome A Fluid measuring apparatus
JPS5618750A (en) * 1979-07-25 1981-02-21 Ricoh Co Ltd Gas detector
US4471647A (en) * 1980-04-18 1984-09-18 Board Of Regents Of Stanford University Gas chromatography system and detector and method
US4332157A (en) * 1980-08-29 1982-06-01 Trustees Of The University Of Pennsylvania Pyroelectric anemometer
US4658855A (en) * 1980-10-03 1987-04-21 Silicon Valley Group Mass flow controller
EP0076935B1 (de) * 1981-10-09 1989-07-19 Honeywell Inc. Integrierte Halbleitervorrichtung und Verfahren zu ihrer Herstellung
US4472239A (en) * 1981-10-09 1984-09-18 Honeywell, Inc. Method of making semiconductor device
US4624137A (en) * 1981-10-09 1986-11-25 Honeywell Inc. Semiconductor device
DE3208145C2 (de) * 1982-03-06 1986-10-09 Viscotherm AG, Hinteregg, Zürich Sender- bzw. Empfängerelement für eine nach dem Wärmeimpfverfahren arbeitende Durchfluß-Meßvorrichtung und unter Verwendung dieser Elemente gebaute Vorrichtung
US4474889A (en) * 1982-04-26 1984-10-02 Microsensor Technology Inc. Miniature gas chromatograph apparatus
US4501144A (en) * 1982-09-30 1985-02-26 Honeywell Inc. Flow sensor
US4478077A (en) * 1982-09-30 1984-10-23 Honeywell Inc. Flow sensor
US4651564A (en) * 1982-09-30 1987-03-24 Honeywell Inc. Semiconductor device
US4548078A (en) * 1982-09-30 1985-10-22 Honeywell Inc. Integral flow sensor and channel assembly
US4478076A (en) * 1982-09-30 1984-10-23 Honeywell Inc. Flow sensor
CA1216330A (en) * 1983-02-07 1987-01-06 Junji Manaka Low power gas detector
US4537068A (en) * 1983-03-10 1985-08-27 Dwyer Instruments, Inc. Thermal anemometer
JPS604815A (ja) * 1983-06-23 1985-01-11 Nippon Soken Inc 流量測定装置
JPS6013220A (ja) * 1983-07-04 1985-01-23 Esutetsuku:Kk ガス流量センサ−及びその製造方法
US4542650A (en) * 1983-08-26 1985-09-24 Innovus Thermal mass flow meter
US4633578A (en) * 1983-12-01 1987-01-06 Aine Harry E Miniature thermal fluid flow sensors and batch methods of making same
JPS60236025A (ja) * 1984-05-09 1985-11-22 Nippon Soken Inc 空気流量センサ
DE3419504A1 (de) * 1984-05-25 1986-01-23 Günther Dipl.-Ing. 2201 Kollmar Weber Stroemungswaechter
US4576050A (en) * 1984-08-29 1986-03-18 General Motors Corporation Thermal diffusion fluid flow sensor
US4608865A (en) * 1984-12-05 1986-09-02 The Regents Of The University Of California Integrated pyroelectric sensor and method
US4561303A (en) * 1984-12-06 1985-12-31 Ford Motor Company Mass airflow sensor with backflow detection
US4594889A (en) * 1984-12-06 1986-06-17 Ford Motor Company Mass airflow sensor
US4685331A (en) * 1985-04-10 1987-08-11 Innovus Thermal mass flowmeter and controller
GB2173905A (en) * 1985-04-12 1986-10-22 Radyne Ltd Fluid-flow monitoring apparatus

Also Published As

Publication number Publication date
EP0380581A1 (de) 1990-08-08
EP0380581B1 (de) 1997-11-26
JP2578365B2 (ja) 1997-02-05
EP0380581A4 (en) 1992-09-23
CA1314413C (en) 1993-03-16
WO1989003512A1 (en) 1989-04-20
JPH03501883A (ja) 1991-04-25
US4909078A (en) 1990-03-20
DE3856076T2 (de) 1998-06-18

Similar Documents

Publication Publication Date Title
DE3856076T2 (de) Nachweis von flüssigkeitsströmungen
DE3890288T1 (de) Erfassung von diamanten
DE3855790D1 (de) Nachweis von Ionen in Flüssigkeiten
KR880007653U (ko) 액체도포구
DK94086A (da) Stabiliseret flydende vaskemiddel
DE3773964D1 (de) Nachweis von magnetischen unstetigkeiten.
BR8803081A (pt) Aparelho ministrador de liquido
DE3751814D1 (de) Flüssige Reinigungsmittel
DK620286A (da) Vaeskeformigt rensemiddel
DK164000C (da) Flydende vaskemiddelblanding
DE3670398D1 (de) Quelle fluessiger metallionen.
DK547086A (da) Flydende opvaskemiddel
KR890701220A (ko) 액체 분리기
DE3677916D1 (de) Nachweis von retikulozyten.
DE3673928D1 (de) Nachweis von retikulocyten.
DE3587119D1 (de) Fluessiges zuechten von nematoden.
DE3685919D1 (de) Ultraschallpruefung von werkstoffen.
DE3675951D1 (de) Pruefung von stoffen mit ultraschall.
KR880000204U (ko) 액체도포구
DE360604T1 (de) Umlauf von fluessigen proben.
DE3790971T1 (de) Mikrosaeulen-fluessigkeitschromatograf
NO921779D0 (no) Gjenvinning av flytende vaeske
KR890004483U (ko) 액체여과장치
NO890924D0 (no) Bygging av konstruksjon flytende.
SE8502420D0 (sv) Anordning for alstring av vetskedroppar

Legal Events

Date Code Title Description
8364 No opposition during term of opposition